JPH0421794Y2 - - Google Patents
Info
- Publication number
- JPH0421794Y2 JPH0421794Y2 JP1987103075U JP10307587U JPH0421794Y2 JP H0421794 Y2 JPH0421794 Y2 JP H0421794Y2 JP 1987103075 U JP1987103075 U JP 1987103075U JP 10307587 U JP10307587 U JP 10307587U JP H0421794 Y2 JPH0421794 Y2 JP H0421794Y2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- pair
- parallel electrodes
- electrode
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 25
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 229920001169 thermoplastic Polymers 0.000 description 2
- 239000004416 thermosoftening plastic Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987103075U JPH0421794Y2 (de) | 1987-07-04 | 1987-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987103075U JPH0421794Y2 (de) | 1987-07-04 | 1987-07-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6410040U JPS6410040U (de) | 1989-01-19 |
| JPH0421794Y2 true JPH0421794Y2 (de) | 1992-05-19 |
Family
ID=31333566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987103075U Expired JPH0421794Y2 (de) | 1987-07-04 | 1987-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0421794Y2 (de) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5225959B2 (ja) * | 2009-09-29 | 2013-07-03 | アール・ビー・コントロールズ株式会社 | イオン発生装置 |
| JP2012176869A (ja) * | 2011-02-28 | 2012-09-13 | Murata Mfg Co Ltd | オゾン発生装置 |
| CN107108208B (zh) * | 2015-01-30 | 2019-01-08 | 株式会社村田制作所 | 臭氧生成装置 |
| JP6645385B2 (ja) * | 2016-08-30 | 2020-02-14 | 株式会社デンソー | ガス改質装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60113334U (ja) * | 1984-01-10 | 1985-07-31 | トヨタ車体株式会社 | オゾン発生装置 |
-
1987
- 1987-07-04 JP JP1987103075U patent/JPH0421794Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6410040U (de) | 1989-01-19 |
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