JPH04291742A - Supplier of slender chip - Google Patents

Supplier of slender chip

Info

Publication number
JPH04291742A
JPH04291742A JP3056581A JP5658191A JPH04291742A JP H04291742 A JPH04291742 A JP H04291742A JP 3056581 A JP3056581 A JP 3056581A JP 5658191 A JP5658191 A JP 5658191A JP H04291742 A JPH04291742 A JP H04291742A
Authority
JP
Japan
Prior art keywords
chip
elongated
wafer
chips
pins
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3056581A
Other languages
Japanese (ja)
Other versions
JP3313121B2 (en
Inventor
Keizo Akiyoshi
秋吉 敬三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5658191A priority Critical patent/JP3313121B2/en
Publication of JPH04291742A publication Critical patent/JPH04291742A/en
Application granted granted Critical
Publication of JP3313121B2 publication Critical patent/JP3313121B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To surely thrust up slender chips such as LED chips by thrust pins of a die ejector. CONSTITUTION:Slender chips P on a wafer 1 are observed by a camera 16 to detect their positional shifts in the rotational direction. Next, a plurality of thrust pins 9 provided on a die ejector 4 are rotated by gears 13,14 and a motor 15 as rotating means to run along the longitudinal direction of chips P, which are thrust up by these pins 9 and picked up onto a transfer head 20.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は細長チップの供給装置に
係り、LEDチップのような細長チップを複数本の突き
上げピンにより確実に突き上げて、移載ヘッドに供給で
きるようにしたものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a feeding device for elongated chips, which allows elongated chips such as LED chips to be reliably pushed up using a plurality of push-up pins and fed to a transfer head.

【0002】0002

【従来の技術】ウェハーに装備されたチップをリードフ
レームなどの基板に搭載する場合、ダイエジェクタの突
き上げピンにより、ウェハー上のチップを突き上げ、こ
のチップを移載ヘッドのノズルに吸着してピックアップ
し、基板に移送搭載するようになっている。
[Prior Art] When chips mounted on a wafer are mounted on a substrate such as a lead frame, the chips on the wafer are pushed up using the push-up pins of a die ejector, and the chips are picked up by being attracted to the nozzle of a transfer head. , to be transferred and mounted on the board.

【0003】0003

【発明が解決しようとする課題】ところで、LEDチッ
プなどの細長チップを上記突き上げピンにより突き上げ
る場合、細長チップが回転方向にわずかでも位置ずれし
ていると、ピンはこのチップからはずれ、このチップを
突き上げることはできない。因みに、LEDチップのサ
イズは、例えばタテ30mm、ヨコ0.5mmである。
[Problems to be Solved by the Invention] By the way, when pushing up an elongated chip such as an LED chip using the push-up pin, if the elongated chip is even slightly misaligned in the rotational direction, the pin will come off the chip and the chip will be pushed up. You can't push it up. Incidentally, the size of the LED chip is, for example, 30 mm vertically and 0.5 mm horizontally.

【0004】そこで本発明は、LEDチップのような細
長チップを確実に突き上げて、移載ヘッドに供給するこ
とができる細長チップの供給装置を提供することを目的
とする。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an elongated chip supply device that can reliably push up elongated chips such as LED chips and supply them to a transfer head.

【0005】[0005]

【課題を解決するための手段】本発明は、細長チップを
備えたウェハーと、このウェハーの下方にあって、この
細長チップを突き上げるダイエジェクタと、この細長チ
ップを上方から観察するカメラとがあり、上記ダイエジ
ェクタが上記細長チップの長さ方向に沿う複数本の突き
上げピンを有するペパーポットを備え、且つ上記カメラ
の観察結果に基づいて、このペパーポットを上記細長チ
ップに対して相対的に水平回転させる回転手段を設けた
ものである。
[Means for Solving the Problems] The present invention includes a wafer having an elongated chip, a die ejector located below the wafer and pushing up the elongated chip, and a camera for observing the elongated chip from above. , the die ejector is provided with a pepper pot having a plurality of push-up pins along the length of the elongated chip, and based on the observation result of the camera, the pepper pot is moved horizontally relative to the elongated chip. It is equipped with a rotating means for rotating.

【0006】[0006]

【作用】上記構成において、突き上げピンによりウェハ
ー上の細長チップを突き上げるに先立ち、このチップを
カメラにより観察して、その回転方向の位置ずれを検出
する。
[Operation] In the above structure, before the elongated chip on the wafer is pushed up by the push-up pin, the chip is observed with a camera to detect any positional deviation in the rotational direction.

【0007】次いでペパーポットをこのチップに対して
相対的に水平回転させて、複数本のピンを細長チップの
長さ方向に沿わせたうえで、ピンによりこのチップを突
き上げ、移載ヘッドにピックアップさせる。
Next, the pepperpot is horizontally rotated relative to the chip, the plurality of pins are aligned along the length of the long and thin chip, and the chip is pushed up by the pins and picked up by the transfer head. let

【0008】[0008]

【実施例】次に、図面を参照しながら本発明の実施例を
説明する。
Embodiments Next, embodiments of the present invention will be described with reference to the drawings.

【0009】図1は細長チップの供給装置の全体図であ
る。1はウェハーであり、台板2に保持されている。ウ
ェハー1上には、LEDチップのような細長チップPが
貼着されている。台板2はXYテーブル3に支持されて
おり、XY方向へ移動する。
FIG. 1 is an overall view of an elongated chip supply device. A wafer 1 is held on a base plate 2. On the wafer 1, an elongated chip P such as an LED chip is adhered. The base plate 2 is supported by an XY table 3 and moves in the XY direction.

【0010】4はウェハー1の下方に設けられたダイエ
ジェクタであって、ペパーポット5と、このペパーポッ
ト5の頭部に装着されたキャップ6を有している。
A die ejector 4 is provided below the wafer 1 and has a pepper pot 5 and a cap 6 attached to the head of the pepper pot 5.

【0011】図2に示すように、ペパーポット5の内部
には、昇降杆7が収納されている。昇降杆7の上部には
、台座8が装着されており、この台座8には突き上げピ
ン9が複数本立設されている。
As shown in FIG. 2, a lifting rod 7 is housed inside the pepper pot 5. A pedestal 8 is attached to the upper part of the lifting rod 7, and a plurality of push-up pins 9 are erected on the pedestal 8.

【0012】このピン9は、細長チップPの長さ方向に
沿うように、直線上に並設されており、これに対応して
、上記キャップ6には複数個のピン孔10が直線上に開
孔されている(図1も参照)。11は昇降杆7の弾発用
コイルばね、12は突き上げ杆である。図示しない駆動
手段に駆動されて、突き上げ杆12が昇降すると、昇降
杆7も昇降し、ピン9はピン孔10から突没する。
The pins 9 are arranged in a straight line along the length of the elongated chip P. Correspondingly, the cap 6 has a plurality of pin holes 10 arranged in a straight line. perforated (see also Figure 1). 11 is a spring coil spring for the lifting rod 7, and 12 is a thrusting rod. When the lifting rod 12 is raised and lowered by being driven by a drive means (not shown), the lifting rod 7 is also raised and lowered, and the pin 9 is projected and retracted from the pin hole 10.

【0013】13はペパーポット5の下部に装着された
ギヤ、14はこのギヤ13に係合するギヤ、15はモー
タである。モータ15が駆動すると、ペパーポット5は
その軸心線を中心に水平回転する。
13 is a gear attached to the lower part of the pepper pot 5, 14 is a gear that engages with this gear 13, and 15 is a motor. When the motor 15 is driven, the pepper pot 5 horizontally rotates about its axis.

【0014】図1において、16はウェハー1の上方に
設けられたカメラであり、細長チップPを観察する。2
0は移載ヘッドであって、ノズル21を有している。こ
のノズル21の下端部には吸着体22が設けられている
。図4に示すように、吸着体22の下面には細長の吸着
部23が設けられており、この吸着部23には、細長チ
ップPに沿うように、複数個の吸着孔24が直線上に開
孔されている。
In FIG. 1, a camera 16 is provided above the wafer 1 and observes the elongated chip P. 2
0 is a transfer head and has a nozzle 21. An adsorbent 22 is provided at the lower end of this nozzle 21 . As shown in FIG. 4, an elongated adsorption section 23 is provided on the lower surface of the adsorption body 22, and a plurality of adsorption holes 24 are formed in a straight line along the elongated chip P in this adsorption section 23. It has been drilled.

【0015】この装置は上記のような構成より成り、次
に動作の説明を行う。ウェハー1上のチップPを移載ヘ
ッド20でピックアップするに先立ち、カメラ16でこ
のチップPを観察して、回転方向の位置ずれを検出する
This device has the above-mentioned configuration, and its operation will be explained next. Before the chip P on the wafer 1 is picked up by the transfer head 20, the chip P is observed by the camera 16 to detect a positional shift in the rotational direction.

【0016】図3実線に示すように、チップPに位置ず
れがない場合は、そのままピン9を突出させてチップP
を突き上げる。また図3鎖線に示すように、チップPに
回転方向の位置ずれがある場合は、モータ15を駆動し
てペパーポット5を回転させ、複数本のピン9を細長チ
ップPの長さ方向に沿わせたうえで、ピン9を突出させ
てチップPを突き上げ、移載ヘッド20にピックアップ
させる。
As shown by the solid line in FIG.
Push up. Further, as shown by the chain line in FIG. 3, if there is a positional deviation in the rotational direction of the chip P, the motor 15 is driven to rotate the pepper pot 5 and the plurality of pins 9 are moved along the length direction of the elongated chip P. Then, the pin 9 is made to protrude to push up the chip P, and the transfer head 20 picks it up.

【0017】なお上記実施例では、ペパーポット5を回
転させているが、ウェハー1を水平回転させて、ピン9
をチップPの長さ方向に沿わせるようにしてもよい。
In the above embodiment, the pepper pot 5 is rotated, but the wafer 1 is rotated horizontally and the pin 9 is rotated.
may be arranged along the length direction of the chip P.

【0018】[0018]

【発明の効果】以上説明したように本発明は、細長チッ
プを備えたウェハーと、このウェハーの下方にあって、
この細長チップを突き上げるダイエジェクタと、この細
長チップを上方から観察するカメラとがあり、上記ダイ
エジェクタが上記細長チップの長さ方向に沿う複数本の
突き上げピンを有するペパーポットを有し、且つ上記カ
メラの観察結果に基づいて、このペパーポットを上記細
長チップに対して相対的に水平回転させる回転手段を設
けているので、LEDチップのような細長チップを突き
上げピンにより確実に突き上げて、移載ヘッドにピック
アップさせることができる。
[Effects of the Invention] As explained above, the present invention provides a wafer having an elongated chip, a wafer below the wafer,
There is a die ejector that pushes up the elongated chip, and a camera that observes the elongated chip from above, the die ejector has a pepper pot having a plurality of push-up pins along the length direction of the elongated chip, and Based on the observation results of the camera, a rotation means is provided to horizontally rotate this pepperpot relative to the elongated chip, so elongated chips such as LED chips can be reliably pushed up with push-up pins and transferred. It can be picked up by the head.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明の細長チップの供給装置の全体図FIG. 1: Overall view of the elongated chip supply device of the present invention.

【図2
】本発明の細長チップの供給装置のピックアップ時の動
作説明のための断面図
[Figure 2
]A cross-sectional view for explaining the operation of the elongated chip supply device of the present invention during pickup.

【図3】本発明の細長チップの供給装置における要部の
平面図
FIG. 3 is a plan view of the main parts of the elongated chip supply device of the present invention.

【図4】本発明の細長チップの供給装置におけるノズル
の斜視図
FIG. 4 is a perspective view of a nozzle in the elongated chip supply device of the present invention.

【符号の説明】[Explanation of symbols]

1  ウェハー 4  ダイエジェクタ 5  ペパーポット 9  突き上げピン 13  ギヤ 14  ギヤ 15  モータ 16  カメラ 1 Wafer 4 Die ejector 5 Pepperpot 9 Push-up pin 13 Gear 14 Gear 15 Motor 16 Camera

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】細長チップを備えたウェハーと、このウェ
ハーの下方にあって、この細長チップを突き上げるダイ
エジェクタと、この細長チップを上方から観察するカメ
ラとがあり、上記ダイエジェクタが上記細長チップの長
さ方向に沿う複数本の突き上げピンを有するペパーポッ
トを備え、且つ上記カメラの観察結果に基づいて、この
ペパーポットを上記細長チップに対して相対的に水平回
転させる回転手段を設けたことを特徴とする細長チップ
の供給装置。
Claim 1: A wafer having an elongated chip; a die ejector located below the wafer that pushes up the elongated chip; and a camera that observes the elongated chip from above; a pepper pot having a plurality of push-up pins along the length direction, and a rotation means for horizontally rotating the pepper pot relative to the elongated tip based on the observation result of the camera. A feeding device for elongated chips characterized by:
JP5658191A 1991-03-20 1991-03-20 Slender chip feeder Expired - Lifetime JP3313121B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5658191A JP3313121B2 (en) 1991-03-20 1991-03-20 Slender chip feeder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5658191A JP3313121B2 (en) 1991-03-20 1991-03-20 Slender chip feeder

Publications (2)

Publication Number Publication Date
JPH04291742A true JPH04291742A (en) 1992-10-15
JP3313121B2 JP3313121B2 (en) 2002-08-12

Family

ID=13031136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5658191A Expired - Lifetime JP3313121B2 (en) 1991-03-20 1991-03-20 Slender chip feeder

Country Status (1)

Country Link
JP (1) JP3313121B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007137888A1 (en) * 2006-05-31 2007-12-06 Siemens Aktiengesellschaft Ejection unit for removing components from an essentially planar arrangement of components
CN103010510A (en) * 2012-12-10 2013-04-03 广东志成华科光电设备有限公司 Vibration-proof turning mechanism for LED (light-emitting diode) taping machines

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007137888A1 (en) * 2006-05-31 2007-12-06 Siemens Aktiengesellschaft Ejection unit for removing components from an essentially planar arrangement of components
CN103010510A (en) * 2012-12-10 2013-04-03 广东志成华科光电设备有限公司 Vibration-proof turning mechanism for LED (light-emitting diode) taping machines

Also Published As

Publication number Publication date
JP3313121B2 (en) 2002-08-12

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