CN112553584A - Method for depositing diamond-like carbon film on outer surface of inner ring of knuckle bearing - Google Patents
Method for depositing diamond-like carbon film on outer surface of inner ring of knuckle bearing Download PDFInfo
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- CN112553584A CN112553584A CN202011219357.0A CN202011219357A CN112553584A CN 112553584 A CN112553584 A CN 112553584A CN 202011219357 A CN202011219357 A CN 202011219357A CN 112553584 A CN112553584 A CN 112553584A
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- 238000000151 deposition Methods 0.000 title claims abstract description 44
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 32
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title claims abstract description 24
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 65
- 229910052786 argon Inorganic materials 0.000 claims abstract description 33
- 239000010936 titanium Substances 0.000 claims abstract description 28
- 238000004140 cleaning Methods 0.000 claims abstract description 26
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 20
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 19
- 230000007704 transition Effects 0.000 claims abstract description 15
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims abstract description 13
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims abstract description 13
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 10
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 12
- 239000008367 deionised water Substances 0.000 claims description 9
- 229910021641 deionized water Inorganic materials 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 7
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 6
- 230000010355 oscillation Effects 0.000 claims description 3
- 238000005238 degreasing Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 27
- 239000007789 gas Substances 0.000 description 12
- 230000008021 deposition Effects 0.000 description 10
- 239000000758 substrate Substances 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 5
- 239000010409 thin film Substances 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- -1 argon ions Chemical class 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000010849 ion bombardment Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 239000011541 reaction mixture Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 230000001050 lubricating effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a method for depositing a diamond-like carbon film on the outer surface of an inner ring of a joint bearing, which comprises the following steps: firstly, cleaning the surface of an inner ring of a joint bearing; putting the cleaned inner ring of the joint bearing into a vacuum cavity, and vacuumizing to 2 x 10 < -3 > Pa; then introducing argon, opening an ion beam, opening pulse bias voltage, and carrying out ion cleaning on the surface of the joint bearing inner ring; introducing argon into the vacuum cavity, adding negative bias to the inner ring of the joint bearing, and depositing a titanium transition layer by magnetron sputtering of a titanium target; introducing argon and acetylene into the vacuum cavity, opening an ion beam and a bias power supply, and depositing a diamond-like carbon film on the surface of the titanium transition layer by magnetron sputtering a carbon target; and finally, taking out the inner ring of the joint bearing after the temperature in the vacuum cavity is reduced to the room temperature. The invention improves the bearing capacity of the film and prolongs the service life of the oscillating bearing.
Description
Technical Field
The invention belongs to the technical field of coating, and particularly relates to a method for depositing a diamond-like carbon film on the outer surface of an inner ring of a joint bearing.
Background
The joint bearing mainly comprises an inner ring and an outer ring, and a friction pair of the joint bearing is a spherical surface, so that the joint bearing is widely applied to the fields of aerospace, automobiles, ships, military machinery and the like. When the knuckle bearing runs normally, the outer surface of the inner ring and the inner surface of the outer ring slide relatively, and the abrasion of the friction pair is gradually increased along with the time, so that the knuckle bearing is finally failed, and therefore, the search for a new method capable of improving the lubricating performance of the friction pair is important. At present, the coating of a lubricating coating on the friction surface is one of effective ways for prolonging the service life of the bearing.
Magnetron sputtering is one type of Physical Vapor Deposition (PVD). The working principle of magnetron sputtering is as follows: under the action of the electric field E, the electrons collide with argon atoms in the process of flying to the substrate, so that the argon atoms are ionized to generate Ar positive ions and new electrons; new electrons fly to the substrate, Ar ions are accelerated to fly to the cathode target under the action of an electric field, and bombard the surface of the target at high energy, so that the target is sputtered. In the sputtering particles, neutral target atoms or molecules are deposited on a substrate to form a film, and generated secondary electrons are subjected to the action of an electric field and a magnetic field to do circular motion on the surface of the target, and a large amount of Ar is ionized in the area to bombard the target, so that high deposition rate is realized. Compared with the common sputtering method, the method has the advantages of high speed, low temperature, low damage and the like.
Disclosure of Invention
In view of the above, the invention provides a method for depositing a diamond-like carbon film on the outer surface of the inner ring of the joint bearing, which improves the bearing capacity of the film and prolongs the service life of the joint bearing.
