JP2000239829A - Member with solid lubricating film - Google Patents
Member with solid lubricating filmInfo
- Publication number
- JP2000239829A JP2000239829A JP11038007A JP3800799A JP2000239829A JP 2000239829 A JP2000239829 A JP 2000239829A JP 11038007 A JP11038007 A JP 11038007A JP 3800799 A JP3800799 A JP 3800799A JP 2000239829 A JP2000239829 A JP 2000239829A
- Authority
- JP
- Japan
- Prior art keywords
- film
- solid lubricating
- layer
- lubricating film
- crn
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/80—Technologies aiming to reduce greenhouse gasses emissions common to all road transportation technologies
- Y02T10/86—Optimisation of rolling resistance, e.g. weight reduction
Landscapes
- Sliding-Contact Bearings (AREA)
- Rolling Contact Bearings (AREA)
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、摺動摩耗部品や工
具などに用いるのに適した、低摩擦係数でかつ高耐摩耗
性を有する固体潤滑膜付き部材に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a member provided with a solid lubricating film having a low friction coefficient and high wear resistance, which is suitable for use in sliding wear parts and tools.
【０００２】[0002]
【従来の技術】工具や機械部品の摩擦係数を低減して耐
摩耗特性を向上させる手段に、部材表面に固体潤滑膜を
形成する方法が知られている。例えば、機械部品表面に
油を塗布したり、潤滑微粒子を分散させたフィルムやオ
イルで覆ったり、スパッタリング法でＭｏＳ2膜などを
形成したりする方法などである。2. Description of the Related Art A method of forming a solid lubricating film on the surface of a member is known as a means for reducing the coefficient of friction of a tool or a mechanical part to improve the wear resistance. For example, a method of applying oil to the surface of a mechanical component, covering with a film or oil in which lubricating fine particles are dispersed, forming a MoS 2 film by a sputtering method, or the like is used.
【０００３】しかしこれら従来の方法では、固体潤滑膜
と部材とが拡散層を形成せず、部材と固体潤滑膜との密
着力が弱かった。また膜自体は耐摩耗性を有しないの
で、長期間使用していると膜が摩耗し、部材表面から膜
が剥離してしまうという欠点があった。However, in these conventional methods, the solid lubricating film and the member do not form a diffusion layer, and the adhesion between the member and the solid lubricating film is weak. Further, since the film itself does not have abrasion resistance, there has been a defect that the film is worn out after being used for a long time, and the film is peeled off from the member surface.
【０００４】また、ＭｏＳ2などの固体潤滑膜は一般に
密着力が弱くて吸湿性が高く、膜自身が水分を吸着して
粘性をもち、部材から剥離しやすかった。In addition, a solid lubricating film such as MoS 2 generally has low adhesion and high hygroscopicity, and the film itself has a viscosity by adsorbing moisture and is easily peeled off from a member.
【０００５】更に、高速回転するポンプの軸や軸受けな
どでは、特に高摩耗特性と高潤滑性（低摩擦係数）とが
必要で、特に水中、熱水中、高温で使用される部材の固
体潤滑膜にあっては、より高い密着力を必要とする。上
記従来の固体潤滑膜はこのような用途に使えず、高価な
セラミックス材や溶射材などを使用せざるを得なかっ
た。Further, high-speed rotating pump shafts and bearings require particularly high wear characteristics and high lubricity (low friction coefficient). Particularly, solid lubrication of members used in water, hot water and at high temperatures is required. For films, higher adhesion is required. The above-mentioned conventional solid lubricating film cannot be used for such a purpose, and has to use expensive ceramic materials and thermal spray materials.
【０００６】[0006]
【発明が解決しようとする課題】そこで本発明は、安価
な固体潤滑膜を用いても固体潤滑膜と部材との密着力が
低下せず、長期間にわたって低摩擦係数が得られ、しか
も高い耐摩耗性が保持できる固体潤滑膜付き部材を提供
することを目的とする。SUMMARY OF THE INVENTION Accordingly, the present invention provides a low friction coefficient over a long period of time without lowering the adhesion between the solid lubricating film and the member even if an inexpensive solid lubricating film is used. An object of the present invention is to provide a member with a solid lubricating film that can maintain abrasion.
【０００７】[0007]
【課題を解決するための手段】上記目的を解決するため
の本発明の固体潤滑膜付き部材は、膜面が結晶面（２０
０）に配向したＣｒＮ膜を第１層に、固体潤滑膜を第２
層に備えたことを特徴とする。According to the present invention, there is provided a member with a solid lubricating film, wherein the film surface has a crystal face (20).
0) as the first layer and the solid lubricating film as the second layer.
Characterized by being provided in a layer.
【０００８】本発明の固体潤滑膜付き部材の第１層のＣ
ｒＮ膜は、窒素ガス圧を２０〜５０ｍＴｏｒｒ、バイア
ス電圧を０Ｖとするカソードアークイオンプレーティン
グ法によって形成されることが望ましい。[0008] C of the first layer of the member with a solid lubricating film of the present invention
The rN film is preferably formed by a cathode arc ion plating method with a nitrogen gas pressure of 20 to 50 mTorr and a bias voltage of 0V.
