JPH04218669A - Wear resistant ti or ti-base alloy member excellent in lubricity - Google Patents
Wear resistant ti or ti-base alloy member excellent in lubricityInfo
- Publication number
- JPH04218669A JPH04218669A JP41221890A JP41221890A JPH04218669A JP H04218669 A JPH04218669 A JP H04218669A JP 41221890 A JP41221890 A JP 41221890A JP 41221890 A JP41221890 A JP 41221890A JP H04218669 A JPH04218669 A JP H04218669A
- Authority
- JP
- Japan
- Prior art keywords
- base alloy
- layer
- lubricity
- alloy member
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 16
- 239000000956 alloy Substances 0.000 title claims abstract description 16
- 150000002500 ions Chemical class 0.000 claims abstract description 16
- 239000010410 layer Substances 0.000 claims abstract description 16
- 239000002344 surface layer Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 abstract description 16
- 239000000463 material Substances 0.000 description 13
- 238000005468 ion implantation Methods 0.000 description 11
- 238000007747 plating Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000007943 implant Substances 0.000 description 4
- 238000004381 surface treatment Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 229910052961 molybdenite Inorganic materials 0.000 description 3
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 3
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000000576 coating method Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000002335 surface treatment layer Substances 0.000 description 2
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
Landscapes
- Sliding-Contact Bearings (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は、潤滑性に優れた耐摩耗
性Ti又はTi基合金部材に関し、特に耐摩耗性および
潤滑性等を高めることにより摺動機械部品等としても利
用できる様にしたTi又はTi基合金部材に関するもの
である。尚以下の説明ではTiを代表的にとりあげるが
、本発明は種々のTi基合金に対して同様に適用するこ
とができる。[Industrial Application Field] The present invention relates to wear-resistant Ti or Ti-based alloy members with excellent lubricity, and in particular, by improving wear resistance and lubricity, they can be used as sliding machine parts, etc. The present invention relates to a Ti or Ti-based alloy member. In the following explanation, Ti will be taken up as a representative example, but the present invention can be similarly applied to various Ti-based alloys.
【0002】0002
【従来の技術】Tiは、高融点,軽量,高強度等の特長
を有すると共に耐腐食性にも優れており、その特長を生
かすことのできる化学プラントや原子力プラント等の分
野における需要が次第に増加している。しかるにTiは
、鋼等に比べると摩耗し易いという欠点があり、特に無
潤滑状態での摩擦係数が大きい(0.5〜0.6 )為
、例えばTiを摺動部や他金属との接触部に使用すると
焼付きの問題が生じ、このことがTiを摺動機械部品等
の材料としての使用を妨げる原因となっている。尚潤滑
剤を使用することによって摩擦係数を下げることはでき
るが、長期の使用に耐えることができず、例えば自動車
部品としての使用には適さない。[Prior Art] Ti has features such as high melting point, light weight, and high strength, as well as excellent corrosion resistance. Demand for Ti is gradually increasing in fields such as chemical plants and nuclear power plants where these features can be utilized. are doing. However, Ti has the disadvantage that it wears more easily than steel, etc., and has a high coefficient of friction (0.5 to 0.6) especially in the unlubricated state. When Ti is used in parts, the problem of seizure occurs, and this is a cause that prevents the use of Ti as a material for sliding machine parts and the like. Although the coefficient of friction can be lowered by using a lubricant, it cannot withstand long-term use and is not suitable for use as an automobile part, for example.
【0003】Tiの焼付きを防止するという観点から種
々の表面処理法が提案されており、その一例としては、
■ガス窒化法、■Crめっき法、■MoS2 コーティ
ング法等の表面処理法を挙げることができる。これらの
方法は、他の分野でそれなりの成果をあげているにもか
かわらず、Ti表面の処理法としてはいくつかの問題が
ある。例えば■ガス窒化法では極めて長い処理時間を要
するという欠点があり、また■Crめっき法の場合には
、Ti素地に対するめっき皮膜の密着性が悪いので、密
着性を高める為の前処理工程として下地めっきを施す必
要があり、工程が煩雑になると共に依然としてめっき皮
膜が剥離し易いという問題がある。さらに■MoS2
コーティング法においても表面皮膜の密着性が悪いこと
が問題点として挙げられ、MoS2 は単なる潤滑剤と
しての作用を発揮するにとどまる。[0003] Various surface treatment methods have been proposed from the viewpoint of preventing Ti seizure.
