JPH04344869A - Heat treatment device - Google Patents

Heat treatment device

Info

Publication number
JPH04344869A
JPH04344869A JP14144991A JP14144991A JPH04344869A JP H04344869 A JPH04344869 A JP H04344869A JP 14144991 A JP14144991 A JP 14144991A JP 14144991 A JP14144991 A JP 14144991A JP H04344869 A JPH04344869 A JP H04344869A
Authority
JP
Japan
Prior art keywords
heat treatment
temperature
guide
treatment apparatus
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14144991A
Other languages
Japanese (ja)
Other versions
JPH0739031B2 (en
Inventor
Motoi Ieda
家田 基
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DENKOO KK
Denkoh Co Ltd
Original Assignee
DENKOO KK
Denkoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DENKOO KK, Denkoh Co Ltd filed Critical DENKOO KK
Priority to JP3141449A priority Critical patent/JPH0739031B2/en
Publication of JPH04344869A publication Critical patent/JPH04344869A/en
Publication of JPH0739031B2 publication Critical patent/JPH0739031B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Control Of Resistance Heating (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

PURPOSE:To prevent the object to be treated from falling and being deformed by detecting a temperature of plural parts of a carrying chain supporting guide which passes through the inside of a heat treatment device main body. CONSTITUTION:In a heat treatment device for placing a side edge part of an object 2 to be treated on an end part of a carrying chain 7 and moving it in a heat treatment device maim body, temperature difference measuring sensors 12, 13 are provided in plural parts in the width direction of a supporting guide, a heater 11 for raising a temperature of a low temperature part and reducing a temperature difference is provided additionally, and also, a controller 15 for reducing a temperature difference is provided. In such a way, a curvature of the guide generated due to an ununiform temperature caused by a fluctuation of a position condition of the guide, and a fall and a deformation of the object to be treated, based thereon can be prevented.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、熱処理装置に関し、特
に、熱処理装置本体内を連続的に移動する被処理物に熱
処理を施す熱処理装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat treatment apparatus, and more particularly to a heat treatment apparatus for applying heat treatment to a workpiece that is continuously moved within the main body of the heat treatment apparatus.

【0002】0002

【従来技術】熱処理装置の(例えば半田リフロー)の従
来例を図3〜図7に示す。
2. Description of the Related Art Conventional examples of heat treatment equipment (for example, solder reflow) are shown in FIGS. 3 to 7.

【0003】図3(a)は、熱処理装置の概略側面図で
ある。図3(b)は、図3(a)及び後述の図3(c)
に示す熱処理装置の、装置内温度分布を概略的に表すグ
ラフである。図3(c)は熱処理装置の概略平面図であ
る。
FIG. 3(a) is a schematic side view of a heat treatment apparatus. Figure 3(b) is similar to Figure 3(a) and Figure 3(c) described below.
2 is a graph schematically representing the temperature distribution inside the heat treatment apparatus shown in FIG. FIG. 3(c) is a schematic plan view of the heat treatment apparatus.

【0004】また、図4は、図3のIV−IV線断面図
である。
FIG. 4 is a sectional view taken along the line IV--IV in FIG. 3.

【0005】図5(a)〜(c)は、熱処理装置本体内
を貫通するガイドのみを示し、その彎曲の様子を表した
概念図である。
[0005] FIGS. 5A to 5C are conceptual diagrams showing only the guide passing through the main body of the heat treatment apparatus and illustrating how the guide is curved.

【0006】更に、図6はプリント基板の例を示す部分
平面図であり、図7は、プリント基板をローラーチェー
ン等の被処理物支持手段に載せた例を示す。
Furthermore, FIG. 6 is a partial plan view showing an example of a printed circuit board, and FIG. 7 shows an example in which the printed circuit board is mounted on a processing object support means such as a roller chain.

