JPH03188340A - Pressure-fluctuation detection sensor for high-pressure piping - Google Patents
Pressure-fluctuation detection sensor for high-pressure pipingInfo
- Publication number
- JPH03188340A JPH03188340A JP32720889A JP32720889A JPH03188340A JP H03188340 A JPH03188340 A JP H03188340A JP 32720889 A JP32720889 A JP 32720889A JP 32720889 A JP32720889 A JP 32720889A JP H03188340 A JPH03188340 A JP H03188340A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure
- substrate
- attached
- detection sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims description 11
- 239000000758 substrate Substances 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 4
- 239000012212 insulator Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000013016 damping Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pipeline Systems (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は高圧下のガス配管内の微少な圧力変動を検出す
る圧力変動検出センサに関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a pressure fluctuation detection sensor that detects minute pressure fluctuations in gas piping under high pressure.
従来、この種の圧力変動検出センサは、ダイアフラムが
耐圧構造となっている密閉型のものか、ダイアフラムが
センサの内部に配置されている差圧型のものであった。Conventionally, this type of pressure fluctuation detection sensor has been either a closed type in which the diaphragm has a pressure-resistant structure, or a differential pressure type in which the diaphragm is disposed inside the sensor.
（発明が解決しようとする課題）
上述した従来の圧力変動検出センサは、密閉型の場合、
ダイヤフラムが耐圧構造のために、圧力変動に対するダ
イヤフラムの変形が小さく、つまり感度が低く、音波等
の低レベルの圧力変動を検出できないという欠点があり
、差圧型の場合、ダイヤフラムがセンサーの内部に位置
しているためにダンピングが大きく低周波の圧力変動の
検出は可能であるが高周波の音波等では検出が困難とい
う欠点がある。また、音波等の検出ということからマイ
クロフォンを使用することが考えられるが、通常の音波
の検出に使用されるマイクロフォンは常圧の環境下で使
用されることを前提として作られているために、高圧下
での使用は不可能である。また、特殊なものとして圧電
素子を使った水中マイクロフォンがあるが、これは液体
中で使うことを前提として作られており、これを気体中
で用いるとインピーダンスが合わず感度が低下してしま
う。(Problems to be Solved by the Invention) When the conventional pressure fluctuation detection sensor described above is a closed type,
Because the diaphragm has a pressure-resistant structure, the deformation of the diaphragm in response to pressure fluctuations is small, meaning that the sensitivity is low and low-level pressure fluctuations such as sound waves cannot be detected.In the case of a differential pressure type, the diaphragm is located inside the sensor. Because of this, the damping is large and it is possible to detect low-frequency pressure fluctuations, but it has the disadvantage that it is difficult to detect high-frequency sound waves. Additionally, it is conceivable to use a microphone to detect sound waves, etc., but the microphones used to detect normal sound waves are designed to be used in an environment of normal pressure. It is not possible to use it under high pressure. There is also a special type of underwater microphone that uses a piezoelectric element, but it is made with the assumption that it will be used in liquid, and if it is used in gas, the impedance will not match and the sensitivity will decrease.
本発明は上記の欠点に鑑み、音波を検出できるように感
度が高く、かつ高圧気体中で圧力変動を検出できる高圧
ガス配管用の圧力変動検出センサを提供することを目的
とする。SUMMARY OF THE INVENTION In view of the above drawbacks, it is an object of the present invention to provide a pressure fluctuation detection sensor for high-pressure gas piping that is sensitive enough to detect sound waves and capable of detecting pressure fluctuations in high-pressure gas.
本発明の高圧ガス配管用の圧力変動検出センサは、
高圧ガス配管からの分岐管のフランジに取り付けられる
基板と、
側壁に圧力バランス用の貫通孔が形成され、取り付けの
際、分岐管側となる該基板の一面に突設された筒状部材
と、
該筒状部材の開放端を覆うように該筒状部材に取り付け
られたダイアフラムと、
該ダイアフラムに配設した圧力センサで該ダイアフラム
の変形を検出し、検出結果を該基板に配設したシール部
を貫通して該基板の他面に導出する圧力変動導出手段と
を有する。The pressure fluctuation detection sensor for high-pressure gas piping of the present invention includes a substrate that is attached to the flange of a branch pipe from the high-pressure gas piping, and a through hole for pressure balance formed in the side wall, which becomes the side of the branch pipe when installed. A cylindrical member protruding from one surface of the substrate, a diaphragm attached to the cylindrical member so as to cover an open end of the cylindrical member, and a pressure sensor disposed on the diaphragm to detect deformation of the diaphragm. and pressure fluctuation deriving means for detecting the pressure fluctuation and deriving the detection result to the other surface of the substrate through a seal portion provided on the substrate.
