JPH04364061A - Manufacture of lead frame - Google Patents

Manufacture of lead frame

Info

Publication number
JPH04364061A
JPH04364061A JP13922391A JP13922391A JPH04364061A JP H04364061 A JPH04364061 A JP H04364061A JP 13922391 A JP13922391 A JP 13922391A JP 13922391 A JP13922391 A JP 13922391A JP H04364061 A JPH04364061 A JP H04364061A
Authority
JP
Japan
Prior art keywords
lead frame
inner lead
leads
tips
lead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13922391A
Other languages
Japanese (ja)
Inventor
Atsuo Nouzumi
能隅 厚生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui High Tec Inc
Original Assignee
Mitsui High Tec Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui High Tec Inc filed Critical Mitsui High Tec Inc
Priority to JP13922391A priority Critical patent/JPH04364061A/en
Publication of JPH04364061A publication Critical patent/JPH04364061A/en
Pending legal-status Critical Current

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Landscapes

  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE:To increase material hardness and to make the material constitution finer by performing a ultra low temperature processing, after completing the shape processing of the main part in a state that the material hardness is low. CONSTITUTION:Stamping is done using a band material and a progressive metal mold so as to form the side edges of inner leads 2 and outer leads 3 successively and let the inner lead tips and a pad 4 link together. And a ultra low temperature processing at -150 deg.C is performed for 30min in a state that the inner lead tips and the pad are linked together, after the formation of the side edges of the inner leads 2 or outer leads 3. And cavity regions are punched off and the inner lead tips are separated individually. Besides coining is performed for ensuring flat breadth needed for wire bonding in the inner lead 2 tips. Namely, processability is excellent since the punching of the main part is completed in a state that the material hardness is low. Besides the ultra low temperature processing makes the material constitution fine and stabilizes it.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、リードフレームの製造
方法に係り、特に打ち抜き法を用いたリードフレームの
製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a lead frame, and more particularly to a method for manufacturing a lead frame using a punching method.

【0002】0002

【従来の技術】近年、ICパッケージは、小型、薄型化
の傾向を強めており、現在主流の0.25mm,0.2
0mm,0.15mmの材料をさらに薄く、0.1mm
あるいはそれ以下にする必要が出てきている。
[Prior Art] In recent years, there has been a growing trend toward smaller and thinner IC packages, and the current mainstream sizes are 0.25 mm and 0.2 mm.
0mm, 0.15mm material is made even thinner to 0.1mm
Or even less.

【0003】このような状況の中でリードフレームに対
する要求も厳しくなってきている。特にリード本数の増
加と微細化により、リード間隔が一層狭くなり、リード
の微小な歪も位置ずれの原因となることから許されなく
なっている。
[0003] Under these circumstances, requirements for lead frames are becoming stricter. In particular, with the increase in the number of leads and their miniaturization, the lead spacing has become narrower, and even minute distortions in the leads can no longer be tolerated because they cause positional deviations.

【0004】また、アウターリードは、実装時の正確な
位置精度を保つ必要から材料が薄くなればなるほど大き
な強度を要求される。
[0004] Furthermore, since it is necessary to maintain accurate positional accuracy during mounting, the thinner the material of the outer lead, the greater the strength required.

【0005】しかしながら、スタンピング法によってリ
ードフレームを形成する場合パンチ強度の限界もあり、
また硬度の高い材料を用いると、加工性が大幅に低下し
、微細パターンを精度よく形成するのは困難となる。
However, when forming a lead frame by the stamping method, there is a limit to the strength of the punch.
Furthermore, if a material with high hardness is used, the workability will be significantly reduced, making it difficult to form fine patterns with high precision.

【0006】微細パターンをもつリードフレームをスタ
ンピング法で形成するに際し、高精度化をはかるために
、インナーリード先端とパッドが連続する形状にスタン
ピングしたのち、加工歪を除去するための熱処理を行う
方法が提案されている。
[0006] When forming a lead frame with a fine pattern by the stamping method, in order to improve precision, a method is used in which the inner lead tip and pad are stamped in a continuous shape, and then heat treatment is performed to remove processing distortion. is proposed.

【0007】この方法によれば、歪が少なくリード先端
の安定したリードフレームを製造することができる。
[0007] According to this method, it is possible to manufacture a lead frame with less distortion and stable lead tips.

【0008】しかしながら、この方法では焼鈍作業時に
おける加熱処理によって、材料硬度が低下するという問
題があった。
However, this method has a problem in that the hardness of the material decreases due to the heat treatment during annealing.

【0009】この加熱処理による材料硬度の低下を見込
んで、出発材料として硬度の高いものを選択する方法も
考えられるが、硬度の高い材料を用いると、前述したよ
うに、加工性が大幅に低下し、微細パターンを精度よく
形成するのは困難となる。
[0009] It is possible to select a material with high hardness as a starting material in anticipation of the decrease in material hardness due to this heat treatment, but if a material with high hardness is used, the workability will be significantly reduced as described above. However, it becomes difficult to form fine patterns with high precision.

【0010】0010

【発明の解決しようとする課題】このように従来の方法
では、焼鈍処理により材料の硬度が低下するため、十分
な強度を維持することができないという問題があった。
As described above, in the conventional method, the hardness of the material decreases due to the annealing treatment, so there is a problem in that sufficient strength cannot be maintained.

【0011】本発明は、前記実情に鑑みてなされたもの
で寸法精度が良好で信頼性の高いリードフレームを提供
することを目的とする。
The present invention was made in view of the above-mentioned circumstances, and an object of the present invention is to provide a lead frame with good dimensional accuracy and high reliability.

【0012】0012

【課題を解決するための手段】そこで本発明では、スタ
ンピング法を用いたリードフレームの製造に際し、スタ
ンピングによる歪除去のための焼鈍処理に代えて、極低
温処理を行うことを特徴としている。
[Means for Solving the Problems] Accordingly, the present invention is characterized in that when manufacturing a lead frame using a stamping method, cryogenic treatment is performed in place of annealing treatment to remove strain caused by stamping.

【0013】[0013]

【作用】上記方法によれば、材料硬度の小さい状態で、
主たる部分の打ち抜きを完了するようにしているため、
加工性が良好で、高精度の打ち抜きパターンを得ること
ができる。このようにして、主たる形状加工を完了した
後、極低温処理によって摂氏−150度以下の極低温処
理を行い、素材の組織を密にし安定させると共に硬度を
増大するようにしているため、強度を高めることができ
る。
[Operation] According to the above method, when the material hardness is low,
Because we are trying to complete the punching of the main part,
It has good workability and can produce highly accurate punching patterns. In this way, after completing the main shape processing, we perform cryogenic treatment at temperatures below -150 degrees Celsius to make the structure of the material denser and more stable, as well as to increase its hardness. can be increased.

【0014】従って、強度が高く寸法精度の良好なリー
ドフレームを得ることが可能となる。  この方法では
、少なくともインナーリード側縁の打ち抜き後に極低温
処理を行う。
[0014] Therefore, it is possible to obtain a lead frame with high strength and good dimensional accuracy. In this method, cryogenic treatment is performed at least after punching out the side edges of the inner lead.

【0015】例えば、インナーリードの先端部と半導体
素子搭載部とが連結した形状をなすようにインナーリー
ドの側縁を打ち抜き、リードフレームの形状加工を行っ
たのち、極低温処理をおこない、この後インナーリード
の先端部と半導体素子搭載部との間のキャビティ領域の
打ち抜きを行い、インナーリードを相互分離し、そして
インナーリード先端を幅広にするためのコイニング工程
、貴金属めっき工程を経て、最後に相互分離されたイン
ナーリード相互間を固定するようにテープを貼着する。
For example, the side edge of the inner lead is punched out so that the tip of the inner lead and the semiconductor element mounting part are connected, the lead frame is shaped, and then subjected to cryogenic treatment. The cavity area between the tip of the inner lead and the semiconductor element mounting area is punched out, the inner leads are separated from each other, a coining process is performed to make the tip of the inner lead wider, and a precious metal plating process is performed. Tape is attached to fix the separated inner leads to each other.

【0016】また、キャビティ抜き工程の後、あるいは
めっき終了後に極低温処理を行うようにしてもよい。
[0016] Furthermore, cryogenic treatment may be performed after the cavity extraction process or after the completion of plating.

【0017】さらにまた、キャビティ抜き工程後にイン
ナーリード相互間が連結片によって連結された状態とな
るように成型加工をおこなったのち、極低温処理を行い
, 最後に連結片を除去するようにしてもよい。
Furthermore, after the cavity extraction process, the inner leads are molded so that they are connected by the connecting piece, and then cryogenic treatment is performed and the connecting piece is removed at the end. good.

【0018】[0018]

【実施例】以下、本発明の実施例について図面を参照し
つつ詳細に説明する。
Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

【0019】図1乃至図5は本発明実施例のリードフレ
ームの製造工程を示す図である。
FIGS. 1 to 5 are diagrams showing the manufacturing process of a lead frame according to an embodiment of the present invention.

【0020】まず、図1に示すようにアロイ42と指称
されている帯状材料1を用い、順送り金型を用いてイン
ナーリード2やアウターリード3の側縁を順次形成して
、インナーリード先端とパッド4が連続する形状をなす
ようにスタンピングする。
First, as shown in FIG. 1, using a strip material 1 designated as alloy 42, the side edges of the inner lead 2 and the outer lead 3 are sequentially formed using a progressive mold to form the tips of the inner leads and Stamping is performed so that the pad 4 has a continuous shape.

【0021】このようにして、インナーリードやアウタ
ーリードの側縁を形成した後、インナーリード先端とパ
ッドが連続した状態のまま−150℃30分の極低温処
理を行う。
After forming the side edges of the inner leads and outer leads in this manner, a cryogenic treatment is performed at -150° C. for 30 minutes while the inner lead tips and pads remain continuous.

【0022】そして、図2に示すようにインナーリード
先端とパッド周辺の間、すなわちいわゆるキャビティ領
域の打ち抜きを行い、インナーリード先端部を個々に分
離する。
Then, as shown in FIG. 2, the space between the inner lead tip and the periphery of the pad, ie, the so-called cavity region, is punched out to separate the inner lead tip portions individually.

【0023】さらに図3に示すようにインナーリード2
先端にワイヤボンディングに必要とされる平坦幅を確保
するためのコイニングを行う。ここで必要に応じてイン
ナーリードの捩じれを強制するための平打ちを行う。
Furthermore, as shown in FIG.
Coining is performed at the tip to ensure the flat width required for wire bonding. Here, flat beating is performed to force twisting of the inner lead as necessary.

【0024】そして、図4に示すように、インナーリー
ド先端およびパッド部にAgなどの貴金属めっき層Mを
形成する。
Then, as shown in FIG. 4, a noble metal plating layer M such as Ag is formed on the tips of the inner leads and the pad portions.

【0025】最後に、図5に示すように、インナーリー
ド相互間を連結固定するためにポリイミドテープTを貼
着し、リードフレームが完成する。
Finally, as shown in FIG. 5, a polyimide tape T is attached to connect and fix the inner leads to each other, and the lead frame is completed.

【0026】このようにして得られたリードフレームは
、インナーリード最先端部をダイパッドに連結した状態
で、打ち抜きを行い、この後、歪除去および硬度の向上
のための極低温処理を行った後、キャビティ領域の打ち
抜き、コイニング、めっきを行った後、テーピングを行
うようにしているため、強度が高く寸法精度が良好で信
頼性の高いものとなっている。
The lead frame thus obtained is punched with the leading edge of the inner lead connected to the die pad, and then subjected to cryogenic treatment to remove distortion and improve hardness. After punching, coining, and plating the cavity area, taping is performed, resulting in high strength, good dimensional accuracy, and high reliability.

【0027】なお、コイニング工程はキャビティ抜き工
程の前に行うようにしても同様に効果を得ることができ
る。
Note that the same effect can be obtained even if the coining process is performed before the cavity extraction process.

【0028】また、前記実施例では、この極低温処理は
、インナーリード側縁の打ち抜き後に行ったが、主たる
打ち抜きのあとであればよく、適宜変更可能である。 完全に形状加工を完了した後、あるいは貴金属めっき工
程をも完了した後に極低温処理を行うようにしてもよい
Further, in the above embodiment, this cryogenic treatment was performed after punching out the side edge of the inner lead, but it may be performed after the main punching, and can be changed as appropriate. The cryogenic treatment may be performed after the shape processing is completely completed or after the precious metal plating process is also completed.

【0029】さらに、インナーリード相互間を連結する
連結部材を残して他の形状加工を行った後、極低温処理
を行うようにしてもよい。
[0029]Furthermore, the cryogenic treatment may be performed after other shape processing is performed while leaving the connecting member that connects the inner leads.

【0030】また、この極低温処理の処理温度および時
間については適宜変更可能である。加えて、焼鈍処理が
なされて形成されたリードフレームに対しさらに、極低
温処理を行うようにしてもよい。
[0030] Furthermore, the treatment temperature and time of this cryogenic treatment can be changed as appropriate. In addition, the lead frame formed by annealing may be further subjected to cryogenic treatment.

【0031】[0031]

【発明の効果】以上説明してきたように、本発明の方法
によれば、材料硬度の小さい状態で主たる部分の形状加
工を完了した後、極低温処理を行い、材料硬度の向上と
材料組織の緻密化を行うようにしているため、高精度で
かつ強度の高いリードフレームを得ることができる。
As explained above, according to the method of the present invention, after completing the shape machining of the main part in a state where the material hardness is small, cryogenic treatment is performed to improve the material hardness and improve the material structure. Since densification is performed, a lead frame with high precision and high strength can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明実施例のリードフレームの製造工程図[Fig. 1] Manufacturing process diagram of a lead frame according to an embodiment of the present invention


図2】本発明実施例のリードフレームの製造工程図
[
Figure 2: Manufacturing process diagram of lead frame according to the embodiment of the present invention

【図
3】本発明実施例のリードフレームの製造工程図
[Fig. 3] Manufacturing process diagram of a lead frame according to an embodiment of the present invention

【図4
】本発明実施例のリードフレームの製造工程図
[Figure 4
] Manufacturing process diagram of a lead frame according to an embodiment of the present invention

【図5】
本発明実施例のリードフレームの製造工程図
[Figure 5]
Manufacturing process diagram of a lead frame according to an embodiment of the present invention

【符号の説明】[Explanation of symbols]

1  帯状材料 2  インナーリード 3  アウターリード 4  パッド C  キャビテイ領域 M  めっき層 1 Strip material 2 Inner lead 3 Outer lead 4 Pad C Cavity area M Plating layer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】所定の間隔をおいて配列された複数のリー
ドを具備してなるリードフレームの製造方法においてス
タンピング法によってリードフレームの形状加工を行う
形状加工工程と前記形状加工工程中または前記形状加工
工程後に、前記リードフレームを極低温下で所定の時間
保持する極低温処理工程を含むことを特徴とするリード
フレームの製造方法。
1. A method for manufacturing a lead frame comprising a plurality of leads arranged at predetermined intervals, including a shaping step of shaping the lead frame by a stamping method; and during the shaping step or during the shaping step. A method for manufacturing a lead frame, comprising a cryogenic treatment step of holding the lead frame at a cryogenic temperature for a predetermined period of time after the processing step.
JP13922391A 1991-06-11 1991-06-11 Manufacture of lead frame Pending JPH04364061A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13922391A JPH04364061A (en) 1991-06-11 1991-06-11 Manufacture of lead frame

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13922391A JPH04364061A (en) 1991-06-11 1991-06-11 Manufacture of lead frame

Publications (1)

Publication Number Publication Date
JPH04364061A true JPH04364061A (en) 1992-12-16

Family

ID=15240371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13922391A Pending JPH04364061A (en) 1991-06-11 1991-06-11 Manufacture of lead frame

Country Status (1)

Country Link
JP (1) JPH04364061A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5973388A (en) * 1998-01-26 1999-10-26 Motorola, Inc. Leadframe, method of manufacturing a leadframe, and method of packaging an electronic component utilizing the leadframe

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63293143A (en) * 1987-05-25 1988-11-30 Nippon Kinzoku Kogyo Kk Martensitic stainless steel hardening by subzero treatment

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63293143A (en) * 1987-05-25 1988-11-30 Nippon Kinzoku Kogyo Kk Martensitic stainless steel hardening by subzero treatment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5973388A (en) * 1998-01-26 1999-10-26 Motorola, Inc. Leadframe, method of manufacturing a leadframe, and method of packaging an electronic component utilizing the leadframe

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