JPH0426080U - - Google Patents
Info
- Publication number
- JPH0426080U JPH0426080U JP6690590U JP6690590U JPH0426080U JP H0426080 U JPH0426080 U JP H0426080U JP 6690590 U JP6690590 U JP 6690590U JP 6690590 U JP6690590 U JP 6690590U JP H0426080 U JPH0426080 U JP H0426080U
- Authority
- JP
- Japan
- Prior art keywords
- drive shaft
- basket
- bearing
- cleaning
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 8
- 239000007921 spray Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990066905U JPH086556Y2 (ja) | 1990-06-25 | 1990-06-25 | 軸受洗浄装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990066905U JPH086556Y2 (ja) | 1990-06-25 | 1990-06-25 | 軸受洗浄装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0426080U true JPH0426080U (enrdf_load_stackoverflow) | 1992-03-02 |
JPH086556Y2 JPH086556Y2 (ja) | 1996-02-28 |
Family
ID=31600015
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990066905U Expired - Lifetime JPH086556Y2 (ja) | 1990-06-25 | 1990-06-25 | 軸受洗浄装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH086556Y2 (enrdf_load_stackoverflow) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59144136A (ja) * | 1983-02-08 | 1984-08-18 | Dainippon Screen Mfg Co Ltd | ウエハの回転形洗浄乾燥装置 |
JPH01179422A (ja) * | 1988-01-08 | 1989-07-17 | Shimada Phys & Chem Ind Co Ltd | 両面洗浄装置 |
-
1990
- 1990-06-25 JP JP1990066905U patent/JPH086556Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59144136A (ja) * | 1983-02-08 | 1984-08-18 | Dainippon Screen Mfg Co Ltd | ウエハの回転形洗浄乾燥装置 |
JPH01179422A (ja) * | 1988-01-08 | 1989-07-17 | Shimada Phys & Chem Ind Co Ltd | 両面洗浄装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH086556Y2 (ja) | 1996-02-28 |