JPH0435761Y2 - - Google Patents
Info
- Publication number
- JPH0435761Y2 JPH0435761Y2 JP19301385U JP19301385U JPH0435761Y2 JP H0435761 Y2 JPH0435761 Y2 JP H0435761Y2 JP 19301385 U JP19301385 U JP 19301385U JP 19301385 U JP19301385 U JP 19301385U JP H0435761 Y2 JPH0435761 Y2 JP H0435761Y2
- Authority
- JP
- Japan
- Prior art keywords
- stylus
- measured
- ridgeline
- surface roughness
- roughness meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003746 surface roughness Effects 0.000 claims description 22
- 241001422033 Thestylus Species 0.000 claims description 20
- 238000005259 measurement Methods 0.000 description 20
- 229910003460 diamond Inorganic materials 0.000 description 5
- 239000010432 diamond Substances 0.000 description 5
- 239000002985 plastic film Substances 0.000 description 5
- 229920006255 plastic film Polymers 0.000 description 5
- 238000007689 inspection Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000003908 quality control method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- -1 etc. Substances 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19301385U JPH0435761Y2 (US08063081-20111122-C00102.png) | 1985-12-17 | 1985-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19301385U JPH0435761Y2 (US08063081-20111122-C00102.png) | 1985-12-17 | 1985-12-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62102106U JPS62102106U (US08063081-20111122-C00102.png) | 1987-06-29 |
| JPH0435761Y2 true JPH0435761Y2 (US08063081-20111122-C00102.png) | 1992-08-25 |
Family
ID=31148635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19301385U Expired JPH0435761Y2 (US08063081-20111122-C00102.png) | 1985-12-17 | 1985-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0435761Y2 (US08063081-20111122-C00102.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07113523B2 (ja) * | 1990-06-19 | 1995-12-06 | 日本碍子株式会社 | ハニカムの表面粗度測定法及びそれに用いる表面粗度測定用測定子 |
| JP2004177192A (ja) * | 2002-11-26 | 2004-06-24 | Dainippon Printing Co Ltd | 欠陥高さ検査装置及び欠陥高さ検査方法 |
-
1985
- 1985-12-17 JP JP19301385U patent/JPH0435761Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62102106U (US08063081-20111122-C00102.png) | 1987-06-29 |
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