Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
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Filing date
Publication date
Application filed by Agency of Industrial Science and TechnologyfiledCriticalAgency of Industrial Science and Technology
Priority to JP26995485ApriorityCriticalpatent/JPS62132003A/ja
Publication of JPS62132003ApublicationCriticalpatent/JPS62132003A/ja
Publication of JPH0423123B2publicationCriticalpatent/JPH0423123B2/ja