JP2003073800A - Surface treatment method for steel material, and steel material having impact resistance, abrasion resistance, and corrosion resistance - Google Patents

Surface treatment method for steel material, and steel material having impact resistance, abrasion resistance, and corrosion resistance

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Publication number
JP2003073800A
JP2003073800A JP2001262608A JP2001262608A JP2003073800A JP 2003073800 A JP2003073800 A JP 2003073800A JP 2001262608 A JP2001262608 A JP 2001262608A JP 2001262608 A JP2001262608 A JP 2001262608A JP 2003073800 A JP2003073800 A JP 2003073800A
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JP
Japan
Prior art keywords
steel
resistance
steel material
corrosion resistance
nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001262608A
Other languages
Japanese (ja)
Inventor
Toshiaki Nagayama
敏明 長山
Noboru Baba
馬場  昇
Shizuka Yamaguchi
山口  静
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
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Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2001262608A priority Critical patent/JP2003073800A/en
Publication of JP2003073800A publication Critical patent/JP2003073800A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a surface treatment method for a steel material, which causes little anxiety of film peeling, can form an adequate depth of a hardened layer in a range of several tens to several hundreds μm on the surface, and can form the hardened layer superior in impact resistance, abrasion resistance, and corrosion resistance, and provide a steel material having impact resistance, abrasion resistance, and corrosion resistance, manufactured with the method. SOLUTION: This method includes plasma nitriding the surface of the steel material, and then implanting nitrogen ions in the surface, to make the nitrogen concentration of the surface to be 30 atom% or higher, for diffusion treatment causing little film- peeling. The method thus provides the surface treatment layer, which has the depth of the hardened layer of several tens to several hundreds μm, and has high impact resistance, high abrasion resistance, and high corrosion resistance. The method can prolong the life of an automobile engine or the like, when applied to, for example, the automobile engine member which receives strong shock, and requires abrasion resistance and corrosion resistance, because the surface treatment layer does not peel off, even if receives shocks, is little abraded, and has little weight loss by corrosion.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、鉄鋼材料の表面処
理方法および耐衝撃,耐摩耗,耐食鉄鋼材料に係り、特
に、自動車エンジン部品などのように、衝撃を受け、耐
摩耗,耐食性も要求される鉄鋼材料の表面処理方法に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface treatment method for steel materials and impact-, wear-, and corrosion-resistant steel materials. In particular, such as automobile engine parts, it is also required to have shock- and wear- and corrosion-resistant properties. The present invention relates to a surface treatment method for a steel material.

【0002】[0002]

【従来の技術】耐摩耗性を高めるには、高硬度化が有効
であり、浸炭や窒化などの拡散処理,高硬質膜を形成す
るPVDやCVD,イオン注入やイオン照射が用いられ
る。特開平9−53170号公報は、窒素イオンを照射
し、表面を改質して硬度を高め、摩擦係数を低下させ、
耐摩耗性を向上させる技術を示している。
2. Description of the Related Art In order to improve wear resistance, it is effective to increase hardness, and diffusion treatment such as carburizing or nitriding, PVD or CVD for forming a highly hard film, ion implantation or ion irradiation is used. Japanese Unexamined Patent Publication No. 9-53170 discloses a method of irradiating nitrogen ions to modify the surface to increase hardness and reduce the coefficient of friction.
A technique for improving wear resistance is shown.

【0003】耐食性を高めるには、環境遮断性に優れる
膜を形成するPVDやCVD,材料の本質を変えること
なく表面を改質するイオン注入やイオン照射が適用され
る。特開平6−41716号公報は、焼き入れ焼き戻し
などの熱処理により生じた圧縮残留応力を窒素イオン注
入により緩和させ、耐摩耗性や耐食性に優れかつ脆さを
改善する技術を示している。
In order to improve the corrosion resistance, PVD or CVD for forming a film having an excellent environmental barrier property, and ion implantation or ion irradiation for modifying the surface without changing the essence of the material are applied. Japanese Unexamined Patent Publication No. 6-41716 discloses a technique in which the compressive residual stress generated by heat treatment such as quenching and tempering is relaxed by nitrogen ion implantation, which is excellent in wear resistance and corrosion resistance and improves brittleness.