筒状部材は開放端の一方は基板により閉塞され、他方は
ダイアフラムにより覆われているので一つの部屋を形成
し、筒状部材の側壁の貫通孔がダイアプラムの正面と背
面の圧力をバランスさせ、音波がダイアフラムに当ると
ダイアフラムが振動してダイアフラムに配設された圧力
センサを駆動し、圧力センサがダイアフラムの振動に伴
なう変形を信号として出力する。One of the open ends of the cylindrical member is closed by the substrate and the other is covered by the diaphragm to form one chamber, and the through hole in the side wall of the cylindrical member balances the pressure on the front and back of the diaphragm. When the sound waves hit the diaphragm, the diaphragm vibrates and drives a pressure sensor disposed on the diaphragm, and the pressure sensor outputs the deformation caused by the vibration of the diaphragm as a signal.
次に、本発明の実施例について図面を参照して説明する
。Next, embodiments of the present invention will be described with reference to the drawings.
第１図は本発明の高圧ガス配管用の圧力変動検出センサ
の第１の実施例を示す断面図である。FIG. 1 is a sectional view showing a first embodiment of a pressure fluctuation detection sensor for high pressure gas piping according to the present invention.
本実施例は高圧ガスが流れる高圧ガス配管８から直角に
分岐して延びる分岐管８のフランジに取り付けられるも
のである。In this embodiment, it is attached to a flange of a branch pipe 8 that branches off at right angles from a high-pressure gas pipe 8 through which high-pressure gas flows.
金属性の高圧フランジ１は、外縁 に沿って設けられた
取り付は孔９を介してボルト９１およびナツト９□によ
り分岐管８のフランジに取り付けられる。また、高圧フ
ランジ１の中央にはリード線を通す貫通孔ＩＩが設けら
れ、その貫通孔ＩＩにはリード線６を絶縁かつ気密に固
定する接着剤、例えばハーメチックシール７が施されて
いる。高圧フランジ１の下面で貫通孔ＩＩの周囲には取
り付は部１２が高圧フランジＩＩに爆接されている。円
筒状のサポート部２は、上部が取り付は部１２にねし止
めされ、下部の開口部がダイアフラム３で覆われている
。またサポート部２の側壁には圧力バランス用の貫通孔
２重が設けられている。ガイド５は、ダイアフラム３の
上下に一定間隔をあけてサポート部２に取り付けられて
おり、ダイアフラム３が過度に大きく振れるのを制限し
ている。圧電セラミック４はダイアフラム３に取り付け
られており、ダイアフラム３の変形に従って出力を変化
させる。この変化はリード線６により導出される。The metallic high-pressure flange 1 is attached to the flange of the branch pipe 8 through holes 9 provided along its outer edge with bolts 91 and nuts 9□. Further, a through hole II through which a lead wire passes is provided in the center of the high voltage flange 1, and an adhesive, for example, a hermetic seal 7, for fixing the lead wire 6 in an insulating and airtight manner is applied to the through hole II. On the lower surface of the high-pressure flange 1, around the through-hole II, a mounting portion 12 is blast-welded to the high-pressure flange II. The cylindrical support part 2 has an upper part screwed onto the mounting part 12 and a lower opening covered with a diaphragm 3. Further, the side wall of the support portion 2 is provided with double through holes for pressure balance. The guides 5 are attached to the support portion 2 at regular intervals above and below the diaphragm 3, and prevent the diaphragm 3 from swinging excessively. The piezoelectric ceramic 4 is attached to the diaphragm 3 and changes its output according to the deformation of the diaphragm 3. This change is derived by the lead wire 6.