【0007】図6及び図7に示すプリント基板17に電
子部品18をはんだ付けするための、半田リフロー等の
熱処理装置においては、プリント基板17上に電子部品
18を載せ、ペースト状半田(直径15〜50μmφの
半田粒子をフラックスペーストに1/2 分散させたも
の。)を付着した被処理物2を、図3及び図4に示す熱
処理装置本体3中で連続的に搬送するための被処理物支
持手段である搬送用チェーン7と、これを支持するため
のガイド4が備わっている。搬送用チェーン7は、熱処
理装置架台10上に載置された搬送用プーリー8及び駆
動用プーリー9によって動作する。なお、搬送チェーン
7は、他の無軌道機構部品であることもある。図6及び
図7において、19はプリント配線、20は半田(ペー
スト半田又はクリーム半田)、21はプリント基板上に
貫通した孔を表す。
In a heat treatment apparatus such as solder reflow for soldering an electronic component 18 to a printed circuit board 17 shown in FIGS. 6 and 7, the electronic component 18 is placed on the printed circuit board 17, and a paste solder (diameter A workpiece for continuously transporting a workpiece 2 to which solder particles of ~50 μmφ are dispersed in flux paste (1/2 of solder particles having a diameter of ~50 μm in flux paste) is conveyed in a heat treatment apparatus main body 3 shown in FIGS. 3 and 4. A conveyor chain 7 serving as a support means and a guide 4 for supporting the conveyor chain 7 are provided. The conveyance chain 7 is operated by a conveyance pulley 8 and a driving pulley 9 placed on the heat treatment apparatus pedestal 10 . Note that the conveyance chain 7 may be another trackless mechanical component. 6 and 7, 19 represents printed wiring, 20 represents solder (paste solder or cream solder), and 21 represents a hole penetrating the printed circuit board.

【0008】図3及び図4に示す被処理物2は、両端を
長さ数ミリ以内(この例では3mm以内)の搬送用チェ
ーンのピン5で支持され、熱処理装置本体3の内部を移
動する。図4に示す搬送用チェーン7及びこれを支持す
るためのガイド4は、ピン5によって被処理物2の両側
縁部を支えるために対向して2本配置され、これらの一
方又は両方は、被処理物2の寸法が異なるときにも支持
が可能なように可動式となっている。(即ち、図示しな
いハンドル等を用いて図4の仮想線のように移動できる
。)
The workpiece 2 shown in FIGS. 3 and 4 is supported at both ends by pins 5 of a conveyor chain with a length of within several millimeters (in this example, within 3 mm), and is moved inside the heat treatment apparatus main body 3. . Two conveyor chains 7 and guides 4 for supporting the conveyor chains 7 shown in FIG. It is movable so that it can be supported even when the size of the workpiece 2 is different. (In other words, it can be moved as shown by the imaginary line in FIG. 4 using a handle, etc. not shown.)

【0009】図3に示すように、ガイド4は複数の炉内
加熱用ヒーター6を有する熱処理装置本体3を貫通して
配置され、ガイド4に支持された搬送用チェーン7は、
被処理物2を載せて熱処理装置本体3の内部を移動する
。炉内加熱用ヒータ6は、熱風ヒーター(空気又は窒素
ガス使用)及び遠赤外ヒーターが併用されている。
As shown in FIG. 3, the guide 4 is disposed to pass through the heat treatment apparatus main body 3 having a plurality of heaters 6 for heating inside the furnace, and the conveying chain 7 supported by the guide 4 is
The object to be treated 2 is placed thereon and moved inside the heat treatment apparatus main body 3. As the furnace heater 6, a hot air heater (using air or nitrogen gas) and a far-infrared heater are used together.

