JPH0426528U - - Google Patents

Info

Publication number
JPH0426528U
JPH0426528U JP6764290U JP6764290U JPH0426528U JP H0426528 U JPH0426528 U JP H0426528U JP 6764290 U JP6764290 U JP 6764290U JP 6764290 U JP6764290 U JP 6764290U JP H0426528 U JPH0426528 U JP H0426528U
Authority
JP
Japan
Prior art keywords
susceptor
heater
reactor
cylindrical
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6764290U
Other languages
English (en)
Japanese (ja)
Other versions
JP2514677Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990067642U priority Critical patent/JP2514677Y2/ja
Publication of JPH0426528U publication Critical patent/JPH0426528U/ja
Application granted granted Critical
Publication of JP2514677Y2 publication Critical patent/JP2514677Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1990067642U 1990-06-26 1990-06-26 薄膜気相成長装置 Expired - Fee Related JP2514677Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990067642U JP2514677Y2 (ja) 1990-06-26 1990-06-26 薄膜気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990067642U JP2514677Y2 (ja) 1990-06-26 1990-06-26 薄膜気相成長装置

Publications (2)

Publication Number Publication Date
JPH0426528U true JPH0426528U (ko) 1992-03-03
JP2514677Y2 JP2514677Y2 (ja) 1996-10-23

Family

ID=31601391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990067642U Expired - Fee Related JP2514677Y2 (ja) 1990-06-26 1990-06-26 薄膜気相成長装置

Country Status (1)

Country Link
JP (1) JP2514677Y2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016189429A (ja) * 2015-03-30 2016-11-04 大陽日酸株式会社 高温加熱装置、気相成長装置、及び気相成長方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62118519A (ja) * 1985-11-19 1987-05-29 Mitsubishi Electric Corp 半導体基板加熱装置
JPS63196033A (ja) * 1987-02-09 1988-08-15 Fujitsu Ltd 気相成長装置
JPS63278322A (ja) * 1987-05-11 1988-11-16 Fujitsu Ltd 気相成長装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62118519A (ja) * 1985-11-19 1987-05-29 Mitsubishi Electric Corp 半導体基板加熱装置
JPS63196033A (ja) * 1987-02-09 1988-08-15 Fujitsu Ltd 気相成長装置
JPS63278322A (ja) * 1987-05-11 1988-11-16 Fujitsu Ltd 気相成長装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016189429A (ja) * 2015-03-30 2016-11-04 大陽日酸株式会社 高温加熱装置、気相成長装置、及び気相成長方法

Also Published As

Publication number Publication date
JP2514677Y2 (ja) 1996-10-23

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees