JPH0436231U - - Google Patents
Info
- Publication number
- JPH0436231U JPH0436231U JP7719390U JP7719390U JPH0436231U JP H0436231 U JPH0436231 U JP H0436231U JP 7719390 U JP7719390 U JP 7719390U JP 7719390 U JP7719390 U JP 7719390U JP H0436231 U JPH0436231 U JP H0436231U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shaped
- processed
- heat treatment
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 29
- 238000001816 cooling Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7719390U JPH0436231U (zh) | 1990-07-20 | 1990-07-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7719390U JPH0436231U (zh) | 1990-07-20 | 1990-07-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0436231U true JPH0436231U (zh) | 1992-03-26 |
Family
ID=31619351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7719390U Pending JPH0436231U (zh) | 1990-07-20 | 1990-07-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0436231U (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005352306A (ja) * | 2004-06-11 | 2005-12-22 | Kyushu Nissho:Kk | 加熱装置 |
JP2013200077A (ja) * | 2012-03-26 | 2013-10-03 | Kyushu Nissho:Kk | 加熱装置 |
JP2016173230A (ja) * | 2016-04-21 | 2016-09-29 | 株式会社九州日昌 | 加熱装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5737848A (en) * | 1980-08-19 | 1982-03-02 | Toshiba Corp | Heating apparatus for wafer |
JPS631325B2 (zh) * | 1980-03-11 | 1988-01-12 | Japan Synthetic Rubber Co Ltd | |
JPH01274418A (ja) * | 1988-04-27 | 1989-11-02 | Nec Corp | 半導体熱処理装置 |
-
1990
- 1990-07-20 JP JP7719390U patent/JPH0436231U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS631325B2 (zh) * | 1980-03-11 | 1988-01-12 | Japan Synthetic Rubber Co Ltd | |
JPS5737848A (en) * | 1980-08-19 | 1982-03-02 | Toshiba Corp | Heating apparatus for wafer |
JPH01274418A (ja) * | 1988-04-27 | 1989-11-02 | Nec Corp | 半導体熱処理装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005352306A (ja) * | 2004-06-11 | 2005-12-22 | Kyushu Nissho:Kk | 加熱装置 |
JP4553637B2 (ja) * | 2004-06-11 | 2010-09-29 | 株式会社九州日昌 | 加熱装置 |
JP2013200077A (ja) * | 2012-03-26 | 2013-10-03 | Kyushu Nissho:Kk | 加熱装置 |
JP2016173230A (ja) * | 2016-04-21 | 2016-09-29 | 株式会社九州日昌 | 加熱装置 |
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