JPH0431945Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a vibration isolation/seismic isolation floor structure, and particularly to a vibration isolation/seismic isolation floor structure that can absorb horizontal and vertical vibrations.

[Conventional technology]

As shown in FIG. 4, the conventional vibration isolation/seismic isolation floor structure has equipment 73, such as a stepper, which dislikes vibration, on the upper surface of the seismic isolation floor 72, 72 of the vibration isolation/seismic isolation floor structure 70.
73 is placed. The seismic isolation floor 72 is a floating frame 7
4, the floating frame 74 is supported by a frame 78
It is suspended and held by a plurality of metal springs 76, 76... That is, the upper ends of the metal springs 76, 76... are attached to the upper part of the outer frame 78, so that the floating frame 74 acts as a damper against vertical vibrations. Rollers 80, 80... are attached to the side surface of the floating frame 74.
0, 80... contact the outer frame 78 and smoothly move the floating frame 74 up and down. Further, the outer frame 78 is fixed on a laminated rubber 84 mounted on a foundation floor 82. Laminated rubber 84 is the foundation 82
The horizontal vibration input from the seismic isolation floor 72 and the floating frame 74 can be absorbed by the laminated rubber 84 via the rollers 80, 80... and the outer frame 78. be done. Further, dampers 86, 86 are provided at the bottom of the floating frame 74 to damp vertical vibrations. Further, a damper 88 attached to the lower surface of the outer frame 78 damps vibrations in the horizontal direction.

[Problem that the invention attempts to solve]

However, such vibration isolation/seismic isolation floor structure 7
0, there is a problem that the height of the seismic isolation floor 72 becomes high due to the length of the spring 76 that supports the seismic isolation floor 72. In addition, since the vibration isolation/seismic isolation floor structure 70 needs to be able to three-dimensionally absorb from slight vibrations on the order of several μm to large vibrations on the order of several centimeters, springs 76 supporting the seismic isolation floor 72 are used. , 76... need to be made smaller. However, if the spring constant is made small, the spring 76 will be stretched by the weight of the floating frame 74, the seismic isolation floor 72, and the equipment 73, and there is a risk that the floating frame 74 will come into contact with the lower part of the outer frame 78. For this reason, it is necessary to increase the length of the outer frame 78 and form the seismic isolation floor 72 at a high position. If the seismic isolation floor 72 becomes high, there is a drawback that equipment cannot be placed indoors with low ceilings.

The present invention was developed in view of these circumstances, and its purpose is to provide a vibration isolation/seismic isolation floor structure that allows the seismic isolation floor on which equipment is placed to be formed at a low position. .

[Means to solve the problem]

In order to achieve the above object, the present invention includes a plurality of horizontal vibration absorption units made of laminated rubber that absorb horizontal vibration and are arranged at predetermined positions, and a recessed portion whose edges other than the recessed portion absorb the horizontal vibration. It is characterized by comprising a frame supported on the unit, a vertical vibration absorption unit disposed on the recessed surface of the frame, and a seismic isolation floor supported on the upper surface of the vertical vibration absorption unit.

[Effect]

In the vibration isolation/seismic isolation floor structure of the present invention, the vertical vibration absorption unit is placed in the recessed part of the frame, so the seismic isolation floor can be lowered accordingly.

〔Example〕

Preferred embodiments of the vibration isolation/seismic isolation floor structure according to the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 is a perspective view of a vibration isolation/seismic isolation floor structure according to the present invention. As shown in FIG. 1, the seismic isolation floor 12 of the vibration isolation/seismic isolation floor structure 10 is formed in a rectangular shape, and semiconductor manufacturing equipment and the like are placed on the upper surface. Four horizontal vibration absorbing units 18, 18, . . . are fixed on a foundation floor 20 shown in FIG. Horizontal vibration absorption unit 18
...A step frame 16 having a recess 16A formed therein is supported. As shown in FIG. 2, the seismic isolation floor 12 is mounted on a step frame 16 via eight vertical vibration absorbing units 14.