【0004】特に、衝撃荷重を受ける場合は、ヘルツ応
力が働き、表面から内部に高応力がかかるので、数十〜
数百μmの硬化層を必要とする。
In particular, when an impact load is applied, the Hertzian stress acts, and a high stress is applied from the surface to the inside.
It requires a hardened layer of a few hundred μm.

【0005】特開平2−15160号公報は、窒化チタ
ンの被覆層形成とイオン注入とを示している。その目的
は、窒化チタンの基材を硬化させ剥離しにくくすること
である。
Japanese Unexamined Patent Publication No. 2-15160 discloses formation of a titanium nitride coating layer and ion implantation. The purpose is to harden the titanium nitride substrate to make it difficult to peel.

【0006】しかし、この切削工具の製造方法には、製
造された切削工具が大量のオイルに周囲を囲まれワーク
を切削すると予想される使用環境から、耐食性に関する
示唆も暗示もなく、特に、窒素量の規定が無いために、
発明の作用効果の臨界的意義が不明瞭である。
[0006] However, in this method for producing a cutting tool, there is no suggestion or suggestion regarding corrosion resistance from the use environment in which it is expected that the produced cutting tool will be surrounded by a large amount of oil to cut a work, and particularly nitrogen is used. Because there is no regulation of quantity,
The critical significance of the effects of the invention is unclear.

【0007】特開平7−197232号公報は、オース
テナイト系鉄鋼材料を対象としており、ガス窒化とイオ
ン注入とを組み合わせても所期の目的を達成できない場
合があるとして、基本的にガス窒化だけでマイクロシャ
フトの窒化硬化層を形成する方法を提案している。
Japanese Unexamined Patent Publication (Kokai) No. 7-1972232 is directed to an austenitic steel material, and even if gas nitriding and ion implantation are combined in some cases, the intended purpose may not be achieved. A method for forming a nitrided hardened layer of a microshaft is proposed.

【0008】この方法は、マルテンサイト系鉄鋼材料を
主な対象とする本発明の属する技術分野には、そのまま
では適用できない。また、ガス窒化だけでは、加工に長
時間を要し、製造効率が上がらない。
This method cannot be applied as it is to the technical field to which the present invention, which mainly targets martensitic steel materials, belongs. Further, gas nitriding alone requires a long time for processing, and the manufacturing efficiency cannot be improved.

【0009】[0009]

【発明が解決しようとする課題】自動車エンジン部品な
どの衝撃荷重を受ける鉄鋼材料においては、耐摩耗性,
耐食性に加えて、数十〜数百μmの硬化層を形成できる
表面処理方法が求められている。
In steel materials subjected to impact loads such as automobile engine parts, wear resistance,
In addition to corrosion resistance, there is a demand for a surface treatment method capable of forming a hardened layer having a thickness of several tens to several hundreds of μm.

【0010】高硬質膜を形成する際に、PVDやCVD
は、鉄鋼材料の基材に含まれる成分とは結合しない膜を
表面上に形成するため、本質的に剥離の可能性がある。
When forming a highly hard film, PVD or CVD
Forms a film on the surface that does not bind to the components contained in the base material of the steel material, and thus may be essentially peeled off.

【0011】イオン注入やイオン照射は、鉄鋼材料自体
を改質するが、改質できる深さが数μmと浅いので、衝
撃荷重を受ける部品に求められる硬化深さが得られな
い。
Ion implantation or ion irradiation modifies the steel material itself, but since the depth of modification is as shallow as a few μm, the hardening depth required for parts subjected to impact load cannot be obtained.

【0012】拡散処理である窒化処理、特にプラズマ窒
化処理では、窒素の拡散により基材に含まれる成分と結
合し、窒化物を形成する。この窒化物は、基材よりも高
硬度であるから、窒素の拡散領域が高硬度化し、耐摩耗
性が上がる。例えば、ステンレス鋼をプラズマ窒化する
と、ステンレス鋼中の元素Cr,Feの窒化物であるC
rN,CrN,FeN,FeN,FeNが生成
される。
In the nitriding treatment which is a diffusion treatment, particularly the plasma nitriding treatment, nitrogen is diffused to combine with a component contained in the base material to form a nitride. Since this nitride has a higher hardness than the base material, the nitrogen diffusion region has a higher hardness and wear resistance is increased. For example, when plasma nitriding stainless steel, C which is a nitride of the elements Cr and Fe in the stainless steel is used.
rN, Cr 2 N, Fe 4 N, Fe 3 N, Fe 2 N are produced.

