JPH0429857Y2 - - Google Patents
Info
- Publication number
- JPH0429857Y2 JPH0429857Y2 JP18906787U JP18906787U JPH0429857Y2 JP H0429857 Y2 JPH0429857 Y2 JP H0429857Y2 JP 18906787 U JP18906787 U JP 18906787U JP 18906787 U JP18906787 U JP 18906787U JP H0429857 Y2 JPH0429857 Y2 JP H0429857Y2
- Authority
- JP
- Japan
- Prior art keywords
- container
- processing liquid
- liquid
- air
- piston
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 43
- 239000007789 gas Substances 0.000 description 8
- 239000003921 oil Substances 0.000 description 6
- 238000012856 packing Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000010720 hydraulic oil Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
- Pistons, Piston Rings, And Cylinders (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18906787U JPH0429857Y2 (de) | 1987-12-11 | 1987-12-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18906787U JPH0429857Y2 (de) | 1987-12-11 | 1987-12-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0192236U JPH0192236U (de) | 1989-06-16 |
JPH0429857Y2 true JPH0429857Y2 (de) | 1992-07-20 |
Family
ID=31480124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18906787U Expired JPH0429857Y2 (de) | 1987-12-11 | 1987-12-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0429857Y2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2648108B2 (ja) * | 1994-11-22 | 1997-08-27 | 九州日本電気株式会社 | レジスト吐出装置 |
JP2818557B2 (ja) * | 1995-07-28 | 1998-10-30 | 日本電気株式会社 | 金属薄膜の形成方法および形成装置 |
-
1987
- 1987-12-11 JP JP18906787U patent/JPH0429857Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH0192236U (de) | 1989-06-16 |
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