CN112708852B - Method for improving performance of AlCrN coating cutter through in-situ high-energy Ar + etching post-treatment - Google Patents
Method for improving performance of AlCrN coating cutter through in-situ high-energy Ar + etching post-treatment Download PDFInfo
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- CN112708852B CN112708852B CN202011534781.4A CN202011534781A CN112708852B CN 112708852 B CN112708852 B CN 112708852B CN 202011534781 A CN202011534781 A CN 202011534781A CN 112708852 B CN112708852 B CN 112708852B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5826—Treatment with charged particles
- C23C14/5833—Ion beam bombardment
Abstract
The invention discloses an in-situ high-energyAr + The method for improving the performance of the AlCrN coating cutter by etching post-treatment comprises the following steps: cleaning the substrate; preparing an AlCrN functional coating; depositing the AlCrN functional coating on the treated substrate; in situ high energy Ar + Post-bombardment treatment; carrying out in-situ high-energy Ar on the prepared AlCrN functional coating + And (3) bombardment post-treatment: after the deposition and coating are finished, vacuumizing the base material, keeping the processing temperature at 400 ℃, and introducing Ar gas; starting an anode target material after starting to clean the Ti target, wherein the anode target material and the cleaned Ti target form positive and negative electrode traction electron motion, and the electrons collide with Ar gas to generate Ar + Controlling the negative bias voltage to-200V, attracting Ar + Performing ion bombardment on the surface of the base material provided with the AlCrN functional coating, wherein the bombardment time is 40min; the method can effectively remove large and small liquid drop particles on the surface of the AlCrN coating, simultaneously increases the residual compressive stress of the coating and the substrate, and improves the surface roughness and the cutting performance of the AlCrN coating.
Description
Technical Field
The invention relates to the technical field of cutter processing technology, in particular to a method for improving the performance of an AlCrN coating cutter through in-situ high-energy Ar + etching post-treatment.
Background
In the mechanical manufacturing industry, although there are many different forming processes, more than 90% of mechanical parts are still manufactured by cutting processes. With the development of science and technology, the machining industry puts higher demands on the cutter, the manufacturing concepts of high efficiency, compounding and environmental protection are widely mentioned, and the hard coating is widely applied to the cutting cutter. Statistically, more than 80% of the tools used tool coatings. The coated tool can significantly improve tool life and cutting efficiency compared to uncoated tools.
The multi-arc ion plating technology is a mainstream technology for preparing the cutter coating at the present stage, has the advantages of high ionization rate and suitability for industrial large-area production, and has good binding force of a deposited film layer, compact structure and high deposition rate under the acceleration of negative bias. Meanwhile, the AlCrN coating prepared by the multi-arc ion plating technology can keep higher hardness, high wear resistance, high-temperature oxidation resistance and good film-substrate binding performance under the continuous cutting condition, so that the AlCrN coating is widely applied to the cutting field. But the surface thereof has a large amount of "metal particles" that increase the surface roughness of the coating, resulting in deterioration of its machinability. The surface roughness has a crucial influence on the cutting performance of the coated tool, and the low surface roughness can improve the frictional wear performance of the AlCrN coating.
The particles on the surface of the multi-arc ion plating AlCrN coating are mainly caused by condensation of evaporated liquid drops on the surface of the target material into Macroscopic Particles (MPS) which are finally deposited on the surface of the coating. The different sized particles on the surface of the coating increase the roughness of the surface of the coating and reduce the overall performance of the coating, thereby causing the increase of the frictional resistance when the surface of the cutter and the workpiece interact.
In view of the above-mentioned drawbacks, the inventors of the present invention have finally obtained the present invention through a long period of research and practice.
Disclosure of Invention
In order to solve the technical defects, the technical scheme adopted by the invention is to provide a method for improving the performance of an AlCrN coating cutter by in-situ high-energy Ar + etching post-treatment, which comprises the following steps:
s1, cleaning a base material;
s2, preparing an AlCrN functional coating;
depositing the AlCrN functional coating on the substrate treated in the step S1;
s3, in-situ high-energy Ar + Post-bombardment treatment;
in the step S3, in-situ high-energy Ar is carried out on the AlCrN functional coating prepared in the step S2 + And (3) bombardment post-treatment: after the deposition and coating are finished, vacuumizing the functional coating, keeping the processing temperature at 400 ℃, and introducing Ar gas; starting an anode target after starting and cleaning the Ti target, wherein the anode target and the cleaning Ti target form positive and negative traction electron motion, and electronsCollide with Ar gas to produce Ar + Controlling the negative bias voltage to-200V, attracting Ar + And carrying out ion bombardment on the surface of the base material provided with the AlCrN functional coating, wherein the bombardment time is 40min.