【0013】一方、ステンレス鋼の耐食性は、表面に形
成される極薄い酸化クロムにより発揮される。
On the other hand, the corrosion resistance of stainless steel is exhibited by the extremely thin chromium oxide formed on the surface.

【0014】ところが、プラズマ窒化では、窒化処理に
より基材中のクロムがクロム窒化物として生成されるの
で、耐食性に寄与する基材のクロム量が減少する。その
結果、プラズマ窒化したステンレス鋼の耐食性は低下す
る。
However, in plasma nitriding, chromium in the base material is generated as chromium nitride by the nitriding treatment, so the amount of chromium in the base material that contributes to corrosion resistance is reduced. As a result, the corrosion resistance of plasma-nitrided stainless steel decreases.

【0015】また、合金工具鋼(SKD材),クロム・モ
リブデン鋼(SCM材),高速度工具鋼(SKH材)は、本
質的にCr量が少ないため、耐食性が悪い。
Further, the alloy tool steel (SKD material), the chromium-molybdenum steel (SCM material), and the high speed tool steel (SKH material) essentially have a small amount of Cr and therefore have poor corrosion resistance.

【0016】本発明の目的は、剥離の恐れがなく、数十
〜数百μmの十分な硬化深さが得られ、耐衝撃性,耐摩
耗性,耐食性に優れた硬化層を形成できる鉄鋼材料の表
面処理方法およびこの方法により製造した耐衝撃,耐摩
耗,耐食鉄鋼材料を提供することである。
An object of the present invention is a steel material capable of forming a hardened layer having a sufficient hardening depth of several tens to several hundreds of μm without exfoliation, and having excellent impact resistance, abrasion resistance and corrosion resistance. The object of the present invention is to provide a surface treatment method, and an impact-resistant, wear-resistant and corrosion-resistant steel material produced by this method.

【0017】[0017]

【課題を解決するための手段】本発明は、上記目的を達
成するために、鉄鋼材料をプラズマ窒化し、その後に窒
素イオンを注入し、鉄鋼材料表面の窒素濃度を30原子
%以上にする鉄鋼材料の表面処理方法を提案する。
In order to achieve the above object, the present invention provides a steel material in which a steel material is plasma-nitrided and then nitrogen ions are implanted so that the nitrogen concentration on the surface of the steel material is 30 atomic% or more. We propose a surface treatment method for materials.

【0018】前記表面処理方法において、鉄鋼材料は、
ステンレス鋼,合金工具鋼(SKD材),クロム・モリブ
デン鋼(SCM材),高速度工具鋼(SKH材)のいずれか
である。
In the surface treatment method, the steel material is
It is either stainless steel, alloy tool steel (SKD material), chrome molybdenum steel (SCM material), or high speed tool steel (SKH material).

【0019】本発明は、また、プラズマ窒化し、その後
に窒素イオンを注入し、表面の窒素濃度を30原子%以
上にした耐衝撃,耐摩耗,耐食鉄鋼材料を提案する。
The present invention also proposes a shock-resistant, wear-resistant and corrosion-resistant steel material in which plasma nitriding is carried out and then nitrogen ions are implanted so that the surface nitrogen concentration is 30 atomic% or more.

【0020】前記耐衝撃,耐摩耗,耐食鉄鋼材料におい
て、鉄鋼材料は、ステンレス鋼,合金工具鋼(SKD
材),クロム・モリブデン鋼(SCM材),高速度工具鋼
(SKH材)のいずれかである。
Among the above-mentioned impact-resistant, wear-resistant and corrosion-resistant steel materials, the steel materials are stainless steel, alloy tool steel (SKD).
Material), chrome / molybdenum steel (SCM material), high speed tool steel
(SKH material).

【0021】[0021]

【発明の実施の形態】発明者らは、十分な硬化深さが得
られ、しかも、剥離の恐れがない拡散処理として、プラ
ズマ窒化処理し、その後に、所定量以上の窒素イオンを
注入すると、表面に高耐食層を形成できることを見出し
た。
BEST MODE FOR CARRYING OUT THE INVENTION The inventors of the present invention carry out a plasma nitriding treatment as a diffusion treatment with which a sufficient hardening depth can be obtained and there is no fear of peeling, and then a predetermined amount or more of nitrogen ions are implanted, It was found that a high corrosion resistant layer can be formed on the surface.

【0022】この方法によれば、プラズマ窒化により十
分な硬化深さとなり、耐衝撃性,耐摩耗性が得られ、窒
素イオン注入により高耐食性が得られる。
According to this method, plasma nitriding achieves a sufficient hardening depth, impact resistance and wear resistance are obtained, and nitrogen ion implantation provides high corrosion resistance.

【0023】次に、図1〜図5を参照して、本発明によ
る鉄鋼材料の表面処理方法および耐衝撃,耐摩耗,耐食
鉄鋼材料の実施形態を説明する。まず、ステンレス鋼S
US440Cを例として、本実施形態の基本的事項を説
明する。
Next, with reference to FIG. 1 to FIG. 5, an embodiment of the surface treatment method for a steel material and impact resistance, wear resistance, and corrosion resistance steel material according to the present invention will be described. First, stainless steel S
The basic matters of this embodiment will be described by taking US440C as an example.

【0024】図1は、ステンレス鋼SUS440Cのプ
ラズマ窒化品をGDS(グロー放電発光分析)で分析した
深さ方向の窒素分布を示す図である。表面の窒素濃度
は、窒化温度により異なり、410℃窒化品が26原子
%であり、570℃窒化品が9原子%であった。
FIG. 1 is a diagram showing the nitrogen distribution in the depth direction of a plasma nitrided product of stainless steel SUS440C analyzed by GDS (Glow Discharge Optical Emission Analysis). The nitrogen concentration on the surface varied depending on the nitriding temperature and was 26 atom% for the 410 ° C nitrided product and 9 atom% for the 570 ° C nitrided product.

【0025】図2は、410℃でプラズマ窒化後に窒素
イオンを注入したステンレス鋼SUS440Cの深さ方
向の窒素分布を示す図である。窒素イオンの注入によっ
て、表面の窒素濃度が42原子%に増加している。
FIG. 2 is a diagram showing the nitrogen distribution in the depth direction of stainless steel SUS440C implanted with nitrogen ions after plasma nitriding at 410 ° C. The implantation of nitrogen ions increases the surface nitrogen concentration to 42 atomic%.

【0026】耐食性は、JIS G 0577 ステンレ
ス孔食電位測定方法によって、pH3.0,液温70℃
における分極試験を実施し、電流密度100μA/cm
になった時の電位(Vc′100)で評価した。
The corrosion resistance was measured by JIS G 0577 stainless pitting potential measuring method, pH 3.0, liquid temperature 70 ° C.
Conducted a polarization test at 100 μA / cm
It was evaluated by the potential (Vc'100) when it reached 2 .

【0027】図3は、410℃でプラズマ窒化後に窒素
イオンを注入したステンレス鋼SUS440Cの深さ方
向の耐食性を示す図である。図3の電位は、Ag/Ag
Cl参照電極(Ref)を基準にした電位である。窒素濃
度の高い表面の耐食性が高くなっているのがわかる。
FIG. 3 is a diagram showing the corrosion resistance in the depth direction of stainless steel SUS440C implanted with nitrogen ions after plasma nitriding at 410 ° C. The potential in FIG. 3 is Ag / Ag
The potential is based on the Cl reference electrode (Ref). It can be seen that the corrosion resistance of the surface with a high nitrogen concentration is high.