【０００９】また、第２層の固体潤滑膜は、イオンプレ
ーティング法、スパッタリング法、または、ショットピ
ーニング法によって形成された、ＭｏＳ2膜、ＷＳ2膜、
ＮｂＳ2膜、雲母膜、Ｓｂ2Ｏ3膜、ＢＮ膜、ＷＳｅ膜、
ＭｏＳｅ2膜、Ａｕ膜、または、Ａｇ膜であることが望
ましい。The second layer of the solid lubricating film is formed of an MoS 2 film, a WS 2 film, or a MoS 2 film formed by an ion plating method, a sputtering method, or a shot peening method.
NbS 2 film, mica film, Sb 2 O 3 film, BN film, WSe film,
It is desirable that the film be a MoSe 2 film, an Au film, or an Ag film.
【００１０】[0010]
【発明の実施の形態】上記構成による本発明の固体潤滑
膜付き部材は、第１層のＣｒＮ膜の表面に形成された４
〜７μｍ程度の微細な凹凸の上に第２層が形成されてい
るので、第１層と第２層との接触面積は大きく、また、
アンカー効果も生じている。このため固体潤滑膜が長期
にわたって使用でき、また、固体潤滑膜が摩耗しても凹
部に堆積している固体潤滑膜が相手材と接触して掘り起
こされ、表面に固体潤滑膜の粒子が染み出てくるので、
更に長期間潤滑性が保たれる。DESCRIPTION OF THE PREFERRED EMBODIMENTS The member with a solid lubricating film according to the present invention having the above-described structure has a structure in which the surface of a first layer CrN film is formed.
Since the second layer is formed on fine irregularities of about 7 μm, the contact area between the first layer and the second layer is large.
An anchor effect also occurs. Therefore, the solid lubricating film can be used for a long period of time, and even if the solid lubricating film is worn, the solid lubricating film deposited in the concave portion comes into contact with the partner material and is dug up, so that particles of the solid lubricating film exude on the surface. Will come
Further, lubricity is maintained for a long time.
【００１１】本発明の部材の基材には、従来から機械の
摺動摩耗部品や切削工具などに用いられているものが使
用できる。例えば、金型用のＳＫＤ鋼、ＳＫＨ鋼、ＳＫ
Ｓ鋼、機械構造用のＳＣ鋼などである。As the base material of the member of the present invention, those conventionally used for sliding wear parts of machines and cutting tools can be used. For example, SKD steel, SKH steel, SK for molds
S steel, SC steel for machine structures, and the like.
【００１２】第１層のＣｒＮ膜は、それ自身例えば摩擦
係数：０．３、ビッカス硬さ：１８００ＨＶと摩擦特
性、耐食性に優れた膜である。この膜はカソードアーク
式イオンプレーティング法で形成できる。The CrN film of the first layer is a film having excellent friction characteristics and corrosion resistance, for example, having a friction coefficient of 0.3 and a Viccus hardness of 1800 HV. This film can be formed by a cathodic arc ion plating method.
【００１３】このカソードアーク式イオンプレーティン
グ法は、蒸発源である金属ターゲットを陰極、チャンバ
ーを陽極としてこれらの間にアーク放電を起こさせ、金
属蒸気をイオン化し、更に反応ガスもイオンとの衝突に
よりイオン化し、部材表面に積層させて膜を形成すると
いうものである。例えばＣｒＮ膜を形成する場合は、金
属ターゲットをＣｒ金属とし、チャンバー内に窒素原子
を含む反応ガスを導入すればよい。In the cathode arc ion plating method, an arc discharge is generated between a metal target as an evaporation source as a cathode and a chamber as an anode to ionize metal vapor, and the reaction gas also collides with ions. To form a film by laminating on the surface of the member. For example, when a CrN film is formed, the metal target may be Cr metal, and a reaction gas containing nitrogen atoms may be introduced into the chamber.
【００１４】カソードアーク式イオンプレーティング法
は、金属のイオン化率が高く、また、複数の蒸発源をチ
ャンバー内の上下左右に設置できるので、複合膜や、大
型形状や複雑形状の部材に均一な厚さの膜が形成でき
る。In the cathodic arc ion plating method, the metal ionization rate is high, and a plurality of evaporation sources can be set up, down, left and right in the chamber. A film having a thickness can be formed.
【００１５】ＣｒＮ膜の形成条件で、窒素ガス圧２０〜
５０ｍＴｏｒｒ、バイアス電圧０Ｖにすると、ＣｒＮの
結晶配向面が（２００）になる。この条件では、膜の成
長が柱状晶になり、柱が独立して立つているようにな
る。上方から観察すると高低差が５〜７μｍの膜表面と
なり、ピンホール数も多くなる。Under the conditions for forming the CrN film, a nitrogen gas pressure of 20 to
At 50 mTorr and a bias voltage of 0 V, the crystal orientation plane of CrN becomes (200). Under these conditions, the growth of the film becomes columnar, and the columns stand independently. When observed from above, the film surface has a height difference of 5 to 7 μm, and the number of pinholes increases.
