JPH0431746A - Apparatus for detecting phase image using heterodyne-detecting light receiving device - Google Patents

Abstract

PURPOSE:To ensure the accurate detection of the phase image of a body having the phase difference in a broad range by synthesizing sample-transmitted light and reference light having the different frequency, detecting the phase distribution of the sample beat component in the one-dimensional direction or the two-dimensional direction along the sample, obtaining the phase image of the sample, and separating the image from incoherent light. CONSTITUTION:Measuring light I having a frequency omega1 and light I' having a frequency omega2 which is slightly different are combined by a half mirror HM. Photoelectric conversion is performed in a detector D. Only the component of the difference omega1 - omega2 is made to pass a band BPF, and only the AC component is taken out. When the amplitude is constant, the signal having the frequency DELTAomega, the phase phi1 - phi2 and the constant magnitude is obtained from the filter F. In the expression, phi1 is the phase of the measuring light I. The phase is changed depending on the refractive index and the thickness of a body Ob which is inserted into a light path. The phase represents the phase of the body. The phase phi2 of the local oscillated light I' has the value of the constant reference. Therefore, the phase of the body Ob can be detected by measuring the phase of the AC signal obtained from the receiver HD.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for detecting a phase image by separating it from incoherent light, which is a scattered component, and particularly relates to an apparatus using a heterodyne detection light receiving system for this purpose.

[Conventional technology]

Since the discovery of X-rays, technology for observing the inside of living organisms (human bodies) from the outside without causing damage (non-invasive or non-invasive measurement methods) has been strongly sought after and developed in the field of biology, especially medicine. Ta. This technology uses gamma rays and X-rays, which have the shortest wavelengths of electromagnetic waves, and radio waves, which have the longest wavelengths. The former is an X-ray CT, the latter is an NMR-CT
(Magnetic Re5onance Im
agingSMRI).

On the other hand, spectroscopy in the ultraviolet-visible, near-infrared, and infrared regions, which are widely used in the fields of physics and chemistry, can be applied to the entire living body (i.e.
There have been relatively few attempts to apply it to n vivo. This is because many problems regarding the most basic "quantitativeness" remain unsolved in biological measurements using light, especially those that utilize absorption and luminescence processes. At present, attempts are being made to measure reflection spectra using solid-state devices, high-sensitivity TV cameras, etc., but this is the reason why the reproducibility and reliability of the obtained absolute values is low.

When light is irradiated onto a scattering object such as biological tissue, it is possible to extract a certain amount of straight light if the light is received 180 degrees facing the object, but at present the spatial resolution is not very good.

The difference in spatial resolution between X-rays and light cannot currently be bridged. However, using light, particularly near-infrared light, it should be possible to image tissue oxygen levels from hemoglobin in the blood. These are other NMR-CT and
It will give different information than line CT.

If the tissue is 3 to 5 cm thick, we can detect the light that passes through it. This means that "optical radiography" can be used for diagnosis. The tissue of the female breast is relatively uniform, allowing light to easily pass through it, and its shape makes it easy to detect transmitted light (approximately 2 to 3 cm thick).
It has been used under the name aphy (Lightscanning).

Under these circumstances, the present inventor filed a patent application filed in 1986-30.
No. 4691 and Japanese Patent Application No. 1-250036, in order to separate and detect a coherent light component that has transmitted through a sample and contains its absorption information and is mixed with scattered light, a coherent light component that has a different frequency from this coherent light component is used. We proposed the use of an optical heterodyne detection system that combines light and detects the bead component of the combined light. However, the above proposal detects an absorption image or an amplitude image of the sample, and cannot detect a phase image based on the refractive index and thickness distribution of the sample.

Schlieren method, phase difference method, etc. are conventionally known methods for observing such phase images, but these methods are applied when the phase difference of the phase image is small and are relatively slow. It was not suitable for those having a wide range of phase distribution. To explain this point a little more, both the Schlieren method and the phase difference method can be explained as spatial filtering methods in the re-diffraction method. In the re-diffraction method, as shown in FIG. 13, two convex lenses L, . ), when an input image is placed on the front focal plane P+ of the first lens L and illuminated with coherent light, the rear focal plane P of the first lens L+ (the front focal plane of the second lens L) is
2 (spectral plane), the complex amplitude image of the input image is subjected to two-dimensional Fourier transform to obtain its spatial frequency distribution, so a spatial filter is placed on this plane P, filtered, and the information is retransmitted into the second This is a method of performing two-dimensional Fourier transformation using the second lens L2, and reproducing an image subjected to spatial filtering processing on the rear focal plane P of the second lens L2.

The Schlieren method is a method that attempts to obtain an image whose brightness is proportional to the square of the phase of the sample by placing a filter that cuts the O component of the spatial frequency on the spectral plane P2 in Fig. 13, and the phase difference This method attempts to obtain an image with brightness proportional to the phase of the sample by placing a filter on the spectral plane P that advances or delays the phase of the zero component of the spatial frequency by π/2. However, all of the above conventional methods are based on the assumption that the phase difference of the sample is small and the spectral distribution is biased toward lower-order components.
If the phase difference is large and the spectral distribution is of high order, high contrast cannot be obtained, and this method cannot necessarily be said to be very effective. In other words, if we take a phase diffraction grating with a predetermined spatial frequency as an example, as shown in Fig. 14, as the phase difference of the grating increases, most of the spectrum is distributed in high-order components, and low-order components are distributed. It will be understood that even if the processed spectrum is subjected to inverse Fourier transform after processing, only a low-contrast image that is not much different from the original image will be reproduced.

[Problem to be solved by the invention]

The present invention was made in view of this situation, and
The purpose of this is to solve the problems of the conventional phase image detection method as described above, and to separate the incoherent light, which is the scattered component, using an optical heterodyne detection light receiving system, and to detect the phase having a wide range of phase differences. The object of the present invention is to provide a completely new device for detecting images.

[Means to solve the problem]

A phase image detection device using a first heterodyne detection light receiving system of the present invention that achieves the above object irradiates a sample with coherent light and synthesizes the transmitted light and a reference coherent light having a frequency different from that of the coherent light. In a device that detects the phase image of a sample using optical heterodyne detection, the entire surface of the sample is irradiated with uniform parallel coherent light, the transmitted light of the sample and the reference coherent light are combined, and one-dimensional or The present invention is characterized in that it is configured to obtain a phase image of a sample by detecting the phase distribution of bead components in two-dimensional directions.

In this case, the reference coherent light and the transmitted light are combined over the entire cross-section of the light beam that has passed through the sample, and the phase distribution of the bead component in the one-dimensional or two-dimensional direction of the east cross section of the composite light is detected. It can be configured to obtain an image, and in this case, the cross section of the light beam that irradiates the sample is divided into small areas, a condenser lens is placed in each divided area, and the sample is located at the condensed point. Arrange the sample as shown below, place a lens that converts each divergent light beam that has passed through the sample into a parallel light beam in correspondence with each converging lens, and combine the converted parallel light beams with the reference coherent light to create a composite light. It can also be configured to obtain a phase image of the sample by detecting the phase distribution of bead components in one-dimensional or two-dimensional directions of the east section.

Alternatively, the phase image of the sample can be determined by scanning a heterodyne receiver that detects only the bead component within the composite beam cross section.

The phase image detection device using the second heterodyne detection light receiving system of the present invention irradiates a sample with coherent light, synthesizes the transmitted light and a reference coherent light having a different frequency from the coherent light, and generates an optical heterodyne. In an apparatus for detecting a phase image of a sample by wave detection, a part of the sample is irradiated with parallel coherent light, the transmitted light of the sample and the reference coherent light are combined, and the phase of the bead component is detected, The sample was arranged so as to be scannable relative to the irradiation light, and the phase image of the sample was obtained by detecting the phase distribution of the bead component in a one-dimensional or two-dimensional direction on a plane along the sample. It is characterized by this.

In this case, a condensing lens is placed in the parallel coherent beam, and the sample is placed at the condensing point.
It is also possible to arrange a lens that converts the divergent light beam that has passed through the sample into a parallel light beam, and to combine the converted parallel light beam and the reference coherent light to detect the phase of the bead component.

The phase image detection device using the third heterodyne detection light receiving system of the present invention irradiates a sample with parallel coherent light, combines the transmitted light with a reference coherent light having a different frequency from the coherent light, and generates an optical signal. An apparatus for detecting a phase image of a sample by heterodyne detection includes a first Fourier transform optical system that is configured to irradiate the entire surface of the sample with uniform parallel coherent light and that Fourier transforms the phase distribution of light transmitted through the sample; A second Fourier transform optical system that further Fourier transforms the distribution on the spectral plane is arranged, and the reference coherent light and the re-converted light are combined on the transformation plane of the second Fourier transform optical system to perform the second Fourier transform. The present invention is characterized in that it is configured to obtain a phase image of a sample by detecting the phase distribution of bead components in a one-dimensional or two-dimensional direction on a conversion surface of an optical system.

In that case, a phase image of the sample is obtained by arranging a spatial filter on the spectral plane and detecting the phase distribution of the bead component in one or two dimensions between the light passing through the spatial filter and the reference coherent light. It can also be configured as

[Effect]

In any of the phase image detection devices of the present invention, light transmitted through a sample and having phase information of the sample is combined with a reference light having a frequency different from that transmitted light, and the bead component of the synthesized light is synthesized into the sample. The phase image of the sample is obtained by detecting the phase distribution in the one-dimensional or two-dimensional direction along the line, so it is possible to separate the phase image of an object with a wide range of phase differences by separating it from the incoherent light that is the scattered component. can be detected reliably and accurately.

〔Example〕

As shown in FIG. 2, the basic form of the heterodyne detection light receiving system is that of the measurement light I of frequency ω and the light of ω2 having a slightly different frequency (this is called local light).

)I' by a half mirror HM, the combined light is photoelectrically converted by a detector, and a bandpass filter F passes only the frequency difference ω1-ω2 component in the signal.
Only the alternating current component is taken out through the filter. To simplify the explanation hereinafter, the combination of the detector and bandpass filter F will be referred to as a heterodyne receiver HD. Assuming that the measurement light I is Vl and the local light I' is V2, the respective lights are expressed as follows.

V, =A+ exp[-i(a+, t*φ,)], V
2 = A2 eXp[-1((L12j+φ2)] When these two light waves V1, 2 are superimposed and detected by a detector, the detection signal S is as follows.

S= Vl +￥2 =V+ ・Vl ” +V2 ・Vs+V+ HV
2 ” +V+ ” ・Vs By the way, Vl 'Vl '' = A 1 ,
V2'V2''=Az, and V+'V2''=A+Aa E! Xp[-
1((11+a+2)j-i(φ1-φ2)], V, ” ・V2 =A, A2 exp[+i(ω
, -a+,) to 10i(φ, -φ,) Vl -V2 ” +V+ ” ・V2= 2 A +
A 2cos [(ω1-ω2)t+(φ1-φ2)]
Therefore, S=A+ 2+A2 + 2 A + A zcos[(ω1-ω2)t+(
φ, −φ, )]. By the way, ω2=ω1−△ω(
△ω is called the bead frequency. ), so AI, A
4 is constant, a signal of a constant magnitude with a frequency Δω and a phase of φ1−φ2 is obtained from the filter F. φ
1 is the phase of the measurement light (2), which changes depending on the refractive index and thickness of the object ob inserted into the optical path, and represents the phase of the object. On the other hand, the phase φ of the local light weight′
, has a constant reference value, so the heterodyne receiver HD obtains an AC signal at the bead frequency having a phase corresponding to the phase of the object ob. Therefore, by measuring the phase of the AC signal obtained from the heterodyne receiver HD, the phase of the object ○b can be detected.

By the way, in a heterodyne detection light receiving system like the one mentioned above, the diameter of the light receiving surface of the detector (the aperture diameter of the focusing optical system when condensing light and taking a bead at the focal point) is d, the detection If the wavelength of the light to be measured is λ, then the angular resolution is approximately d/λ. Therefore, the diameter d of the light-receiving surface of the detector
If the wavelength λ of the light to be detected is made sufficiently large compared to the wavelength λ of the light to be detected, the heterodyne detection light receiving system can be said to be a highly directional light receiving system.

Now, by arranging the heterodyne detection light receiving systems as described above in parallel, it is possible to detect a phase image of a phase object. Its basic configuration is shown in Figure 1. Phase sample S
A coherent transmitted illumination light A is applied to the sample S, and one-dimensional or two-dimensional measurement light weight that has been spatially phase-modulated by the sample S is made incident on the half mirror HM. On the other hand, for example, light obtained by dividing a part of the illumination light A is inputted to a frequency shifter AO consisting of an ultrasonic modulator, etc., and the frequency is shifted somewhat from the frequency of the illumination light A to make it a local light beam.
It is made incident on M, where it is combined with the measured light weight. The synthetic light is
In order to remove noise and increase the S/N ratio, the light enters the heterodyne receivers HD11...HDln...HMmn, etc. arranged two-dimensionally in a matrix through a polarizer P inserted at t to remove noise and increase the S/N ratio. There is. The heterodyne receivers HDII...HDln... arranged in a matrix form
HM m n will be referred to as a two-dimensional heterodyne receiver 2HD for convenience of explanation hereinafter. As described above, each heterodyne receiver HMmn outputs a bead signal having a phase corresponding to the phase of the sample S at its corresponding position. A lock-in amplifier RAmn is connected to each heterodyne receiver HMmn, and a reference bead frequency signal is given to each lock-in amplifier RAmn from the control device CO. Therefore, the phase value of the bead signal output from each heterodyne receiver HM m n is converted into an intensity signal by the lock-in amplifier RAmn. This matrix-like RAll...RAln
...RAmn will be referred to as a parallel phase difference processing device PR for convenience of explanation below. Parallel phase difference processing device PR
A phase distribution image can be obtained by displaying the signals from, for example, on a corresponding secondary display surface of the display device DY. As described above, the phase distribution of the phase sample S is two-dimensionally sampled and detected at the arrangement interval of the heterodyne receiver HDmn. On the other hand, since the light scattered in and around the sample S does not generate a bead component even when combined with the local light 1', it is removed by using such a heterodyne detection light receiving system, and the light scattered around the sample S is removed. Only the phase image is detected with high accuracy. In the above configuration, the reference bead frequency signal is applied from the control device CO to each lock-in amplifier to detect the phase of the signal from each channel (each heterodyne receiver) of the two-dimensional heterodyne receiver 2HD. Alternatively, the bead signal of any one channel may be used as a reference signal, and the phases of signals from other channels may be detected. Note that in the arrangement shown in FIG. 1, the greater the distance between the two-dimensional heterodyne receiver 2HD and the sample S, the larger the minimum spatial sampling area of the detected image by each heterodyne receiver. Furthermore, if the size of each heterodyne receiver is reduced to increase the density, not only will the sampling area become larger, but also the sampling areas will overlap, so it is necessary to perform image reproduction in consideration of the overlap. By subtracting the overlap, the minimum spatial resolution area becomes smaller, resulting in higher resolution.

By the way, in the case of FIG. 1, the light irradiated onto the sample S can be made into a condensed light, so that the resolution at the measurement point can be increased, although the sampling gap remains the same. For this purpose, as shown in Fig. 3, a heterodyne receiver H
Microlens arrays MLI and ML2 are prepared which are composed of condensing lenses arranged corresponding to the matrix of Mmn, and these two microlens arrays ML1 and ML2 are arranged so that each lens sandwiches the sample on the measurement sample S so that it becomes confocal. M
L2 is arranged so that parallel illumination light A is applied from one microlens array MLI side.

In this way, the illumination light is focused on a minute measurement point on the sample S, so it is possible to measure the exact phase shift compared to the case where the average phase of the sampling area is determined, as in the case of the '1fJ1 diagram. . If necessary, fine sampling gaps are also possible by scanning the sample S.

The systems shown in Figures 1 and 3 used multiple unit heterodyne receivers and multiple lock-in amplifiers attached to each unit, but instead, one heterodyne receiver and its attached units were used. It is also possible to detect the phase distribution of the sample S using one lock-in amplifier.

Examples are shown in FIGS. 4 to 6. The one shown in FIG. 4 is a two-dimensional heterodyne receiver 2H in the one shown in FIG.
In place of D and the parallel phase difference processing device PR, one heterodyne receiver HD and one lock-in amplifier RA attached to it are used, and the heterodyne receiver HD is scanned in the X-Y direction across the measurement light I. It was made movable for this reason. Even in this case, the phase distribution of the sample S can be measured as long as the two-dimensional phase difference between the illumination source and the local light source ■' does not change. In the example shown in FIG. 5, the heterodyne receiver HD is fixed, and instead, the measurement sample S is moved in the X-Y direction across the measurement light I for scanning. In this case, the beam diameters of both the illumination light A and the local light I' can be made narrower, which is advantageous both in terms of resolution and in that an optical system for expanding the beam is not required.

The one in Fig. 6 is one in which the focused light focused by the lens L1 is applied to the sample S, which is moved in the X-Y direction (in this direction) for scanning, to further increase the resolution. The light from the measurement point is converted into parallel light I by another lens L2 and combined with the local light 1'.By the way, in Fig. 6, the light from the same laser 1 is used as the illumination light and the local light. .

That is, the coherent light from the laser 1 is split into two by the beam splitter BS, one beam is used to illuminate the sample S, and the other beam passes through the mirror M1 and enters the frequency shifter AO such as an ultrasonic modulator. , the frequency is shifted to some extent, and it is used as local light via mirror M2. Note that the lock-in amplifier RA and display device DY are not shown in FIG.

Next, an example of the configuration of a specific device for detecting a phase image of a sample will be explained using a phase image detection device based on the principle shown in FIGS. 1 and 3 to 6. . In the following, the configuration shown in Figure 1 will be adopted as the arrangement for detecting the phase distribution by the heterodyne detection light receiving system, but instead, the configuration shown in Figures 3 to 6 will be used. It is clear that you can also use

FIG. 7 simply embodies the basic configuration of FIG. 1. That is, the coherent parallel light of a predetermined frequency oscillated from the laser 1 is split into two by the beam splitter BS, one beam is used as illumination light A to illuminate the sample S from behind, and the other beam is used to illuminate the mirror M1. After that, the light enters a frequency shifter A, such as an ultrasonic modulator, and its frequency is shifted to some extent, and then passes through a mirror M2 to become a local light I'. Note that in order to expand the diameter of the light beam from the laser 1, a beam expander may be inserted before the beam splitter BS. The illumination light A illuminates the measurement sample S and the scatterer N located around it. Transmits sample S and scatterer N,
The measurement light I, which includes the scattered component by the scatterer N and the phase distribution information of the sample S, is converted into a coherent local light I with a constant intensity that has a frequency slightly different from that of the illumination light by the half mirror HM.
', the noise component is reduced by polarizer P,
The signal enters the two-dimensional heterodyne receiver 2HD, and a two-dimensional bead signal having a phase corresponding to each sampling position is obtained. These bead signals transmit through the sample S and have a phase equal to the phase determined by the thickness and refractive index of the sampling position, so the phase of the bead signal of each channel is determined by the parallel phase difference processing device PR. By comparing the phase with a reference signal from the control device CO, it is converted into an intensity signal, and by outputting it to a display device DY or the like, the phase distribution is visualized. Even if the component scattered by the scatterer N is mixed with the local light 1', it does not generate a bead component on the two-dimensional heterodyne receiver 2HD, but simply becomes a DC component, so it is not included in the signal from the two-dimensional heterodyne receiver 2HD. does not have any influence, and it is possible to extract and detect the phase distribution of only the light of the rectilinear light component to which the phase shift is given by the sample S with high directivity.

The device shown in Fig. 8 is the same as the apparatus shown in Fig. 7, but similar beam expanders BEI and BF2 are inserted in the optical path of the light transmitted through the sample S and in the optical path of the local light, and a two-dimensional heterodyne receiver 2HD is installed. The diameter of the incident light beam is enlarged to enlarge the obtained phase image, and this arrangement is suitable for the small sample S.

The one in Fig. 9, on the contrary, has a beam condenser BC1 in both optical paths.
BC2 is inserted to reduce the obtained phase image.

By the way, at the measurement point of the sample S, the phase usually has direction dependence. In order to measure the directional dependence of the phase at a specific measurement point on the sample S, as shown in FIG. The diverging light of is converted into parallel light by the convex lens L2, and the local light 1
' and visualize the phase distribution of the bead component using the two-dimensional heterodyne receiver 2HD. Furthermore, components scattered in directions other than the straight direction from the sample S may have coherence with the incident light. The device can be modified so that it can detect the phase distribution of components other than straight light having such coherence. An example is shown in FIG. The only difference from the device shown in Fig. 7 is that the two-dimensional heterodyne receiver 2HD is placed at a position that captures the scattered components in the direction to be detected other than the straight forward light, and the half mirror HM is placed so that the local light is also incident at this position. This is the point where . .

Now, the above method detects the phase image by detecting the two bead components of the light at or near the object plane immediately after the light that has passed through the sample, but the sample is first Fourier transformed using the convex lens L1. It is also possible to perform Fourier transformation again using another convex lens L2 to form an image S' of the phase sample S on the image plane, and to detect the phase distribution on this image plane. The 12th example is
As shown in the figure. In this case, the focal length f of the lens L1 and the focal length f of the lens L2 do not need to be equal, and by making them different sizes, the reconstructed image can be enlarged or reduced with respect to the sample. When r, > f, the image becomes a reduced image, and when f+<f2, it becomes an enlarged image. Furthermore, various spatial filters can be placed on the spectral plane P of the lens L1 to perform image processing.

Although several embodiments of the phase image detection device using the heterodyne detection light receiving system of the present invention have been described above, the present invention is not limited to these embodiments, and various modifications are possible. For example, as a frequency shifter, not only one using ultrasonic light diffraction such as an ultrasonic modulator, but also a combination of wave plates, a rotating grating, and the electro-optic effect of a crystal can be used. Alternatively, the reflector may be moved at a constant speed or oscillated with a sawtooth wave.

〔Effect of the invention〕

In any phase image detection device using the heterodyne detection light receiving system of the present invention, light transmitted through a sample and having phase information of the sample is combined with a reference light having a frequency different from that transmitted light. The phase image of the sample is obtained by detecting the phase distribution of the bead component of light along the sample in one or two dimensions. A phase image of an object having a phase difference can be detected reliably and accurately.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing the basic configuration for detecting a phase image by arranging heterodyne detection light receiving systems in parallel, FIG. 2 is a diagram explaining the basic configuration and operation of the heterodyne detection light receiving system, Figure 3 is a diagram showing the configuration of a modification of Figure 1;
Figure 5 shows the configuration of the one in Figure 1 modified into a scanning type, Figure 6 shows the configuration of the one in Figure 3 modified into a scanning type, and Figure 7 shows the configuration of the sample in Figure 3. A diagram showing an example of the configuration of a specific device for detecting a phase image, FIG. 8 is a diagram showing the configuration of a modified version of the one in FIG. 7 so that an enlarged image can be obtained, and FIG. A diagram showing the configuration of the one in Figure 7 modified to obtain a reduced image, Figure 10 is a diagram showing the configuration of an apparatus for measuring the directional dependence of the phase of the measurement point, and Figure 11 is a diagram showing the configuration of a device for measuring the directional dependence of the phase of the measurement point. Figure 12 is a diagram showing the configuration of a device modified to be able to detect the phase distribution of components other than FIG. 14 is a diagram illustrating the phase image detection method using the re-diffraction method, and is a diagram showing the relationship between the phase difference of the phase diffraction grating and the distribution of spectral components. 1... Laser, ■... Measuring light, I'... Local light, HM... Half mirror 1D... Detector, F...
Bandpass filter, HD...heterodyne receiver, Ob...object, S...sample, A...illumination light, A
O...Frequency shifter, P...Polarizer, 2HD...
Two-dimensional heterodyne receiver, RA...lock-in amplifier, CO...control device, PR...parallel phase difference processing device, DY...display device, MLl, ML2...microlens array, Ll, L2...lens, BS...
Beams Fritter-1M1, M2...Mirror, N...
・Scatterer, P...Polarizer, BEI, BF2...Beam expander, BCl, BC2...Beam condenser, P2・
...Spectral surface Figure 1 Figure 2 Applicant New Technology Corporation (2 others) Agent Patent attorney Masa Hirukawa M5 Figure 6 M7 Figure 8 Figure 14 )