The technical scheme adopted by the invention is as follows:
a method for depositing a diamond-like carbon film on the outer surface of an inner ring of a joint bearing comprises the following steps:
cleaning the surface of an inner ring of a joint bearing;
step two, placing the cleaned joint bearing inner ring into a vacuum cavity, and vacuumizing to 2 multiplied by 10-3Pa; introducing argon, opening an ion beam, opening pulse bias voltage, and performing ion cleaning on the surface of the joint bearing inner ring;
introducing argon into the vacuum cavity, adding negative bias to the inner ring of the joint bearing, and depositing a titanium transition layer by magnetron sputtering a titanium target;
introducing argon and acetylene into the vacuum cavity, opening an ion beam and a bias power supply, and depositing a diamond-like carbon film on the surface of the titanium transition layer by magnetron sputtering a carbon target;
and fifthly, taking out the inner ring of the joint bearing after the temperature in the vacuum cavity is reduced to room temperature.
Further, the cleaning process in the first step is as follows:
firstly, removing oil on the surface of an inner ring of the joint bearing, and then rinsing; then, removing rust on the surface of the inner ring of the joint bearing, and rinsing; and finally, dehydrating.
Furthermore, acetone is used for deoiling, deionized water is used for rinsing, and the cleaning process is completed under ultrasonic oscillation.
Furthermore, the working pressure in the vacuum chamber in the second step is 0.5-1.5 Pa, the pulse bias voltage is-400-600V, and the ion beam voltage is 1100-1300V.
Further, the working air pressure in the vacuum cavity in the third step is 0.5-0.7 Pa, the negative bias is loaded by direct current pulse and ranges from-400V to-500V, the duty ratio is 50% -60%, the frequency is 30KHz to 50KHz, the current of the titanium target ranges from 1A to 3A, and the thickness of the transition layer ranges from 100 nm to 300 nm.
Furthermore, in the fourth step, the percentage concentration of acetylene and argon is 50% -60%, the working pressure in the vacuum chamber is 0.8-1.1 Pa, the bias voltage power supply is a direct current pulse power supply, the bias voltage is-300 to-500V, the duty ratio is 50% -60%, the frequency is 30KHz to 50KHz, the titanium target current is 2-3A, and the ion beam voltage is 1100 to 1300V. The diamond-like carbon film has a thickness of 1 to 3 μm.
Has the advantages that:
1. diamond-like thin films are a metastable material that is generated by bonding in the form of sp3 and sp2 bonds, and have high hardness while combining the excellent properties of diamond and graphite. High resistivity. Good optical properties and excellent tribological properties. Therefore, the method has wide application prospect in the fields of aerospace, engineering machinery and the like. The invention utilizes the properties of diamond-like carbon film such as high hardness, low friction, corrosion resistance and the like to reduce the abrasion of the inner ring and the outer ring of the knuckle bearing, and utilizes the titanium transition layer to improve the binding force, improve the bearing capacity of the film and greatly prolong the service life of the knuckle bearing.
2. The bias voltage for ion cleaning is-400V to-600V, because when the bias voltage is less than-400V, the energy of argon ions when bombarding the substrate is too small, the substrate surface can not be cleaned and activated completely, thereby weakening the binding force of the film, when the bias voltage is more than-600V, the argon ion energy will be increased sharply, the continuous bombardment of the argon ions can cause the substrate surface temperature to be too high, thereby causing the surface roughness to be increased and generating defects, and the defects can greatly weaken the binding force of the film. When the bias is between-400V and-600V, the surface of the substrate can be properly activated, so that the film has better bonding force.