【００１６】柱状晶を十分形成するには、窒素ガス圧２
０〜５０ｍＴｏｒｒで、バイアス０Ｖとすればよい。バ
イアスを１００Ｖや３００Ｖなどで印加すると膜が緻密
に形成され、柱状晶が見られなくなり、膜表面も平滑に
なってピンホール数も減少してしまうのでよくない。In order to sufficiently form columnar crystals, a nitrogen gas pressure of 2
The bias may be 0 V at 0 to 50 mTorr. When a bias is applied at 100 V, 300 V, or the like, the film is formed densely, columnar crystals are not observed, the surface of the film becomes smooth, and the number of pinholes is reduced.
【００１７】本発明では、形成されたＣｒＮ膜表面に、
ＭｏＳ2、Ａｇ等から選ばれる固体潤滑膜を、イオンプ
レーティング、スパッタリング、またはショットピーニ
ング法で形成する。In the present invention, on the surface of the formed CrN film,
A solid lubricating film selected from MoS 2 , Ag, or the like is formed by ion plating, sputtering, or shot peening.
【００１８】スパッタリング法で固体潤滑膜を形成する
には、直流（ＤＣ）スパッタリングと、高周波（ＲＦ）
スパッタリング法が選択できる。放電ガスに、Ｎｅ、Ａ
ｒ、Ｋｒ等の不活性ガスが利用されるが、取り扱いが容
易であるＡｒガスが最も一般的に適用される。放電ガス
圧を１〜４Ｐａに設定することで、緻密で密着力が高い
固体潤滑膜が形成される。In order to form a solid lubricating film by a sputtering method, direct current (DC) sputtering and high frequency (RF)
A sputtering method can be selected. Ne, A for discharge gas
An inert gas such as r or Kr is used, but Ar gas, which is easy to handle, is most commonly applied. By setting the discharge gas pressure to 1 to 4 Pa, a solid lubricating film having a dense and high adhesion is formed.
【００１９】固体潤滑膜の膜厚は、材料によって異なる
が、例えばＭｏＳ2では０．１〜４μｍがよい。０．１
μｍ未満では十分な潤滑性は得られず、４μｍを超える
と膜のせん断が起こりやすくなり、膜中に多くのＡｒ分
子を含有するので潤滑特性も劣化してくるからである。The thickness of the solid lubricating film varies depending on the material. For example, MoS 2 is preferably 0.1 to 4 μm. 0.1
If the thickness is less than μm, sufficient lubricating properties cannot be obtained. If the thickness exceeds 4 μm, the film is likely to be sheared, and since the film contains many Ar molecules, the lubricating properties deteriorate.
【００２０】ショットピーニング法で固体潤滑膜を形成
するには、第１層を形成した部材に、固体潤滑剤粉末と
合成樹脂粒子とを一定割合で混合した混合体を、乾式ブ
ラスト装置により加工物表面に噴射すればよい。固体潤
滑剤粉末は部材表面に衝突して付着し、樹脂粒子は表面
に衝突すると同時に反発して気体流とともに飛び去る。
このとき、樹脂粒子は表面に付着した固体潤滑粉体を表
面に打ち込み、また擦り込み、密着性の良い固体潤滑膜
が形成される。例えばＭｏＳ2の膜では、厚膜が形成さ
れずらいが、膜厚１μｍ程度で十分である。In order to form a solid lubricating film by the shot peening method, a mixture obtained by mixing a solid lubricant powder and synthetic resin particles at a fixed ratio to a member on which the first layer is formed is processed by a dry blasting apparatus. What is necessary is just to spray on a surface. The solid lubricant powder collides with and adheres to the member surface, and the resin particles collide with the surface and repel and fly away with the gas flow.
At this time, the resin particles strike and rub the solid lubricating powder adhered to the surface to form a solid lubricating film having good adhesion. For example, with a MoS 2 film, it is difficult to form a thick film, but a film thickness of about 1 μm is sufficient.
【００２１】[0021]
【実施例】実施例１ ・・・ 厚さ２ｍｍ、２０ｍｍ角
の工具鋼（ＳＫＨ５１）を基材とし、第１層のＣｒＮ膜
形成にはマルチアーク社製カソードアーク式イオンプレ
ーティング装置を用いた。ターゲットとしてＣｒ金属を
チャンバーに取り付け、基板をエタノールで超音波洗浄
した後、真空チャンバー内にセットし、チャンバー内を
２×１０-5Ｔｏｒｒ以下まで排気した。Example 1 A 2 mm thick, 20 mm square tool steel (SKH51) was used as a base material, and a CrN film as a first layer was formed using a cathode arc type ion plating apparatus manufactured by Multi-Arc. . After a Cr metal was attached to the chamber as a target, the substrate was ultrasonically cleaned with ethanol, then set in a vacuum chamber, and the chamber was evacuated to 2 × 10 −5 Torr or less.
【００２２】基材に−５００Ｖのバイアス電圧を印加
し、Ｃｒ金属のメタルボンバードで基板表面を洗浄し、
４５０℃まで加熱し、Ｃｒイオンの打ち込みを行った。
次に、チャンバー内に窒素ガスを２０ｍＴｏｒｒまで導
入し、バイアス電圧を０ＶとしてＣｒＮ膜を厚さ５．９
μｍ形成した。A bias voltage of -500 V is applied to the substrate, and the surface of the substrate is washed with a metal bombard of Cr metal.
It was heated to 450 ° C. and implanted with Cr ions.
