JPH0433992B2 - - Google Patents

Info

Publication number
JPH0433992B2
JPH0433992B2 JP58077780A JP7778083A JPH0433992B2 JP H0433992 B2 JPH0433992 B2 JP H0433992B2 JP 58077780 A JP58077780 A JP 58077780A JP 7778083 A JP7778083 A JP 7778083A JP H0433992 B2 JPH0433992 B2 JP H0433992B2
Authority
JP
Japan
Prior art keywords
pipe
explosion
exhaust
opening
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58077780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59203886A (ja
Inventor
Junichi Inaba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58077780A priority Critical patent/JPS59203886A/ja
Publication of JPS59203886A publication Critical patent/JPS59203886A/ja
Publication of JPH0433992B2 publication Critical patent/JPH0433992B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP58077780A 1983-05-02 1983-05-02 真空ポンプ用防爆装置 Granted JPS59203886A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58077780A JPS59203886A (ja) 1983-05-02 1983-05-02 真空ポンプ用防爆装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58077780A JPS59203886A (ja) 1983-05-02 1983-05-02 真空ポンプ用防爆装置

Publications (2)

Publication Number Publication Date
JPS59203886A JPS59203886A (ja) 1984-11-19
JPH0433992B2 true JPH0433992B2 (cg-RX-API-DMAC10.html) 1992-06-04

Family

ID=13643479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58077780A Granted JPS59203886A (ja) 1983-05-02 1983-05-02 真空ポンプ用防爆装置

Country Status (1)

Country Link
JP (1) JPS59203886A (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08193573A (ja) * 1995-01-17 1996-07-30 Tel Varian Ltd クライオポンプの安全弁装置

Also Published As

Publication number Publication date
JPS59203886A (ja) 1984-11-19

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