JPH0428710Y2 - - Google Patents
Info
- Publication number
- JPH0428710Y2 JPH0428710Y2 JP1988011803U JP1180388U JPH0428710Y2 JP H0428710 Y2 JPH0428710 Y2 JP H0428710Y2 JP 1988011803 U JP1988011803 U JP 1988011803U JP 1180388 U JP1180388 U JP 1180388U JP H0428710 Y2 JPH0428710 Y2 JP H0428710Y2
- Authority
- JP
- Japan
- Prior art keywords
- microscope
- shape
- laser
- processing
- objective lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000004075 alteration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988011803U JPH0428710Y2 (ko) | 1988-01-30 | 1988-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988011803U JPH0428710Y2 (ko) | 1988-01-30 | 1988-01-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01118892U JPH01118892U (ko) | 1989-08-11 |
| JPH0428710Y2 true JPH0428710Y2 (ko) | 1992-07-13 |
Family
ID=31220676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988011803U Expired JPH0428710Y2 (ko) | 1988-01-30 | 1988-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0428710Y2 (ko) |
-
1988
- 1988-01-30 JP JP1988011803U patent/JPH0428710Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01118892U (ko) | 1989-08-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR960005214B1 (ko) | 레이저 가공 장치 및 레이저 가공 방법 | |
| CN100395069C (zh) | 光纤的激光切断法 | |
| US20080029497A1 (en) | Laser processing device | |
| JPS63293510A (ja) | レ−ザ−照射装置 | |
| FI90285B (fi) | Optinen järjestelmä kohteen kaarevuuden muutoksen määrittämiseksi mitoiltaan pienellä alueella | |
| JP2008134468A (ja) | 集光光学系および光加工装置 | |
| JPH0428710Y2 (ko) | ||
| US6888680B2 (en) | Optical arrangement for obtaining information from a sample or an observed object | |
| JP2007025068A (ja) | 焦点検出装置 | |
| JP2001079679A (ja) | レーザ加工機 | |
| JP2009042519A (ja) | 対物レンズ | |
| JPH0290119A (ja) | レーザ描画機の集光光学装置 | |
| JPH09325277A (ja) | 焦点検出装置 | |
| JPH0556992A (ja) | 眼科光学装置 | |
| JP2699282B2 (ja) | 色収差を利用した二重焦点検出装置 | |
| JPH09159572A (ja) | 光学装置 | |
| JP2001009580A (ja) | レーザ光集光装置 | |
| JPH08220432A (ja) | 投影光学系および該光学系を備えた露光装置 | |
| JPH0370497B2 (ko) | ||
| CN220188814U (zh) | 贝塞尔光束生成装置及飞行光路切割系统 | |
| JP4723842B2 (ja) | 走査型光学顕微鏡 | |
| JPS63108318A (ja) | レ−ザ−加工装置 | |
| JPS6265327A (ja) | 位置合わせ装置 | |
| JPH10135571A (ja) | 半導体レーザの集光光学系 | |
| JP3177775B2 (ja) | 光合成方法及び合成出射光学系 |