JP2797717B2 - Wear-resistant Ti or Ti-based alloy member with excellent lubricity - Google Patents
Wear-resistant Ti or Ti-based alloy member with excellent lubricityInfo
- Publication number
- JP2797717B2 JP2797717B2 JP41221890A JP41221890A JP2797717B2 JP 2797717 B2 JP2797717 B2 JP 2797717B2 JP 41221890 A JP41221890 A JP 41221890A JP 41221890 A JP41221890 A JP 41221890A JP 2797717 B2 JP2797717 B2 JP 2797717B2
- Authority
- JP
- Japan
- Prior art keywords
- based alloy
- wear
- ions
- alloy member
- resistant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Sliding-Contact Bearings (AREA)
- Physical Vapour Deposition (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、潤滑性に優れた耐摩耗
性Ｔｉ又はＴｉ基合金部材に関し、特に耐摩耗性および
潤滑性等を高めることにより摺動機械部品等としても利
用できる様にしたＴｉ又はＴｉ基合金部材に関するもの
である。尚以下の説明ではＴｉを代表的にとりあげる
が、本発明は種々のＴｉ基合金に対して同様に適用する
ことができる。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wear-resistant Ti or Ti-based alloy member having excellent lubricating properties. It relates to a Ti or a Ti-based alloy member. In the following description, Ti is taken as a representative example, but the present invention can be similarly applied to various Ti-based alloys.
【０００２】[0002]
【従来の技術】Ｔｉは、高融点，軽量，高強度等の特長
を有すると共に耐腐食性にも優れており、その特長を生
かすことのできる化学プラントや原子力プラント等の分
野における需要が次第に増加している。しかるにＴｉ
は、鋼等に比べると摩耗し易いという欠点があり、特に
無潤滑状態での摩擦係数が大きい（0.5〜0.6 ）為、例
えばＴｉを摺動部や他金属との接触部に使用すると焼付
きの問題が生じ、このことがＴｉを摺動機械部品等の材
料としての使用を妨げる原因となっている。尚潤滑剤を
使用することによって摩擦係数を下げることはできる
が、長期の使用に耐えることができず、例えば自動車部
品としての使用には適さない。2. Description of the Related Art Ti has features such as high melting point, light weight and high strength, and also has excellent corrosion resistance, and the demand in the fields of chemical plants and nuclear power plants, etc., which can take advantage of the features, is gradually increasing. doing. However, Ti
Has a disadvantage that it is easily worn as compared with steel or the like, and has a large friction coefficient especially in a non-lubricated state (0.5 to 0.6). For example, when Ti is used for a sliding portion or a contact portion with another metal, seizure occurs. This causes a problem in that Ti is prevented from being used as a material for sliding machine parts and the like. Although the friction coefficient can be reduced by using a lubricant, it cannot withstand long-term use, and is not suitable for use as, for example, an automobile part.
【０００３】Ｔｉの焼付きを防止するという観点から種
々の表面処理法が提案されており、その一例としては、
ガス窒化法、Ｃｒめっき法、ＭｏＳ2 コーティン
グ法等の表面処理法を挙げることができる。これらの方
法は、他の分野でそれなりの成果をあげているにもかか
わらず、Ｔｉ表面の処理法としてはいくつかの問題があ
る。例えばガス窒化法では極めて長い処理時間を要す
るという欠点があり、またＣｒめっき法の場合には、
Ｔｉ素地に対するめっき皮膜の密着性が悪いので、密着
性を高める為の前処理工程として下地めっきを施す必要
があり、工程が煩雑になると共に依然としてめっき皮膜
が剥離し易いという問題がある。さらにＭｏＳ2 コー
ティング法においても表面皮膜の密着性が悪いことが問
題点として挙げられ、ＭｏＳ2 は単なる潤滑剤としての
作用を発揮するにとどまる。[0003] Various surface treatment methods have been proposed from the viewpoint of preventing seizure of Ti.