【0010】図3(b)は被処理物2の、熱処理装置本
体3の内部を移動する際の温度分布の1例である。この
グラフにおいて、被処理物2は炉内に入ると直ぐに昇温
され、一定の温度(例えば150 〜170 ℃)に保
たれながら一定の距離を移動し、次に更に昇温されて最
高温度(Tmax)に達する。Tmaxは、プリント基
板17に搭載された電子部品18の耐熱温度以下で、し
かもはんだ付けの可能な温度(例えば215 〜220
 ℃)に制御される。Tmaxに達した後、被処理物2
の温度は下降する。被処理物2の炉内通過時間は、例え
ば3〜4分である。図3(c)に示すA1 、A2 、
B1 及びB2 は、Tmax部におけるガイド4の内
側面(A1 、A2 )及び外側面(B1 、B2 )
を表す。
FIG. 3(b) shows an example of the temperature distribution of the object 2 as it moves inside the heat treatment apparatus main body 3. In this graph, the temperature of the workpiece 2 is immediately raised when it enters the furnace, it moves a certain distance while being kept at a constant temperature (for example, 150 to 170 °C), and then it is further heated to reach the maximum temperature ( Tmax) is reached. Tmax is a temperature below the heat-resistant temperature of the electronic component 18 mounted on the printed circuit board 17 and at which soldering is possible (for example, 215 to 220
℃). After reaching Tmax, the workpiece 2
temperature decreases. The time required for the object 2 to pass through the furnace is, for example, 3 to 4 minutes. A1, A2, shown in FIG. 3(c),
B1 and B2 are the inner surface (A1, A2) and outer surface (B1, B2) of the guide 4 at the Tmax portion.
represents.

【0011】ところで、上記の熱処理装置には以下の問
題点があった。 a)被処理物2の幅に合わせるために、ガイト4の一方
又は両方を移動調節した場合。具体的には、図4におい
て,ガイド4を例えば仮想線の位置へ移動し、又は例え
ば仮想線の位置から実線の位置へ移動したため、両方の
ガイドの間隔Dが変化した場合。 b)被処理物2(プリント基板17等)が多種に及ぶた
め、それらの熱容量が一定でない場合。
By the way, the above heat treatment apparatus has the following problems. a) A case where one or both of the guides 4 is adjusted to match the width of the object 2 to be processed. Specifically, in FIG. 4, the distance D between both guides changes because the guide 4 is moved, for example, to the position of the imaginary line, or from the position of the imaginary line to the position of the solid line. b) When there are many types of objects 2 to be processed (printed circuit boards 17, etc.), and their heat capacities are not constant.

【0012】上記の場合には、熱処理装置本体3の内部
の熱的条件が経時的に変化して炉内温度がIV−IV線
方向で不均一になる。この結果、ステンレススチール等
の金属で構成されているガイド4は、図5の(b)又は
(c)に示すような熱膨張変形を起こし、被処理物支持
用のピン5が数mm以下の僅かな長さであることから、
被処理物2が搬送チェーン7から落下したり、或は圧縮
されて変形してしまうことがある。
In the above case, the thermal conditions inside the heat treatment apparatus main body 3 change over time, and the temperature inside the furnace becomes non-uniform in the IV-IV line direction. As a result, the guide 4 made of metal such as stainless steel undergoes thermal expansion deformation as shown in FIG. Due to its short length,
The workpiece 2 may fall off the conveyor chain 7 or be compressed and deformed.

【0013】図5において、TA1 、TA2 、TB
1及びTB2 は夫々、図4に示したガイド4のA1 
、A2 、B1 及びB2 の温度を示す。ガイド4の
内側面及び外側面に温度差が無いとき、即ちTA1 =
TB1 、TA2 =TB2 のときには、図5(a)
に示すようにガイド4は彎曲しない。
In FIG. 5, TA1, TA2, TB
1 and TB2 are A1 of the guide 4 shown in FIG. 4, respectively.
, A2 , B1 and B2 . When there is no temperature difference between the inner and outer surfaces of the guide 4, that is, TA1 =
When TB1, TA2 = TB2, Fig. 5(a)
The guide 4 does not curve as shown in FIG.

