JPH04207699A - Pressure vibration detecting element - Google Patents

Pressure vibration detecting element

Info

Publication number
JPH04207699A
JPH04207699A JP33775790A JP33775790A JPH04207699A JP H04207699 A JPH04207699 A JP H04207699A JP 33775790 A JP33775790 A JP 33775790A JP 33775790 A JP33775790 A JP 33775790A JP H04207699 A JPH04207699 A JP H04207699A
Authority
JP
Japan
Prior art keywords
case
condenser microphone
circuit board
pressure vibration
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP33775790A
Other languages
Japanese (ja)
Other versions
JP2753896B2 (en
Inventor
Yoshijirou Watanabe
嘉二郎 渡邊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshin Electric Co Ltd
Original Assignee
Toshin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshin Electric Co Ltd filed Critical Toshin Electric Co Ltd
Priority to JP2337757A priority Critical patent/JP2753896B2/en
Publication of JPH04207699A publication Critical patent/JPH04207699A/en
Application granted granted Critical
Publication of JP2753896B2 publication Critical patent/JP2753896B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Fluid Pressure (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

PURPOSE:To improve the above element in such a manner that even extremely low frequencies can be measured by utilizing a condenser microphone by closing the air leak path of a cylindrical body exclusive of its aperture. CONSTITUTION:An adhesive layer 13 adheres a circuit board 3 to the bottom wall surface on the inner side of a case 2 to eliminate the spacing 10 formed between the circuit board 3 and the bottom wall surface on the inner side of the case 2, thereby preventing the flow of the air in and out of the case 2 through the hole 2a of the case 2. The holes, etc., for mounting parts must not be bored in the part of the hole 2a position of the case 2 of the circuit board 3 in such a case. The frequency characteristics in the low frequency region of the condenser microphone are improved down to about 0.1Hz as the counter resonance is eliminated. The frequency characteristics of the low frequency region are easily and greatly improved by the simple constitution in this way.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、コンデンサマイクロホン、セラミックマイ
クロホン等の圧力振動検出素子に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a pressure vibration detection element such as a condenser microphone or a ceramic microphone.

[従来の技術] 従来の圧力振動検出素子の構造をコンデンサマイクロホ
ンを例にとって説明する。すなわち、第4図乃至第6図
にコンデンサマイクロホン(+)の断面構造を示し、そ
の説明を行うがコンデンサマイクロホンは音響機器の一
部品として従来から広く、M的に使用されてきているも
の(例えば プリモ製 ICEM−EM−1211なの
で詳細な説明は省略、簡単に説明する。
[Prior Art] The structure of a conventional pressure vibration detection element will be explained using a condenser microphone as an example. That is, the cross-sectional structure of a condenser microphone (+) is shown in FIGS. Since it is ICEM-EM-1211 manufactured by Primo, a detailed explanation will be omitted and a brief explanation will be provided.