Surface treatment methods such as a gas nitriding method, a Cr plating method, and a MoS 2 coating method can be used. Although these methods have achieved some success in other fields, there are several problems with treating Ti surfaces. For example, the gas nitriding method has a disadvantage of requiring an extremely long processing time, and the Cr plating method has a disadvantage.
Since the adhesion of the plating film to the Ti substrate is poor, it is necessary to apply a base plating as a pre-treatment step for improving the adhesion, and the process becomes complicated and the plating film is still easily peeled off. Further, the MoS 2 coating method has another problem that the adhesion of the surface film is poor, and MoS 2 merely functions as a lubricant.
【０００４】[0004]
【発明が解決しようとする課題】本発明はこうした事情
に着目してなされたものであって、簡素な工程で短時間
に処理を完了することができ、しかもＴｉ素地との密着
性に優れた表面処理層を形成することができるような技
術、殊にそのような表面処理層を形成することによって
得られる潤滑性および耐摩耗性の優れたＴｉ部材を提供
することを目的とするものである。SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and can complete the processing in a short time in a simple process and has excellent adhesion to a Ti base. It is an object of the present invention to provide a technique capable of forming a surface treatment layer, and in particular, to provide a Ti member excellent in lubricity and wear resistance obtained by forming such a surface treatment layer. .
【０００５】[0005]
【課題を解決するための手段】しかして上記目的を達成
した本発明のＴｉ部材は、Ｔｉ（又はＴｉ基合金）部材
の表面に、Ｐイオンをイオン注入し、ＴｉまたはＴｉ基
合金の表層部にＰ濃度富化層を形成したものである点に
要旨を有するものである。According to the Ti member of the present invention which has achieved the above object, P ions are ion-implanted into the surface of a Ti (or Ti-based alloy) member to form a surface layer of Ti or a Ti-based alloy. The point is that a P-concentration-enriched layer is formed on the substrate.
【０００６】[0006]
【作用】本発明で利用されるイオン注入の手法は、加速
された高エネルギーのイオンを目的深さまで打ち込んで
Ｔｉ部材の表面を改質するものであり、半導体分野にお
ける不純物ドーピング手段として利用されている他、鋼
を中心とする金属材料の表面改質にもその適用が進めら
れているが、半導体分野を除けばこれまでのところ実用
化はあまり進んでいない。According to the ion implantation technique used in the present invention, the surface of a Ti member is modified by implanting accelerated high-energy ions to a target depth, and is used as an impurity doping means in the semiconductor field. In addition, its application is also being promoted for surface modification of metallic materials such as steel, but its practical use has not so far progressed except in the field of semiconductors.
【０００７】本発明に係るＴｉ部材は、このようなイオ
ン注入の手法をＴｉ部材の表面改質に利用したものであ
り、Ｔｉ部材表層部にはイオン注入によって非熱平衡物
質層が形成される。即ちこれまで行なわれてきた熱プロ
セスによる合金化や表面処理では、熱的平衡状態にある
合金層あるいは表面皮膜が形成され、該合金層は熱平衡
物質層であるが故にその物性改造にも自ずから限度があ
った。これに対し本発明では非熱平衡物質層を形成する
ことにより、非熱平衡状態に基づくストレスに起因し
て、熱平衡物質からは予測できない特性を得ることがで
きる。換言すればイオン注入される元素と同じ元素を添
加したＴｉ合金を形成しても本発明Ｔｉ部材のような耐
摩耗性の発揮は期待することができないのである。The Ti member according to the present invention utilizes such a technique of ion implantation for surface modification of the Ti member, and a non-thermal equilibrium material layer is formed on the surface of the Ti member by ion implantation. That is, in the alloying and surface treatment that have been performed so far, an alloy layer or a surface film in a thermal equilibrium state is formed, and since the alloy layer is a thermal equilibrium material layer, the modification of its physical properties is naturally limited. was there. On the other hand, in the present invention, by forming the non-thermal equilibrium material layer, characteristics that cannot be predicted from the thermal equilibrium material can be obtained due to the stress based on the non-thermal equilibrium state. In other words, even if a Ti alloy to which the same element as the ion-implanted element is added is formed, it cannot be expected to exhibit the wear resistance as in the Ti member of the present invention.