Drawings
FIG. 1 is an SEM (scanning electron microscope) morphology of a section of a diamond-like carbon film deposited on the outer surface of an inner ring of a joint bearing;
FIG. 2 is an AFM (atomic force microscope) topography of the surface of a diamond-like carbon film deposited on the outer surface of an inner ring of a joint bearing;
FIG. 3 is a friction coefficient of a diamond-like carbon film deposited on the outer surface of an inner ring of the knuckle bearing;
FIG. 4 is a scratch appearance of a diamond-like carbon film deposited on the outer surface of an inner ring of the knuckle bearing;
FIG. 5 shows the friction coefficient of a diamond-like carbon film deposited on the outer surface of the inner race of the spherical plain bearing.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
The invention provides a method for depositing a diamond-like carbon film on the outer surface of an inner ring of a joint bearing, which comprises the following steps:
cleaning the surface of an inner ring of a joint bearing;
firstly, removing oil on the surface of an inner ring of the joint bearing, and then rinsing; then, removing rust on the surface of the inner ring of the joint bearing, and rinsing; and finally, dehydrating. Acetone is used for removing oil, deionized water is used for rinsing, and the cleaning process is completed under ultrasonic oscillation.
Step two, placing the cleaned joint bearing inner ring into a vacuum cavity, and vacuumizing to 2 multiplied by 10-3Pa; introducing argon, opening an ion beam, opening pulse bias voltage, and performing ion cleaning on the surface of the joint bearing inner ring;
wherein the working pressure in the vacuum chamber is 0.5-1.5 Pa, the bias voltage is-400-600V, and the ion beam voltage is 1100-1300V.
Introducing argon into the vacuum cavity, adding negative bias to the inner ring of the joint bearing, and depositing a titanium transition layer by magnetron sputtering a titanium target;
wherein the working air pressure in the vacuum chamber is 0.5-0.7 Pa, the negative bias is loaded by direct current pulse and is-400-500V, the duty ratio is 50-60%, the frequency is 30 KHz-50 KHz, the titanium target current is 1-3A, and the thickness of the transition layer is 100-300 nm.
Introducing argon and acetylene into the vacuum cavity, opening an ion beam and a bias power supply, and depositing a diamond-like carbon film on the surface of the titanium transition layer by magnetron sputtering a carbon target;
the percentage concentration of acetylene and argon is 50-60%, the working pressure in the vacuum chamber is 0.8-1.1 Pa, the bias power supply is a direct-current pulse power supply, the bias voltage is-300-500V, the duty ratio is 50-60%, the frequency is 30 KHz-50 KHz, the titanium target current is 2-3A, and the ion beam voltage is 1100-1300V. The diamond-like carbon film has a thickness of 1 to 3 μm.
And fifthly, taking out the inner ring of the joint bearing after the temperature in the vacuum cavity is reduced to room temperature.
Example 1:
the specific operation steps are as follows:
A. sample pretreatment: and respectively ultrasonically cleaning the bearing inner ring for 10min by using acetone and deionized water, respectively ultrasonically cleaning for 20min by using a rust remover and deionized water, and finally ultrasonically cleaning for 10min by using absolute ethyl alcohol. Then the mixture is dried by nitrogen and put into a deposition chamber. Pumping the deposition chamber to a pressure of 2X 10-3Pa, introducing argon gas until the air pressure is 0.7Pa, opening an ion beam, adjusting the voltage to 1100V, adjusting the bias voltage of the matrix to-400V, and performing argon ion bombardment cleaning for 20 min.
B. And (3) depositing a Ti transition layer: adjusting the flow of argon gas to maintain the working pressure at about 0.5Pa, setting the bias voltage of DC pulse to-400V, the duty ratio to 50 percent and the frequency to 30KHz, turning on the power supply of the Ti target, adjusting the current of the Ti target to 1A, and depositing for 60 min.
C. Depositing a diamond-like thin film layer: introducing acetylene and argon gas, controlling the flow ratio of the acetylene to the argon gas to be 1:1, maintaining the working air pressure of the cavity to be about 0.8Pa, controlling the ion beam voltage to be 1100V, setting direct current pulse bias voltage to be-300V, setting the duty ratio to be 50 percent, controlling the frequency to be 30KHz, turning on a C target power supply, adjusting the C target current to be 2A, and depositing for 200 min. After deposition was complete, the reaction mixture was cooled to room temperature and the vacuum was released to remove the sample.
Example 2:
A. sample pretreatment: and respectively ultrasonically cleaning the bearing inner ring for 10min by using acetone and deionized water, respectively ultrasonically cleaning for 20min by using a rust remover and deionized water, and finally ultrasonically cleaning for 10min by using absolute ethyl alcohol. Then the mixture is dried by nitrogen and put into a deposition chamber. Pumping the deposition chamber to a pressure of 2X 10-3Pa, introducing argon gas until the air pressure is 0.9Pa, opening an ion beam, adjusting the voltage to 1200V, adjusting the bias voltage of the matrix to-500V, and performing argon ion bombardment cleaning for 25 min.