Preferably, in step S1, a vacuum furnace for multi-arc ion plating is vacuumized, ar gas is introduced, and the furnace is heated to 450 ℃; opening the anode target after opening the cleaning Ti target, wherein the anode target and the cleaning Ti target form positive and negative traction electron movement, and the electrons collide with Ar gas to generate Ar + Controlling the negative bias voltage to-200V, attracting Ar + And carrying out ion bombardment on the surface of the base material.
Preferably, in the preparation process of the AlCrN functional coating, the AlCr target current is adjusted to 130A, the substrate bias voltage is set to-80V, and the deposition time is 120min.
Preferably, the molar content ratio of the target materials of the AlCr target is Al: cr = 70: 30.
Preferably, in the step S3, the purity of the Ar gas is 99.999%.
Preferably, in the step S3, the current for cleaning the Ti target is 40A to 100A.
Preferably, in the step S3, before the Ar gas is introduced, the vacuum furnace is vacuumized to 2.0 × 10 -4 Pa, and regulating the pressure to be 4.0Pa after Ar gas is introduced.
Compared with the prior art, the invention has the beneficial effects that: the invention can directly carry out in-situ high-energy Ar ion cleaning treatment on the coating equipment without cooling and disassembling after the coating is finished, and the processing mode is simpler and faster. 2, the AlCrN coating treated by the method has the advantages that the number of liquid drop particles on the surface of the coating and the surface roughness of the coating are obviously reduced, and the thinning degree of the coating thickness is not obvious. 3, due to high energy Ar + The bombardment of (2) produces residual compressive stress on the surface of the coating, and also produces residual stress on the base body part at the film-substrate interface, and the lower surface roughness of the coating and the proper residual compressive stress can improve the cutting performance of the coated cutting tool.
Drawings
FIG. 1 shows a high-energy Ar + Surface appearance and surface three-dimensional appearance graphs of the AlCrN coating before and after bombardment treatment;
FIG. 2 is a graph of the number of droplets on the surface of a coating;
FIG. 3 shows high energy Ar + XRD patterns of AlCrN coating before and after bombardment treatment;
FIG. 4 shows the high-energy Ar + Friction factor graphs of AlCrN coatings before and after bombardment post-treatment;
FIG. 5 shows high energy Ar + After bombardment, processing the residual stress diagram of the base body of the cutter;
FIG. 6 shows high energy Ar + A curve graph of the cutting life of the AlCrN coating cutter before and after bombardment post-treatment;
FIG. 7 shows high energy Ar + And (4) a shape graph of the cutting wear of the AlCrN coating cutter before and after bombardment post-treatment.
Detailed Description
The above and further features and advantages of the present invention are described in more detail below with reference to the accompanying drawings.
The invention discloses a method for improving the performance of an AlCrN coating cutter by in-situ high-energy Ar + etching post-treatment, which comprises the following steps:
s1, cleaning a base material;
vacuumizing a vacuum furnace for multi-arc ion plating, introducing Ar gas and heating to 450 ℃; after the cleaning Ti target is started, starting an anode target material, wherein the anode target material and the cleaning Ti target form positive and negative electrode traction electron motion, and the electrons collide with Ar gas to generate Ar + Controlling the negative bias voltage to-200V, attracting Ar + And carrying out ion bombardment on the surface of the base material.
S2, preparing an AlCrN functional coating;
depositing an AlCrN functional coating on the substrate treated in the step S1.
In the preparation process of the AlCrN functional coating, the AlCr target current is adjusted to 130A, the substrate bias voltage is set to-80V, and the deposition time is 120min.
The molar content ratio of the target material of the AlCr target is Al: cr = 70: 30.