Next, nitrogen gas was introduced into the chamber to 20 mTorr, the bias voltage was set to 0 V, and the CrN film was formed to a thickness of 5.9.
μm was formed.
【００２３】形成したＣｒＮ膜には、面積の約０．１％
がピンホールであることが電気化学的手法によって測定
された。膜の表面を光学顕微鏡で観察すると、全面に凹
凸が見られた。また、表面粗さはＲｍａｘで６μｍ、Ｒ
ｚで３．５μｍの凸凹が形成されていた。硬さはビッカ
ス硬度で１８００ＨＶであった。The formed CrN film has an area of about 0.1%
Was determined to be a pinhole by an electrochemical technique. When the surface of the film was observed with an optical microscope, irregularities were observed on the entire surface. The surface roughness is 6 μm in Rmax,
3.5 μm unevenness was formed in z. The hardness was 1800 HV in Viccus hardness.
【００２４】続いて、ＲＦマグネトロンスパッタリング
装置（日電アネルバ（株）社製ＳＰＦ５３０Ｈ）を用い
て第２層を形成した。所定位置に直径５インチの円盤型
二硫化モリブデン（ＭｏＳ2）ターゲットをセットし、
真空を５×１０-4 Ｐａまで引き、Ａｒガスを０．４Ｐ
ａ導入した。放電電力として３００Ｗ（ターゲットに対
し、２．３７Ｗ／ｃｍ2）投入し、ＭｏＳ2をＡｒガス雰
囲気で厚さ１．２μｍ形成した。Subsequently, a second layer was formed using an RF magnetron sputtering apparatus (SPF530H manufactured by Nidec Anelva Co., Ltd.). A disk-shaped molybdenum disulfide (MoS 2 ) target with a diameter of 5 inches is set at a predetermined position,
Vacuum is pulled down to 5 × 10 -4 Pa and Ar gas is 0.4 P
a was introduced. A discharge power of 300 W (2.37 W / cm 2 with respect to the target) was applied, and MoS 2 was formed to a thickness of 1.2 μm in an Ar gas atmosphere.
【００２５】得られた固体潤滑膜付き部材を、直径６ｍ
ｍ、ＳＵＳ４４０Ｃ製の玉を用いて、荷重１０Ｎ、周速
度０．５ｍ／ｓｅｃ、直径１２ｍｍでボールオンディス
ク試験によって評価した。耐久摩擦回数は、ＭｏＳ2が
無くなる回数とした。また、密着力は、膜にカッターナ
イフを用いて間隔約２ｍｍの碁盤の目状に切り込みを入
れ、粘着テープを貼り、これを一気にひき剥がすことで
評価した。密着力が弱いと粘着テープによって膜が剥離
する。The obtained member with a solid lubricating film is 6 m in diameter.
m, using a ball made of SUS440C, the load was 10 N, the peripheral speed was 0.5 m / sec, and the diameter was 12 mm. The number of durable rubs was the number of times that MoS 2 disappeared. The adhesion was evaluated by making a cut in a grid pattern with an interval of about 2 mm on the film using a cutter knife, applying an adhesive tape, and peeling it off at once. If the adhesion is weak, the film is peeled off by the adhesive tape.
【００２６】比較試料として、ピンホール、凹みをでき
るだけ形成しない電子ビーム式イオンプレーティング装
置を用いて作製した、ビッカス硬度９００ＨＶのＣｒＮ
膜上に、ＭｏＳ2膜をスパッタリングしたものについて
も同様の評価をした。As a comparative sample, a CrN having a Viccus hardness of 900 HV was manufactured using an electron beam ion plating apparatus in which pinholes and depressions were not formed as much as possible.
The same evaluation was performed for a film obtained by sputtering a MoS 2 film on the film.
【００２７】本実施例で得られた試料のボールオンデイ
スク試験での耐久摩擦回数は９００×１０2回で、摩擦
係数は０．１であった。密着力試験では、剥離はみられ
なかった。In the ball-on-disk test of the sample obtained in this example, the number of durable friction was 900 × 10 2 and the friction coefficient was 0.1. No peeling was observed in the adhesion test.
【００２８】一方、比較試料では、ボールオンデイスク
試験による耐久摩擦回数は２７０×１０2回、摩擦係数
は０．１５で、密着力試験では、約５０％が剥離した。On the other hand, in the comparative sample, the number of times of endurance friction in the ball-on-disk test was 270 × 10 2 times, the coefficient of friction was 0.15, and about 50% peeled off in the adhesion test.
【００２９】実施例２ ・・・ 厚さ２ｍｍ、２０ｍｍ
角のＳＵＳ３０４を基材とし、マルチアーク社製カソー
ドアーク式イオンプレーティング装置を用いて第１層の
ＣｒＮ膜を形成した。Ｃｒターゲットをチャンバーに取
り付け、基板をエタノールで超音波洗浄した後、真空チ
ャンバー内にセットして２×１０-5Ｔｏｒｒ以下まで排
気した。基板に−５００Ｖのバイアス電圧を印加し、Ｃ
ｒイオンのメタルボンバードで基板表面を洗浄し、４５
０℃に加熱し、Ｃｒイオンの打ち込みを行った。次に、
Ｎ2ガスを５０ｍＴｏｒｒまで導入し、バイアス電圧０
ＶでＣｒＮ膜を２３μｍ形成した。Example 2 thickness 2 mm, 20 mm
Using the corner SUS304 as a base material, a CrN film as a first layer was formed using a cathode arc type ion plating apparatus manufactured by Multi-Arc. After attaching a Cr target to the chamber and ultrasonic cleaning the substrate with ethanol, the substrate was set in a vacuum chamber and evacuated to 2 × 10 −5 Torr or less. A bias voltage of -500 V is applied to the substrate, and C
Clean the substrate surface with r-ion metal bombardment,
It was heated to 0 ° C. and implanted with Cr ions. next,
N 2 gas was introduced up to 50 mTorr and the bias voltage was 0
V formed a CrN film of 23 μm.
