JPH042346Y2 - - Google Patents

Info

Publication number
JPH042346Y2
JPH042346Y2 JP16409187U JP16409187U JPH042346Y2 JP H042346 Y2 JPH042346 Y2 JP H042346Y2 JP 16409187 U JP16409187 U JP 16409187U JP 16409187 U JP16409187 U JP 16409187U JP H042346 Y2 JPH042346 Y2 JP H042346Y2
Authority
JP
Japan
Prior art keywords
clean room
ceiling
clean
filter
ceiling chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16409187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0170042U (US06818201-20041116-C00086.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16409187U priority Critical patent/JPH042346Y2/ja
Publication of JPH0170042U publication Critical patent/JPH0170042U/ja
Application granted granted Critical
Publication of JPH042346Y2 publication Critical patent/JPH042346Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP16409187U 1987-10-27 1987-10-27 Expired JPH042346Y2 (US06818201-20041116-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16409187U JPH042346Y2 (US06818201-20041116-C00086.png) 1987-10-27 1987-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16409187U JPH042346Y2 (US06818201-20041116-C00086.png) 1987-10-27 1987-10-27

Publications (2)

Publication Number Publication Date
JPH0170042U JPH0170042U (US06818201-20041116-C00086.png) 1989-05-10
JPH042346Y2 true JPH042346Y2 (US06818201-20041116-C00086.png) 1992-01-27

Family

ID=31449394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16409187U Expired JPH042346Y2 (US06818201-20041116-C00086.png) 1987-10-27 1987-10-27

Country Status (1)

Country Link
JP (1) JPH042346Y2 (US06818201-20041116-C00086.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3911904B2 (ja) 1999-04-21 2007-05-09 株式会社日立プラントテクノロジー クリーンルーム構造
WO2001007843A1 (fr) * 1999-07-26 2001-02-01 Hitachi Plant Engineering & Construction Co., Ltd. Dispositif de nettoyage d'une chambre

Also Published As

Publication number Publication date
JPH0170042U (US06818201-20041116-C00086.png) 1989-05-10

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