【0028】図4は、図2および図3の結果に基づき、
410℃でプラズマ窒化後に窒素イオンを注入したステ
ンレス鋼SUS440Cの表面窒素濃度と耐食性との関
係を示す図である。耐食性は、窒素濃度30原子%以上
でプラズマ窒化の硬化層より貴になり、Vc′100が
0.78V vs Ref以上になる。
FIG. 4 is based on the results of FIGS. 2 and 3.
It is a figure which shows the relationship between the surface nitrogen concentration of stainless steel SUS440C which injected nitrogen ion after plasma nitriding at 410 degreeC, and corrosion resistance. Corrosion resistance becomes more noble than that of the hardened layer of plasma nitriding at a nitrogen concentration of 30 atomic% or more, and Vc'100 becomes 0.78 V vs Ref or more.

【0029】この値はSUS440Cの焼き入れ焼き戻
し品の0.52V vs Refを上回る。
This value exceeds 0.52 V vs Ref of the quenched and tempered product of SUS440C.

【0030】このように、プラズマ窒化して耐食性が低
下したステンレス鋼でも、窒素イオンを注入し、窒素イ
オンを30原子%以上に増加させると耐食性が向上す
る。
As described above, even in stainless steel whose plasma nitriding has reduced corrosion resistance, the corrosion resistance is improved by implanting nitrogen ions and increasing the nitrogen ions to 30 atomic% or more.

【0031】なお、プラズマ窒化だけでは、窒素濃度が
9〜26原子%の範囲にあり、Vc′100は−0.4
6〜−0.48V vs Refとなり、耐食性が悪い。
It should be noted that only by plasma nitriding, the nitrogen concentration is in the range of 9 to 26 atomic%, and Vc'100 is -0.4.
6 to -0.48V vs Ref, and the corrosion resistance is poor.

【0032】この結果は、他の鋼種でも同様である。The results are the same for other steel grades.

【0033】窒素イオン注入単独でも窒素濃度を30原
子%以上に高めることは可能であるが、一般の鉄鋼材の
窒素濃度は1原子%にも満たないので、30原子%に高
めるには長時間を要する。
Although it is possible to increase the nitrogen concentration to 30 atomic% or more by nitrogen ion implantation alone, since the nitrogen concentration of general steel materials is less than 1 atomic%, it takes a long time to increase it to 30 atomic%. Requires.

【0034】また、衝撃荷重を受ける部品に本発明を適
用する場合、窒素イオン注入で得られる硬化深さは、数
μmであり、十分でない。
When the present invention is applied to a part which receives an impact load, the hardening depth obtained by nitrogen ion implantation is several μm, which is not sufficient.

【0035】そこで、本発明により、プラズマ窒化で窒
素濃度を高めた後に、窒素イオンをイオン注入すると、
窒素濃度を30原子%に高めるための主にイオン注入の
所要時間を短縮できる。
Therefore, according to the present invention, when nitrogen concentration is increased by plasma nitriding and then nitrogen ions are implanted,
The time required for ion implantation to increase the nitrogen concentration to 30 atomic% can be shortened.

【0036】図5は、摩耗試験の結果を比摩耗量で示す
図表である。図2の分極試験と同じpH3.0の液中
で、リング状の可動片を直方体の固定片に載せ、可動片
側から垂直に荷重をかけた。
FIG. 5 is a table showing the results of the wear test as specific wear amounts. A ring-shaped movable piece was placed on a fixed piece of a rectangular parallelepiped in the same liquid of pH 3.0 as in the polarization test of FIG. 2, and a load was applied vertically from the side of the movable piece.

【0037】可動片はプラズマ窒化品,固定片は窒化温
度を変えたプラズマ窒化品であり、プラズマ窒化後に窒
素イオンを注入した試料とした。
The movable piece was a plasma-nitrided product, and the fixed piece was a plasma-nitrided product in which the nitriding temperature was changed.

【0038】図5から明らかなように、プラズマ窒化後
に窒素イオンを注入した試料の摩耗量は、プラズマ窒化
のみの試料と比較すると、約1/100になった。
As is clear from FIG. 5, the wear amount of the sample in which nitrogen ions were implanted after plasma nitriding was about 1/100 as compared with the sample of plasma nitriding only.

【0039】このように、プラズマ窒化により必要な深
さまで硬化した後、窒素イオン注入により表面の窒素濃
度を高めると、高耐衝撃性,高耐摩耗性,高耐食性の表
面処理層が得られる。
As described above, after the surface is hardened to the required depth by plasma nitriding and the nitrogen concentration on the surface is increased by implanting nitrogen ions, a surface treatment layer having high impact resistance, high wear resistance and high corrosion resistance can be obtained.