B. And (3) depositing a Ti transition layer: adjusting the flow of argon gas to maintain the working pressure at about 0.6Pa, setting the direct current pulse bias voltage to-500V, the duty ratio to 50 percent and the frequency to 30KHz, turning on the Ti target power supply, adjusting the current of the Ti target to 2A, and depositing for 80 min.
C. Depositing a diamond-like thin film layer: introducing acetylene and argon gas, controlling the flow ratio of the acetylene to the argon gas to be 1:1, keeping the working air pressure of the cavity at about 0.9Pa, controlling the ion beam voltage to be 1200V, setting direct current pulse bias voltage to be 400V, duty ratio to be 55 percent, frequency to be 40KHz, turning on a C target power supply, adjusting the C target current to be 2.5A, and depositing for 300 min. After deposition was complete, the reaction mixture was cooled to room temperature and the vacuum was released to remove the sample.
The diamond-like carbon DLC film prepared by the process comprises the following steps: has a compact structure and no defects such as holes, and is shown in figure 1; the DLC film had a smooth surface with a surface roughness of 7nm as shown in FIG. 2; the DLC film bonded well to the substrate, as shown in FIG. 4; under the conditions of normal temperature, atmospheric atmosphere, load of 10N and frequency of 5Hz, the friction coefficient is 0.07, as shown in FIG. 3, and the abrasion loss is 128nm, as shown in FIG. 5.
Example 3:
A. sample pretreatment: and respectively ultrasonically cleaning the bearing inner ring for 10min by using acetone and deionized water, respectively ultrasonically cleaning for 20min by using a rust remover and deionized water, and finally ultrasonically cleaning for 10min by using absolute ethyl alcohol. Then the mixture is dried by nitrogen and put into a deposition chamber. Pumping the deposition chamber to a pressure of 2X 10-3Pa, introducing argon gas until the air pressure is 1.1Pa, opening an ion beam, adjusting the voltage to 1300V, adjusting the bias voltage of the matrix to-600V, and performing argon ion bombardment cleaning for 30 min.
B. And (3) depositing a Ti transition layer: adjusting the flow of argon gas to maintain the working pressure at about 0.8Pa, setting the direct current pulse bias voltage to-450V, the duty ratio to be 60 percent and the frequency to be 50KHz, turning on the Ti target power supply, adjusting the current of the Ti target to be 3A, and depositing for 70 min.
C. Depositing a diamond-like thin film layer: introducing acetylene and argon gas, controlling the flow ratio of the acetylene to the argon gas to be 1:1, keeping the working air pressure of the cavity at about 1.0Pa, controlling the ion beam voltage to be 1300V, setting direct current pulse bias voltage to be-500V, setting the duty ratio to be 60 percent, controlling the frequency to be 50KHz, turning on a C target power supply, adjusting the C target current to be 3A, and depositing for 350 min. After deposition was complete, the reaction mixture was cooled to room temperature and the vacuum was released to remove the sample.
The performance parameters for each example are shown in the following table:
the main performance indexes of the joint bearing inner ring are shown in the following table:
| detecting items | Performance index |
| Thickness of film | ＞ |
| Surface roughness | |
| 2～10nm | |
| Hardness of film | 15～30GPa |
| Coefficient of friction | ＜0.1 |
| Rate of wear | ＜10-8mm3/Nm |
Comparing the data of the two tables, the knuckle bearing obtained by the method for depositing the diamond-like carbon film on the outer surface of the inner ring of the knuckle bearing meets the performance index.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. A method for depositing a diamond-like carbon film on the outer surface of an inner ring of a joint bearing is characterized by comprising the following steps:
cleaning the surface of an inner ring of a joint bearing;
step two, placing the cleaned joint bearing inner ring into a vacuum cavity, and vacuumizing to 2 multiplied by 10-3Pa; introducing argon, opening an ion beam, opening pulse bias voltage, and performing ion cleaning on the surface of the joint bearing inner ring;
introducing argon into the vacuum cavity, adding negative bias to the inner ring of the joint bearing, and depositing a titanium transition layer by magnetron sputtering a titanium target;
introducing argon and acetylene into the vacuum cavity, opening an ion beam and a bias power supply, and depositing a diamond-like carbon film on the surface of the titanium transition layer by magnetron sputtering a carbon target;
and fifthly, taking out the inner ring of the joint bearing after the temperature in the vacuum cavity is reduced to room temperature.
