JPH0434478U - - Google Patents

Info

Publication number
JPH0434478U
JPH0434478U JP7687490U JP7687490U JPH0434478U JP H0434478 U JPH0434478 U JP H0434478U JP 7687490 U JP7687490 U JP 7687490U JP 7687490 U JP7687490 U JP 7687490U JP H0434478 U JPH0434478 U JP H0434478U
Authority
JP
Japan
Prior art keywords
check valve
valve body
piezoelectric element
valve unit
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7687490U
Other languages
Japanese (ja)
Other versions
JP2510589Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7687490U priority Critical patent/JP2510589Y2/en
Publication of JPH0434478U publication Critical patent/JPH0434478U/ja
Application granted granted Critical
Publication of JP2510589Y2 publication Critical patent/JP2510589Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本考案の一実施例を示す一部断面説
明図、第２図は、本考案の圧電ポンプの製作段階
を示す説明図、第３〜５図は、本考案ポンプで用
いられる逆止弁ユニツトの一例を示す説明図であ
る。 図中、１は逆止弁ユニツト、２はスペーサー、
３は圧電素子、４及び５は流路部、６はモールド
ハウジング、７はポンプ室、Ａは２分割タイプの
ハウジング成形金型、Ｂは流路部形成金型である
。 Fig. 1 is a partially cross-sectional explanatory diagram showing an embodiment of the present invention, Fig. 2 is an explanatory diagram showing the manufacturing stages of the piezoelectric pump of the present invention, and Figs. It is an explanatory view showing an example of a check valve unit. In the figure, 1 is a check valve unit, 2 is a spacer,
3 is a piezoelectric element, 4 and 5 are flow passage parts, 6 is a mold housing, 7 is a pump chamber, A is a two-part type housing mold, and B is a flow passage part forming mold.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 圧電素子の撓振動によりポンプ作用を行う圧電
ポンプであつて、積層シートの左右に互いに異な
る上下方向のみに開放し得る弁体を備えた逆止弁
ユニツト１、スペーサー２、圧電素子３を順次積
層し、これらと逆止弁ユニツト１の各弁体に連通
する流路部４，５とをモールドハウジング６と共
に一体的に形成して成ることを特徴とする圧電ポ
ンプ。 This is a piezoelectric pump that performs a pumping action by the flexural vibration of a piezoelectric element, and includes a check valve unit 1, a spacer 2, and a piezoelectric element 3, which are sequentially laminated on the left and right sides of a laminated sheet, each having a valve body that can be opened only in different vertical directions. A piezoelectric pump characterized in that these and flow path portions 4 and 5 communicating with each valve body of the check valve unit 1 are integrally formed with a molded housing 6.
JP7687490U 1990-07-19 1990-07-19 Piezoelectric pump Expired - Fee Related JP2510589Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7687490U JP2510589Y2 (en) 1990-07-19 1990-07-19 Piezoelectric pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7687490U JP2510589Y2 (en) 1990-07-19 1990-07-19 Piezoelectric pump

Publications (2)

Publication Number Publication Date
JPH0434478U true JPH0434478U (en) 1992-03-23
JP2510589Y2 JP2510589Y2 (en) 1996-09-11

Family

ID=31618735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7687490U Expired - Fee Related JP2510589Y2 (en) 1990-07-19 1990-07-19 Piezoelectric pump

Country Status (1)

Country Link
JP (1) JP2510589Y2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005307858A (en) * 2004-04-21 2005-11-04 Matsushita Electric Works Ltd Piezoelectric diaphragm pump
JP2006220056A (en) * 2005-02-10 2006-08-24 Nec Tokin Corp Fluid transportation device
WO2013046330A1 (en) * 2011-09-27 2013-04-04 株式会社菊池製作所 Microdiaphragm pump
JP2015203317A (en) * 2014-04-11 2015-11-16 東京理化器械株式会社 diaphragm vacuum pump
CN109162902A (en) * 2018-09-20 2019-01-08 长春工业大学 A kind of floating type I-shaped valve piezoelectric pump

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005307858A (en) * 2004-04-21 2005-11-04 Matsushita Electric Works Ltd Piezoelectric diaphragm pump
JP4501517B2 (en) * 2004-04-21 2010-07-14 パナソニック電工株式会社 Piezoelectric diaphragm pump
JP2006220056A (en) * 2005-02-10 2006-08-24 Nec Tokin Corp Fluid transportation device
WO2013046330A1 (en) * 2011-09-27 2013-04-04 株式会社菊池製作所 Microdiaphragm pump
JP2015203317A (en) * 2014-04-11 2015-11-16 東京理化器械株式会社 diaphragm vacuum pump
CN109162902A (en) * 2018-09-20 2019-01-08 长春工业大学 A kind of floating type I-shaped valve piezoelectric pump
CN109162902B (en) * 2018-09-20 2023-12-15 长春工业大学 Floating type I-shaped valve piezoelectric pump

Also Published As

Publication number Publication date
JP2510589Y2 (en) 1996-09-11

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