【0040】プラズマ窒化においては、窒化温度および
窒化時間を変更すると、任意の硬さおよび硬化深さが得
られる。
In plasma nitriding, an arbitrary hardness and hardening depth can be obtained by changing the nitriding temperature and the nitriding time.

【0041】その後は、表面の窒素濃度が耐食性が増す
30原子%以上になるまで窒素イオンを注入すればよ
い。
After that, nitrogen ions may be implanted until the concentration of nitrogen on the surface becomes 30 atomic% or more, which increases the corrosion resistance.

【0042】実際の製造工程では、プラズマ窒化および
窒素イオン注入の合計処理時間が短いことが望ましいの
で、表面処理装置の能力に応じて、それぞれの処理に必
要な処理時間を考慮して窒化温度を決める。
In the actual manufacturing process, it is desirable that the total processing time of plasma nitriding and nitrogen ion implantation is short. Therefore, depending on the capability of the surface processing apparatus, the nitriding temperature should be set in consideration of the processing time required for each processing. Decide

【0043】また、イオン注入におけるイオンの侵入深
さは、イオン種,加速電圧で異なり、注入したイオンが
基材温度に応じて拡散する。
Further, the penetration depth of ions in the ion implantation differs depending on the ion species and the acceleration voltage, and the implanted ions diffuse according to the substrate temperature.

【0044】窒素イオンでは、加速電圧50eVで0.
05μm程度である。したがって、1μm程度の深さを
得るには、基材温度を制御して拡散させる必要がある。
With nitrogen ions, the acceleration voltage is 50 eV and
It is about 05 μm. Therefore, in order to obtain a depth of about 1 μm, it is necessary to control the base material temperature for diffusion.

【0045】本実施形態の場合、基材温度は、窒化温度
以下でかつ300℃以上にした。
In the case of this embodiment, the base material temperature is set to the nitriding temperature or lower and 300 ° C. or higher.

【0046】このように、プラズマ窒化処理後に窒素イ
オンを注入し、表面の窒素濃度を30原子%以上にする
と、数十〜数百μmの硬化深さで高耐摩耗,高耐食性の
表面処理層が得られる。
As described above, when nitrogen ions are implanted after the plasma nitriding treatment and the surface nitrogen concentration is 30 atomic% or more, a surface treatment layer having a high wear resistance and a high corrosion resistance with a hardening depth of several tens to several hundreds of μm. Is obtained.

【0047】[0047]

【実施例1】ステンレス鋼SUS440Cを焼き入れ焼
き戻して表面硬さをHv680に調整した1cm×1c
m×0.5cmの試料を、窒素/水素比=1/3,圧力
430Pa,温度410℃の雰囲気で、10時間プラズ
マ窒化した。その時の表面硬さは、Hv1370であ
り、硬化深さは、20μmであった。
[Example 1] 1 cm x 1 c in which stainless steel SUS440C was quenched and tempered to adjust the surface hardness to Hv680.
A sample of m × 0.5 cm was plasma-nitrided for 10 hours in an atmosphere of nitrogen / hydrogen ratio = 1/3, pressure of 430 Pa and temperature of 410 ° C. At that time, the surface hardness was Hv1370 and the curing depth was 20 μm.

【0048】その後、窒素イオンを加速電圧50kV,
電流密度30μA/cmで5600秒注入し、約1×
1018個/cmの窒素イオンにより、表面窒素濃度
を30原子%にした。その結果、図3に示した耐食性と
図5に示した耐摩耗性とが得られた。
After that, nitrogen ions were applied at an acceleration voltage of 50 kV,
Implanted at current density of 30 μA / cm 2 for 5600 seconds, about 1 ×
The surface nitrogen concentration was set to 30 atomic% with 10 18 ions / cm 2 . As a result, the corrosion resistance shown in FIG. 3 and the wear resistance shown in FIG. 5 were obtained.