S3, in-situ high-energy Ar + Post-bombardment treatment;
carrying out in-situ high-energy Ar on the AlCrN functional coating prepared in the step S2 + And (5) performing bombardment post-treatment.
After deposition and coating are finished, vacuumizing a vacuum furnace for multi-arc ion plating, keeping the temperature at 400 ℃, and introducing Ar gas; starting the anode target after the cleaning Ti target is started, wherein the anode target and the cleaning Ti target form positive and negative traction electron movement, and the electrons collide with Ar gas to generate Ar + Controlling the negative bias voltage to-200V, attracting Ar + And carrying out ion bombardment on the surface of the base material provided with the AlCrN functional coating, wherein the bombardment time is 40min.
In the step S3, the purity of Ar gas is 99.999%.
In the step S3, the current for cleaning the Ti target is 40-100A.
In the step S3, before the Ar gas is introduced, the vacuum furnace is vacuumized to 2.0 multiplied by 10 -4 Pa, and regulating the pressure to be 4.0Pa after Ar gas is introduced.
The method can carry out subsequent bombardment cleaning on the AlCrN coating only by high-energy Ar ions under the bias condition in situ, the roughness is reduced by nearly 20 percent, and a cutting test shows that the cutting life of the AlCrN coating high-speed steel straight shank end mill can be prolonged by 40 percent. In situ high energy Ar + The bombardment post-treatment method can effectively remove large and small liquid drop particles on the surface of the AlCrN coating, simultaneously increases the residual compressive stress of the coating and the cutter substrate, and improves the surface roughness and the cutting performance of the AlCrN coating.
The conventional treatment pressure intensity after sand blasting is improved, the duration is prolonged, the cutting action of the sprayed material on the coating is increased, the coating, particularly the coating at the cutting edge is thinned, and the radius of the blunt circle of the cutting edge is increased. When the coating becomes thin, the substrate is exposed in a local area, so that the thermal stress and the cutting force of the cutter during cutting are improved, and the cutting performance of the coating is seriously deteriorated.
The high-energy Ar of the invention is adopted for the AlCrN coating cutter + The bombardment post-treatment process can obviously reduce the surface roughness of the coating, only has a cleaning effect on 'particles' attached to the surface of the coating, has no damage to coating materials, simultaneously obtains lower friction coefficient and proper residual compressive stress of the surface of the coating and a cutter base body, improves the frictional wear resistance and cutting performance of the coating, and has great stress in the fields of cutters and surface protectionAnd 4, application prospect.
Example one
M42 high-speed steel test pieces and M42 high-speed steel straight shank end mills with the diameter of 10mm are selected for the test. Two symmetrically distributed AlCr (atomic ratio Al: cr = 70: 30, purity 99.5%) alloy targets were used for the experiments. Before coating, high-energy Ar is used + Bombarding the surface of the base material, namely performing etching cleaning treatment on the surface of the base material, wherein the current is 90A, and the time is 30min; when coating, the temperature is 450 ℃, N 2 Pressure 4.0 x10 -2 mbar, current of the AlCr alloy target material is 130A, and deposition time is 2 hours.
And detecting the prepared AlCrN coating.
Example two
The preparation of the AlCrN coating is carried out in the same way as in the first example.
Carrying out post-treatment on the prepared AlCrN coating again, wherein the post-treatment step is carried out by in-situ high-energy Ar ion bombardment:
in the first step, the vacuum degree in the furnace reaches 2.0x10 -4 When Pa is needed, introducing Ar gas with the purity of 99.999 percent and heating to 400 ℃; and secondly, starting a cylindrical Ti target as a traction arc target, controlling the current during cleaning to be 80A, and exciting to generate a large amount of electrons. And starting the circular auxiliary anode target material, and forming positive and negative traction electron movement with the Ti target. The electrons collide with Ar gas in the furnace to generate high density Ar + . The substrate is negatively biased at-200V to attract Ar + Performing ion bombardment on the surface of the base material; and thirdly, the bombardment time is 40min.
Subjecting to high energy Ar + And detecting the bombarded AlCrN coating.
Other embodiments are the same as example 1.
The untreated AlCrN coating and the high-energy Ar + The bombarded AlCrN coating is detected, and the detection result is shown in the table I.
TABLE-high energy Ar + Statistical result of surface liquid drop number and surface roughness of AlCrN coating before and after bombardment treatment
| Number of droplets | Sa(μm) | Sq(μm) | |
| Untreated | 314 | 0.274 | 0.531 |
| Ion etching | 238 | 0.191 | 0.382 |
As shown in FIG. 1, FIG. 1 shows the high-energy Ar + The surface appearance and the surface three-dimensional appearance of the AlCrN coating before and after bombardment treatment. Wherein FIG. 1 (a) is high energy Ar + A surface topography of the AlCrN coating before bombardment treatment; FIG. 1 (b) shows the reaction of high energy Ar + The surface topography of the AlCrN coating after bombardment treatment; FIG. 1 (c) shows high energy Ar + A three-dimensional topography map of the AlCrN coating surface before bombardment treatment; FIG. 1 (d) shows the reaction of passing high energy Ar + And (4) a three-dimensional topography map of the surface of the AlCrN coating after bombardment treatment.
As can be seen from FIG. 1 (a), the untreated AlCrN coating has more liquid drop particles and pits with different sizes on the surface, which is a typical characteristic of the surface morphology of the coating prepared by the multi-arc ion plating coating technology. The main reason for the generation of droplets is that molten metal droplets solidify on the surface of the coating during the coating process.
FIG. 1 (b) shows the passing of high energyAr + And (4) a surface topography map of the AlCrN coating after bombardment treatment. It is clearly seen that the number of particles on the surface of the coating is significantly reduced, i.e. the post-treatment can significantly reduce the particles on the surface of the coating.
FIGS. 1 (c) and (d) are graphs with high energy Ar + The three-dimensional topography of the AlCrN coating surface before and after bombardment post-treatment, and corresponding surface roughness results are listed in Table 1. As shown in Table I, by passing through high energy Ar + After bombardment treatment, the surface roughness of the AlCrN coating is reduced.
FIG. 2 is a graph showing the number of droplets on the surface of the coating, which can be quantitatively analyzed by high energy Ar + The cleaning effect of the bombardment post-treatment on the liquid drops on the surface of the coating is shown in the table I.
As can be seen from Table I, the AlCrN coating passes through high-energy Ar + After bombardment treatment, the surface liquid drops are reduced, the particle on the surface of the coating is reduced by 22.0 percent, and high-energy Ar is shown + The bombardment post-treatment has a cleaning effect on the droplets on the surface of the coating.
FIG. 3 shows high energy Ar as in FIG. 3 + XRD patterns of AlCrN coating before and after bombardment treatment.
As can be seen from the figure, the high energy Ar + The XRD pattern of the AlCrN coating before and after bombardment treatment is similar to that of the untreated coating, and the main structural phase of all AlCrN coatings is solid-solution fcc- (Cr, al) N phase and high-energy Ar + The phase composition of the AlCrN coating and the matrix is not influenced before and after bombardment treatment.
It can also be seen that the peak positions of the AlCrN before and after the high energy Ar + bombardment post-treatment are shifted to a low angle compared to the untreated AlCrN coating.
Taking the (200) diffraction peak of (Al, cr) N as an example, through high-energy Ar + The peak shift value of post bombardment treatment reached 0.461 °. The diffraction peak of AlCrN coating (111) is also shifted to low angle by high energy Ar + The offset after bombardment post-treatment was 0.600 °. The diffraction peaks of the material are shifted toward low angles, which is closely related to the increase of the residual compressive stress, indicating high-energy Ar + Post-bombardment treatment can increase the residual compressive stress of the coating, and suitable residual compressive stress can improve the cutting performance of the coated tool.
As shown in FIG. 4, FIG. 4 shows the high energy Ar + Friction factor plots of AlCrN coatings before and after bombardment post-treatment.
As can be seen from FIG. 4, the average friction factor of the untreated AlCrN coating was 0.654 under high energy Ar + The average friction factor of the post-bombardment treated AlCrN coating was 0.620. By high energy Ar + The average coefficient of friction of the AlCrN coating after bombardment was less than that of the untreated coating, indicating high energy Ar + The bombardment post-treatment can reduce the surface roughness of the coating, and further reduce the friction coefficient of the coating.
FIG. 5 shows high energy Ar as shown in FIG. 5 + And (4) residual stress maps of the tool base body before and after bombardment post-treatment.
The residual stress of the untreated matrix is-36 MPa after high-energy Ar + The residual stress of the base body after bombardment treatment is-210 MPa. By high energy Ar + After bombardment post-treatment, residual stress increases.
FIG. 6 shows high energy Ar in FIG. 6 + The graph of the cutter cutting life of the AlCrN coating cutter before and after bombardment post-treatment.
When dull with a standard VB of 0.2mm, the untreated AlCrN-coated tool had a cutting length of 10m after high-energy Ar + The cutting length of the bombarded AlCrN coating cutter can reach 14 m, and the cutting life is prolonged by about 40%. This is mainly due to the reduction of the surface roughness of the coating, reducing the stresses and wear to which the coated tool is subjected during cutting, due to the high energy Ar + The increase in residual stress in the coating and substrate from post-bombardment treatment also effectively increases the cutting life of the coated tool.
FIG. 7 shows high energy Ar as shown in FIG. 7 + And (4) a shape graph of the cutting wear of the AlCrN coating cutter before and after bombardment post-treatment. Wherein FIG. 7 (a) shows high energy Ar + Cutting wear topography of the AlCrN coating cutter before bombardment post-treatment; FIG. 7 (b) shows high energy Ar + And (4) a cutting wear topography of the AlCrN coating cutter after bombardment post-treatment.
As can be seen from fig. 7 (a), there are areas of coating wear, spalling at the cutting edge of the coated tool and the tool base is exposed.
From FIG. 7 (b) by high energy Ar + After bombardment treatmentThe AlCrN coated tool has a small area of wear and flaking on the flank surface, and the tool substrate is exposed.
The foregoing is merely a preferred embodiment of the invention, which is intended to be illustrative and not limiting. It will be understood by those skilled in the art that various changes, modifications and equivalents may be made therein without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (4)
1. A method for improving the performance of an AlCrN coating cutter by in-situ high-energy Ar + etching post-treatment is characterized by comprising the following steps:
s1, cleaning a base material;
in the step S1, a vacuum furnace for multi-arc ion plating is vacuumized, ar gas is introduced, and the vacuum furnace is heated to 400 ℃; starting an anode target after starting a cleaning Ti target, wherein the anode target and the cleaning Ti target form positive and negative traction electron motion, electrons collide with Ar gas to generate Ar +, the negative bias is controlled to be-200V, and the Ar + is attracted to carry out ion bombardment on the surface of a substrate;
s2, preparing an AlCrN functional coating;
depositing the AlCrN functional coating on the substrate treated in the step S1;
s3, in-situ high-energy Ar + bombardment post-treatment;
in the step S3, in-situ high-energy Ar + bombardment post-treatment is performed on the AlCrN functional coating prepared in the step S2: after deposition and coating, keeping the AlCrN functional coating in a coating chamber, vacuumizing the functional coating, keeping the processing temperature at 400 ℃, and introducing Ar gas; starting an anode target after starting the Ti target to be cleaned, wherein the anode target and the Ti target to be cleaned form positive and negative electrode traction electron motion, the electrons collide with Ar gas to generate Ar +, the negative bias is controlled to be-200V, the Ar + is attracted to carry out ion bombardment on the surface of the base material provided with the AlCrN functional coating, and the bombardment time is 40min;
in the preparation process of the AlCrN functional coating, the AlCr target current is adjusted to 130A, the substrate bias voltage is set to-80V, and the deposition time is 120min; the molar content ratio of the target material of the AlCr target is Al: cr = 70: 30.
2. The method for improving the performance of the AlCrN coated tool bit by in-situ high energy Ar + post-etch treatment of claim 1, wherein in step S3, the purity of Ar gas is 99.999%.
3. The method for improving the performance of the AlCrN coated tool by in-situ high-energy Ar + post-etch treatment as claimed in claim 1, wherein in the step S3, the current for cleaning the Ti target is 40-100A.
4. The method for improving the performance of the AlCrN coated cutting tool through the in-situ high-energy Ar + post-etching treatment in claim 1, wherein in the step S3, before the Ar gas is introduced, the vacuum furnace is vacuumized to 2.0x10 < -4 > Pa, and after the Ar gas is introduced, the pressure is adjusted to 4.0Pa.
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