JPH04209503A - Method for trimming resistor - Google Patents
Method for trimming resistorInfo
- Publication number
- JPH04209503A JPH04209503A JP2405403A JP40540390A JPH04209503A JP H04209503 A JPH04209503 A JP H04209503A JP 2405403 A JP2405403 A JP 2405403A JP 40540390 A JP40540390 A JP 40540390A JP H04209503 A JPH04209503 A JP H04209503A
- Authority
- JP
- Japan
- Prior art keywords
- resistors
- resistor
- resistance value
- trimming
- ruo2
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000009966 trimming Methods 0.000 title claims abstract description 14
- 238000000034 method Methods 0.000 title claims description 8
- 239000011521 glass Substances 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 230000002950 deficient Effects 0.000 abstract description 2
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 abstract 2
- 230000007423 decrease Effects 0.000 description 3
- 238000010304 firing Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
Description
【産業上の利用分野］本発明は厚膜ハイブリッドＩＣ等
の抵抗体のトリミング方法に関する。
［０００２］
【従来の技術】一般に、厚膜ハイブリッドＩＣでは、基
板上に作り込まれた素子、とくに抵抗素子の値を所定の
範囲内に入れるためにトリミングが行われる。このトリ
ミングは、抵抗体の幅をせまくするか、有効長を長くす
ることにより、抵抗値を高くして、所要の値を得る方法
である。
［０００３］従来の厚膜抵抗体のトリミング方法として
は、例えば所定幅の抵抗体の一部をＹＡＧレーザ等で切
ることにより、抵抗体の幅を狭めてその抵抗値を上昇さ
せるレーザトリミングがある。
［０００４］[Field of Industrial Application] The present invention relates to a method for trimming a resistor of a thick film hybrid IC or the like. [0002] Generally, in thick film hybrid ICs, trimming is performed to bring the values of elements fabricated on a substrate, particularly resistance elements, within a predetermined range. This trimming is a method of increasing the resistance value by narrowing the width of the resistor or lengthening its effective length to obtain the desired value. [0003] As a conventional method for trimming a thick film resistor, there is laser trimming, in which, for example, a part of a resistor of a predetermined width is cut with a YAG laser or the like to narrow the width of the resistor and increase its resistance value. . [0004]
【発明が解決しようとする課題】しかしながら、このよ
うな抵抗体のトリミング方法にあっては、レーザの照射
が失敗したり、印刷ミス等によりその抵抗体の抵抗値が
目標値よりも高くなった場合には、再び抵抗値を低下さ
せることはできず、その抵抗体さらにはハイブリッドＩ
Ｃまでがすべて不良となっていた。
［０００５］そこで、本発明は、その抵抗値を低下させ
ることができる抵抗体のトリミング方法を提供すること
を目的としている。
［０００６］[Problem to be Solved by the Invention] However, in this method of trimming a resistor, the resistance value of the resistor becomes higher than the target value due to laser irradiation failure, printing error, etc. In this case, the resistance value cannot be lowered again, and the resistor and even the hybrid I
All items up to C were defective. [0005] Therefore, an object of the present invention is to provide a method for trimming a resistor that can reduce its resistance value. [0006]
【課題を解決するための手段】本発明は、ＲｕＯ２−ガ
ラス系抵抗体ペーストにＡｇを０． ５〜２０重量％含
ませた抵抗体を基板上に配設し、この抵抗体に局部的に
熱を加えることによりその抵抗値を減少させる抵抗体の
トリミング方法である。
（０００７］ここで、抵抗体中に含まれるＡｇが０．５
重量％未満の場合には抵抗値が低下しないものである。
また、Ａｇが２０重量％を超える場合にはＡｇとＲｕＯ
２のパスができて加熱しても抵抗値の変化は無いもので
ある。
［０００８］[Means for Solving the Problems] The present invention provides RuO2-glass resistor paste with 0.00% Ag. This is a resistor trimming method in which a resistor containing 5 to 20% by weight is disposed on a substrate and the resistance value of the resistor is reduced by locally applying heat to the resistor. (0007] Here, Ag contained in the resistor is 0.5
If it is less than % by weight, the resistance value will not decrease. In addition, when Ag exceeds 20% by weight, Ag and RuO
There is no change in the resistance value even if the second pass is made and heated. [0008]
【作用】本発明に係る抵抗体のトリミング方法によれば
、抵抗体の加熱された部分は抵抗値が低下する。これは
、高温加熱によりＲｕＣｈ−ガラス系中にはＡｇはＡｇ
゛で存在しており、このＡｇ−が電子をトラップするか
らである。すなわち、Ａｇ−＋ｅ−→Ａｇとなるからで
ある。
［０００９］この結果、当該高温加熱部分の抵抗値は低
下することとなる。
［００１０１
【効果］本発明によれば、抵抗体の抵抗値を低下させる
ことができ、トリミングミスや印刷ミスに係る抵抗体を
再生させることができる。したがって、その歩留まりを
向上させることができる。
［００１１１
【実施例］次表はＡｇの含有量と抵抗値の変化の関係を
示している。抵抗体の焼成条件二通常の焼成条件、８５
０℃×１０分使用レーザ：ＹＡＧレーザレーザ出カニ０
．２Ｗ〜ＩＷ
［００１２］According to the method of trimming a resistor according to the present invention, the resistance value of the heated portion of the resistor decreases. This is because Ag becomes Ag in the RuCh-glass system due to high-temperature heating.
This is because this Ag- traps electrons. That is, this is because Ag-+e-→Ag. [0009] As a result, the resistance value of the high temperature heating portion will decrease. [00101] [Effect] According to the present invention, the resistance value of a resistor can be lowered, and a resistor caused by a trimming error or a printing error can be regenerated. Therefore, the yield can be improved. [00111] [Example] The following table shows the relationship between the Ag content and the change in resistance value. Firing conditions for resistor 2 Normal firing conditions, 85
0°C x 10 minutes Laser used: YAG laser Laser output 0
．． 2W~IW [0012]
Claims (1)
ｇを０．５〜２０重量％含ませた抵抗体を基板上に配設
し、この抵抗体に局部的に熱を加えることによりその抵
抗値を減少させることを特徴とする抵抗体のトリミング
方法。Claim 1: RuO_2-glass resistor paste with A
A method for trimming a resistor, which comprises disposing a resistor containing 0.5 to 20% by weight of g on a substrate, and reducing the resistance value by locally applying heat to the resistor. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2405403A JPH04209503A (en) | 1990-12-05 | 1990-12-05 | Method for trimming resistor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2405403A JPH04209503A (en) | 1990-12-05 | 1990-12-05 | Method for trimming resistor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04209503A true JPH04209503A (en) | 1992-07-30 |
Family
ID=18515001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2405403A Withdrawn JPH04209503A (en) | 1990-12-05 | 1990-12-05 | Method for trimming resistor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04209503A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100369565B1 (en) * | 1999-12-17 | 2003-01-29 | 대주정밀화학 주식회사 | Resistive paste composition for the formation of electrically heat-generating layer |
| JP2006228851A (en) * | 2005-02-16 | 2006-08-31 | Toppan Printing Co Ltd | Method for forming resistance element |
-
1990
- 1990-12-05 JP JP2405403A patent/JPH04209503A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100369565B1 (en) * | 1999-12-17 | 2003-01-29 | 대주정밀화학 주식회사 | Resistive paste composition for the formation of electrically heat-generating layer |
| JP2006228851A (en) * | 2005-02-16 | 2006-08-31 | Toppan Printing Co Ltd | Method for forming resistance element |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19980312 |