JPH04288471A - Drying device - Google Patents

Abstract

PURPOSE:To make heating by heater after blowing nitrogen gas unnecessary and shorten drying time by a method wherein a heating source and a fluid discharging port are provided on the level of medium solution, in a drying device, in which matters to be washed are pulled up after dipping them into heated medium after washing. CONSTITUTION:A washed aluminum substrate 1 is pulled up from the level of pure water and dipped into the hot pure water 7 in a drying tank 3 silently whereby the aluminum substrate 1 is heated to a temperature higher than at least 80 deg.C. After heating, the aluminum substrate 1 is pulled up silently, however, hot pure water 7 is adhered to the aluminum substrate 1 as the thin film of the same. Subsequently, the aluminum substrate 1 is heated by an infrared ray heater 9, whose output density is at least 50kW/m<2>, to provide with heat more than the latent heat of evaporation of the adhered water, then, heated nitrogen is blown against the aluminum substrate 1 from a blow nozzle 4 to evaporate the adhered water. According to this method, the aluminum substrate 1 can be dried within a short period of time without producing any stain due to evaporation.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention relates to drying after cleaning, and particularly relates to glass substrates for liquid crystals, aluminum substrates for magnetic disks,
Involved in drying glass substrates for optical discs.

0002

[Prior art] In the prior art, Japanese Patent Application Laid-Open No. 1-3742
As described, the object to be cleaned was immersed in a tank to which heated pure water was supplied, then the object was pulled up and further heated with a heater to dry it.

0003

In the prior art shown in FIG. 2, drying was carried out by blowing heated nitrogen from a blow nozzle 4 while lifting the material from the drying tank 3, and then heating it with a heater. However, since a thin object to be cleaned such as the glass substrate 1 has a small heat capacity compared to its surface area, when the adhering water evaporates from the surface by blowing, the latent heat of evaporation is taken away and the substrate temperature decreases, so that the adhering water does not evaporate. Once this is sufficient, it is necessary to heat the remaining adhering water with a heater and dry it. Therefore, there are problems in that the drying time becomes long and dry stains are likely to occur.

0004

[Means for Solving the Problems] The present invention heats the substrate 1 with an infrared heater 9 before drying it by blowing,
The goal is to provide sufficient heat.

[0005]

[Function] By applying heat greater than the amount of heat required to evaporate the water adhering to the substrate 1 with the infrared heater 9, the adhering water can be dried by blowing nitrogen from the blow nozzle 4, and the adhering water can be dried on the substrate 1. It can prevent stains from forming.

[0006]

[Embodiment] An embodiment of the present invention will be explained below with reference to FIG.

The drying tank 3 has a volume sufficient to immerse the aluminum substrate 1, and is made of a material that does not elute and contaminate pure water. For example, it is made of quartz, but stainless steel with a mirror finish can also be used. The drying tank 3 is equipped with a supply port 5 for supplying warm pure water 7. The pure water 8 is heated by the pure water heater 6 and becomes warm pure water 7. The temperature of the warm pure water 7 is at least 80 degrees or higher, for example 90 degrees.

An infrared heater 9 and a blow nozzle 4 are provided above the pure water level 2. The output density of the infrared heater 9 is at least 50 kW/m2. Also,
The nitrogen gas blown out from the blow nozzle 4 is at least 100 degrees or higher and at a rate of 20 liters/min or higher, and has a temperature of 5.25
In the case of an inch aluminum board, for example, 150 degrees, 5
0 liter/min.

After cleaning, the aluminum substrate 1 is gently immersed in warm pure water 7 in a drying tank 3 from the pure water level 2 . As an example, it is lowered at a speed of 50 mm/sec. The aluminum substrate 1 is heated with warm pure water 7 to a temperature of at least 80 degrees. After heating, the aluminum substrate 1 is gently pulled up. As an example, it is pulled up at a speed of 10 mm/sec. lifted up,
When passing through the pure water surface 2, the warm pure water 7 adheres to the aluminum substrate 1 as a thin film. Furthermore, the aluminum substrate 1 is heated by an infrared heater 9 and receives heat greater than the latent heat of vaporization of the attached water. Thereafter, the aluminum substrate 1 is blown with heated nitrogen from the blow nozzle 4 to evaporate the attached water. In this embodiment, by passing through the blow nozzle 4, the water adhering to the aluminum substrate 1 can be dried without creating dry stains.

0010

According to the present invention, heating with a heater after nitrogen blowing becomes unnecessary, making it possible to shorten the drying time. In addition, since it can be dried without creating dry stains, cleaning,
It is possible to achieve various desired performances without changing the uniformity or characteristics of the thin film in the film forming process after drying.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a drying device according to an embodiment of the present invention.

FIG. 2 is a sectional view of a drying device according to the prior art;

[Explanation of symbols]

1... Aluminum substrate, 2... Pure water level, 3... Drying tank, 4... Blow nozzle, 5... Supply port, 6... Pure water heater, 7... Warm pure water,
8...Pure water, 9...Infrared heater, 10...Heater.

Claims (7)

[Claims] 1. A drying device for cleaning an object to be cleaned, immersing it in a heated medium, and then pulling it up and drying it, the drying device comprising a heating source and a fluid discharge port above the surface of the medium. . 2. The drying apparatus according to claim 1, wherein the heating source is provided between the fluid discharge port and the liquid surface. 3. The drying apparatus according to claim 1, wherein an infrared heater is used as a heating source provided above the surface of the medium. 4. The drying apparatus according to claim 1, wherein nitrogen gas is used as a medium for the discharged fluid. 5. The drying apparatus according to claim 1, wherein the temperature of the medium discharged from the discharge port is at least 100 degrees. 6. The drying apparatus according to claim 1, wherein the flow rate of the medium discharged from the discharge port is at least 20 liters/minute or more. 7. The infrared heater has a power density of at least 50
The drying apparatus according to any one of claims 1 to 6, characterized in that the drying capacity is kW/m2 or more.