【0014】しかし、前記の理由で、ガイドを移動させ
たときに温度条件が変わり、ガイド側面温度が不均一に
なったときには、図5(b)のようにガイド内側面温度
が外側面温度よりも高くなって(即ちTA1 >TB1
 、TA2 >TB2 となって)彎曲が生じガイド4
の間隔が挟まったり、或は、図5(c)のようにガイド
外側面温度が内側面温度よりも高くなって(即ちTA1
 <TB1 、TA2 <TB2 となって)ガイド4
の間隔が開いてしまうという問題があった。
However, for the reason mentioned above, when the temperature condition changes when the guide is moved and the temperature on the guide side surface becomes uneven, the temperature on the inner side surface of the guide becomes lower than the temperature on the outer surface as shown in FIG. 5(b). (i.e. TA1 > TB1
, TA2 > TB2) A curvature occurs and guide 4
or the temperature of the outer surface of the guide becomes higher than the temperature of the inner surface (i.e. TA1
<TB1, TA2 <TB2) Guide 4
There was a problem that the interval between

【0015】上記問題を解決するためには、従来はガイ
ド4に頑丈な部材を使用するか、或は、炉内加熱用ヒー
ター6の配置を変えるか、又はファンを備え付ける等し
て炉内均熱を図り、ガイド4の彎曲を防止しようとして
いた。しかし、各種被処理物2毎の位置関係が変わった
とき、最適条件を逐一決定することは困難であるため、
結局不十分なまま運転されていたのが現状である。
In order to solve the above-mentioned problem, the conventional methods have been to use a sturdy member for the guide 4, change the arrangement of the heater 6 for heating the furnace, or install a fan to improve the uniformity in the furnace. They were trying to prevent the guide 4 from curving by increasing the heat. However, when the positional relationship of each type of workpiece 2 changes, it is difficult to determine the optimal conditions one by one.
In the end, the current situation is that the system has been operated in an insufficient manner.

【0016】[0016]

【発明の目的】本発明の目的は、熱処理装置本体内が均
一温度であっても、ガイドの位置条件が変わるときの不
均一な温度のために生ずるガイドの彎曲、及び彎曲を原
因として発生する被処理物の落下及び変形を防ぐ手段を
構じた、熱処理装置を提供することにある。
[Object of the Invention] The object of the present invention is to solve the problem of curvature of the guide, which occurs due to uneven temperature when the positional conditions of the guide change, even if the temperature inside the heat treatment apparatus body is uniform, and the curvature caused by the curvature. An object of the present invention is to provide a heat treatment apparatus equipped with a means for preventing objects to be treated from falling and being deformed.

【0017】[0017]

【発明の構成】即ち、本発明は、熱処理装置本体と;こ
の熱処理装置本体内を貫通するガイドと;このガイドに
案内され、前記熱処理装置本体内を移動する被処理物支
持手段とを有する熱処理装置において、前記ガイドの所
定部分を加熱するための加熱手段と、前記ガイドの複数
箇所の温度を検出する温度検出手段と、この温度検出手
段による温度検出結果に基いて前記加熱手段を作動させ
ることにより、前記ガイドの複数箇所間の温度差を小さ
くするように温度制御する温度制御手段とを有すること
を特徴とする熱処理装置を提供するものである。
[Structure of the Invention] That is, the present invention provides a heat treatment method having a heat treatment apparatus main body; a guide passing through the heat treatment apparatus main body; and a workpiece supporting means guided by the guide and moved within the heat treatment apparatus main body. In the apparatus, a heating means for heating a predetermined portion of the guide, a temperature detection means for detecting temperatures at a plurality of locations on the guide, and operating the heating means based on a temperature detection result by the temperature detection means. Accordingly, there is provided a heat treatment apparatus characterized by having a temperature control means for controlling the temperature so as to reduce the temperature difference between a plurality of locations on the guide.

【0018】[0018]

【実施例】以下、本発明の実施例を説明する。[Examples] Examples of the present invention will be described below.

【0019】図1及び図2は、本発明を表す概略図であ
る。
FIGS. 1 and 2 are schematic diagrams representing the present invention.

【0020】図1は、図3におけるIV−IV線の位置
、即ち、温度がTmax(例えば230 ℃)である位
置の断面の一部を概略的に表した図である。熱処理装置
本体3は図示省略し、被処理物支持手段は一方のみ示し
ているが、他方の側も同様としてある。ここにおいて、
Tmaxに耐え得るコントロールヒーター11をガイド
4の外側の外面B1 に付設する。
FIG. 1 is a diagram schematically showing a part of a cross section taken along the line IV--IV in FIG. 3, that is, the position where the temperature is Tmax (for example, 230° C.). Although the heat treatment apparatus body 3 is not shown and only one side of the support means for the object to be treated is shown, the same applies to the other side. put it here,
A control heater 11 that can withstand Tmax is attached to the outer surface B1 on the outside of the guide 4.

