JPH0429478Y2 - - Google Patents

Info

Publication number
JPH0429478Y2
JPH0429478Y2 JP1984160054U JP16005484U JPH0429478Y2 JP H0429478 Y2 JPH0429478 Y2 JP H0429478Y2 JP 1984160054 U JP1984160054 U JP 1984160054U JP 16005484 U JP16005484 U JP 16005484U JP H0429478 Y2 JPH0429478 Y2 JP H0429478Y2
Authority
JP
Japan
Prior art keywords
electrode
charged particle
irradiation device
particle irradiation
shield cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984160054U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6175057U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984160054U priority Critical patent/JPH0429478Y2/ja
Publication of JPS6175057U publication Critical patent/JPS6175057U/ja
Application granted granted Critical
Publication of JPH0429478Y2 publication Critical patent/JPH0429478Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1984160054U 1984-10-23 1984-10-23 Expired JPH0429478Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984160054U JPH0429478Y2 (en, 2012) 1984-10-23 1984-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984160054U JPH0429478Y2 (en, 2012) 1984-10-23 1984-10-23

Publications (2)

Publication Number Publication Date
JPS6175057U JPS6175057U (en, 2012) 1986-05-21
JPH0429478Y2 true JPH0429478Y2 (en, 2012) 1992-07-16

Family

ID=30717988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984160054U Expired JPH0429478Y2 (en, 2012) 1984-10-23 1984-10-23

Country Status (1)

Country Link
JP (1) JPH0429478Y2 (en, 2012)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918352U (ja) * 1982-07-28 1984-02-03 日本電子株式会社 静電レンズ構造

Also Published As

Publication number Publication date
JPS6175057U (en, 2012) 1986-05-21

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