JPH0426081U - - Google Patents

Info

Publication number

JPH0426081U

JPH0426081U JP6564490U JP6564490U JPH0426081U JP H0426081 U JPH0426081 U JP H0426081U JP 6564490 U JP6564490 U JP 6564490U JP 6564490 U JP6564490 U JP 6564490U JP H0426081 U JPH0426081 U JP H0426081U

Authority

JP

Japan

Prior art keywords

fluorocarbon

tank

liquid

cooling coil

water separation

Prior art date

1990-06-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000007788 liquid Substances 0.000 claims description 38
• NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 25
• 238000001816 cooling Methods 0.000 claims description 16
• 239000002699 waste material Substances 0.000 claims description 16
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
• 238000004140 cleaning Methods 0.000 claims description 10
• 238000000926 separation method Methods 0.000 claims description 10
• 238000004821 distillation Methods 0.000 claims description 8
• 238000011084 recovery Methods 0.000 claims description 7
• 238000005057 refrigeration Methods 0.000 claims description 4
• 238000001704 evaporation Methods 0.000 claims description 2
• 230000004907 flux Effects 0.000 claims description 2
• 238000010438 heat treatment Methods 0.000 claims description 2
• 230000001172 regenerating effect Effects 0.000 claims 1
• 230000008929 regeneration Effects 0.000 description 4
• 238000011069 regeneration method Methods 0.000 description 4
• 238000010586 diagram Methods 0.000 description 2
• 238000004506 ultrasonic cleaning Methods 0.000 description 2

Cited By (1)