JPH0432533U - - Google Patents

Info

Publication number
JPH0432533U
JPH0432533U JP7352890U JP7352890U JPH0432533U JP H0432533 U JPH0432533 U JP H0432533U JP 7352890 U JP7352890 U JP 7352890U JP 7352890 U JP7352890 U JP 7352890U JP H0432533 U JPH0432533 U JP H0432533U
Authority
JP
Japan
Prior art keywords
wafers
quartz
wafer loading
standing
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7352890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7352890U priority Critical patent/JPH0432533U/ja
Publication of JPH0432533U publication Critical patent/JPH0432533U/ja
Pending legal-status Critical Current

Links

JP7352890U 1990-07-11 1990-07-11 Pending JPH0432533U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7352890U JPH0432533U (enrdf_load_stackoverflow) 1990-07-11 1990-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7352890U JPH0432533U (enrdf_load_stackoverflow) 1990-07-11 1990-07-11

Publications (1)

Publication Number Publication Date
JPH0432533U true JPH0432533U (enrdf_load_stackoverflow) 1992-03-17

Family

ID=31612419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7352890U Pending JPH0432533U (enrdf_load_stackoverflow) 1990-07-11 1990-07-11

Country Status (1)

Country Link
JP (1) JPH0432533U (enrdf_load_stackoverflow)

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