JPH04324104A - Magnetic core for magnetic head - Google Patents

Abstract

PURPOSE:To improve a yield by forming thin films of oxide films, etc., on the surfaces of soft magnetic metallic films laminated on substrates. CONSTITUTION:The soft magnetic metallic film 22 is laminated on the ceramic or glass substrate 21 and the magnetic thin film 23 consisting of any of an oxide, nitride and carbide is formed on the surface of the film 22 on the side opposite from the substrate 21. The joint strength of the glass is then enhanced and joining glass 24 is joined with high strength via the film 23. The magnetic cores are formed at a high yield if the substrate 21 is laminated and similar half core is welded and joined by the glass 24.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head, and more particularly to a magnetic core for a magnetic head.

0002

[Prior Art] A conventional magnetic core for a magnetic head has a structure shown in FIG.
As shown in the cross-sectional view, in a magnetic core having a structure in which a metal soft magnetic film 31 is sandwiched between ceramic or glass supports 32, a soft magnetic film is formed on a ceramic or glass substrate, and then bonded to the surface of the soft magnetic film. A glass 33 is formed into a film, and the support 32 on the opposite side is separated from the substrate by this bonded glass.
A structure in which the two are joined together is used.

0003

[Problems to be Solved by the Invention] Increasing the bonding strength between the metal soft magnetic film and the support is important for improving the yield and reliability of magnetic heads. In particular, when bonding metal and ceramic or glass via bonding glass, the wettability between the metal surface and the bonded glass is often inferior to the wettability between the ceramic or glass and the bonded glass. In many cases, the bonding strength between the metal surface and the bonded glass surface was insufficient. As a result, this caused peeling during processing, leading to a decrease in yield and reliability.

An object of the present invention is to provide a magnetic core for a magnetic head that solves these problems.

[0005]

[Means for Solving the Problem] In a soft magnetic film structure consisting of a metal soft magnetic film and a ceramic substrate or a glass substrate, an oxide,
Alternatively, a soft magnetic film structure is formed by forming a thin film of nitride or carbide. The oxide-forming ability, nitride-forming ability, and carbide-forming ability of the elements constituting the oxide, nitride, or carbide must be higher than those of the elements constituting the metal soft magnetic film. Because oxide or nitride,
Alternatively, the oxide-forming ability, nitride-forming ability, and carbide-forming ability of the elements constituting the carbide are higher than those of the elements constituting the metal soft magnetic film. Among them are oxides, nitrides, and carbides of oxygen, nitrogen,
This is because carbon is not incorporated and the soft magnetic properties are not deteriorated.

When glass for bonding is formed on the surface of the above soft magnetic film structure, the glass and oxide film, nitride film,
Since the wettability with the carbide film is greater than the wettability between the metal soft magnetic film and glass, the bonding strength of the glass with other ceramics or glass can be increased.

[0007] Therefore, if a magnetic head is manufactured using this structure, the yield and reliability can be improved compared to the conventional method.

[0008]

【Example】

Example 1 As shown in FIG. 1, a ceramic plate made of MnO and NiO was used as the substrate 11, and a FeTaN film (soft magnetic film) 1
2 and a 0.1 μm thick alumina sputtered film 13 using an Al2O3 target was formed thereon (Fig. 1(a)), and a sample without such film (Fig. 1(b)) were prepared. .

A glass film for bonding was formed on the surfaces of these samples. On the other hand, a bonding glass film was formed on another ceramic plate made of MnO and NiO on which the FeTaN film 12 was not formed, and the bonding glass surface was bonded to the sample (FIGS. 1(a) and 1(b)) with a weight of 1 kg. Bonding was performed by heating at 550° C. while pressing. The number of samples was 10. Table 1 shows the joint strength evaluation results (average shear force).

0010

[Table 1]

As can be seen from Table 1, the bonding strength was improved by providing the alumina film 13.

FIG. 2(a) shows the structure in which the alumina film is formed and the structure in which the alumina film is not formed.
, and a magnetic head having the structure shown in FIG. 2(b) was manufactured. 2(a) is a perspective view, and FIG. 2(b) is a top view, in which a soft magnetic film 22 is sandwiched between ceramic supports 21. Note that, as shown in FIG. 2(b), one of the supports 2
1 is welded to the surface of the alumina film 23 with a bonding glass 24 .

