JPH0434478U - - Google Patents
Info
- Publication number
- JPH0434478U JPH0434478U JP7687490U JP7687490U JPH0434478U JP H0434478 U JPH0434478 U JP H0434478U JP 7687490 U JP7687490 U JP 7687490U JP 7687490 U JP7687490 U JP 7687490U JP H0434478 U JPH0434478 U JP H0434478U
- Authority
- JP
- Japan
- Prior art keywords
- check valve
- valve body
- piezoelectric element
- valve unit
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 238000005086 pumping Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7687490U JP2510589Y2 (ja) | 1990-07-19 | 1990-07-19 | 圧電ポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7687490U JP2510589Y2 (ja) | 1990-07-19 | 1990-07-19 | 圧電ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0434478U true JPH0434478U (th) | 1992-03-23 |
JP2510589Y2 JP2510589Y2 (ja) | 1996-09-11 |
Family
ID=31618735
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7687490U Expired - Fee Related JP2510589Y2 (ja) | 1990-07-19 | 1990-07-19 | 圧電ポンプ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2510589Y2 (th) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005307858A (ja) * | 2004-04-21 | 2005-11-04 | Matsushita Electric Works Ltd | 圧電ダイヤフラムポンプ |
JP2006220056A (ja) * | 2005-02-10 | 2006-08-24 | Nec Tokin Corp | 流体搬送装置 |
WO2013046330A1 (ja) * | 2011-09-27 | 2013-04-04 | 株式会社菊池製作所 | マイクロダイヤフラムポンプ |
JP2015203317A (ja) * | 2014-04-11 | 2015-11-16 | 東京理化器械株式会社 | ダイヤフラム真空ポンプ |
CN109162902A (zh) * | 2018-09-20 | 2019-01-08 | 长春工业大学 | 一种浮动式工字型阀压电泵 |
-
1990
- 1990-07-19 JP JP7687490U patent/JP2510589Y2/ja not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005307858A (ja) * | 2004-04-21 | 2005-11-04 | Matsushita Electric Works Ltd | 圧電ダイヤフラムポンプ |
JP4501517B2 (ja) * | 2004-04-21 | 2010-07-14 | パナソニック電工株式会社 | 圧電ダイヤフラムポンプ |
JP2006220056A (ja) * | 2005-02-10 | 2006-08-24 | Nec Tokin Corp | 流体搬送装置 |
WO2013046330A1 (ja) * | 2011-09-27 | 2013-04-04 | 株式会社菊池製作所 | マイクロダイヤフラムポンプ |
JP2015203317A (ja) * | 2014-04-11 | 2015-11-16 | 東京理化器械株式会社 | ダイヤフラム真空ポンプ |
CN109162902A (zh) * | 2018-09-20 | 2019-01-08 | 长春工业大学 | 一种浮动式工字型阀压电泵 |
CN109162902B (zh) * | 2018-09-20 | 2023-12-15 | 长春工业大学 | 一种浮动式工字型阀压电泵 |
Also Published As
Publication number | Publication date |
---|---|
JP2510589Y2 (ja) | 1996-09-11 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |