JPH0423318Y2 - - Google Patents
Info
- Publication number
- JPH0423318Y2 JPH0423318Y2 JP13712584U JP13712584U JPH0423318Y2 JP H0423318 Y2 JPH0423318 Y2 JP H0423318Y2 JP 13712584 U JP13712584 U JP 13712584U JP 13712584 U JP13712584 U JP 13712584U JP H0423318 Y2 JPH0423318 Y2 JP H0423318Y2
- Authority
- JP
- Japan
- Prior art keywords
- lifting
- guide
- wafer support
- elevating
- guide bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003028 elevating effect Effects 0.000 claims description 28
- 238000001947 vapour-phase growth Methods 0.000 claims description 11
- 235000012431 wafers Nutrition 0.000 description 29
- 239000007789 gas Substances 0.000 description 7
- 238000002791 soaking Methods 0.000 description 6
- 238000010926 purge Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13712584U JPH0423318Y2 (OSRAM) | 1984-09-10 | 1984-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13712584U JPH0423318Y2 (OSRAM) | 1984-09-10 | 1984-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6151731U JPS6151731U (OSRAM) | 1986-04-07 |
| JPH0423318Y2 true JPH0423318Y2 (OSRAM) | 1992-05-29 |
Family
ID=30695542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13712584U Expired JPH0423318Y2 (OSRAM) | 1984-09-10 | 1984-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0423318Y2 (OSRAM) |
-
1984
- 1984-09-10 JP JP13712584U patent/JPH0423318Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6151731U (OSRAM) | 1986-04-07 |
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