【００３０】膜の表面を観察すると全面に５〜７μｍの
凸凹が形成されていた。この形成したＣｒＮ膜の表面を
観察すると全面に凹凸が見られ、表面粗さはＲｍａｘで
６μｍ、Ｒｚで３．５μｍの凸凹が形成されていた。こ
の膜は、電気化学的手法により、面積の約０．１％がピ
ンホールとして測定された。When the surface of the film was observed, irregularities of 5 to 7 μm were formed on the entire surface. When the surface of the formed CrN film was observed, irregularities were observed on the entire surface, and the surface roughness was 6 μm in Rmax and 3.5 μm in Rz. About 0.1% of the area of this film was measured as a pinhole by an electrochemical method.
【００３１】この試料にＭｏＳ2の第２層を形成した。
ＭｏＳ2粉末と７４０ｇ、５０μｍの樹脂ビーズを３２
０ｇを混合し、噴射エアーガンと試料との距離を１００
ｍｍ、噴射エアー圧を３ｋｇｆ／ｃｍ2として混合粉を
ＣｒＮ膜上に吹き付け、膜厚１μｍのＭｏＳ2膜を形成
した。A second layer of MoS 2 was formed on this sample.
MoS 2 powder and 740 g, 50 μm resin beads 32
0 g, and the distance between the injection air gun and the sample is 100
The mixed powder was sprayed onto the CrN film at a pressure of 3 kgf / cm 2 with a jet air pressure of 3 mm to form a 1 μm-thick MoS 2 film.
【００３２】実施例１と同様の密着力試験では、剥離は
みられなかった。また、フアレックス試験では、開始か
ら２０００秒経過しても殆ど同じ値で、固体潤滑膜の剥
離もみられなかった。In the same adhesion test as in Example 1, no peeling was observed. Further, in the flex test, the values were almost the same even after lapse of 2000 seconds from the start, and no peeling of the solid lubricating film was observed.
【００３３】比較として、同じ基材にＣｒＮ膜を形成せ
ずに同じ方法で膜厚１μｍのＭｏＳ 2膜を形成した試料
についてフアレックス試験を行ったところ、ＭｏＳ2が
粉状に飛び散り、すぐに基材が露出し、８００秒から徐
々にトルクが上昇してしまった。As a comparison, a CrN film was formed on the same substrate.
1 μm thick MoS TwoSample with film formed
Was subjected to a flex test and found that MoSTwoBut
Splatters in a powder form and immediately exposes the substrate, slowly from 800 seconds
Each time the torque has risen.
【００３４】実施例３ ・・・ 実施例１と同様にＣｒ
Ｎ膜を２３μｍ形成し、その上に、神港精器製ピアス式
イオンプレーティング装置を用いて、第２層のＡｇ膜を
形成した。装置に銅−モリブデン製ルツボに台形型のＡ
ｇを入れ、電子ビーム出力を１０ｋＷ、４０ｍＶ、イオ
ン化電流を５０ｍＶ、２０Ａ、バイアス電圧を−２００
Ｖとして３０秒成膜し、Ａｇ膜厚を０．５μｍとした。Example 3 Cr as in Example 1
An N film was formed to a thickness of 23 μm, and a second Ag film was formed thereon using a piercing ion plating apparatus manufactured by Shinko Seiki. The equipment is a copper-molybdenum crucible and a trapezoidal A
g, the electron beam output is 10 kW, 40 mV, the ionization current is 50 mV, 20 A, and the bias voltage is -200.
V was deposited for 30 seconds, and the Ag film thickness was 0.5 μm.
【００３５】耐久摩耗回数を、ボールオンデイスク試験
（荷重２Ｎ）でＡｇ膜が無くなる回数で評価したとこ
ろ、４５０×１０2回、摩擦係数は０．４５であった。
また、実施例１と同様の密着力試験による剥離はみられ
なかった。The number of times of endurance wear was evaluated by the number of times that the Ag film disappeared by a ball-on-disk test (load 2N), and it was 450 × 10 2 times and the friction coefficient was 0.45.
Further, no peeling was observed in the same adhesion test as in Example 1.
【００３６】比較として電子ビーム式イオンプレーティ
ング装置のＣｒＮ膜に、同様の方法で０．５μｍのＡｇ
膜を形成した試料では、耐久摩耗回数は１７０×１０2
回、摩擦係数は０．５であった。実施例１と同様の密着
力試験では、３０％が剥離した。For comparison, a 0.5 μm Ag was applied to the CrN film of the electron beam ion plating apparatus in the same manner.
In the sample on which the film was formed, the number of durable wear was 170 × 10 2
Twice, the coefficient of friction was 0.5. In the adhesion test similar to that in Example 1, 30% was peeled off.
【００３７】実施例４ ・・・ ガスタービンに使用さ
れているグローブ弁は、弁箱にＳＵＳ３１６、グローブ
弁体の摺動部分には、ステライトが盛金されている。使
用温度は３５０℃で、流体の流れの変化が大きく、摩耗
が激しい。その弁箱内部に、（２００）配向したＣｒＮ
膜を実施例１と同様にして１０μｍ形成し、実施例２に
あるショットピーニング法でＭｏＳ2を１μｍ形成し
た。この部品をポンプに組み上げ、加速試験として、３
５０℃で軸速度７ｍ／ｓｅｃで上下運動させた。その結
果、８時間の加速試験後でも膜の損傷はほとんど観察さ
れなかった。Embodiment 4 The globe valve used in the gas turbine has SUS316 on the valve box and stellite on the sliding part of the globe valve body. The operating temperature is 350 ° C., the flow of the fluid changes largely, and the wear is severe. Inside the valve box, (200) oriented CrN
A film was formed to 10 μm in the same manner as in Example 1, and MoS 2 was formed to 1 μm by the shot peening method in Example 2. Assemble these parts into a pump and perform 3
It was moved up and down at 50 ° C. at an axial speed of 7 m / sec. As a result, almost no damage to the film was observed even after the 8-hour accelerated test.
【００３８】同様に、ＭｏＳ2を形成していないＣｒＮ
膜のみの部品について同様の評価をしたところ、試験後
４時間で膜に摺動傷が発生した。Similarly, CrN not forming MoS 2
When the same evaluation was performed for the component having only the film, sliding scratches occurred in the film 4 hours after the test.
【００３９】[0039]
【発明の効果】本発明により、安価な固体潤滑膜を用い
ても、固体潤滑膜と部材との密着力が低下せず、長期間
にわたって低摩擦係数が得られ、しかも高い耐摩耗性が
保持できる固体潤滑膜付き部材を提供できた。According to the present invention, even when an inexpensive solid lubricating film is used, the adhesion between the solid lubricating film and the member does not decrease, a low friction coefficient can be obtained over a long period, and high wear resistance is maintained. A member with a solid lubricating film that can be provided.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｆ１６Ｃ 33/12 Ｆ１６Ｃ 33/12 Ｚ 33/66 33/66 Ａ Ｆターム(参考） 3J011 JA02 LA04 MA02 PA10 QA04 RA10 SE04 SE06 SE07 3J101 DA05 EA02 EA53 EA55 EA78 FA32 4K029 AA02 BA04 BA05 BA21 BA43 BA51 BA58 BA59 BB02 BB07 BC02 BD04 BD05 CA03 CA05 CA13 DC05 DC12 DC39 DD06 FA04 4K044 AA02 BA18 BA19 BB03 BC01 CA13 CA23 ──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 7 Identification symbol FI theme coat ゛ (reference) F16C 33/12 F16C 33/12 Z 33/66 33/66 A F term (reference) 3J011 JA02 LA04 MA02 PA10 QA04 RA10 SE04 SE06 SE07 3J101 DA05 EA02 EA53 EA55 EA78 FA32 4K029 AA02 BA04 BA05 BA21 BA43 BA51 BA58 BA59 BB02 BB07 BC02 BD04 BD05 CA03 CA05 CA13 DC05 DC12 DC39 DD06 FA04 4K044 AA02 BA18 BA19 BB03 BC01 CA13 CA23
Claims (4)
Ｎ膜を第１層に、固体潤滑膜を第２層に備えた固体潤滑
膜付き部材。1. Cr having a film plane oriented to a crystal plane (200)
A member with a solid lubricating film comprising an N film as a first layer and a solid lubricating film as a second layer.
〜５０ｍＴｏｒｒ、バイアス電圧を０Ｖとするカソード
アークイオンプレーティング法によって形成された請求
項１に記載の固体潤滑膜付き部材。2. The first CrN film has a nitrogen gas pressure of 20.
The member with a solid lubricating film according to claim 1, which is formed by a cathode arc ion plating method in which the bias voltage is 0 V and a pressure of 50 mTorr.
ィング法、スパッタリング法、または、ショットピーニ
ング法によって形成された請求項１または請求項２に記
載の固体潤滑膜付き部材。3. The member with a solid lubricating film according to claim 1, wherein the second layer of the solid lubricating film is formed by an ion plating method, a sputtering method, or a shot peening method.