Examples of surface treatment methods include: (1) gas nitriding method, (2) Cr plating method, and (2) MoS2 coating method. Although these methods have achieved some success in other fields, they have several problems as a method for treating Ti surfaces. For example, ■Gas nitriding method has the disadvantage of requiring an extremely long processing time, and ■Cr plating method has poor adhesion of the plating film to the Ti substrate, so a pre-treatment step is required to improve the adhesion. It is necessary to perform plating, which makes the process complicated, and there is still a problem that the plating film is likely to peel off. Furthermore ■MoS2
A problem with the coating method is that the adhesion of the surface film is poor, and MoS2 merely functions as a lubricant.
【0004】0004
【発明が解決しようとする課題】本発明はこうした事情
に着目してなされたものであって、簡素な工程で短時間
に処理を完了することができ、しかもTi素地との密着
性に優れた表面処理層を形成することができるような技
術、殊にそのような表面処理層を形成することによって
得られる潤滑性および耐摩耗性の優れたTi部材を提供
することを目的とするものである。[Problems to be Solved by the Invention] The present invention has been made with attention to these circumstances, and it is an object of the present invention to achieve a process that can be completed in a short time using a simple process, and that has excellent adhesion to the Ti substrate. The purpose of the present invention is to provide a technology that can form a surface treatment layer, and in particular, to provide a Ti member with excellent lubricity and wear resistance that can be obtained by forming such a surface treatment layer. .
【0005】[0005]
【課題を解決するための手段】しかして上記目的を達成
した本発明のTi部材は、Ti(又はTi基合金)部材
の表面に、Pイオンをイオン注入し、TiまたはTi基
合金の表層部にP濃度富化層を形成したものである点に
要旨を有するものである。[Means for Solving the Problems] The Ti member of the present invention which achieves the above object is obtained by implanting P ions into the surface of the Ti (or Ti-based alloy) member, and by implanting P ions into the surface layer of the Ti or Ti-based alloy. The main point is that a P-concentration enriched layer is formed in the P-concentration layer.
【0006】[0006]
【作用】本発明で利用されるイオン注入の手法は、加速
された高エネルギーのイオンを目的深さまで打ち込んで
Ti部材の表面を改質するものであり、半導体分野にお
ける不純物ドーピング手段として利用されている他、鋼
を中心とする金属材料の表面改質にもその適用が進めら
れているが、半導体分野を除けばこれまでのところ実用
化はあまり進んでいない。[Operation] The ion implantation method used in the present invention modifies the surface of a Ti member by implanting accelerated high-energy ions to a target depth, and is used as an impurity doping means in the semiconductor field. In addition, it is being applied to surface modification of metal materials, mainly steel, but so far there has not been much progress in practical application, except in the semiconductor field.