(2)は底部にリード線取り出し用孔(2a)が設けら
れたケース、(3)はFET )ランシスタ(4)が取
り付けられた回路基板で、その回路基板(3)から前記
ケース(2)の孔(2a)を介して引出し線(図示せず
)が外部に引き出されている。(5)は上下両端開口の
円筒状の間隔保持・支持部材で、その上端面(5a)と
ケース(2)の先端折り曲げ部(2b)との間に、複数
枚のリング状絶縁スペーサ(7)を介して、受圧面を形
成するエレクトレットフィルム(・6a)及びその対向
電極(6b)の周縁部が全体にわたって挟持されている
。そのため、コンデンサマイクロホン(1)は第5図に
示すようにケース(2)の先端折り曲げ部(2b)近傍
に微小な隙間(10)が所々に形成され、その隙間(1
0)を介してコンデンサマイクロホン(1)の内部に形
成された空間に閉じ込められた空気が漏れるように流通
し、外部に発生する圧力変動によって、エレクトレット
フィルム(6a)がたわみ、対向電極(6b)との間に
形成された静電容量を変化せしめ、   1圧力変動を
a気信号に変換している。またコンデンサマイクロホン
(1)の底部にも第6図に示すように各部材(2)(3
)、(s)間に隙間(10)が発生して、外部;二圧力
変動が発生するとケース(2)の孔(2a)を介して、
コンデンサマイクロホン(1)の内部に形成され、た空
間の空気が流通する。なお、上記F E Thランシス
タ(4)の1つのリード端子(4a)はエレクトレット
フィルム(6a)の対向電極(6b)に電気的に常時接
続されている。
(2) is a case with a hole (2a) for taking out lead wires at the bottom, (3) is a circuit board to which a FET (FET) run transistor (4) is attached, and the circuit board (3) is connected to the case (2). A lead wire (not shown) is led out through the hole (2a). (5) is a cylindrical spacing/supporting member with openings at both upper and lower ends, and a plurality of ring-shaped insulating spacers (7 ), the entire peripheral edge of the electret film (6a) forming the pressure receiving surface and its counter electrode (6b) is sandwiched. Therefore, as shown in Fig. 5, the condenser microphone (1) has small gaps (10) formed here and there near the bent end portion (2b) of the case (2).
The air trapped in the space formed inside the condenser microphone (1) leaks through the capacitor microphone (1) through the capacitor microphone (1), and due to pressure fluctuations occurring outside, the electret film (6a) bends and the counter electrode (6b) It changes the capacitance formed between the two and converts pressure fluctuations into an air signal. Also, as shown in Figure 6, each member (2) (3) is placed on the bottom of the condenser microphone (1).
), (s), and when external pressure fluctuations occur, the air is removed through the hole (2a) of the case (2).
The air in the space formed inside the condenser microphone (1) circulates. Note that one lead terminal (4a) of the F E Th transistor (4) is always electrically connected to the counter electrode (6b) of the electret film (6a).

[発明が解決しようとする課題] しかしながら、この種のコンデンサマイクロホン等を含
む、−a市販品のマイクロホンは音響用として開発され
ていたので、低い方の周波数は人間の耳に聞こえる20
Hz程度までしか周波数特性も計測されておらず、また
カタログ上も商品としての保証もしていないのが現状で
、マイクロホンを0.1)Tz、1l−Tz等の低い周
波数領域で使用するようなことは性能上、またその構造
上できなかった。そこで、小生はカタログ値として掲載
されていない(実際上測定されていない)上記コンデン
サマイクロホン(+)の周波数特性を、小生が自作′し
た゛i定装置を用いて測定したところ第7図に示すよう
にIHz〜1.、、OHzの間に反共振特性(特性が7
字状になっている部分)が発生し、低周波領域での計測
用センサとしての特性は有していないことが分かり、こ
のような、周波数特性のもとては、0.1〜IOHz程
度のゆっくりした運動特性を有する人間等の動きなどの
物理現象を圧力変動を利用して検出することはできない
と言うことを実験的に証明した。
[Problem to be solved by the invention] However, since commercially available microphones, including this type of condenser microphone, were developed for acoustic use, the lower frequencies are audible to the human ear.
Frequency characteristics have only been measured up to about Hz, and there is currently no guarantee in the catalog or as a product. This was not possible due to its performance and structure. Therefore, I measured the frequency characteristics of the above-mentioned condenser microphone (+), which are not listed in the catalog values (in fact, they have not been measured), using a self-made device, and the results are shown in Figure 7. Like IHz~1. ,, anti-resonance characteristic (characteristic is 7
It has been found that the sensor does not have the characteristics as a measurement sensor in the low frequency range, and the source of such frequency characteristics is about 0.1 to IOHz. It was experimentally proven that physical phenomena such as the movement of humans, which have slow motion characteristics, cannot be detected using pressure fluctuations.

[発明が解決するための手段]   ゛そこで、小生は
、低価格の一般市販品のオーディオ用マイクロホン、特
にコンデンサマイクロホンを利用して、非常に低域の周
波数まで測定できるように改良した全く新規なマイクロ
ホン、すなわち圧力振動検出素子を提案するもので、そ
の構成は、筒体の一端開口部を閉塞するように、圧力振
動検出手段を配設し、かつその筒体をその開口部以外の
空気漏れ路を閉塞するようにする。
[Means for Solving the Invention] ゛Therefore, I developed a completely new and improved technology that uses a low-cost, commercially available audio microphone, especially a condenser microphone, to be able to measure very low frequencies. We propose a microphone, that is, a pressure vibration detection element.The structure is such that a pressure vibration detection means is arranged so as to close an opening at one end of a cylindrical body, and the cylindrical body is closed to prevent air leakage from other than the opening. to block the tract.

[作用] 上記のようなコンデンサマイクロホン等の圧力振動検出
手段の受圧部の後方に形成される空間部分と外部との気
体の流通を極めて少なくするようにして0.1Hz、I
Hz等の低周波特性を大幅に改善する。
[Function] 0.1 Hz, I
Significantly improves low frequency characteristics such as Hz.

[第1実施例] 第1図に基づいて構成を説明するが、第4図乃至第6図
で説明した部分と同一構成または均等な部分のものにつ
いてはその説明を省略し、異なる部分についてのみ説明
をする。
[First embodiment] The configuration will be explained based on FIG. 1, but the explanation will be omitted for parts that are the same or equivalent to those explained in FIGS. 4 to 6, and only the different parts will be explained. Give an explanation.

第1図において、(13)は接着層で、回路基板(3)
をケース(2)の内側の底壁面に接着するもので、第6
図に示した回路基板(3)とケース(2)内側の底壁面
との間に形成されている隙間(10)を解消し、ケース
(2)の孔(2a)を介してのケース(2)内外の空気
の流通を防止している。ただしこの場合、云うまでもな
いことであるが、回路基板(3)のケース(2)の孔(
2a)位置の部分に部品取り付は用の孔等が穿設されて
いてはならない。
In Figure 1, (13) is an adhesive layer, which is attached to the circuit board (3).
is glued to the inside bottom wall of the case (2).
The gap (10) formed between the circuit board (3) shown in the figure and the bottom wall inside the case (2) is eliminated, and the case (2) is inserted through the hole (2a) of the case (2). ) Prevents the circulation of air inside and outside. However, in this case, it goes without saying that the hole (
2a) There shall be no holes or the like for mounting parts in the part at position 2a).

上記構成にすることによって、コンデンサマイクロホン
(1)の低周波領域における周波数特性は、反共振が解
消されて0.1Hzの近傍まで改善されていることを第
2図に示す。7 [第2実施例] 第3図に基すいてこの実施例の構成を説明するが、第1
図及び第5図乃至第6図で説明した部分と同一構成また
は均等な部分のものについてはその説明を省略し、異な
る部分についてのみ説明をする。
FIG. 2 shows that by adopting the above configuration, the frequency characteristics of the condenser microphone (1) in the low frequency range are improved to around 0.1 Hz by eliminating anti-resonance. 7 [Second Embodiment] The configuration of this embodiment will be explained based on FIG.
Descriptions of parts that are the same or equivalent to those explained in FIGS. 5 and 6 will be omitted, and only different parts will be described.

まず第3図において、第1図と異なるところは第3図で
は第1図における接着層(13)を用いずにケース(2
)の孔(2a)を外側から封止剤(14)を用いて封止
してケース(2)内外の空気の流通を防止している点で
ある。
First, in Fig. 3, the difference from Fig. 1 is that in Fig. 3, the adhesive layer (13) in Fig. 1 is not used, and the case (2) is
) is sealed from the outside using a sealant (14) to prevent air from flowing inside and outside the case (2).

すなわち、封止剤(14)はケース(2)のリード線引
き出用孔(2a)を外側から閉塞してしまい、ケース(
2)内外の空気の流通を防止している。それによって、
上記実施例のものと同様の周波数特性を第2図の如く得
ている。
That is, the sealant (14) closes the lead wire extraction hole (2a) of the case (2) from the outside, and the case (
2) Prevents circulation of air inside and outside. Thereby,
A frequency characteristic similar to that of the above embodiment is obtained as shown in FIG.