【0049】[0049]

【実施例2】ダイス鋼SKD11を焼き入れ焼き戻して
表面硬さをHv800に調整した試料を、窒素/水素比
=1/3,圧力430Paの雰囲気で、10時間プラズ
マ窒化した。その時の表面硬さは、Hv1200であ
り、硬化深さは、40μmであった。
Example 2 A sample of which die steel SKD11 was quenched and tempered to adjust the surface hardness to Hv800 was plasma-nitrided for 10 hours in an atmosphere of nitrogen / hydrogen ratio = 1/3 and pressure 430 Pa. At that time, the surface hardness was Hv1200 and the curing depth was 40 μm.

【0050】その後、実施例1と同様に、窒素イオンを
注入し、表面窒素濃度を35原子%にした。その結果、
Vc′100が0.6V vs Refと良好な耐食性を
示し、比摩耗量は、2.9×10−11g/N・mmと
なり、プラズマ窒化処理のみの例と比較して、大変少な
い摩耗量になった。
Then, as in Example 1, nitrogen ions were implanted to bring the surface nitrogen concentration to 35 atom%. as a result,
Vc′100 shows good corrosion resistance of 0.6 V vs Ref, and the specific wear amount is 2.9 × 10 −11 g / N · mm, which is a very small wear amount as compared with the case of only plasma nitriding treatment. Became.

【0051】[0051]

【発明の効果】本発明によれば、鉄鋼材料をプラズマ窒
化し、その後に窒素イオンを注入し、鉄鋼材料表面の窒
素濃度を30原子%以上にするので、数十〜数百μmの
硬化深さで、高耐衝撃性,高耐摩耗性,高耐食性の表面
処理層が得られ、この種の鉄鋼材料を用いる自動車エン
ジンなどを長寿命化できる。
According to the present invention, since the steel material is plasma-nitrided and then nitrogen ions are implanted to make the nitrogen concentration on the surface of the steel material 30 atomic% or more, the hardening depth of several tens to several hundreds μm. As a result, a surface treatment layer having high impact resistance, high wear resistance, and high corrosion resistance can be obtained, and the life of an automobile engine using this type of steel material can be extended.

【図面の簡単な説明】[Brief description of drawings]

【図1】ステンレス鋼SUS440Cのプラズマ窒化品
をGDS(グロー放電発光分析)で分析した深さ方向の窒
素分布を示す図である。
FIG. 1 is a diagram showing a nitrogen distribution in a depth direction of a plasma nitrided product of stainless steel SUS440C analyzed by GDS (Glow Discharge Optical Emission Analysis).

【図2】410℃でプラズマ窒化後に窒素イオンを注入
したステンレス鋼SUS440Cの深さ方向の窒素分布
を示す図である。
FIG. 2 is a diagram showing nitrogen distribution in the depth direction of stainless steel SUS440C implanted with nitrogen ions after plasma nitriding at 410 ° C.

【図3】410℃でプラズマ窒化後に窒素イオンを注入
したステンレス鋼SUS440Cの深さ方向の耐食性を
示す図である。
FIG. 3 is a diagram showing corrosion resistance in the depth direction of stainless steel SUS440C implanted with nitrogen ions after plasma nitriding at 410 ° C.

【図4】図2および図3の結果に基づき、410℃でプ
ラズマ窒化後に窒素イオンを注入したステンレス鋼SU
S440Cの表面窒素濃度と耐食性との関係を示す図で
ある。
FIG. 4 is a stainless steel SU implanted with nitrogen ions after plasma nitriding at 410 ° C. based on the results of FIGS. 2 and 3.
It is a figure which shows the relationship between the surface nitrogen concentration of S440C, and corrosion resistance.

【図5】摩耗試験の結果を比摩耗量で示す図表である。FIG. 5 is a chart showing the results of a wear test as specific wear amounts.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 山口 静 茨城県日立市大みか町七丁目1番1号 株 式会社日立製作所日立研究所内 Fターム(参考) 4K028 BA02 BA12 4K029 AA02 BC01 BC02 BD03 CA10 FA05    ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Shizuka Yamaguchi             7-1-1, Omika-cho, Hitachi-shi, Ibaraki Prefecture             Inside the Hitachi Research Laboratory, Hitachi Ltd. F-term (reference) 4K028 BA02 BA12                 4K029 AA02 BC01 BC02 BD03 CA10                       FA05