As shown in FIG. 3, the recess 1 of the step frame 16
Vertical vibration absorption unit 14 attached to 6A
A cylindrical casing 22, a compression coil spring 24 provided in the casing 22, and a casing 2
2 and a viscous body 26 filled with water. The upper end of the compression coil spring 24 supports the lower surface of the seismic isolation floor 12 and absorbs vibrations received from the seismic isolation floor 12. It also absorbs vibrations input from the foundation 20. Further, the casing 22 is filled with a viscous body 26, and the viscous body 26 acts as a viscous liquid of a viscous damper that dampens the movement of the compression spring 24 and the like within the casing 22.

Further, the horizontal vibration absorbing unit 18 is formed of laminated rubber having a certain thickness, and can absorb horizontal vibrations received from the seismic isolation floor 12 via the frame 16. The same applies to vibrations input from the foundation 20. This absorption of vibrations is not limited to the direction of arrow A shown in FIG. 3, but also vibrations from directions perpendicular to or oblique to the plane of the paper of FIG. 3 can be absorbed. Further, a damper 30 is installed between the lower surface of the center of the frame 16 and the surface of the foundation floor 20 to damp horizontal vibrations.

According to the vibration isolation/seismic isolation floor structure according to the present invention configured as described above, the vertical vibration absorption unit 14 is used for vertical vibrations applied to the seismic isolation floor 12 and vertical vibrations input from the foundation 20. ,14...
It is absorbed by the damper effect of each compression spring 24 and the viscous body 26. Further, horizontal vibrations are absorbed through the frame 16 by horizontal vibration absorbing units 18, 18.
It is absorbed by... Further, horizontal vibrations from the foundation 20 are absorbed by the horizontal vibration absorption unit 18. For this reason, the seismic isolation floor 1 is generated due to the thickness of the horizontal vibration absorption unit 18 formed of laminated rubber and compression springs.
The increase in height of 2 can be reduced. Thereby, the equipment placed on the seismic isolation floor 12 can be installed at a low position, and the vibration isolation/seismic isolation floor structure 10 can be installed even in a building with a low ceiling.

[Effect of idea]

As explained above, the vibration isolation/seismic isolation floor structure according to the present invention includes a horizontal vibration absorbing unit made of laminated rubber that absorbs horizontal vibrations, and a frame with a step formed on the horizontal vibration absorbing unit. The structure consists of a vertical vibration absorption unit that is installed through the vertical vibration absorption unit and whose mounting position is below the top surface of the horizontal vibration absorption unit, and a seismic isolation floor that is installed on the top surface of the vertical vibration absorption unit. The height of the floor can be lowered.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of a vibration isolation/seismic isolation floor structure according to the present invention. Figure 2 is a top view of the frame of the vibration isolation/seismic isolation floor structure according to the present invention when it is attached to a horizontal vibration absorption unit; Figure 3 is a sectional view of the vibration isolation/seismic isolation floor structure according to the invention; Figure 4 is an explanatory diagram of a conventional vibration isolation/seismic isolation floor structure. 10... Vibration isolation/seismic isolation floor structure, 12... Seismic isolation floor,
14... Vertical vibration absorption unit, 16... Frame, 18... Horizontal vibration absorption unit, 24... Compression coil spring, 26... Viscous body.

Claims (1)

[Claims for Utility Model Registration] (1) A plurality of horizontal vibration absorbing units formed of laminated rubber that absorb horizontal vibrations and arranged at predetermined positions; A vibration isolator comprising: a frame supported on a unit; a vertical vibration absorption unit disposed on a recessed surface of the frame; and a seismic isolation floor supported on the upper surface of the vertical vibration absorption unit.・Seismic isolation floor structure. (2) The vibration isolation/seismic isolation floor structure according to claim 1, wherein the vertical vibration absorption unit is constituted by a compression coil spring. (3) The vibration isolation/seismic isolation floor structure according to claim 1, wherein the vertical vibration absorption unit is constructed by combining a compression coil spring and a viscous damper.