なお、上記実施例ではコンデンサマイクロホンを圧力振
動検出素子として利用した例を説明したが、それに限ら
ず 類似の機能を有し、同様な構造を有するものである
ならば何でもよいことは云うまでもないことである。
Although the above embodiment describes an example in which a condenser microphone is used as a pressure vibration detection element, it goes without saying that the present invention is not limited to this, and any device having a similar function and structure may be used. That's true.

[発明の効果] 以上のように、本発明は、筒体の一端開口部を閉塞する
ように、圧力振動検出手段が配設されてなる圧力振動検
出素子において、前記筒体をその開口部以外の空気漏れ
路を閉塞したことを特徴とする圧力振動検出素子である
ので、簡単る構成で容易に低周波領域の周波数特性を大
幅に改善できると云う効果が発揮される。特に、従来の
コンデンサマイクロホンは全く改造しなくても容易に低
周波領域の周波数特性を大幅に改善でき、かつ高価にな
らず安価な素子を得ることができるという従来に全くな
い極めて大きな効果が発揮できる。
[Effects of the Invention] As described above, the present invention provides a pressure vibration detection element in which a pressure vibration detection means is arranged so as to close an opening at one end of a cylinder. Since the pressure vibration detection element is characterized in that the air leakage path is closed, it is possible to easily improve the frequency characteristics in the low frequency region significantly with a simple configuration. In particular, it is possible to greatly improve the frequency characteristics in the low frequency range of conventional condenser microphones without any modification at all, and it is possible to obtain inexpensive elements without making them expensive. can.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による第1実施例のコンデンサマイクロ
ホンの要部断面説明図、第2図は第1実施例及び第2実
施例に示したものの周波数特性図第3図は本発明による
第2実施例のコンデンサマイクロホンの要部断面説明図
、第4図は従来のコンデンサマイクロホンの断面説明図
、第5聞及び第6図は第4図に示したコンデンサマイク
ロホンの空気漏れ路を説明するための要部断面説明図、
第7図は第4図に示したコンデンサマイクロホンの周波
数特性図である。 1・・・・・・・・・コンデンサマイクロホン2・・・
・・・・・・ケース  2a・・・・・・・・・孔3・
・・・・・・・・回路基板 4・・・・・・・・・FF
Tトランジスタ6a・・・・・・・・・エレクトレット
フィルム6b・・・・・・・・・対向電極  7・・・
・・・・・・スペーサ13・・・・・・・・・接着剤 
 14・・・・・・・・・封止剤第1図 上 第3図 ± 第4図 第5図         第6図
FIG. 1 is a cross-sectional explanatory diagram of essential parts of a condenser microphone according to a first embodiment of the present invention, and FIG. 2 is a frequency characteristic diagram of the condenser microphone shown in the first and second embodiments. FIG. 4 is a cross-sectional view of the main part of the condenser microphone of the embodiment, FIG. 4 is a cross-sectional view of a conventional condenser microphone, and FIGS. Cross-sectional diagram of main parts,
FIG. 7 is a frequency characteristic diagram of the condenser microphone shown in FIG. 4. 1... Condenser microphone 2...
...Case 2a ...... Hole 3.
・・・・・・・・・Circuit board 4・・・・・・・・・FF
T transistor 6a...Electret film 6b...Counter electrode 7...
・・・・・・Spacer 13・・・・・・Adhesive
14... Sealant Fig. 1, Fig. 3 ± Fig. 4, Fig. 5, Fig. 6

Claims (1)

【特許請求の範囲】[Claims] (1)筒体の一端開口部を閉塞するように、圧力振動検
出手段が配設されてなる圧力振動検出素子において、前
記筒体をその開口部以外の空気漏れ路を閉塞したことを
特徴とする圧力振動検出素子。
(1) A pressure vibration detection element in which a pressure vibration detection means is arranged so as to close an opening at one end of a cylinder, characterized in that the air leakage path other than the opening of the cylinder is closed. Pressure vibration detection element.
JP2337757A 1990-11-30 1990-11-30 Pressure vibration detection element Expired - Lifetime JP2753896B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2337757A JP2753896B2 (en) 1990-11-30 1990-11-30 Pressure vibration detection element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2337757A JP2753896B2 (en) 1990-11-30 1990-11-30 Pressure vibration detection element

