JPH0429358U - - Google Patents
Info
- Publication number
- JPH0429358U JPH0429358U JP6970690U JP6970690U JPH0429358U JP H0429358 U JPH0429358 U JP H0429358U JP 6970690 U JP6970690 U JP 6970690U JP 6970690 U JP6970690 U JP 6970690U JP H0429358 U JPH0429358 U JP H0429358U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- surface plate
- polished
- flow rate
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 5
- 239000000523 sample Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 3
- 238000001816 cooling Methods 0.000 claims 2
- 239000000110 cooling liquid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990069706U JP2527910Y2 (ja) | 1990-06-30 | 1990-06-30 | 研磨装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990069706U JP2527910Y2 (ja) | 1990-06-30 | 1990-06-30 | 研磨装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0429358U true JPH0429358U (en, 2012) | 1992-03-09 |
JP2527910Y2 JP2527910Y2 (ja) | 1997-03-05 |
Family
ID=31605243
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990069706U Expired - Lifetime JP2527910Y2 (ja) | 1990-06-30 | 1990-06-30 | 研磨装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2527910Y2 (en, 2012) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06246633A (ja) * | 1993-02-25 | 1994-09-06 | Cat Syst:Kk | ブラシロール・研磨研削ロール等の表面処理用ロール の制御方法及びその装置 |
JP2013142591A (ja) * | 2012-01-10 | 2013-07-22 | Disco Abrasive Syst Ltd | 混合液供給装置 |
JP2013193175A (ja) * | 2012-03-21 | 2013-09-30 | Mitsubishi Heavy Ind Ltd | 冷却装置、加工装置、および、冷却油流量決定方法 |
CN118514006A (zh) * | 2024-07-23 | 2024-08-20 | 鲁冉光电(微山)有限公司 | 一种光学镜片加工清洁装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102157729B1 (ko) | 2020-01-09 | 2020-09-18 | 엑스티알 테크놀로지스 인코포레이티드 | 액정유리의 연마장치 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61265262A (ja) * | 1985-05-17 | 1986-11-25 | Hitachi Ltd | 研磨装置 |
JPS6315008U (en, 2012) * | 1986-07-14 | 1988-02-01 |
-
1990
- 1990-06-30 JP JP1990069706U patent/JP2527910Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61265262A (ja) * | 1985-05-17 | 1986-11-25 | Hitachi Ltd | 研磨装置 |
JPS6315008U (en, 2012) * | 1986-07-14 | 1988-02-01 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06246633A (ja) * | 1993-02-25 | 1994-09-06 | Cat Syst:Kk | ブラシロール・研磨研削ロール等の表面処理用ロール の制御方法及びその装置 |
JP2013142591A (ja) * | 2012-01-10 | 2013-07-22 | Disco Abrasive Syst Ltd | 混合液供給装置 |
JP2013193175A (ja) * | 2012-03-21 | 2013-09-30 | Mitsubishi Heavy Ind Ltd | 冷却装置、加工装置、および、冷却油流量決定方法 |
CN118514006A (zh) * | 2024-07-23 | 2024-08-20 | 鲁冉光电(微山)有限公司 | 一种光学镜片加工清洁装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2527910Y2 (ja) | 1997-03-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |