JPH06192817A - Al or al alloy member surface-modified by metal ion implantation - Google Patents

Al or al alloy member surface-modified by metal ion implantation

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Publication number
JPH06192817A
JPH06192817A JP34911692A JP34911692A JPH06192817A JP H06192817 A JPH06192817 A JP H06192817A JP 34911692 A JP34911692 A JP 34911692A JP 34911692 A JP34911692 A JP 34911692A JP H06192817 A JPH06192817 A JP H06192817A
Authority
JP
Japan
Prior art keywords
ion
ion implantation
alloy member
ions
modified
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP34911692A
Other languages
Japanese (ja)
Inventor
Atsushi Munemasa
淳 宗政
Tadashi Kumakiri
正 熊切
Noriyuki Inuishi
典之 犬石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP34911692A priority Critical patent/JPH06192817A/en
Publication of JPH06192817A publication Critical patent/JPH06192817A/en
Withdrawn legal-status Critical Current

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Abstract

PURPOSE:To provide a modified surface excellent in resistance to corrosion and wear by forming a layer enriched with a special metal element on the surface of an Al member by ion implantation. CONSTITUTION:One or more kinds of metal elements selected from groups IIIA, IVA, VA, VIA; VIII and VIB are ion-implanted in the surface of an Al or Al alloy member to form a layer enriched with the elements on the member surface. The metal ion alone or the metal ions are preferably implanted at 1X10<15>ions/cm<2>. As a result, a surface-modified Al or Al alloy member, which is not pitted in a corrosive environment contg. a halogen ion such as chlorine ion and exhibits excellent wear resistance even when slid, is obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、金属イオン注入によっ
て表面を改質したAlまたはAl合金部材に関するもの
であり、特に塩素イオン等のハロゲンが存在する腐食環
境下においても孔食を発生しない様な優れた耐食性や、
摺動される環境下においても優れた耐摩耗性を示す表面
改質AlまたはAl合金部材に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an Al or Al alloy member whose surface has been modified by metal ion implantation, and particularly to prevent pitting corrosion even in a corrosive environment in which halogen such as chlorine ions exists. Excellent corrosion resistance,
The present invention relates to a surface-modified Al or Al alloy member that exhibits excellent wear resistance even in a sliding environment.

【0002】[0002]

【従来の技術】AlやAl合金は軽量且つ美麗で機械的
性質も優れていることから、缶,自動車,建材,家電等
様々な分野において幅広く使用されている。
2. Description of the Related Art Since Al and Al alloys are lightweight, beautiful and have excellent mechanical properties, they are widely used in various fields such as cans, automobiles, building materials and home appliances.

【0003】AlやAl合金は、基本的に耐食性が良好
であり、この耐食性は、表面に自然酸化によって形成さ
れる酸化被膜によって達成される。しかしながら、Al
やAl合金は塩素イオン等のハロゲンが存在する腐食環
境下では、上記の酸化皮膜が容易に破壊されて活性なA
l表面が露出し、その部分で比較的容易に孔食が発生す
るという欠点がある。そこでAlやAl合金における孔
食の発生を防止することが要求され、各種の金属元素を
添加した耐食性Al合金が提案されているが、満足し得
る特性を備えたAl合金は開発されていないのが実情で
ある。またAlやAl合金の孔食防止技術として、(1)
アルマイト処理、(2) Zn被覆処理、(3) 樹脂被覆等が
実施されているが、いずれも孔食防止の為の有効な手段
とはなっていない。一方、AlやAl合金は耐摩耗性に
劣るという欠点がある為、適用分野は著しく制限されて
いた。
Al and Al alloys basically have good corrosion resistance, and this corrosion resistance is achieved by an oxide film formed on the surface by natural oxidation. However, Al
In Al and Al alloys, in a corrosive environment where halogens such as chlorine ions are present, the above oxide film is easily destroyed and active A
There is a disadvantage that the surface is exposed and pitting corrosion occurs relatively easily at that portion. Therefore, it is required to prevent the occurrence of pitting corrosion in Al and Al alloys, and corrosion-resistant Al alloys to which various metal elements are added have been proposed, but Al alloys having satisfactory properties have not been developed. Is the reality. In addition, as a pitting corrosion prevention technology for Al and Al alloys, (1)
Although alumite treatment, (2) Zn coating treatment, (3) resin coating, etc. have been carried out, none of them are effective means for preventing pitting corrosion. On the other hand, Al and Al alloys have the drawback of being inferior in wear resistance, so that the fields of application have been significantly limited.

【0004】[0004]

【発明が解決しようとする課題】本発明はこうした事情
に着目されたものであって、その目的は、塩素イオン等
のハロゲンが存在する腐食環境下においても孔食を発生
しない様な優れた耐食性や、摺動環境下においても優れ
た耐摩耗性を示す表面改質AlまたはAl合金部材を提
供することにある。
The present invention has been made in view of these circumstances, and its purpose is to provide excellent corrosion resistance such that pitting corrosion does not occur even in a corrosive environment in which halogen such as chlorine ions exists. Another object is to provide a surface-modified Al or Al alloy member that exhibits excellent wear resistance even in a sliding environment.

【0005】[0005]

【課題を解決する為の手段】上記目的を達成し得た本発
明とは、AlまたはAl合金部材の表面に、IIIa,IV
a,Va,VIa,VIIIおよびIVb族よりなる群から選ば
れる1種以上の金属元素をイオン注入し、AlまたはA
l合金部材表面に、上記金属元素の濃度富化層を形成し
たものである点に要旨を有する金属イオン注入により表
面改質したAlまたはAl合金部材である。
According to the present invention which has achieved the above object, the surface of an Al or Al alloy member has IIIa, IV
a, Va, VIa, VIII and IVb are ion-implanted with at least one metal element selected from the group consisting of
1 is an Al or Al alloy member surface-modified by metal ion implantation, which is characterized in that a concentration-enriched layer of the above metal element is formed on the surface of the l alloy member.

【0006】[0006]

【作用】本発明で利用されるイオン注入の手法は、加速
された高エネルギーのイオンを目的深さまで打ち込んで
AlまたはAl合金部材(以下、Al部材で代表する)
の表面を改質するものであり、半導体分野における不純
物ドービング手段として利用されている他、鋼を中心と
する金属材料の表面改質にもその適用が進められている
が(例えば特開平3−6362号)、半導体分野を除け
ばこれまでのところ実用化はあまり進んでいない。
The ion implantation method used in the present invention is carried out by implanting accelerated high-energy ions to a target depth and forming an Al or Al alloy member (hereinafter, represented by an Al member).
In addition to being used as an impurity doving means in the field of semiconductors, its application is also being advanced for surface modification of metal materials centering on steel (see, for example, Japanese Patent Laid-Open No. Hei 3- 6362), except for the semiconductor field, so far no practical progress has been made.

【0007】本発明に係るAl部材は、この様なイオン
注入の手法をAl部材の表面改質に利用したものであ
り、Al部材表層部にはイオン注入によって非熱平衡物
質層が形成される。即ちこれまで行なわれてきた熱プロ
セスによる合金化では、熱平衡状態にある合金層が形成
され、該合金層は熱平衡物質層であるが故にその物質改
善にも自ずから限度があった。これに対し本発明では、
非熱平衡物質層を形成することにより、従来からは予測
できない特性を得ることができる。換言すれば、イオン
注入される元素と同じ元素を添加したAl合金を形成し
ても本発明のAl合金の様な耐食性や耐摩耗性の発揮は
期待できないのである。
The Al member according to the present invention uses such an ion implantation method for surface modification of the Al member, and a non-thermal equilibrium substance layer is formed on the surface layer of the Al member by ion implantation. That is, in the alloying by the thermal process that has been performed so far, an alloy layer in a thermal equilibrium state is formed, and since the alloy layer is a thermal equilibrium substance layer, there is a limit to the improvement of the substance. On the other hand, in the present invention,
By forming the non-thermal equilibrium material layer, it is possible to obtain properties that cannot be predicted conventionally. In other words, even if an Al alloy to which the same element as the ion-implanted element is added is formed, it cannot be expected to exhibit the corrosion resistance and wear resistance as the Al alloy of the present invention.

【0008】ところでAl部材の特性を改善するに当た
ってはAl部材にイオン注入を行ないさえすれば良いと
言うものではなく、改善しようとする特性に合わせて特
定の元素イオンを選び、且つその注入量および注入エネ
ルギーを適当に設定する必要がある。本発明者らが、種
々の元素イオンについてイオン注入実験を重ねた結果、
Al部材の耐食性を著しく改善する為には、IVa,V
a,VIaおよびVIII族よりなる群から選ばれる1種以上
の金属元素をイオン注入すれば良いことが分かった。ま
た耐摩耗性を改善する為には、IIIa,IVa,Va,VI
a,VIII族およびIVb族よりなる群から選ばれる1種以
上の金属元素をイオン注入すれば良いことも分かった。
従って、IVa,Va,VIaおよびVIII族よりなる群から
選ばれる1種以上の金属元素をイオン注入すれば、耐食
性と共に耐摩耗性も改善される。いずれにしても改善し
たい特性に応じて、AlまたはAl合金部材の表面に、
IIIa,IVa,Va,VIa,VIII族およびIVb族よりな
る群から選ばれる1種以上の金属元素をイオン注入すれ
ば良い。
In order to improve the characteristics of the Al member, it is not necessary to implant ions into the Al member, but specific elemental ions are selected according to the characteristics to be improved, and the implantation amount and It is necessary to set the implantation energy appropriately. As a result of the inventors performing ion implantation experiments on various elemental ions,
In order to significantly improve the corrosion resistance of Al members, IVa, V
It has been found that ion implantation may be performed with at least one metal element selected from the group consisting of a, VIa and VIII groups. In order to improve wear resistance, IIIa, IVa, Va, VI
It has also been found that it is sufficient to ion-implant one or more metal elements selected from the group consisting of a, VIII and IVb groups.
Therefore, by ion-implanting at least one metal element selected from the group consisting of IVa, Va, VIa and VIII groups, the corrosion resistance and the wear resistance are improved. In any case, on the surface of the Al or Al alloy member, depending on the characteristics to be improved,
Ions may be implanted with at least one metal element selected from the group consisting of IIIa, IVa, Va, VIa, VIII and IVb groups.

【0009】イオン注入では高エネルギーイオンをAl
部材の表層部に強制的に打ち込むが、表面層に別物質層
が形成される訳ではないので、めっき等の表面処理のよ
うに基材と異なる材質の皮膜を密着させる場合と異な
り、イオン注入表層部の基材層との一体性は極めて良好
であり、剥離の問題は生じない。
In ion implantation, high energy ions are replaced with Al.
Although it is forcibly driven into the surface layer of the member, it does not mean that another material layer is formed on the surface layer, so unlike the case where a coating of a material different from the base material is adhered, as in the case of surface treatment such as plating, ion implantation The integrity of the surface layer portion with the base material layer is extremely good, and the problem of peeling does not occur.

【0010】本発明に係るAl部材は上記作用効果と奏
するものであるが、これらの効果を得るには上記金属イ
オンを単独または合計で1×1015イオン/ cm2以上注
入することが望まれる。一方過剰に注入すると注入エネ
ルギーに応じてスパッタ現象による表面切削現象が顕著
になるので、注入エネルギーおよび注入量は慎重に決定
する必要がある。こうした観点からすれば、注入エネル
ギーは5〜250KV程度とし、且つ注入量は単独また
は合計で5×1018イオン/ cm2以下に抑えることが望
ましい。
The Al member according to the present invention has the above-mentioned effects, and in order to obtain these effects, it is desirable to implant the above metal ions alone or in a total of 1 × 10 15 ions / cm 2 or more. . On the other hand, if the implantation is excessive, the surface cutting phenomenon due to the spattering phenomenon becomes remarkable depending on the implantation energy. Therefore, the implantation energy and the implantation amount must be carefully determined. From this point of view, it is desirable that the implantation energy is about 5 to 250 KV, and the implantation amount is suppressed to 5 × 10 18 ions / cm 2 or less alone or in total.

【0011】以下本発明を実施例によって更に詳細に説
明するが、下記実施例は本発明を限定する性質のもので
はなく、前・後記の趣旨に徴して設計変更することはい
ずれも本発明の技術的範囲に含まれるものである。
The present invention will be described in more detail with reference to the following examples, but the following examples are not intended to limit the present invention, and any design changes that may be made in view of the spirits of the preceding and the following are not intended to limit the present invention. It is included in the technical scope.

【0012】[0012]

【実施例】【Example】

実施例1 純Al基板(厚さ:1mm)に、各種の金属イオンを注入
し、アノード分極曲線測定に基づく孔食発生電位から各
種金属イオン注入Al部材の耐食性を評価した。このと
きのイオン注入条件および耐食性試験条件は下記の通り
である。 (イオン注入条件) 加速電圧:70KV 注入量 :1×1017イオン/ cm2 注入面 :25×25(mm)面(片面に注入) (耐食性試験条件) 溶液:3%NaCl(30±1℃) 掃引速度:30mV/min 試験面積:1 cm2
Example 1 Various metal ions were injected into a pure Al substrate (thickness: 1 mm), and corrosion resistance of various metal ion-implanted Al members was evaluated from the pitting corrosion generation potential based on the measurement of the anodic polarization curve. The ion implantation conditions and the corrosion resistance test conditions at this time are as follows. (Ion implantation condition) Acceleration voltage: 70 KV Injection amount: 1 × 10 17 ions / cm 2 Injection surface: 25 × 25 (mm) surface (Implanted on one surface) (Corrosion resistance test condition) Solution: 3% NaCl (30 ± 1 ° C.) ) Sweep speed: 30 mV / min Test area: 1 cm 2

【0013】耐食性の試験結果を図1に示す。尚図1に
は比較の為にイオン注入をしなかった純Al基板の孔食
発生電位についても示した。この結果から明らかな様
に、Zr,Ti,Nb,V,Mo,W,Cr,Ni,P
d等の金属元素をイオン注入すると、未処理の純Al基
板より貴な孔食発生電位を示す様になり、耐食性が改善
されることが分かる。特に、Ti,Nb,Mo等をイオ
ン注入すると孔食発生電位が100mV以上貴になり、こ
れらのイオン注入効果が極めて高いことが分かる。
The results of the corrosion resistance test are shown in FIG. For comparison, FIG. 1 also shows the pitting corrosion generation potential of a pure Al substrate which was not ion-implanted. As is clear from this result, Zr, Ti, Nb, V, Mo, W, Cr, Ni, P
It can be seen that when the metal element such as d is ion-implanted, the pitting corrosion generation potential becomes more noble than that of the untreated pure Al substrate, and the corrosion resistance is improved. Particularly, when Ti, Nb, Mo, etc. are ion-implanted, the pitting corrosion generation potential becomes 100 mV or more noble, and it is understood that the ion implantation effect of these is extremely high.

【0014】実施例2 円板状のAl合金(A6061,直径:50mm,厚さ:
8mm)に、各種の金属イオンを注入し、往復摺動型ボー
ルオンディスク摩耗試験に基づく動摩擦係数から耐摩耗
性を評価した(摩耗量は動摩擦係数に比例する)。この
ときのイオン注入条件および耐摩耗性試験条件は下記の
通りである。 (イオン注入条件) 加速電圧:70KV(但し、Cは30KV) 注入量 :1×1017イオン/ cm2(但し、複合注入の
場合は各々1×1017イオン/ cm2) 注入面 :φ50mmの面(片面のみ) (耐摩耗性試験条件) 摺動速度:12.7mm/min 摺動幅 :5mm 荷重 :20gf 摺動回数:17回 ボール圧子:SUS440C(直径:10mm) 試験環境:室温,無潤滑
Example 2 A disk-shaped Al alloy (A6061, diameter: 50 mm, thickness:
8 mm), various metal ions were injected, and the wear resistance was evaluated from the dynamic friction coefficient based on the reciprocating sliding ball-on-disk wear test (the wear amount is proportional to the dynamic friction coefficient). Ion implantation conditions and wear resistance test conditions at this time are as follows. (Ion implantation conditions) Acceleration voltage: 70 KV (however, C is 30 KV) Implantation amount: 1 × 10 17 ions / cm 2 (However, in the case of compound implantation, each is 1 × 10 17 ions / cm 2 ) Implantation surface: φ50 mm Surface (one side only) (Abrasion resistance test conditions) Sliding speed: 12.7 mm / min Sliding width: 5 mm Load: 20 gf Sliding frequency: 17 times Ball indenter: SUS440C (diameter: 10 mm) Test environment: room temperature, no lubrication