【0021】コントロールヒーター11の結線方法につ
いて述べると、A1 及びB1 の両面に温度検出素子
12及び13を取付け、両者からの出力が互いに打消さ
れるように配線する。
Regarding the method of wiring the control heater 11, temperature detecting elements 12 and 13 are attached to both sides of A1 and B1, and the wiring is done so that the outputs from both cancel each other out.

【0022】温度検出素子12、13として例えば熱電
対を採用する場合には、図1に示すように+−、−+の
ように直列に結線する。また、サーミスタのような抵抗
素子32、33を採用する場合にも、図2に示すように
ブリッジ結線を行う。
When thermocouples are used as the temperature detection elements 12 and 13, for example, they are connected in series as +- and -+ as shown in FIG. Furthermore, when employing resistance elements 32 and 33 such as thermistors, bridge connection is performed as shown in FIG.

【0023】常温時における0点調整は、例えば熱電対
を使用する場合は図1に示す電圧偏差設定器14を接続
し常温時出力を0に設定する。また抵抗素子を用いる場
合は、図2(a)に示す可変抵抗VRを調節することで
常温時出力を0とすることができるが(但し、R1 =
R2 )、更に電圧偏差設定器も併用してよい。なお、
図2(b)は、抵抗素子を用いる場合の抵抗ブリッジの
回路図である。上記以外の方式の温度計を採用する場合
も、温度差の検出方法は同様に行う。
For zero point adjustment at room temperature, for example, when using a thermocouple, connect the voltage deviation setter 14 shown in FIG. 1 and set the output at room temperature to 0. In addition, when using a resistance element, the output at room temperature can be set to 0 by adjusting the variable resistor VR shown in Fig. 2(a) (however, R1 =
R2), and a voltage deviation setting device may also be used. In addition,
FIG. 2(b) is a circuit diagram of a resistance bridge when using a resistance element. Even when a thermometer of a type other than the above is used, the temperature difference is detected in the same manner.

【0024】上記の温度検出法によって、Tmaxにお
けるガイド4の内側面及び外側面の温度差を検出し、こ
の温度差による偏差信号を0±ΔVの電圧偏差設定器1
4を介して炉温制御とは別設置のPID(比例、積分、
微分動作)コントローラー15の入力とする。PIDコ
ントローラーの出力はコントロールヒーター11の電力
調節回路16の入力とし、自動温度制御回路を構成する
By the temperature detection method described above, the temperature difference between the inner and outer surfaces of the guide 4 at Tmax is detected, and a deviation signal due to this temperature difference is applied to the voltage deviation setting device 1 of 0±ΔV.
PID (proportional, integral,
Differential operation) is input to the controller 15. The output of the PID controller is input to the power adjustment circuit 16 of the control heater 11, forming an automatic temperature control circuit.

【0025】上記の例にあっては、A1 点及びB1 
点並びに図示省略したA2 点及びB2 点(図3(c
)、図4参照)の温度を検出し、温度TA1 と温度T
B1 との差、温度TA2 とTB2 との差(図5参
照)を無くすか又は僅かにするように、コントロールヒ
ーター11を作動させている。従って、図5(b)又は
同図(c)に示すようなガイド両側の温度差による熱膨
張の差に起因するガイド彎曲が防止され、常に同図(a
)のような直線状を維持することができる。その結果、
プリント基板はローラーチェーンから外れて落下したり
、ローラーチェーンに押されて変形するようなことがな
い。また、コントロールヒーター11の作動はPID制
御によっているので、上記の温度制御は高精度になされ
、信頼性が高い。
In the above example, point A1 and point B1
point, and points A2 and B2 (not shown in Figure 3(c)
), see Figure 4) is detected, and temperature TA1 and temperature T are detected.
The control heater 11 is operated so as to eliminate or minimize the difference between the temperatures TA2 and TB2 and the difference between the temperatures TA2 and TB2 (see FIG. 5). Therefore, the guide curvature caused by the difference in thermal expansion caused by the temperature difference on both sides of the guide as shown in FIG. 5(b) or FIG. 5(c) is prevented, and
) can maintain a straight line. the result,
The printed circuit board will not fall off the roller chain, nor will it be deformed by being pushed by the roller chain. Further, since the control heater 11 is operated by PID control, the temperature control described above is performed with high precision and is highly reliable.