【0007】本発明に係るTi部材は、このようなイオ
ン注入の手法をTi部材の表面改質に利用したものであ
り、Ti部材表層部にはイオン注入によって非熱平衡物
質層が形成される。即ちこれまで行なわれてきた熱プロ
セスによる合金化や表面処理では、熱的平衡状態にある
合金層あるいは表面皮膜が形成され、該合金層は熱平衡
物質層であるが故にその物性改造にも自ずから限度があ
った。これに対し本発明では非熱平衡物質層を形成する
ことにより、非熱平衡状態に基づくストレスに起因して
、熱平衡物質からは予測できない特性を得ることができ
る。換言すればイオン注入される元素と同じ元素を添加
したTi合金を形成しても本発明Ti部材のような耐摩
耗性の発揮は期待することができないのである。The Ti member according to the present invention utilizes such an ion implantation method to modify the surface of the Ti member, and a non-thermal equilibrium material layer is formed on the surface layer of the Ti member by ion implantation. In other words, in the alloying and surface treatments by thermal processes that have been carried out so far, an alloy layer or surface film that is in a thermal equilibrium state is formed, and since the alloy layer is a thermally equilibrium material layer, there is a natural limit to the modification of its physical properties. was there. In contrast, in the present invention, by forming a non-thermal equilibrium material layer, properties that cannot be predicted from a thermally equilibrium material can be obtained due to stress based on a non-thermal equilibrium state. In other words, even if a Ti alloy containing the same elements as those to be ion-implanted is formed, it cannot be expected to exhibit wear resistance like the Ti member of the present invention.
【0008】ところでTi部材の特性を改善するに当た
ってはTi部材にイオン注入を行ないさえすれば良いと
言うものではなく、改善しようとする特性に合せて特定
の元素イオンを注入する必要がある。即ち本発明におい
ては、種々の元素イオンについてイオン注入実験を重ね
た結果、Ti部材の耐焼き付き性を改善する為には、P
イオンを注入する必要があることを知った。尚Ti部材
にPイオンを注入することにより形成される非熱平衡状
態の具体的な物性の変化としては、■表面硬度が上昇す
る、■摩擦係数が低下する、■摩耗の際の相手材との凝
着現象が緩和される、■イオン注入時のスパッタによっ
て表面が清浄化される、■摩擦時の表面酸化挙動が変化
する等の現象をあげることができる。By the way, in order to improve the characteristics of a Ti member, it is not enough to simply implant ions into the Ti member, but it is necessary to implant ions of a specific element in accordance with the characteristics to be improved. That is, in the present invention, as a result of repeated ion implantation experiments with various elemental ions, in order to improve the seizure resistance of Ti members, P
I learned that I needed to implant ions. Specific changes in the physical properties of the non-thermal equilibrium state formed by implanting P ions into a Ti member include: ■ Increase in surface hardness, ■ Decrease in the coefficient of friction, and ■ Increase in friction with the mating material during wear. The following phenomena can be mentioned: (1) the surface is cleaned by sputtering during ion implantation; (2) the surface oxidation behavior changes during friction;
【0009】またイオン注入では高エネルギーイオンを
Ti部材の表層部に強制的に添加するが、表面層に別物
質層が形成される訳ではないので、注入層と基材層はマ
トリックス構造が同じである。従ってめっき等の表面処
理のように基材と異なる材質の皮膜を密着させる場合と
異なり、イオン注入表層部の基材層との一体性は極めて
良好であり、摩擦状態下でも剥離することがない。In addition, in ion implantation, high-energy ions are forcibly added to the surface layer of the Ti member, but since a separate material layer is not formed on the surface layer, the implanted layer and the base material layer have the same matrix structure. It is. Therefore, unlike surface treatments such as plating, where a film made of a different material is adhered to the base material, the ion-implanted surface layer has extremely good integrity with the base material layer, and will not peel off even under frictional conditions. .
【0010】本発明に係るTi部材は上記作用効果を奏
するものであるが、これらの効果を得るにはPイオンを
5×1015イオン/cm2以上注入することが望まれ
る。一方過剰に注入しても処理時間が長くなるだけで耐
摩耗性等が一定以上に向上することはないので注入量は
合計で1×1019イオン/cm2 以下に抑えること
が望ましい。The Ti member according to the present invention exhibits the above-mentioned effects, but in order to obtain these effects, it is desirable to implant P ions at a rate of 5×10 15 ions/cm 2 or more. On the other hand, since excessive implantation only increases the processing time and does not improve wear resistance beyond a certain level, it is desirable to suppress the total implantation amount to 1×10 19 ions/cm 2 or less.
