JPH0422983B2 - - Google Patents

Info

Publication number
JPH0422983B2
JPH0422983B2 JP59021203A JP2120384A JPH0422983B2 JP H0422983 B2 JPH0422983 B2 JP H0422983B2 JP 59021203 A JP59021203 A JP 59021203A JP 2120384 A JP2120384 A JP 2120384A JP H0422983 B2 JPH0422983 B2 JP H0422983B2
Authority
JP
Japan
Prior art keywords
film
sputtering
gas
etching
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59021203A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60165788A (ja
Inventor
Toshiaki Wada
Yoshiaki Katsuyama
Koji Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Special Metals Co Ltd filed Critical Sumitomo Special Metals Co Ltd
Priority to JP2120384A priority Critical patent/JPS60165788A/ja
Publication of JPS60165788A publication Critical patent/JPS60165788A/ja
Publication of JPH0422983B2 publication Critical patent/JPH0422983B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • C04B41/5031—Alumina

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Formation Of Insulating Films (AREA)
JP2120384A 1984-02-07 1984-02-07 薄膜磁気ヘッド用Ａｌ↓２Ｏ↓３被膜の形成方法 Granted JPS60165788A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2120384A JPS60165788A (ja) 1984-02-07 1984-02-07 薄膜磁気ヘッド用Ａｌ↓２Ｏ↓３被膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2120384A JPS60165788A (ja) 1984-02-07 1984-02-07 薄膜磁気ヘッド用Ａｌ↓２Ｏ↓３被膜の形成方法

Publications (2)

Publication Number Publication Date
JPS60165788A JPS60165788A (ja) 1985-08-28
JPH0422983B2 true JPH0422983B2 (oth) 1992-04-21

Family

ID=12048418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2120384A Granted JPS60165788A (ja) 1984-02-07 1984-02-07 薄膜磁気ヘッド用Ａｌ↓２Ｏ↓３被膜の形成方法

Country Status (1)

Country Link
JP (1) JPS60165788A (oth)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5569254A (en) * 1978-11-17 1980-05-24 Yoichi Murayama Coloring method for metal surface
JPS6047905B2 (ja) * 1980-07-14 1985-10-24 ユニヴア−シテイ・オブ・シドニ− 基体上に勾配付表面被覆を反応的にスパツタ−する方法および装置

Also Published As

Publication number Publication date
JPS60165788A (ja) 1985-08-28

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term