JPH04342308A - Piezoelectric resonator - Google Patents

Piezoelectric resonator

Info

Publication number
JPH04342308A
JPH04342308A JP11455391A JP11455391A JPH04342308A JP H04342308 A JPH04342308 A JP H04342308A JP 11455391 A JP11455391 A JP 11455391A JP 11455391 A JP11455391 A JP 11455391A JP H04342308 A JPH04342308 A JP H04342308A
Authority
JP
Japan
Prior art keywords
piezoelectric
electrodes
substrates
dielectric constant
constant material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11455391A
Other languages
Japanese (ja)
Inventor
Hiroyuki Takahashi
宏幸 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP11455391A priority Critical patent/JPH04342308A/en
Publication of JPH04342308A publication Critical patent/JPH04342308A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain the piezoelectric resonator improving the damping amount out of a passed band without enlarging the size. CONSTITUTION:Piezoelectric substrates 1 and 10 and a low-dielectric constant material 20 are adhered by the adhesive agent of epoxy resin, etc., and formed into one plate. For example, the ceramics substrate of PZT having about 800-1600 dielectric constant is used for the piezoelectric substrates 1 and 10, and a porcelain plate having about 30 dielectric constant is used for the low- dielectric constant material 20. On the front and rear faces of the substrates 1 and 10, a relay conductor 8 respectively connecting vibrating electrodes 3, 4, 5, 12, 13 with 14 and electrodes 4 with 12, a relay conductor 9 is connecting the electrodes 5 with 14, and input and output electrodes 6 and 7 connected to the respective electrodes 3 and 13 are provided. An input terminal 21, output terminal 22 and ground terminal 23 are soldered and connected to the electrodes 6 and 7 and the conductor 9 respectively. The respective vibrations generated at the substrates 1 and 10 by the electrodes 3-5 and the electrodes 13-14 are not propagated to the other substrates 10 and 1 by the low-dielectric constant material 20.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、フィルタ回路等に使用
される圧電共振子に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric resonator used in filter circuits and the like.

【0002】0002

【従来の技術と課題】二重モードフィルタに使用される
圧電共振子として、図4に示す厚みすべり振動を利用し
た圧電共振子が知られていた。この圧電共振子は、1枚
の圧電体基板51に電気的に直列接続された2個のフィ
ルタ部52,53を備えている。ところで、この圧電共
振子の通過帯域外減衰量を向上させるには、基板51の
長さLを長くしてフィルタ部52と53の間の寸法を長
くし、一方のフィルタ部に発生した振動が他方のフィル
タ部に伝わりにくくすればよい(即ちフィルタ部52と
53の電磁的結合を疎にすればよい)ことが知られてい
る。しかし、基板51の長さLを長くすると、(1)フ
ィルタのサイズが大型化する。
2. Description of the Related Art A piezoelectric resonator using thickness shear vibration, as shown in FIG. 4, has been known as a piezoelectric resonator used in a dual mode filter. This piezoelectric resonator includes two filter sections 52 and 53 electrically connected in series to one piezoelectric substrate 51. By the way, in order to improve the amount of attenuation outside the passband of this piezoelectric resonator, the length L of the substrate 51 is increased to increase the dimension between the filter sections 52 and 53, so that the vibration generated in one filter section is reduced. It is known that the electromagnetic coupling between the filter sections 52 and 53 can be made weaker by making it difficult for the signal to be transmitted to the other filter section. However, if the length L of the substrate 51 is increased, (1) the size of the filter increases;

【0003】(2)基板51のサイズが大きくなるので
、同一基板内での材料特性が大きくばらつくおそれがあ
る。 (3)外装樹脂による大きな締め付け応力が基板51に
かかるため、温度特性等の環境信頼性が低下する。等の
問題があった。
(2) Since the size of the substrate 51 increases, there is a risk that the material properties within the same substrate will vary greatly. (3) Since a large tightening stress is applied to the board 51 by the exterior resin, environmental reliability such as temperature characteristics is deteriorated. There were other problems.

【0004】そこで、本発明の課題は、サイズを大きく
することなく、通過帯域外減衰量が向上した圧電共振子
を提供することにある。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a piezoelectric resonator with improved attenuation outside the passband without increasing the size.

