JPH0432956B2 - - Google Patents

Info

Publication number
JPH0432956B2
JPH0432956B2 JP2600984A JP2600984A JPH0432956B2 JP H0432956 B2 JPH0432956 B2 JP H0432956B2 JP 2600984 A JP2600984 A JP 2600984A JP 2600984 A JP2600984 A JP 2600984A JP H0432956 B2 JPH0432956 B2 JP H0432956B2
Authority
JP
Japan
Prior art keywords
cryopump
shield plate
opening
unit
cooled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2600984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60173378A (ja
Inventor
Yoshinao Sanada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP2600984A priority Critical patent/JPS60173378A/ja
Publication of JPS60173378A publication Critical patent/JPS60173378A/ja
Publication of JPH0432956B2 publication Critical patent/JPH0432956B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2600984A 1984-02-16 1984-02-16 クライオポンプ Granted JPS60173378A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2600984A JPS60173378A (ja) 1984-02-16 1984-02-16 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2600984A JPS60173378A (ja) 1984-02-16 1984-02-16 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS60173378A JPS60173378A (ja) 1985-09-06
JPH0432956B2 true JPH0432956B2 (enExample) 1992-06-01

Family

ID=12181695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2600984A Granted JPS60173378A (ja) 1984-02-16 1984-02-16 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS60173378A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019099862A1 (en) 2017-11-17 2019-05-23 Brooks Automation, Inc. Cryopump with peripheral first and second stage arrays

Also Published As

Publication number Publication date
JPS60173378A (ja) 1985-09-06

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