JPS60173378A - クライオポンプ - Google Patents

クライオポンプ

Info

Publication number
JPS60173378A
JPS60173378A JP2600984A JP2600984A JPS60173378A JP S60173378 A JPS60173378 A JP S60173378A JP 2600984 A JP2600984 A JP 2600984A JP 2600984 A JP2600984 A JP 2600984A JP S60173378 A JPS60173378 A JP S60173378A
Authority
JP
Japan
Prior art keywords
cryopump
shield plate
opening
cooled
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2600984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0432956B2 (enExample
Inventor
Yoshinao Sanada
真田　芳直
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2600984A priority Critical patent/JPS60173378A/ja
Publication of JPS60173378A publication Critical patent/JPS60173378A/ja
Publication of JPH0432956B2 publication Critical patent/JPH0432956B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2600984A 1984-02-16 1984-02-16 クライオポンプ Granted JPS60173378A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2600984A JPS60173378A (ja) 1984-02-16 1984-02-16 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2600984A JPS60173378A (ja) 1984-02-16 1984-02-16 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS60173378A true JPS60173378A (ja) 1985-09-06
JPH0432956B2 JPH0432956B2 (enExample) 1992-06-01

Family

ID=12181695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2600984A Granted JPS60173378A (ja) 1984-02-16 1984-02-16 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS60173378A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021503576A (ja) * 2017-11-17 2021-02-12 エドワーズ バキューム リミテッド ライアビリティ カンパニー 周縁部に設けられた第１及び第２ステージアレイを備えるクライオポンプ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021503576A (ja) * 2017-11-17 2021-02-12 エドワーズ バキューム リミテッド ライアビリティ カンパニー 周縁部に設けられた第１及び第２ステージアレイを備えるクライオポンプ
US11466673B2 (en) 2017-11-17 2022-10-11 Edwards Vacuum Llc Cryopump with peripheral first and second stage arrays

Also Published As

Publication number Publication date
JPH0432956B2 (enExample) 1992-06-01

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