【0015】耐摩耗性の試験結果を図2および図3に示
す。尚図2,3には比較の為にイオン注入をしなかった
上記Al合金の動摩擦係数についても示した。この結果
から明らかな様に、未注入の場合には動摩擦係数が0.7
程度であるのに対し、Pd,Ta,Mo,Ni,(Ti
+C),(C+Y)等の金属元素をイオン注入したもの
では動摩擦係数を0.23以下(未注入材の1/3以下)に
低減することができ、耐摩耗性が改善されていることが
分かる。
The results of the abrasion resistance test are shown in FIGS. 2 and 3. For comparison, FIGS. 2 and 3 also show the dynamic friction coefficient of the above Al alloys without ion implantation. As is clear from this result, the dynamic friction coefficient is 0.7 when the injection is not performed.
However, Pd, Ta, Mo, Ni, (Ti
It can be seen that in the case of ion-implanting a metal element such as + C) or (C + Y), the dynamic friction coefficient can be reduced to 0.23 or less (1/3 or less of the non-implanted material), and the wear resistance is improved.

【0016】[0016]

【発明の効果】本発明は以上の様に構成されており、金
属イオンに注入層を形成することによって優れた耐食性
や耐摩耗性を示すAl(またはAl合金)部材を得るこ
とができた。かくして従来では使用が困難であった腐食
性環境下や摺動環境下においても、好適に使用すること
ができ、AlおよびAl合金部材の適用範囲が大きく拡
がることが期待される。
EFFECTS OF THE INVENTION The present invention is configured as described above, and an Al (or Al alloy) member having excellent corrosion resistance and wear resistance can be obtained by forming an implantation layer in metal ions. Thus, it can be suitably used even in a corrosive environment or a sliding environment, which has been difficult to use in the past, and it is expected that the applicable range of Al and Al alloy members will be greatly expanded.

【図面の簡単な説明】[Brief description of drawings]

【図1】各種金属イオン注入Al部材の耐食性試験結果
を示すグラフである。
FIG. 1 is a graph showing the corrosion resistance test results of various metal ion-implanted Al members.

【図2】各種金属イオン注入Al部材の耐摩耗性試験結
果の一例を示すグラフである。
FIG. 2 is a graph showing an example of wear resistance test results of various metal ion-implanted Al members.

【図3】各種金属イオン注入Al部材の耐摩耗性試験結
果の他の例を示すグラフである。
FIG. 3 is a graph showing another example of wear resistance test results of various metal ion-implanted Al members.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 AlまたはAl合金部材の表面に、III
a,IVa,Va,VIa,VIIIおよびIVb族よりなる群か
ら選ばれる1種以上の金属元素をイオン注入し、Alま
たはAl合金部材表面に、上記金属元素の濃度富化層を
形成したものであることを特徴とする金属イオン注入に
より表面改質したAlまたはAl合金部材。
1. A surface of an Al or Al alloy member is provided with III
a, IVa, Va, VIa, VIII and IVb, wherein at least one metal element selected from the group consisting of groups is ion-implanted to form a concentration-enriched layer of the metal element on the surface of the Al or Al alloy member. An Al or Al alloy member whose surface is modified by metal ion implantation.
JP34911692A 1992-12-28 1992-12-28 Al or al alloy member surface-modified by metal ion implantation Withdrawn JPH06192817A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34911692A JPH06192817A (en) 1992-12-28 1992-12-28 Al or al alloy member surface-modified by metal ion implantation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34911692A JPH06192817A (en) 1992-12-28 1992-12-28 Al or al alloy member surface-modified by metal ion implantation

Publications (1)

Publication Number Publication Date
JPH06192817A true JPH06192817A (en) 1994-07-12

Family

ID=18401600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34911692A Withdrawn JPH06192817A (en) 1992-12-28 1992-12-28 Al or al alloy member surface-modified by metal ion implantation

Country Status (1)

Country Link
JP (1) JPH06192817A (en)

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