【0026】本発明は、上記以外にも色々変形すること
ができる。
The present invention can be modified in various ways other than those described above.

【0027】一般的に熱処理装置本体3の内部温度は、
中心部が一番高く、中心部から外れる程低くなる。この
ため、前記実施例に示した如く、ガイド4の外側面にコ
ントロールヒーター11を取り付ける場合が多いが、逆
にガイド4の内側面に付設することも可能である。
Generally, the internal temperature of the heat treatment apparatus main body 3 is as follows:
It is highest in the center and gets lower as you move away from the center. For this reason, although the control heater 11 is often attached to the outer surface of the guide 4 as shown in the above embodiment, it is also possible to attach it to the inner surface of the guide 4.

【0028】また、コントロールヒーター11をガイド
4の内側面及び外側面の両面に付設することも可能であ
るが、この場合には、温度差制御のみでなく、ガイド4
の温度がTmaxを超えないように制御する必要がある
It is also possible to attach the control heater 11 to both the inner and outer surfaces of the guide 4, but in this case, not only the temperature difference control but also the
It is necessary to control the temperature so that it does not exceed Tmax.

【0029】更に、本発明は、連続処理のほか、バッチ
タイプの熱処理装置にも適用可能であり、被処理物がプ
リント基板以外であっても良いことは言うまでもない。
Furthermore, the present invention is applicable not only to continuous processing but also to batch type heat treatment equipment, and it goes without saying that the object to be processed may be other than printed circuit boards.

【0030】[0030]

【発明の効果】本発明は、ガイドの複数の箇所の温度を
検出し、検出された各温度の差を小さくするように制御
するので、上記の複数箇所の温度差に基く熱膨張の差に
よる前記ガイドの変形が防止される。その結果、熱処理
物は、前記ガイドに案内される被処理物支持手段から外
れたり、或はこの被処理物支持手段に挟まれて変形した
りせず、安全に移動して熱処理が施される。
Effects of the Invention: The present invention detects the temperature at multiple locations on the guide and controls to reduce the difference between the detected temperatures. Deformation of the guide is prevented. As a result, the heat-treated object does not come off from the object-to-be-processed support means guided by the guide, or is deformed by being caught between the object-to-be-processed support means, and is safely moved and subjected to heat treatment. .

【図面の簡単な説明】[Brief explanation of drawings]

【図1】本発明の実施例の熱処理装置内最高温部におけ
る概略断面図及び熱電対使用時の回路図である。
FIG. 1 is a schematic cross-sectional view of the highest temperature part in a heat treatment apparatus according to an embodiment of the present invention, and a circuit diagram when a thermocouple is used.

【図2】本発明の実施例の温度/抵抗変化素子使用時の
回路図の一部である。
FIG. 2 is a part of a circuit diagram when a temperature/resistance variable element according to an embodiment of the present invention is used.

【図3】従来例の熱処理装置側面及び平面の概略図並び
に温度分布図である。
FIG. 3 is a schematic side view and plan view of a conventional heat treatment apparatus, and a temperature distribution diagram.

【図4】従来例の熱処理装置本体の最高温部における概
略断面図である。
FIG. 4 is a schematic cross-sectional view of the highest temperature part of a conventional heat treatment apparatus main body.

【図5】従来例のガイド彎曲の概念図である。FIG. 5 is a conceptual diagram of a conventional guide curve.

【図6】プリント基板の一例を示す部分断面図である。FIG. 6 is a partial cross-sectional view showing an example of a printed circuit board.