Claims (8)

[Claims] (1) A device that irradiates a sample with coherent light, combines the transmitted light with a reference coherent light having a different frequency, and detects a phase image of the sample using optical heterodyne detection. The phase image of the sample is obtained by irradiating parallel coherent light, combining the transmitted light of the sample with the reference coherent light, and detecting the phase distribution of the bead component in one or two-dimensional directions in the cross section of the combined beam. What is claimed is: 1. A phase image detection device using a heterodyne detection light receiving system. (2) A phase image of the sample is obtained by combining the reference coherent light and the transmitted light over the entire cross-section of the light beam that has passed through the sample, and detecting the phase distribution of the bead component in one-dimensional or two-dimensional directions of the combined light beam cross-section. 2. A phase image detection device using a heterodyne detection light receiving system according to claim 1, wherein the phase image detection device is configured to obtain the following. (3) Divide the cross section of the light flux that irradiates the sample into small regions, place a condenser lens in each divided region, and place the sample so that the sample is located at the focal point, and each divergence that passes through the sample A lens that converts a light beam into a parallel light beam is placed in correspondence with each condenser lens, and the converted parallel light beam and reference coherent light are combined to calculate the phase of the bead component in one or two-dimensional direction of the cross section of the combined light beam. 3. The phase image detection apparatus using a heterodyne detection light receiving system according to claim 2, characterized in that the phase image of the sample is obtained by detecting the distribution. (4) Claim 2 or 3 characterized in that the phase image of the sample is obtained by scanning a heterodyne receiver that detects only the bead component within the cross section of the composite beam.
A phase image detection device using the heterodyne detection light receiving system described above. (5) In a device that irradiates a sample with coherent light, combines the transmitted light with a reference coherent light having a different frequency from the coherent light, and detects a phase image of the sample by optical heterodyne detection, a part of the sample is detected. It is configured to irradiate parallel coherent light, combine the transmitted light of the sample and the reference coherent light, and detect the phase of the bead component.
The sample was arranged so as to be scannable relative to the irradiation light, and the phase image of the sample was obtained by detecting the phase distribution of the bead component in a one-dimensional or two-dimensional direction on a plane along the sample. A phase image detection device using a heterodyne detection light receiving system. (6) Place a condensing lens in the parallel coherent beam, place the sample so that the sample is located at the condensing point, place a lens that converts the divergent beam that has passed through the sample into a parallel beam, and 6. The phase image detection device using a heterodyne detection light receiving system according to claim 5, wherein the phase image detection device uses a heterodyne detection light receiving system, and is configured to combine the parallel light beam and the reference coherent light and detect the phase of a bead component thereof. (7) In a device that irradiates a sample with parallel coherent light, combines the transmitted light with a reference coherent light having a different frequency from the coherent light, and detects a phase image of the sample by optical heterodyne detection, it is uniform over the entire surface of the sample. a first Fourier transform optical system configured to irradiate parallel coherent light and Fourier transform the phase distribution of the transmitted light of the sample; and a second Fourier transform optical system that further Fourier transform the distribution in the spectral plane. The reference coherent light and the re-converted light are combined on the conversion surface of the second Fourier transformation optical system, and the phase of the bead component in the one-dimensional or two-dimensional direction on the conversion surface of the second Fourier transformation optical system is determined. 1. A phase image detection device using a heterodyne detection light receiving system, characterized in that it is configured to obtain a phase image of a sample by detecting distribution. (8) A phase image of the sample is obtained by arranging a spatial filter on the spectral plane and detecting the phase distribution of the bead component in one-dimensional or two-dimensional directions between the light passing through the spatial filter and the reference coherent light. 8. A phase image detection device using a heterodyne detection light receiving system according to claim 7.