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 鉄鋼材料をプラズマ窒化し、その後に窒
素イオンを注入し、前記鉄鋼材料表面の窒素濃度を30
原子%以上にする鉄鋼材料の表面処理方法。
1. A steel material is plasma-nitrided, and then nitrogen ions are implanted to increase the nitrogen concentration on the surface of the steel material to 30.
A surface treatment method for steel materials, which is at least atomic%.
【請求項2】 請求項1に記載の鉄鋼材料の表面処理方
法において、 前記鉄鋼材料が、ステンレス鋼,合金工具鋼(SKD
材),クロム・モリブデン鋼(SCM材),高速度工具鋼
(SKH材)のいずれかであることを特徴とする鉄鋼材料
の表面処理方法。
2. The surface treatment method for a steel material according to claim 1, wherein the steel material is stainless steel, alloy tool steel (SKD).
Material), chrome / molybdenum steel (SCM material), high speed tool steel
(SKH material), a surface treatment method for a steel material.
【請求項3】 プラズマ窒化し、その後に窒素イオンを
注入し、表面の窒素濃度を30原子%以上にした耐衝
撃,耐摩耗,耐食鉄鋼材料。
3. A shock-resistant, wear-resistant and corrosion-resistant steel material, which has been subjected to plasma nitriding and then nitrogen ion implantation to make the surface nitrogen concentration 30 atomic% or more.
【請求項4】 請求項3に記載の耐衝撃,耐摩耗,耐食
鉄鋼材料において、 前記鉄鋼材料が、ステンレス鋼,合金工具鋼(SKD
材),クロム・モリブデン鋼(SCM材),高速度工具鋼
(SKH材)のいずれかであることを特徴とする耐衝撃,
耐摩耗,耐食鉄鋼材料。
4. The impact resistant, wear resistant and corrosion resistant steel material according to claim 3, wherein the steel material is stainless steel, alloy tool steel (SKD).
Material), chrome / molybdenum steel (SCM material), high speed tool steel
Impact resistance, characterized by being any of (SKH material),
Wear and corrosion resistant steel material.
JP2001262608A 2001-08-31 2001-08-31 Surface treatment method for steel material, and steel material having impact resistance, abrasion resistance, and corrosion resistance Pending JP2003073800A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005272978A (en) * 2004-03-26 2005-10-06 Sdc:Kk Surface structure of austenitic stainless steel
JP2010168603A (en) * 2009-01-20 2010-08-05 Ntn Corp WEAR-RESISTANT CrN FILM
JP2015161011A (en) * 2014-02-28 2015-09-07 学校法人 芝浦工業大学 High nitrogen solid solution stainless steel and method for forming mold material
CN106637329A (en) * 2015-11-02 2017-05-10 丹阳市米可汽车零部件厂 Automobile part surface treatment method
CN111852696A (en) * 2020-07-24 2020-10-30 秦皇岛零叁邀柒科技开发有限公司 Anion intelligent fuel-saving and emission-reducing system for automobile fuel engine and operation method thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005272978A (en) * 2004-03-26 2005-10-06 Sdc:Kk Surface structure of austenitic stainless steel
JP4505246B2 (en) * 2004-03-26 2010-07-21 株式会社エスディーシー Formation method of hardened surface of corrosion resistant and wear resistant austenitic stainless steel
JP2010168603A (en) * 2009-01-20 2010-08-05 Ntn Corp WEAR-RESISTANT CrN FILM
JP2015161011A (en) * 2014-02-28 2015-09-07 学校法人 芝浦工業大学 High nitrogen solid solution stainless steel and method for forming mold material
CN106637329A (en) * 2015-11-02 2017-05-10 丹阳市米可汽车零部件厂 Automobile part surface treatment method
CN111852696A (en) * 2020-07-24 2020-10-30 秦皇岛零叁邀柒科技开发有限公司 Anion intelligent fuel-saving and emission-reducing system for automobile fuel engine and operation method thereof
CN111852696B (en) * 2020-07-24 2023-08-11 秦皇岛零叁邀柒科技开发有限公司 Negative ion intelligent fuel-saving and emission-reducing system for automobile fuel engine and operation method thereof

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