Publications (2)

Publication Number Publication Date
JPH04207699A true JPH04207699A (en) 1992-07-29
JP2753896B2 JP2753896B2 (en) 1998-05-20

Family

ID=18311675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2337757A Expired - Lifetime JP2753896B2 (en) 1990-11-30 1990-11-30 Pressure vibration detection element

Country Status (1)

Country Link
JP (1) JP2753896B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008533951A (en) * 2006-05-09 2008-08-21 ビーエスイー カンパニー リミテッド Directional silicon condenser microphone with additional back chamber
JP2010503220A (en) * 2006-08-29 2010-01-28 カリフォルニア インスティテュート オブ テクノロジー Microfabricated implantable wireless pressure sensor and pressure measurement and sensor implantation method for biomedical applications
JP2016072802A (en) * 2014-09-30 2016-05-09 株式会社アコー Sound/vibration detection sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5645264U (en) * 1979-09-19 1981-04-23
JPS5654711U (en) * 1979-10-03 1981-05-13

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5645264U (en) * 1979-09-19 1981-04-23
JPS5654711U (en) * 1979-10-03 1981-05-13

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008533951A (en) * 2006-05-09 2008-08-21 ビーエスイー カンパニー リミテッド Directional silicon condenser microphone with additional back chamber
JP2010104006A (en) * 2006-05-09 2010-05-06 Bse Co Ltd Directional silicon capacitor microphone having additional back chamber
JP4738481B2 (en) * 2006-05-09 2011-08-03 ビーエスイー カンパニー リミテッド Directional silicon condenser microphone with additional back chamber
JP2010503220A (en) * 2006-08-29 2010-01-28 カリフォルニア インスティテュート オブ テクノロジー Microfabricated implantable wireless pressure sensor and pressure measurement and sensor implantation method for biomedical applications
JP2016072802A (en) * 2014-09-30 2016-05-09 株式会社アコー Sound/vibration detection sensor

Also Published As

Publication number Publication date
JP2753896B2 (en) 1998-05-20

Similar Documents

Publication Publication Date Title
US11358859B2 (en) Micro-electromechanical transducer
US6937736B2 (en) Acoustic sensor using curved piezoelectric film
CN105744453B (en) The Electret Condencer Microphone of conductive plate with insulation
JPH11508101A (en) Micro mechanical microphone
US4439642A (en) High energy ultrasonic transducer
CN105191352A (en) Capacitive sensor, acoustic sensor and microphone
US20180184212A1 (en) Capacitive transducer and acoustic sensor
JP2872170B2 (en) Vibration detection sensor
CN109379684A (en) Microphone and electronic equipment
JP3805576B2 (en) Vibration transducer and acceleration sensor equipped with the vibration transducer
US20050276429A1 (en) Electret condenser microphone
JPH04207699A (en) Pressure vibration detecting element
US11368794B2 (en) MEMS microphone with integrated resistor heater
EP3334184B1 (en) Acoustic sensor and capacitive transducer
JP4154108B2 (en) Small microphone
JP5190033B2 (en) Vibration sensor
US20170265005A1 (en) Microphone capsule with odd number of sides
JP7219525B2 (en) transducer device
JP2017112479A (en) Contact microphone
JP3293729B2 (en) Vibration pickup device and manufacturing method thereof
JP4112883B2 (en) Acceleration sensor
RU2082131C1 (en) Capacitance pressure gauge and method for its manufacturing
JP2612563B2 (en) Pressure sensor for low frequency measurement
JPH1090099A (en) Pressure sensor
JPH03188340A (en) Pressure-fluctuation detection sensor for high-pressure piping