In this magnetic head, the FeTaN film thickness was 5 μm and the gap width was 0.3 μm. The yield of good glass bonding was 30% when no alumina film was formed, but increased to 70% when an alumina film was formed. Example 2 As shown in FIG. 1, the substrate 11 is made of CaO, TiO2.
, Sendust film (
A soft magnetic film 12 is formed, and an alumina film 13 is formed on it.
．． A sample with a film formed to a thickness of 1 μm (FIG. 1(a)) and a sample without a film (FIG. 1(b)) were prepared. A glass film for bonding was formed on the surfaces of these samples. On the other hand, a bonding glass film was also formed on another ceramic plate made of CaO, TiO2, and NiO on which the sendust film was not formed, and the bonding glass surface was bonded to the sample (Fig. 1(a), (b)) by 1 kg. They were bonded by heating at 680° C. while being pressed together. The number of samples was 10. Table 2 shows the joint strength evaluation results (average shear force).

[0014]

[Table 2]

As can be seen from Table 2, the bonding strength was improved by providing the alumina film 13.

FIG. 2(a) shows the structure in which the alumina film is formed and the structure in which the alumina film is not formed.
, and a magnetic head having a structure similar to that of Example 1 shown in FIG. 2(b) was manufactured. The sendust film thickness was 5 μm, and the gap width was 0.3 μm. The yield of good glass bonding increased from 70% when no alumina film was formed to 95% when an alumina film was formed.

In addition to the above embodiments, in place of the alumina film, CaO film, MgO film, TiO2 film, V2 O3
film, SiO2 film, MnO film, Cr2O3 film, Z
The same effect can be obtained even if an nO film or the like is used, a nitride film or a carbide film is used in place of the oxide film, or a composite film of oxide, nitride, and carbide is used. As a magnetic film, FeMN other than Ta (M=Ti, Zr, Nb, Mo, Hf, Ta
) system film or FeSiAl film has additive elements such as Ti, Cr, Ru, etc., the ability to form oxides, nitrides, or carbides is higher than that of the elements constituting the magnetic film. By forming a film of element oxide, nitride, or carbide on the surface of the magnetic film, the bonding strength can be increased without deteriorating the magnetic properties of the soft magnetic film.

[0018]

According to the present invention, in the magnetic head having the structure shown in FIG. 2(a), a soft magnetic film and a ceramic or
By improving the glass bonding strength with the glass support, it was possible to improve the yield.

That is, when a bonding glass film is formed on the surface of the structure shown in FIG. Because the wettability with glass is greater than that with glass, it was possible to increase the glass bonding strength with other ceramics and glass. Therefore, when a magnetic head as shown in FIG. 2(a) was manufactured using this structure, the yield and reliability could be improved compared to the conventional method.

[Brief explanation of drawings]

FIG. 1 (a) is a cross-sectional view of a structure according to the present invention, (b)
is a cross-sectional view of a conventional structure.

FIG. 2 is a diagram showing a magnetic head using a structure according to the present invention.

FIG. 3 is a top view of a conventional magnetic head.

[Explanation of symbols]

11 Board 12, 22 Soft magnetic film 13,23 FeTaN film 21 Soft magnetic film 24 Bonded glass

Claims (3)

[Claims] 1. A metal soft magnetic film is laminated on a ceramic substrate or a glass substrate, and a thin film of oxide, nitride, or carbide is formed on the surface of the metal soft magnetic film opposite to the substrate. It has a soft magnetic film structure in which an oxide of this structure is formed,
Alternatively, a glass film for bonding is formed on the surface of a thin film of nitride or carbide, and a ceramic plate or a glass plate is welded and bonded using this glass film for bonding, thereby forming a soft magnetic film into a ceramic plate or a glass plate. A magnetic core for a magnetic head, comprising a structure sandwiched between a glass plate and the substrate. 2. The magnetic core for a magnetic head according to claim 1, wherein the soft magnetic film contains Fe, Si, and Al. 3. The soft magnetic film is made of FeMN, and M is T.
2. The magnetic core for a magnetic head according to claim 1, wherein the core is at least one element selected from the group consisting of i, Nb, Zr, Mo, Hf, and Ta, and N is nitrogen.