【０００８】ところでＴｉ部材の特性を改善するに当た
ってはＴｉ部材にイオン注入を行ないさえすれば良いと
言うものではなく、改善しようとする特性に合せて特定
の元素イオンを注入する必要がある。即ち本発明におい
ては、種々の元素イオンについてイオン注入実験を重ね
た結果、Ｔｉ部材の耐焼き付き性を改善する為には、Ｐ
イオンを注入する必要があることを知った。尚Ｔｉ部材
にＰイオンを注入することにより形成される非熱平衡状
態の具体的な物性の変化としては、表面硬度が上昇す
る、摩擦係数が低下する、摩耗の際の相手材との凝
着現象が緩和される、イオン注入時のスパッタによっ
て表面が清浄化される、摩擦時の表面酸化挙動が変化
する等の現象をあげることができる。In order to improve the characteristics of the Ti member, it is not only necessary to implant ions into the Ti member, but it is necessary to implant specific element ions in accordance with the characteristics to be improved. That is, in the present invention, as a result of repeated ion implantation experiments for various element ions, in order to improve the seizure resistance of the Ti member, P
I knew that I needed to implant ions. Specific changes in the physical properties of the non-thermal equilibrium state formed by injecting P ions into the Ti member include a surface hardness increase, a friction coefficient decrease, and a cohesion phenomenon with a counterpart material during wear. Are alleviated, the surface is cleaned by sputtering at the time of ion implantation, and the surface oxidation behavior at the time of friction is changed.
【０００９】またイオン注入では高エネルギーイオンを
Ｔｉ部材の表層部に強制的に添加するが、表面層に別物
質層が形成される訳ではないので、注入層と基材層はマ
トリックス構造が同じである。従ってめっき等の表面処
理のように基材と異なる材質の皮膜を密着させる場合と
異なり、イオン注入表層部の基材層との一体性は極めて
良好であり、摩擦状態下でも剥離することがない。In ion implantation, high-energy ions are forcibly added to the surface layer of the Ti member. However, since another material layer is not formed on the surface layer, the implanted layer and the base material layer have the same matrix structure. It is. Therefore, unlike the case where a film of a different material is adhered to the base material such as a surface treatment such as plating, the integration of the ion-implanted surface layer with the base material layer is extremely good and does not peel off even under a frictional state. .
【００１０】本発明に係るＴｉ部材は上記作用効果を奏
するものであるが、これらの効果を得るにはＰイオンを
５×1015イオン／cm2以上注入することが望まれる。一
方過剰に注入しても処理時間が長くなるだけで耐摩耗性
等が一定以上に向上することはないので注入量は合計で
１×1019イオン／cm2 以下に抑えることが望ましい。The Ti member according to the present invention has the above-mentioned effects. To obtain these effects, it is desirable to implant P ions at 5 × 10 15 ions / cm 2 or more. On the other hand, even if it is excessively implanted, the treatment time is prolonged and the wear resistance and the like are not improved more than a certain level. Therefore, it is desirable to suppress the implantation amount to 1 × 10 19 ions / cm 2 or less in total.
【００１１】[0011]
【実施例】実験１ 表１に示す各種イオン注入Ｔｉ部材についてボール・オ
ン・プレート型摩耗試験装置を用いて摩耗試験を行な
い、動摩擦係数および相対的な摩耗量を比較したところ
表１に示す結果が得られた。摩耗条件はアルミナ，鋼お
よびＴｉを相手材とし、荷重１kgf で空気中で試験を行
なった。尚摩耗量は、イオン未注入材の摩耗量を１とし
て相対摩耗量を算出した。EXPERIMENT 1 An abrasion test was performed on various ion-implanted Ti members shown in Table 1 using a ball-on-plate type abrasion tester, and the kinetic friction coefficient and the relative wear amount were compared. was gotten. The test was carried out in air with a load of 1 kgf using alumina, steel and Ti as mating materials. The relative wear amount was calculated assuming that the wear amount of the ion-implanted material was 1.