Ｓ2膜、ＮｂＳ2膜、雲母膜、Ｓｂ2Ｏ3膜、ＢＮ膜、ＷＳ
ｅ膜、ＭｏＳｅ2膜、Ａｕ膜、または、Ａｇ膜である請
求項１〜請求項３のいずれかに記載の固体潤滑膜付き部
材。4. The solid lubricant film of the second layer is a MoS 2 film, W
S 2 film, NbS 2 film, mica film, Sb 2 O 3 film, BN film, WS
e film, MoSe 2 film, Au film, or a solid lubricating film with member according to any one of claims 1 to 3 is a Ag film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11038007A JP2000239829A (en) | 1999-02-17 | 1999-02-17 | Member with solid lubricating film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11038007A JP2000239829A (en) | 1999-02-17 | 1999-02-17 | Member with solid lubricating film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000239829A true JP2000239829A (en) | 2000-09-05 |
Family
ID=12513529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11038007A Pending JP2000239829A (en) | 1999-02-17 | 1999-02-17 | Member with solid lubricating film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000239829A (en) |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002153691A (en) * | 2000-09-06 | 2002-05-28 | Juki Corp | Sewing machine parts and manufacturing method therefor |
| WO2002086182A1 (en) * | 2001-04-19 | 2002-10-31 | Deutsche Bahn Ag | Method for preventing press fit damages to wheelsets, particularly to wheelsets of rail vehicles |
| JP2003301282A (en) * | 2002-04-10 | 2003-10-24 | Kobe Steel Ltd | Sliding member superior in sliding characteristic under high contact pressure |
| JP2004043924A (en) * | 2002-07-15 | 2004-02-12 | Nisshin Steel Co Ltd | Metal of excellent photocatalytic activity, and method for manufacturing the same |
| US6811899B2 (en) | 2001-03-30 | 2004-11-02 | Hitachi Metals, Ltd. | Coated tool for warm-and/or-hot working with superior galling resistance property and superior wear resistance |
| JP2005112241A (en) * | 2003-10-09 | 2005-04-28 | Nsk Ltd | Electric power steering device |
| JP2005233267A (en) * | 2004-02-18 | 2005-09-02 | Daido Metal Co Ltd | Slide bearing for internal combustion engine |
| JP2007218373A (en) * | 2006-02-17 | 2007-08-30 | Yaskawa Electric Corp | Solid lubrication roller bearing |
| JP2007270205A (en) * | 2006-03-30 | 2007-10-18 | Daido Metal Co Ltd | Sliding material and method for producing coating layer therefor |
| JP2007270895A (en) * | 2006-03-30 | 2007-10-18 | Daido Metal Co Ltd | Sliding member and method for forming coating layer thereof |
| US8197647B2 (en) * | 2004-02-02 | 2012-06-12 | Kobe Steel, Ltd. | Hard laminated film, method of manufacturing the same and film-forming device |
| JP2013129902A (en) * | 2011-12-22 | 2013-07-04 | Om Sangyo Kk | Plated product and method for producing the same |
| CN103758990A (en) * | 2014-01-02 | 2014-04-30 | 上海宇航系统工程研究所 | Lubricating device of lunar high-load spatial mechanism |
| CN104962859A (en) * | 2014-09-05 | 2015-10-07 | 北京机械工业自动化研究所 | Method for preparing WS2/Ag compositional gradient solid lubrication film |
| JP2016500759A (en) * | 2012-10-22 | 2016-01-14 | アイエイチアイ イオンボンド アーゲー | Fatigue resistant coating for metal forming parts |
| JP2016528391A (en) * | 2013-08-20 | 2016-09-15 | エムディーエス コーティング テクノロジーズ コーポレーション | Coating containing macroparticles and cathodic arc process for forming the coating |
| CN110578110A (en) * | 2019-10-15 | 2019-12-17 | 河南科技大学 | Sulfide-based composite film layer, preparation method thereof and wear-resistant workpiece |
| CN110983272A (en) * | 2019-12-10 | 2020-04-10 | 广东省新材料研究所 | Self-lubricating material, self-lubricating composite coating, preparation method of self-lubricating composite coating and mechanical part |
| CN115287592A (en) * | 2022-08-10 | 2022-11-04 | 中国科学院兰州化学物理研究所 | High-temperature wear-resistant self-lubricating coating for fingertip sealing and preparation method thereof |
-
1999
- 1999-02-17 JP JP11038007A patent/JP2000239829A/en active Pending
Cited By (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002153691A (en) * | 2000-09-06 | 2002-05-28 | Juki Corp | Sewing machine parts and manufacturing method therefor |
| US6811899B2 (en) | 2001-03-30 | 2004-11-02 | Hitachi Metals, Ltd. | Coated tool for warm-and/or-hot working with superior galling resistance property and superior wear resistance |
| WO2002086182A1 (en) * | 2001-04-19 | 2002-10-31 | Deutsche Bahn Ag | Method for preventing press fit damages to wheelsets, particularly to wheelsets of rail vehicles |
| JP2003301282A (en) * | 2002-04-10 | 2003-10-24 | Kobe Steel Ltd | Sliding member superior in sliding characteristic under high contact pressure |
| JP2004043924A (en) * | 2002-07-15 | 2004-02-12 | Nisshin Steel Co Ltd | Metal of excellent photocatalytic activity, and method for manufacturing the same |
| JP2005112241A (en) * | 2003-10-09 | 2005-04-28 | Nsk Ltd | Electric power steering device |
| US8197647B2 (en) * | 2004-02-02 | 2012-06-12 | Kobe Steel, Ltd. | Hard laminated film, method of manufacturing the same and film-forming device |
| JP2005233267A (en) * | 2004-02-18 | 2005-09-02 | Daido Metal Co Ltd | Slide bearing for internal combustion engine |
