JPH0422443B2 - - Google Patents

Info

Publication number
JPH0422443B2
JPH0422443B2 JP26854185A JP26854185A JPH0422443B2 JP H0422443 B2 JPH0422443 B2 JP H0422443B2 JP 26854185 A JP26854185 A JP 26854185A JP 26854185 A JP26854185 A JP 26854185A JP H0422443 B2 JPH0422443 B2 JP H0422443B2
Authority
JP
Japan
Prior art keywords
measured
sample
optical system
shape measuring
splitting prism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP26854185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62127618A (ja
Inventor
Toshihiko Waza
Masahito Nakajima
Jushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP26854185A priority Critical patent/JPS62127618A/ja
Publication of JPS62127618A publication Critical patent/JPS62127618A/ja
Publication of JPH0422443B2 publication Critical patent/JPH0422443B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP26854185A 1985-11-29 1985-11-29 表面形状測定装置 Granted JPS62127618A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26854185A JPS62127618A (ja) 1985-11-29 1985-11-29 表面形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26854185A JPS62127618A (ja) 1985-11-29 1985-11-29 表面形状測定装置

Publications (2)

Publication Number Publication Date
JPS62127618A JPS62127618A (ja) 1987-06-09
JPH0422443B2 true JPH0422443B2 (cs) 1992-04-17

Family

ID=17459957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26854185A Granted JPS62127618A (ja) 1985-11-29 1985-11-29 表面形状測定装置

Country Status (1)

Country Link
JP (1) JPS62127618A (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6416904A (en) * 1987-07-10 1989-01-20 Fujitsu Ltd Inspection instrument for surface waviness
JPH02140608A (ja) * 1988-11-21 1990-05-30 Fujitsu Ltd 表面形状測定装置
US5278635A (en) * 1990-03-28 1994-01-11 Konica Corporation Surface defect detection apparatus
KR100488305B1 (ko) * 2002-03-21 2005-05-11 주식회사 새 미 비접촉식 휴대용 표면거칠기 측정장치

Also Published As

Publication number Publication date
JPS62127618A (ja) 1987-06-09

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