【００１２】[0012]
【表１】 実験２ Ｐのイオン注入量を変化させた場合に、イオン注入量と
相対摩耗量との関係を求めたところ、図１に示す結果が
得られた。[Table 1] Experiment 2 When the ion implantation amount was changed in P, the relationship between the ion implantation amount and the relative wear amount was determined, and the results shown in FIG. 1 were obtained.
【００１３】図１に示されるようにイオン注入量が増加
するに従って相対摩耗量は減少していくが、その傾向が
顕著に現われるのはイオン注入量が１×1016イオン／cm
2 となる付近からであり、１×1017イオン／cm2 以上で
はその効果は飽和していることが分かった。As shown in FIG. 1, the relative wear amount decreases as the ion implantation amount increases, but this tendency is noticeable when the ion implantation amount is 1 × 10 16 ions / cm 2.
Is from nearby the 2, at 1 × 10 17 ions / cm 2 or more the effect was found to be saturated.
【００１４】[0014]
【発明の効果】本発明は以上のように構成されており、
潤滑性および耐摩耗性に優れ、焼き付きに対して優れた
耐久性を示すＴｉ（又はＴｉ基合金）部材を得ることが
できる。かくして耐食性に優れたＴｉ部材を従来適用困
難であった摺動機械部品等の用途にも適用することがで
きるようになった。The present invention is configured as described above.
A Ti (or Ti-based alloy) member having excellent lubricity and wear resistance and exhibiting excellent durability against seizure can be obtained. Thus, a Ti member having excellent corrosion resistance can be applied to applications such as sliding machine parts, which were difficult to apply conventionally.
【図１】イオン注入量と相対摩耗量の関係を示すグラフ
である。FIG. 1 is a graph showing a relationship between an ion implantation amount and a relative wear amount.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 上田 啓司 神戸市北区有野町有野1315 (56)参考文献 特開 平３−177570（ＪＰ，Ａ) 特開 平３−100166（ＪＰ，Ａ) 特公 平６−8505（ＪＰ，Ｂ２) (58)調査した分野(Int.Cl.6，ＤＢ名) C23C 14/48 F16C 33/12────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Keiji Ueda 1315 Arino, Arino-cho, Kita-ku, Kobe (56) References JP-A-3-177570 (JP, A) JP-A-3-100166 (JP, A) Kohei 6-8505 (JP, B2) (58) Field surveyed (Int. Cl. 6 , DB name) C23C 14/48 F16C 33/12
Claims (1)
オンをイオン注入し、ＴｉまたはＴｉ基合金の表層部に
Ｐ濃度富化層を形成したものであることを特徴とする潤
滑性に優れた耐摩耗性ＴｉまたはＴｉ基合金部材。1. A lubricating property characterized in that P ions are ion-implanted into the surface of a Ti or Ti-based alloy member and a P-concentration-enriched layer is formed on the surface of Ti or a Ti-based alloy. Excellent wear resistance Ti or Ti-based alloy member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP41221890A JP2797717B2 (en) | 1990-12-18 | 1990-12-18 | Wear-resistant Ti or Ti-based alloy member with excellent lubricity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP41221890A JP2797717B2 (en) | 1990-12-18 | 1990-12-18 | Wear-resistant Ti or Ti-based alloy member with excellent lubricity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04218669A JPH04218669A (en) | 1992-08-10 |
| JP2797717B2 true JP2797717B2 (en) | 1998-09-17 |
Family
ID=18521088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP41221890A Expired - Fee Related JP2797717B2 (en) | 1990-12-18 | 1990-12-18 | Wear-resistant Ti or Ti-based alloy member with excellent lubricity |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2797717B2 (en) |
-
1990
- 1990-12-18 JP JP41221890A patent/JP2797717B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04218669A (en) | 1992-08-10 |
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