JPH0430738U - - Google Patents

Info

Publication number
JPH0430738U
JPH0430738U JP7347590U JP7347590U JPH0430738U JP H0430738 U JPH0430738 U JP H0430738U JP 7347590 U JP7347590 U JP 7347590U JP 7347590 U JP7347590 U JP 7347590U JP H0430738 U JPH0430738 U JP H0430738U
Authority
JP
Japan
Prior art keywords
transport vehicle
semiconductor wafer
cassettes
transport
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7347590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7347590U priority Critical patent/JPH0430738U/ja
Publication of JPH0430738U publication Critical patent/JPH0430738U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
JP7347590U 1990-07-09 1990-07-09 Pending JPH0430738U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7347590U JPH0430738U (enExample) 1990-07-09 1990-07-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7347590U JPH0430738U (enExample) 1990-07-09 1990-07-09

Publications (1)

Publication Number Publication Date
JPH0430738U true JPH0430738U (enExample) 1992-03-12

Family

ID=31612322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7347590U Pending JPH0430738U (enExample) 1990-07-09 1990-07-09

Country Status (1)

Country Link
JP (1) JPH0430738U (enExample)

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