2. The method for depositing a diamond-like carbon film on the outer surface of the inner ring of the spherical plain bearing according to claim 1, wherein the cleaning process in the first step is as follows:
firstly, removing oil on the surface of an inner ring of the joint bearing, and then rinsing; then, removing rust on the surface of the inner ring of the joint bearing, and rinsing; and finally, dehydrating.
3. The method for depositing the diamond-like film on the outer surface of the inner ring of the joint bearing of claim 2, wherein the degreasing is performed by using acetone, the rinsing is performed by using deionized water, and the cleaning process is performed under ultrasonic oscillation.
4. The method for depositing the diamond-like carbon film on the outer surface of the inner ring of the joint bearing according to claim 1, wherein the working pressure in the vacuum chamber in the second step is 0.5 to 1.5Pa, the pulse bias is-400 to-600V, and the ion beam voltage is 1100 to 1300V.
5. The method for depositing the diamond-like carbon film on the outer surface of the inner ring of the joint bearing as claimed in claim 1, wherein the working air pressure in the vacuum chamber in the third step is 0.5 to 0.7Pa, the negative bias is loaded by DC pulse and is-400 to-500V, the duty ratio is 50 to 60 percent, the frequency is 30KHz to 50KHz, the titanium target current is 1 to 3A, and the thickness of the transition layer is 100 to 300 nm.
6. The method for depositing the diamond-like carbon film on the outer surface of the inner ring of the joint bearing according to claim 1, wherein the percentage concentration of acetylene and argon in the step four is 50% -60%, the working pressure in the vacuum chamber is 0.8-1.1 Pa, the bias power supply is a direct current pulse power supply, the bias voltage is-300 to-500V, the duty ratio is 50% -60%, the frequency is 30KHz to 50KHz, the titanium target current is 2-3A, and the ion beam voltage is 1100 to 1300V. The diamond-like carbon film has a thickness of 1 to 3 μm.
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| CN202011219357.0A CN112553584A (en) | 2020-11-04 | 2020-11-04 | Method for depositing diamond-like carbon film on outer surface of inner ring of knuckle bearing |
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| CN202011219357.0A CN112553584A (en) | 2020-11-04 | 2020-11-04 | Method for depositing diamond-like carbon film on outer surface of inner ring of knuckle bearing |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113653735A (en) * | 2021-07-06 | 2021-11-16 | 上海大学 | Water-lubricated sliding bearing with flexible support and self-lubricating diamond-like coating |
| CN114196936A (en) * | 2021-12-13 | 2022-03-18 | 昆山汇创杰纳米科技有限公司 | Novel preparation process for preparing DLC coating by ion beam method |
| CN115029678A (en) * | 2022-03-29 | 2022-09-09 | 核工业理化工程研究院 | Needle-shaped shaft mounting clamp and needle-shaped shaft end spherical surface modification treatment method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111334794A (en) * | 2020-03-09 | 2020-06-26 | 中国科学院海洋研究所 | Modified film containing Ti transition layer and titanium-doped diamond-like carbon deposited on surface of substrate and method |
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| US20120270064A1 (en) * | 2011-04-22 | 2012-10-25 | Hitachi, Ltd. | Slide member including diamond-like-carbon film |
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| CN113653735A (en) * | 2021-07-06 | 2021-11-16 | 上海大学 | Water-lubricated sliding bearing with flexible support and self-lubricating diamond-like coating |
| CN114196936A (en) * | 2021-12-13 | 2022-03-18 | 昆山汇创杰纳米科技有限公司 | Novel preparation process for preparing DLC coating by ion beam method |
| CN115029678A (en) * | 2022-03-29 | 2022-09-09 | 核工业理化工程研究院 | Needle-shaped shaft mounting clamp and needle-shaped shaft end spherical surface modification treatment method |
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