| JP2007218373A (en) * | 2006-02-17 | 2007-08-30 | Yaskawa Electric Corp | Solid lubrication roller bearing |
| JP2007270205A (en) * | 2006-03-30 | 2007-10-18 | Daido Metal Co Ltd | Sliding material and method for producing coating layer therefor |
| JP2007270895A (en) * | 2006-03-30 | 2007-10-18 | Daido Metal Co Ltd | Sliding member and method for forming coating layer thereof |
| JP4732941B2 (en) * | 2006-03-30 | 2011-07-27 | 大同メタル工業株式会社 | Sliding material and method for producing the same |
| JP2013129902A (en) * | 2011-12-22 | 2013-07-04 | Om Sangyo Kk | Plated product and method for producing the same |
| JP2016500759A (en) * | 2012-10-22 | 2016-01-14 | アイエイチアイ イオンボンド アーゲー | Fatigue resistant coating for metal forming parts |
| JP2016528391A (en) * | 2013-08-20 | 2016-09-15 | エムディーエス コーティング テクノロジーズ コーポレーション | Coating containing macroparticles and cathodic arc process for forming the coating |
| JP2018188741A (en) * | 2013-08-20 | 2018-11-29 | エムディーエス コーティング テクノロジーズ コーポレーション | Membrane containing macro particle, and cathode arc process for forming membrane |
| US10465278B2 (en) | 2013-08-20 | 2019-11-05 | Mds Coating Technologies Corp. | Coating containing macroparticles and cathodic arc process of making the coating |
| CN103758990A (en) * | 2014-01-02 | 2014-04-30 | 上海宇航系统工程研究所 | Lubricating device of lunar high-load spatial mechanism |
| CN104962859A (en) * | 2014-09-05 | 2015-10-07 | 北京机械工业自动化研究所 | Method for preparing WS2/Ag compositional gradient solid lubrication film |
| CN110578110A (en) * | 2019-10-15 | 2019-12-17 | 河南科技大学 | Sulfide-based composite film layer, preparation method thereof and wear-resistant workpiece |
| CN110578110B (en) * | 2019-10-15 | 2021-08-27 | 河南科技大学 | Sulfide-based composite film layer, preparation method thereof and wear-resistant workpiece |
| CN110983272A (en) * | 2019-12-10 | 2020-04-10 | 广东省新材料研究所 | Self-lubricating material, self-lubricating composite coating, preparation method of self-lubricating composite coating and mechanical part |
| CN115287592A (en) * | 2022-08-10 | 2022-11-04 | 中国科学院兰州化学物理研究所 | High-temperature wear-resistant self-lubricating coating for fingertip sealing and preparation method thereof |
| CN115287592B (en) * | 2022-08-10 | 2024-01-26 | 中国科学院兰州化学物理研究所 | High-temperature wear-resistant self-lubricating coating for fingertip sealing and preparation method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2000239829A (en) | Member with solid lubricating film | |
| Rodrıguez et al. | Tribological behaviour of hard coatings deposited by arc-evaporation PVD | |
| Hirvonen et al. | Present progress in the development of low friction coatings | |
| Zhou et al. | Microstructure, hardness and corrosion behaviour of Ti/TiN multilayer coatings produced by plasma activated EB-PVD | |
| Spalvins | Coatings for wear and lubrication | |
| US6410125B1 (en) | Wear-resistant, mechanically highly stressed and low-friction boundary coating construction for titanium or the alloys thereof and a method for producing the same | |
| CN108977776A (en) | High-bond solid lubricating film and preparation method thereof under the wide temperature range environment in space | |
| WO2005100810A1 (en) | Process for finishing critical surfaces of a bearing | |
| Deng et al. | Tribological behavior of TiN, TiCxNy and TiC coatings prepared by unbalanced magnetron sputtering techniques | |
| CN112553584A (en) | Method for depositing diamond-like carbon film on outer surface of inner ring of knuckle bearing | |
| JP2739722B2 (en) | piston ring | |
| KR100762198B1 (en) | Coating material and thereof coating method with superhard and high lubrication | |
| Oohira | Characteristics and Applications of DLC films | |
| JP2000178720A (en) | Member with solid lubricant film | |
| Zhao et al. | Effect of axial magnetic field on the microstructure, hardness and wear resistance of TiN films deposited by arc ion plating | |
| CN106467959B (en) | A kind of solid lubrication composite coating of matrix surface and preparation method thereof | |
| JP2011127205A (en) | Coated die having excellent lubricant adhesiveness and durability, and method for producing the same | |
| US20080268281A1 (en) | Shield Components With Enhanced Thermal and Mechanical Stability | |
| CN1114984A (en) | Common-sputtering solid lubricating film | |
| Patel et al. | Corrosion behavior of Ti2N thin films in various corrosive environments | |
| JP2008050696A (en) | Coating apparatus and sputtering film deposition method | |
| US20240011145A1 (en) | Molybdenum nitride based multilayer coating for wear and friction reduction | |
| CN108411263A (en) | A kind of graded composite lubricant coating and preparation method thereof | |
| RU2644094C1 (en) | METHOD OF OBTAINING ADAPTIVE WEAR-RESISTANT Ti-Al-Mo-N COATING FOR PROTECTING FROM WEARING IN VARIABLE FREQUENCY CONDITIONS | |
| JPS61120897A (en) | Preparation of solid lubricant film |