JPH0426758Y2 - - Google Patents
Info
- Publication number
- JPH0426758Y2 JPH0426758Y2 JP1984146442U JP14644284U JPH0426758Y2 JP H0426758 Y2 JPH0426758 Y2 JP H0426758Y2 JP 1984146442 U JP1984146442 U JP 1984146442U JP 14644284 U JP14644284 U JP 14644284U JP H0426758 Y2 JPH0426758 Y2 JP H0426758Y2
- Authority
- JP
- Japan
- Prior art keywords
- opening
- disk
- cover structure
- dustproof cover
- movable member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Sealing Devices (AREA)
- Diaphragms And Bellows (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984146442U JPH0426758Y2 (enEXAMPLES) | 1984-09-27 | 1984-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984146442U JPH0426758Y2 (enEXAMPLES) | 1984-09-27 | 1984-09-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6161368U JPS6161368U (enEXAMPLES) | 1986-04-25 |
| JPH0426758Y2 true JPH0426758Y2 (enEXAMPLES) | 1992-06-26 |
Family
ID=30704678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984146442U Expired JPH0426758Y2 (enEXAMPLES) | 1984-09-27 | 1984-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0426758Y2 (enEXAMPLES) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5939233Y2 (ja) * | 1977-06-08 | 1984-11-01 | 富士重工業株式会社 | 車両用自動変速装置におけるガバナ駆動装置 |
-
1984
- 1984-09-27 JP JP1984146442U patent/JPH0426758Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6161368U (enEXAMPLES) | 1986-04-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6784418B2 (en) | Semiconductor processing tool alignment technique implemented in a FIMS system | |
| US5149043A (en) | Turntable device | |
| KR960007114A (ko) | 가변 원격탄성중심기기(vrcc) | |
| US4897015A (en) | Rotary to linear motion robot arm | |
| US5267106A (en) | System for clamping a plurality of disks to a hub | |
| EP1147863A2 (en) | Vertically telescopic robot | |
| US6152680A (en) | Wafer cassette rotation mechanism | |
| JP2003524881A (ja) | エッジグリッピングエンドエフェクタウエーハハンドリング装置 | |
| US5609079A (en) | Socket mechanism having flexible coupling therein used with vertical type powered bolt/nut driving apparatus | |
| KR950703788A (ko) | 웨이퍼 매거진 운반장치 | |
| JPH0426758Y2 (enEXAMPLES) | ||
| US6273237B1 (en) | Rotating shuttle payload platform | |
| JP7111615B2 (ja) | 液体クロマトグラフィシステム用の液体フラクションコレクタ | |
| US4813845A (en) | Object transport apparatus | |
| JP2003338532A (ja) | 基板ハンドリング装置 | |
| CN209175745U (zh) | 一种具有自适应能力的六自由度机器人 | |
| US288408A (en) | Portable turn-table | |
| CN205889229U (zh) | 自动夹持机械手爪 | |
| JPH05198659A (ja) | プラズマ処理装置 | |
| DE60019713T2 (de) | Robotische greifvorrichtung zum greifen von werkstücken mit einem an der oberseite angeortneten handgriff | |
| WO2020088361A1 (zh) | 无人搬运车及举升机构 | |
| CN117124103B (zh) | 一种阀体法兰面加工用自动紧固机构 | |
| GB2129674A (en) | Shelving | |
| JPH0337879Y2 (enEXAMPLES) | ||
| CN206218711U (zh) | 内藏式移动平台 |