JPH0436136Y2 - - Google Patents
Info
- Publication number
- JPH0436136Y2 JPH0436136Y2 JP1986000127U JP12786U JPH0436136Y2 JP H0436136 Y2 JPH0436136 Y2 JP H0436136Y2 JP 1986000127 U JP1986000127 U JP 1986000127U JP 12786 U JP12786 U JP 12786U JP H0436136 Y2 JPH0436136 Y2 JP H0436136Y2
- Authority
- JP
- Japan
- Prior art keywords
- cryogenic
- chip
- room temperature
- quartz substrate
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003507 refrigerant Substances 0.000 claims description 14
- 238000003825 pressing Methods 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 19
- 239000000758 substrate Substances 0.000 description 19
- 229910052734 helium Inorganic materials 0.000 description 15
- 239000001307 helium Substances 0.000 description 15
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 15
- 239000007788 liquid Substances 0.000 description 15
- 238000001816 cooling Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008094 contradictory effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000004519 grease Substances 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000002355 dual-layer Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
Landscapes
- Containers, Films, And Cooling For Superconductive Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986000127U JPH0436136Y2 (fr) | 1986-01-07 | 1986-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986000127U JPH0436136Y2 (fr) | 1986-01-07 | 1986-01-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62112168U JPS62112168U (fr) | 1987-07-17 |
| JPH0436136Y2 true JPH0436136Y2 (fr) | 1992-08-26 |
Family
ID=30776832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986000127U Expired JPH0436136Y2 (fr) | 1986-01-07 | 1986-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0436136Y2 (fr) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5975687A (ja) * | 1982-10-18 | 1984-04-28 | インタ−ナシヨナル ビジネス マシ−ンズ コ−ポレ−シヨン | 低温で動作するサンプリング装置を用いた試験装置 |
| JPH0325419U (fr) * | 1989-07-20 | 1991-03-15 | ||
| JPH0325420U (fr) * | 1989-07-21 | 1991-03-15 |
-
1986
- 1986-01-07 JP JP1986000127U patent/JPH0436136Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5975687A (ja) * | 1982-10-18 | 1984-04-28 | インタ−ナシヨナル ビジネス マシ−ンズ コ−ポレ−シヨン | 低温で動作するサンプリング装置を用いた試験装置 |
| JPH0325419U (fr) * | 1989-07-20 | 1991-03-15 | ||
| JPH0325420U (fr) * | 1989-07-21 | 1991-03-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62112168U (fr) | 1987-07-17 |
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