【図7】搬送用チェーン端部に載荷されたプリント基板
の概略図である。
FIG. 7 is a schematic diagram of a printed circuit board loaded on the end of a conveying chain.

【符号の説明】[Explanation of symbols]

1    熱処理装置 2    被処理物 3    熱処理装置本体 4    支持用ガイド 5    (搬送用チェーン)ピン 6    炉内加熱用ヒーター 7    搬送用チェーン 8    搬送用プーリー 9    駆動プーリー 10    熱処理装置架台 11    コントロールヒーター 12、13、32、33    温度検出素子14  
  電圧偏差設定器 15    PIDコントローラー 16    電力調節回路 17    プリント基板 18    電子部品 19    プリント配線 20    半田 21    プリント基板貫通孔
1 Heat treatment device 2 Workpiece 3 Heat treatment device main body 4 Support guide 5 (conveyance chain) pin 6 Furnace heating heater 7 Conveyance chain 8 Conveyance pulley 9 Drive pulley 10 Heat treatment device stand 11 Control heaters 12, 13, 32, 33 Temperature detection element 14
Voltage deviation setting device 15 PID controller 16 Power adjustment circuit 17 Printed circuit board 18 Electronic components 19 Printed wiring 20 Solder 21 Printed circuit board through hole

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  熱処理装置本体と;この熱処理装置本
体内を貫通するガイドと;このガイドに案内され、前記
熱処理装置本体内を移動する被処理物支持手段とを有す
る熱処理装置において、前記ガイドの所定部分を加熱す
るための加熱手段と、前記ガイドの複数箇所の温度を検
出する温度検出手段と、この温度検出手段による温度検
出結果に基いて前記加熱手段を作動させることにより、
前記ガイドの複数箇所間の温度差を小さくするように温
度制御する温度制御手段とを有することを特徴とする熱
処理装置。
1. A heat treatment apparatus comprising: a heat treatment apparatus main body; a guide passing through the heat treatment apparatus main body; and a workpiece support means guided by the guide and moved within the heat treatment apparatus main body, wherein the guide A heating means for heating a predetermined portion, a temperature detection means for detecting temperatures at a plurality of locations on the guide, and operating the heating means based on the temperature detection result by the temperature detection means,
A heat treatment apparatus comprising: temperature control means for controlling temperature so as to reduce temperature differences between a plurality of locations on the guide.
JP3141449A 1991-05-17 1991-05-17 Heat treatment equipment Expired - Fee Related JPH0739031B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3141449A JPH0739031B2 (en) 1991-05-17 1991-05-17 Heat treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3141449A JPH0739031B2 (en) 1991-05-17 1991-05-17 Heat treatment equipment

Publications (2)

Publication Number Publication Date
JPH04344869A true JPH04344869A (en) 1992-12-01
JPH0739031B2 JPH0739031B2 (en) 1995-05-01

Family

ID=15292181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3141449A Expired - Fee Related JPH0739031B2 (en) 1991-05-17 1991-05-17 Heat treatment equipment

Country Status (1)

Country Link
JP (1) JPH0739031B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012067155A1 (en) * 2010-11-19 2012-05-24 千住金属工業株式会社 Transport device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136364U (en) * 1984-08-07 1986-03-06 岩崎電気株式会社 Solder reflow equipment
JPH0241770A (en) * 1988-08-03 1990-02-09 Matsushita Electric Ind Co Ltd Reflow device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136364U (en) * 1984-08-07 1986-03-06 岩崎電気株式会社 Solder reflow equipment
JPH0241770A (en) * 1988-08-03 1990-02-09 Matsushita Electric Ind Co Ltd Reflow device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012067155A1 (en) * 2010-11-19 2012-05-24 千住金属工業株式会社 Transport device
JP2012106273A (en) * 2010-11-19 2012-06-07 Senju Metal Ind Co Ltd Transport device
CN103221171A (en) * 2010-11-19 2013-07-24 千住金属工业株式会社 Transport device
CN103221171B (en) * 2010-11-19 2015-04-15 千住金属工业株式会社 Transport device

Also Published As

Publication number Publication date
JPH0739031B2 (en) 1995-05-01

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