【0011】[0011]
【実施例】実験1
表1に示す各種イオン注入Ti部材についてボール・オ
ン・プレート型摩耗試験装置を用いて摩耗試験を行ない
、動摩擦係数および相対的な摩耗量を比較したところ表
1に示す結果が得られた。摩耗条件はアルミナ,鋼およ
びTiを相手材とし、荷重1kgf で空気中で試験を
行なった。尚摩耗量は、イオン未注入材の摩耗量を1と
して相対摩耗量を算出した。[Example] Experiment 1 Wear tests were conducted on various ion-implanted Ti members shown in Table 1 using a ball-on-plate wear test device, and the coefficient of dynamic friction and relative amount of wear were compared. The results are shown in Table 1. was gotten. The wear conditions were as follows: alumina, steel, and Ti were used as mating materials, and the test was conducted in air under a load of 1 kgf. The amount of wear was calculated as a relative amount of wear, with the amount of wear of the non-ion-implanted material taken as 1.
【0012】0012
【表1】
実験2
Pのイオン注入量を変化させた場合に、イオン注入量と
相対摩耗量との関係を求めたところ、図1に示す結果が
得られた。[Table 1] Experiment 2 When the ion implantation amount of P was varied, the relationship between the ion implantation amount and the relative wear amount was determined, and the results shown in FIG. 1 were obtained.
【0013】図1に示されるようにイオン注入量が増加
するに従って相対摩耗量は減少していくが、その傾向が
顕著に現われるのはイオン注入量が1×1016イオン
/cm2 となる付近からであり、1×1017イオン
/cm2 以上ではその効果は飽和していることが分か
った。As shown in FIG. 1, as the ion implantation amount increases, the relative wear amount decreases, but this tendency becomes noticeable around the point where the ion implantation amount reaches 1×10 16 ions/cm 2 . It was found that the effect was saturated above 1×10 17 ions/cm 2 .
【0014】[0014]
【発明の効果】本発明は以上のように構成されており、
潤滑性および耐摩耗性に優れ、焼き付きに対して優れた
耐久性を示すTi(又はTi基合金)部材を得ることが
できる。かくして耐食性に優れたTi部材を従来適用困
難であった摺動機械部品等の用途にも適用することがで
きるようになった。[Effects of the Invention] The present invention is configured as described above,
It is possible to obtain a Ti (or Ti-based alloy) member that has excellent lubricity and wear resistance, and exhibits excellent durability against seizure. In this way, it has become possible to apply Ti members with excellent corrosion resistance to applications such as sliding machine parts, which were previously difficult to apply.
【図1】イオン注入量と相対摩耗量の関係を示すグラフ
である。FIG. 1 is a graph showing the relationship between ion implantation amount and relative wear amount.
Claims (1)
オンをイオン注入し、TiまたはTi基合金の表層部に
P濃度富化層を形成したものであることを特徴とする潤
滑性に優れた耐摩耗性TiまたはTi基合金部材。[Claim 1] A lubricity characterized by implanting P ions into the surface of a Ti or Ti-based alloy member to form a P concentration-enriched layer on the surface layer of the Ti or Ti-based alloy. Excellent wear-resistant Ti or Ti-based alloy member.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP41221890A JP2797717B2 (en) | 1990-12-18 | 1990-12-18 | Wear-resistant Ti or Ti-based alloy member with excellent lubricity |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP41221890A JP2797717B2 (en) | 1990-12-18 | 1990-12-18 | Wear-resistant Ti or Ti-based alloy member with excellent lubricity |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04218669A true JPH04218669A (en) | 1992-08-10 |
JP2797717B2 JP2797717B2 (en) | 1998-09-17 |
Family
ID=18521088
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP41221890A Expired - Fee Related JP2797717B2 (en) | 1990-12-18 | 1990-12-18 | Wear-resistant Ti or Ti-based alloy member with excellent lubricity |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2797717B2 (en) |
-
1990
- 1990-12-18 JP JP41221890A patent/JP2797717B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2797717B2 (en) | 1998-09-17 |
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