【0005】[0005]

【課題を解決するための手段】以上の課題を解決するた
め、本発明に係る第1の圧電共振子は、複数個の圧電体
基板と、前記複数個の圧電体基板を間に隙間を設けた状
態で保持するグランド端子と、前記各圧電体基板に設け
た振動電極に電気的に接続する入力端子と出力端子とを
備えたことを特徴とする。
[Means for Solving the Problems] In order to solve the above problems, a first piezoelectric resonator according to the present invention includes a plurality of piezoelectric substrates and a gap between the plurality of piezoelectric substrates. The piezoelectric substrate is characterized in that it includes a ground terminal that is held in a fixed state, and an input terminal and an output terminal that are electrically connected to the vibrating electrodes provided on each of the piezoelectric substrates.

【0006】また、本発明に係る第2の圧電共振子は、
低誘電率材と、前記低誘電率材を介して一体的に構成さ
れる複数個の圧電体基板と、前記各圧電体基板に設けた
振動電極に電気的に接続する入力端子と出力端子とグラ
ンド端子とを備えたことを特徴とする。
[0006] Furthermore, the second piezoelectric resonator according to the present invention includes:
A low dielectric constant material, a plurality of piezoelectric substrates integrally formed through the low dielectric constant material, and an input terminal and an output terminal electrically connected to a vibrating electrode provided on each of the piezoelectric substrates. It is characterized by having a ground terminal.

【0007】[0007]

【作用】以上の構成により、各圧電体基板に発生した振
動は、圧電体基板間に設けた隙間や低誘電率材によって
他の圧電体基板に伝わらない。従って、各圧電体基板に
設けた振動電極は他の圧電体基板に発生した振動の影響
を受けなくてもすむ。
[Operation] With the above structure, vibrations generated in each piezoelectric substrate are not transmitted to other piezoelectric substrates due to the gaps provided between the piezoelectric substrates and the low dielectric constant material. Therefore, the vibrating electrodes provided on each piezoelectric substrate do not have to be affected by vibrations generated on other piezoelectric substrates.

【0008】[0008]

【実施例】以下、本発明に係る圧電共振子の実施例を添
付図面を参照して説明する。 [第1実施例、図1及び図2]図1は、厚みすべり振動
を利用した二重モードフィルタに使用される圧電共振子
の斜視図である。圧電共振子は低誘電率材20と、この
低誘電率材20を介して一体的に構成される2枚の圧電
体基板1,10と、入力端子21と、出力端子22と、
グランド端子23とを備えている。圧電体基板1,10
のそれぞれにはフィルタ部2,11が設けられている。
Embodiments Hereinafter, embodiments of a piezoelectric resonator according to the present invention will be described with reference to the accompanying drawings. [First Embodiment, FIGS. 1 and 2] FIG. 1 is a perspective view of a piezoelectric resonator used in a dual mode filter using thickness shear vibration. The piezoelectric resonator includes a low dielectric constant material 20, two piezoelectric substrates 1 and 10 that are integrally formed via the low dielectric constant material 20, an input terminal 21, an output terminal 22,
A ground terminal 23 is provided. Piezoelectric substrate 1, 10
A filter section 2, 11 is provided in each of the filter sections 2 and 11.

【0009】圧電体基板1,10は矩形状のPZTのセ
ラミックス基板等からできている。この基板1,10の
それぞれの一方の端部は低誘電率材20を介して接合し
ており、基板1,10及び低誘電率材20は一板の板状
になっている。低誘電率材20の材料としては、各圧電
体基板1,10に設けたフィルタ部2,11に発生した
振動が他方の圧電体基板に伝わらないようにする材料、
即ち、フィルタ部2,11間の電磁的結合を疎にする物
性を有する材料で構成されている。例えば、PZTの圧
電体基板1,10(誘電率が約800〜1600)に対
して、低誘電率材20には誘電率が約20〜30の磁器
板や接着剤のエポキシ樹脂材等が使用される。磁器板を
使用した場合は、圧電体基板1,10と磁器板はエポキ
シ樹脂等の接着剤にて固着一体化する。
The piezoelectric substrates 1 and 10 are made of rectangular PZT ceramic substrates or the like. One end of each of the substrates 1 and 10 is joined via a low dielectric constant material 20, and the substrates 1 and 10 and the low dielectric constant material 20 are in the shape of a single plate. The material for the low dielectric constant material 20 includes a material that prevents vibrations generated in the filter portions 2 and 11 provided on each piezoelectric substrate 1 and 10 from being transmitted to the other piezoelectric substrate;
That is, it is made of a material that has physical properties that make the electromagnetic coupling between the filter parts 2 and 11 loose. For example, for the PZT piezoelectric substrates 1 and 10 (with a dielectric constant of about 800 to 1600), the low dielectric constant material 20 is a porcelain plate with a dielectric constant of about 20 to 30, an epoxy resin material for adhesive, etc. be done. When a porcelain plate is used, the piezoelectric substrates 1 and 10 and the porcelain plate are fixed and integrated with an adhesive such as epoxy resin.

【0010】フィルタ部2,11はそれぞれ振動電極3
,4,5、12,13,14で構成されている。振動電
極3の一部は基板1の左端部に引き出されて入力電極6
に電気的に接続し、振動電極13の一部は基板10の右
端部に引き出されて出力電極7に電気的に接続している
。振動電極4と12の間は中継導体8にて電気的に接続
されている。さらに振動電極5と14の間は中継導体9
にて電気的に接続され、しかもこの中継導体9はグラン
ド電極としての機能も合わせ持つ。なお、これら振動電
極3,4,5,12,13,14と中継導体8,9と入
力電極6と出力電極7は、低誘電率材20と圧電体基板
1,10を一体的に固着した後に設けてもよい。あるい
は、振動電極3,4,5,12,13,14と入力電極
6と出力電極7を予め設けた圧電体基板1,10を低誘
電率材20を介して一体的に固着した後に中継導体8,
9を設けてもよい。
The filter parts 2 and 11 each have a vibrating electrode 3
, 4, 5, 12, 13, and 14. A part of the vibrating electrode 3 is pulled out to the left end of the substrate 1 and is connected to the input electrode 6.
A part of the vibrating electrode 13 is drawn out to the right end of the substrate 10 and electrically connected to the output electrode 7 . The vibrating electrodes 4 and 12 are electrically connected by a relay conductor 8. Furthermore, between the vibrating electrodes 5 and 14 is a relay conductor 9.
The relay conductor 9 also functions as a ground electrode. Note that these vibrating electrodes 3, 4, 5, 12, 13, 14, relay conductors 8, 9, input electrode 6, and output electrode 7 are made by integrally fixing a low dielectric constant material 20 and piezoelectric substrates 1, 10. It may be provided later. Alternatively, piezoelectric substrates 1 and 10 on which vibrating electrodes 3, 4, 5, 12, 13, 14, input electrodes 6, and output electrodes 7 are provided in advance are fixed together via a low dielectric constant material 20, and then a relay conductor is formed. 8,
9 may be provided.

【0011】入力端子21は接続部21aと端子部21
bとで構成され、出力端子22は接続部22aと端子部
22bとで構成され、グランド端子23は接続部23a
と端子部23bとで構成されている。これらの端子21
,22,23の接続部21a,22a,23aがそれぞ
れ入力電極6、出力電極7及び中継導体9に半田付け等
の手段にて固着される。この後、シリコンゴム等のダン
ピング材が圧電体基板1,10及び低誘電率材の表面に
コーティングされる。さらに、エポキシ樹脂等で被覆し
て二重モードフィルタを完成させる。図2はこうして得
られた二重モードフィルタの周波数と減衰量の関係を測
定した結果を示すグラフである。実線25が本実施例に
よって得られたフィルタの測定結果を示すものである。 比較のために従来のフィルタの測定結果を点線26にて
示す。図2には圧電体基板1と10の間に挟まれた低誘
電率材20によってフィルタ部2,11間の電磁的結合
が疎になり、フィルタの通過帯域外減衰量が向上してい
ることが示されている。
[0011] The input terminal 21 has a connection part 21a and a terminal part 21.
b, the output terminal 22 is composed of a connecting part 22a and a terminal part 22b, and the ground terminal 23 is composed of a connecting part 23a and a terminal part 22b.
and a terminal portion 23b. These terminals 21
, 22, 23 are fixed to the input electrode 6, output electrode 7, and relay conductor 9, respectively, by means of soldering or the like. Thereafter, a damping material such as silicone rubber is coated on the surfaces of the piezoelectric substrates 1 and 10 and the low dielectric constant material. Furthermore, the dual mode filter is completed by coating with epoxy resin or the like. FIG. 2 is a graph showing the results of measuring the relationship between frequency and attenuation of the dual mode filter thus obtained. A solid line 25 shows the measurement results of the filter obtained in this example. For comparison, the measurement results of a conventional filter are indicated by a dotted line 26. FIG. 2 shows that the low dielectric constant material 20 sandwiched between the piezoelectric substrates 1 and 10 loosens the electromagnetic coupling between the filter parts 2 and 11, improving the attenuation outside the passband of the filter. It is shown.

