JPH04291615A - Charged particle device - Google Patents

Abstract

PURPOSE:To prevent the generation of dust due to contact by using a mouse including contactless sensor for a mouse for issuing an operation instruction or the like to a charged particle device body. CONSTITUTION:An optical mouse consisting of a light emitting part and a light receiving part and capable of relatively pointing out a position on a monitor by reading out a mesh pattern or the like contactlessly or a magnetic mouse having a magnetic sensor is used for a mouse 9 to be an input device capable of executing the specification of a position on the monitor based upon input information obtained from a contactless sensor. In the case of starting a series of plotting work on a sample, an operator sets up a sample cassette to the device body 7 and selects one of switches graphically arranged on the monitor of a work station by the mouse 9 to input an operation mode or the like to the work station and start the work station 1 through a control system. Thereby the indication of coordinates on the monitor can be contactlessly executed.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a charged particle device used in a clean room, such as an electron beam lithography device, a reduction projection exposure device, and a length measurement SEM.

0002

2. Description of the Related Art In conventional devices, instructions to a computer that controls the device are often input using a dedicated or general-purpose keyboard, and stylus pens, touch panels, etc. are also used. In addition, recently, with the rapid spread of workstations and the like, workstations and the like are sometimes used to control devices, and in this case, a mouse is sometimes used as an input device. The structure of a typical mouse is
A freely rotating ball is brought into contact with axes arranged in the X and Y directions, the ball is brought into contact with, for example, a desk, etc., and rotated, and as the ball rotates, the X and Y axes that are in contact with the ball are rotated. , the amount of rotation is picked up by an encoder and replaced with a relative position on the monitor. As mentioned above,
In order to rotate the encoded X and Y axes, the desk and ball and the ball and the X and Y axes are brought into contact and rotated, so dust is generated as the ball rotates, that is, the position on the monitor is specified using the mouse. . Equipment that exposes and measures charged particles is generally placed in a clean room with a very high level of cleanliness, and a mouse used to input instructions, data, etc. to the equipment is also placed inside the clean room. There is a possibility that it will be placed in In this case, there was a problem in that the dust generated by the mouse impeded the cleanliness in the clean room.

0003

SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned problems and to prevent dust generation caused by mouse operations.

0004

[Means for solving the problem] Recently, mouse types have been equipped with a light emitting part and a light receiving part, and by reading mesh patterns etc. without contact, it is possible to indicate the relative location on the monitor. I have an optical mouse. It is also possible to configure a mouse equipped with a magnetic sensor or the like as a non-contact sensor. The present invention focuses on a mouse that applies such a non-contact sensor, and specifically uses a non-contact type mouse as an input device for an exposure and measurement device using charged particles used in a clean room. It is designed to suppress dust generation.

[0005]

[Operation] Compared to a mechanical mouse in which a ball is mechanically rotated, the non-contact type mouse has no part that comes into contact when inputting a point on a monitor, and does not generate dust due to contact. Therefore, even if input instructions to the device are performed using a mouse, the cleanliness inside the clean room will not be reduced.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIG. 1, taking an electron beam lithography apparatus as an example. FIG. 1 shows an overall block diagram of an electron beam lithography apparatus.

[0007] A workstation 1 having a monitor that controls the entire device, via a CPU interface 2,
A buffer memory 3 that temporarily stores lithography data, a lithography control system 4 that generates a signal to control the deflection of the electron beam based on the lithography data and manages the lithography sequence, and controls the movement of the stage on which the sample is mounted in conjunction with the lithography. It is connected to a stage control system 5 for transporting the sample onto the stage, a loader control system 6 for loading and unloading the sample onto the stage, a vacuum evacuation system 8 for maintaining the apparatus main body 7 in a vacuum, and a high voltage power supply 10 for generating the electron beam 11. Further, these control systems are connected to the main body 7 of the apparatus.

[0008] When starting a series of drawing operations on a sample using this electron beam drawing apparatus, the operator must:
Set the sample cassette in the main body 7 of the apparatus, then select the switches graphically arranged on the monitor of the workstation 1 with the mouse 9, input the operating mode etc. to the workstation 1, and then , starts the control system. At this time, the mouse 9 is equipped with a non-contact sensor, such as an optical mouse, and has a configuration that allows coordinates to be indicated on the monitor without contact, so that the mouse 9 can be configured to be able to indicate coordinates on the monitor without contact. Prevent dust.

According to one embodiment of the present invention, a mouse, which is generally considered to have the best human interface as an input device for a computer, can be used in a clean room, and it is possible to use it in a clean room without interfering with making the clean room dust-free. figure,
The operating efficiency of the device can be improved.

0010

[Effect of the invention] According to the present invention, in a clean room,
For equipment that exposes and measures samples using charged particles, the mouse, which is generally rated as having the best human interface, can be used without creating dust in the clean room, improving the operability of the equipment. do.

[Brief explanation of the drawing]

FIG. 1 is a schematic block diagram showing one embodiment of the present invention using an electron beam lithography apparatus.

[Explanation of symbols]

1...workstation, 9...mouse.

Claims (1)

[Claims] Claim 1: A sample such as a wafer or mask coated with a photosensitive agent, a stage on which the sample is mounted, a photosensitive agent on the sample is exposed to form an LSI pattern on the sample, or an already created pattern on the sample. from a control computer having a charged particle source for observing the charged particle source, the stage, a control section for controlling the charged particle source, a monitor for managing the main control section, and a mouse as a pointing device for pointing on the monitor and inputting instructions. An optical mouse, a magnetic mouse with a magnetic sensor, which consists of a light emitting part and a light receiving part, and can indicate the relative location on the monitor by reading mesh patterns etc. without contact. A charged particle device characterized by having a mouse as an input device capable of specifying a position on a monitor using input information from a built-in non-contact sensor.