JPH0422635B2 - - Google Patents
Info
- Publication number
- JPH0422635B2 JPH0422635B2 JP63049574A JP4957488A JPH0422635B2 JP H0422635 B2 JPH0422635 B2 JP H0422635B2 JP 63049574 A JP63049574 A JP 63049574A JP 4957488 A JP4957488 A JP 4957488A JP H0422635 B2 JPH0422635 B2 JP H0422635B2
- Authority
- JP
- Japan
- Prior art keywords
- ion exchange
- water
- ultrapure water
- exchange resin
- toc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 43
- 239000012498 ultrapure water Substances 0.000 claims description 43
- 238000005342 ion exchange Methods 0.000 claims description 30
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 29
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 claims description 22
- 239000003729 cation exchange resin Substances 0.000 claims description 19
- 230000002378 acidificating effect Effects 0.000 claims description 18
- 239000003957 anion exchange resin Substances 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 239000011347 resin Substances 0.000 claims description 10
- 229920005989 resin Polymers 0.000 claims description 10
- 239000003456 ion exchange resin Substances 0.000 claims description 9
- 229920003303 ion-exchange polymer Polymers 0.000 claims description 9
- 238000011071 total organic carbon measurement Methods 0.000 description 29
- 239000012535 impurity Substances 0.000 description 5
- 239000012528 membrane Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000001223 reverse osmosis Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 150000001450 anions Chemical class 0.000 description 2
- 229940023913 cation exchange resins Drugs 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003673 groundwater Substances 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- -1 sodium and calcium Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000008399 tap water Substances 0.000 description 2
- 235000020679 tap water Nutrition 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000001112 coagulating effect Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000005189 flocculation Methods 0.000 description 1
- 230000016615 flocculation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000008235 industrial water Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000012607 strong cation exchange resin Substances 0.000 description 1
- 238000000108 ultra-filtration Methods 0.000 description 1
Landscapes
- Treatment Of Water By Ion Exchange (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4957488A JPH01224090A (ja) | 1988-03-04 | 1988-03-04 | 超純水の製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4957488A JPH01224090A (ja) | 1988-03-04 | 1988-03-04 | 超純水の製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01224090A JPH01224090A (ja) | 1989-09-07 |
| JPH0422635B2 true JPH0422635B2 (fi) | 1992-04-20 |
Family
ID=12834982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4957488A Granted JPH01224090A (ja) | 1988-03-04 | 1988-03-04 | 超純水の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01224090A (fi) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0696147B2 (ja) * | 1989-05-15 | 1994-11-30 | 東京有機化学工業株式会社 | イオン交換樹脂組成物を用いた超純水の製造法 |
| JP2007160231A (ja) * | 2005-12-14 | 2007-06-28 | Japan Organo Co Ltd | 超純水システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53149873A (en) * | 1977-06-03 | 1978-12-27 | Kurita Water Ind Ltd | Preparatin of ultra-pure water |
-
1988
- 1988-03-04 JP JP4957488A patent/JPH01224090A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53149873A (en) * | 1977-06-03 | 1978-12-27 | Kurita Water Ind Ltd | Preparatin of ultra-pure water |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01224090A (ja) | 1989-09-07 |
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