【0012】[第2実施例、図3]図3は厚みすべり振
動を利用した二重モードフィルタに使用される別の圧電
共振子の斜視図である。なお、図3において第1実施例
と同じ部品、部分には同じ符号を付した。圧電共振子は
2枚の圧電体基板1,10と、入力端子21と出力端子
22及びグランド端子23とで構成されている。
[Second Embodiment, FIG. 3] FIG. 3 is a perspective view of another piezoelectric resonator used in a dual mode filter utilizing thickness shear vibration. In FIG. 3, the same parts and portions as in the first embodiment are given the same reference numerals. The piezoelectric resonator is composed of two piezoelectric substrates 1 and 10, an input terminal 21, an output terminal 22, and a ground terminal 23.

【0013】振動電極4の一部は基板1の左端部に引き
出され、振動電極12の一部は基板10の右端部に引き
出されている。そして、振動電極4と12は中継導体3
0を介して電気的に接続されている。中継導体30には
、例えばワイヤボンディング等の手段にて接続したリー
ド線等が使用される。また、振動電極5の一部は基板1
の右端部に引き出されてグランド電極34に電気的に接
続し、振動電極14の一部は基板10の左端部に引き出
されてグランド電極35に電気的に接続している。
A portion of the vibrating electrode 4 is drawn out to the left end of the substrate 1, and a portion of the vibrating electrode 12 is drawn out to the right end of the substrate 10. The vibrating electrodes 4 and 12 are connected to the relay conductor 3.
They are electrically connected via 0. For the relay conductor 30, a lead wire or the like connected by means such as wire bonding is used, for example. Further, a part of the vibrating electrode 5 is connected to the substrate 1
A part of the vibrating electrode 14 is drawn out to the right end of the substrate 10 and electrically connected to the ground electrode 34 , and a part of the vibrating electrode 14 is drawn out to the left end of the substrate 10 and electrically connected to the ground electrode 35 .

【0014】グランド端子23の接続部23aは、圧電
体基板1,10のグランド電極34,35に半田付け等
の手段で固着され、電気的に接続される。このとき、基
板1と10は基板1と10の間に隙間Gが確保されるよ
うに配置される。この隙間(本実施例では隙間の寸法は
約4mmとした)によって各圧電体基板1,10に設け
たフィルタ部2,11に発生した振動は他方の圧電体基
板に伝わらない。さらに、入力端子21の接続部21a
は基板1の入力電極6に半田付け等の手段で固着され、
電気的に接続される。同様にして出力端子22の接続部
22aは基板10の出力電極7に半田付け等の手段で固
着され、電気的に接続される。この後、シリコンゴム等
のダンピング材を圧電体基板1,10の表面にコーティ
ングし、エポキシ樹脂等で被覆して二重モードフィルタ
とする。
The connecting portion 23a of the ground terminal 23 is fixed to the ground electrodes 34, 35 of the piezoelectric substrates 1, 10 by means such as soldering, and is electrically connected. At this time, the substrates 1 and 10 are arranged so that a gap G is maintained between the substrates 1 and 10. Vibrations generated in the filter sections 2 and 11 provided on each piezoelectric substrate 1 and 10 are not transmitted to the other piezoelectric substrate due to this gap (in this embodiment, the size of the gap is about 4 mm). Furthermore, the connection part 21a of the input terminal 21
is fixed to the input electrode 6 of the substrate 1 by means such as soldering,
electrically connected. Similarly, the connecting portion 22a of the output terminal 22 is fixed to the output electrode 7 of the substrate 10 by means such as soldering, and is electrically connected. Thereafter, the surfaces of the piezoelectric substrates 1 and 10 are coated with a damping material such as silicone rubber, and covered with an epoxy resin or the like to form a dual mode filter.

【0015】[他の実施例]なお、本発明に係る圧電共
振子は前記実施例に限定するものではなく、その要旨の
範囲内で種々に変形することができる。特に、圧電共振
子は3枚以上の圧電体基板からなるものであってもよい
[Other Embodiments] The piezoelectric resonator according to the present invention is not limited to the embodiments described above, and can be modified in various ways within the scope of the gist. In particular, the piezoelectric resonator may be composed of three or more piezoelectric substrates.

【0016】[0016]

【発明の効果】以上の説明で明らかなように、本発明に
よれば、各圧電体基板間に隙間や低誘電率材を設けたの
で、各圧電体基板に発生した振動が他の圧電体基板に伝
わらない。従って、サイズを大きくすることなく、通過
帯域外減衰量が向上した圧電共振子が得られる。
[Effects of the Invention] As is clear from the above explanation, according to the present invention, since a gap and a low dielectric constant material are provided between each piezoelectric substrate, vibrations generated in each piezoelectric substrate are transmitted to other piezoelectric substrates. It is not transmitted to the board. Therefore, a piezoelectric resonator with improved out-of-passband attenuation can be obtained without increasing the size.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】本発明に係る圧電共振子の第1実施例を示す斜
視図。
FIG. 1 is a perspective view showing a first embodiment of a piezoelectric resonator according to the present invention.

【図2】図1に示した圧電共振子を使用した二重モード
フィルタの周波数と減衰量の関係を測定した結果を示す
グラフ。
FIG. 2 is a graph showing the results of measuring the relationship between frequency and attenuation of a dual mode filter using the piezoelectric resonator shown in FIG. 1;

【図3】本発明に係る圧電共振子の第2実施例を示す斜
視図。
FIG. 3 is a perspective view showing a second embodiment of a piezoelectric resonator according to the present invention.

【図4】従来例を示す斜視図。FIG. 4 is a perspective view showing a conventional example.

【符号の説明】[Explanation of symbols]

1…圧電体基板 3,4,5…振動電極 10…圧電体基板 12,13,14…振動電極 20…低誘電率材 21…入力端子 22…出力端子 23…グランド端子 G…隙間 1...Piezoelectric substrate 3, 4, 5... vibrating electrode 10...Piezoelectric substrate 12, 13, 14... Vibrating electrode 20...Low dielectric constant material 21...Input terminal 22...Output terminal 23...Ground terminal G...Gap

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】  複数個の圧電体基板と、前記複数個の
圧電体基板を間に隙間を設けた状態で保持するグランド
端子と、前記各圧電体基板に設けた振動電極に電気的に
接続する入力端子と出力端子と、を備えたことを特徴と
する圧電共振子。
1. A plurality of piezoelectric substrates, a ground terminal that holds the plurality of piezoelectric substrates with a gap therebetween, and electrically connected to a vibrating electrode provided on each of the piezoelectric substrates. A piezoelectric resonator comprising an input terminal and an output terminal.
【請求項2】  低誘電率材と、前記低誘電率材を介し
て一体的に構成される複数個の圧電体基板と、前記各圧
電体基板に設けた振動電極に電気的に接続する入力端子
と出力端子とグランド端子と、を備えたことを特徴とす
る圧電共振子。
2. A low dielectric constant material, a plurality of piezoelectric substrates integrally formed through the low dielectric constant material, and an input electrically connected to a vibrating electrode provided on each of the piezoelectric substrates. A piezoelectric resonator characterized by comprising a terminal, an output terminal, and a ground terminal.
JP11455391A 1991-05-20 1991-05-20 Piezoelectric resonator Pending JPH04342308A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11455391A JPH04342308A (en) 1991-05-20 1991-05-20 Piezoelectric resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11455391A JPH04342308A (en) 1991-05-20 1991-05-20 Piezoelectric resonator

Publications (1)

Publication Number Publication Date
JPH04342308A true JPH04342308A (en) 1992-11-27

Family

ID=14640681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11455391A Pending JPH04342308A (en) 1991-05-20 1991-05-20 Piezoelectric resonator

Country Status (1)

Country Link
JP (1) JPH04342308A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5446335A (en) * 1993-02-19 1995-08-29 Murata Mfg. Co., Ltd. Piezoresonator with a built-in capacitor and a manufacturing method thereof

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JPS6142943A (en) * 1984-08-06 1986-03-01 Clarion Co Ltd Manufacture of complex semiconductor device
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JPH0234465A (en) * 1988-07-26 1990-02-05 Railway Technical Res Inst Steered bogie with independent wheel for rolling stock

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