次に第１図の実施例の動作について説明する。Next, the operation of the embodiment shown in FIG. 1 will be explained.
本実施例は高圧ガス配管８の分岐管８！に取り付けられ
るので高圧ガスの静圧がダイアフラム３にかかる。また
、ダイアフラム３の背面には貫通孔２．を経由した静圧
がかかるのでダイアフラム３の正面の圧力と背面の圧力
は完全にバランスしている。高圧ガス配管の高圧ガスを
介して何らかの音波が伝わるとダイアフラムは振動し、
振動によるダイアフラムの変形が圧電セラミック７によ
りリード線６を介して外部に出力される。In this embodiment, the branch pipe 8 of the high pressure gas pipe 8! Since the diaphragm 3 is attached to the diaphragm 3, static pressure of high pressure gas is applied to the diaphragm 3. Further, the back surface of the diaphragm 3 has a through hole 2. Since static pressure is applied via the diaphragm 3, the pressure on the front and the pressure on the back of the diaphragm 3 are perfectly balanced. When some sound waves are transmitted through the high-pressure gas in the high-pressure gas piping, the diaphragm vibrates,
Deformation of the diaphragm due to vibration is outputted to the outside by the piezoelectric ceramic 7 via the lead wire 6.
第２図は本発明の第２の実施例の一部を示す断面図であ
る。FIG. 2 is a sectional view showing a part of a second embodiment of the invention.
本実施例は第１図の実施例のダイアフラム３としてステ
ンレス板を用いたものであって、ステンレス板１３は強
度か大であるのでガイド５を省略して簡略化している。In this embodiment, a stainless steel plate is used as the diaphragm 3 of the embodiment shown in FIG. 1, and since the stainless steel plate 13 is strong, the guide 5 is omitted for simplification.
第３図は本発明の第３の実施例の一部を示す断面図であ
る。FIG. 3 is a sectional view showing a portion of a third embodiment of the present invention.
本実施例は圧電セラミックの代りにガイド１５の間に挟
んだエレクトレットフィルム１６を用いている。ガイド
１５およびエレクトレットフィルム１６は、絶縁体１７
でサポート部２から絶縁され、絶縁体１７とは接着剤１
７皿で接着されている。また、ノイズの妨害を受けぬよ
うリード線６１はインピーダンス変換器１０を介して、
外部に信号導出するリード線６２に接続されている。In this embodiment, an electret film 16 sandwiched between guides 15 is used instead of the piezoelectric ceramic. The guide 15 and the electret film 16 are connected to the insulator 17
The insulator 17 is insulated from the support part 2 by the adhesive 1.
It is glued together with 7 plates. In addition, the lead wire 61 is connected through an impedance converter 10 so as not to be interfered with by noise.
It is connected to a lead wire 62 that leads out signals to the outside.
上記の各実施例では高圧フランジ１、サポート部２等を
金属材料として記載しているが、強度が十分であわば絶
縁体でもよいことは明らかである。Although the high-voltage flange 1, support portion 2, etc. are described as being made of metal materials in each of the above embodiments, it is clear that they may be made of an insulating material as long as it has sufficient strength.
以上説明したように本発明は、正面背面の気体圧力がバ
ランスされたダイアフラムに配設された圧力センサにダ
イアフラムの変形に対応する信号を出力させることによ
り、たとえ高圧ガス中でも音波を高感度に検出できる効
果がある。As explained above, the present invention detects sound waves with high sensitivity even in high-pressure gas by having a pressure sensor installed on a diaphragm whose front and rear gas pressures are balanced output a signal corresponding to the deformation of the diaphragm. There is an effect that can be done.
第１図は本発明の高圧ガス配管用圧力変動検出センサの
第１の実施例を示す断面図、第２図、第３図はそれぞれ
本発明の第２、第３の実施例を示す断面図である。
１・・・・・・・・・・・・・・・・・・・・・・・・
・・・高圧フランジ、１、．２．．１５．・・・貫通孔
、
２・・・・・・・・・・・・・・・・・・・旧・・・・
・サポート部、２２・・・・・・・・・・・・・・・川
・・・・・・ねじ、３・・・・・・・・・・・・・・・
・・・・・・・・・・・・ダイアフラム、４・・・・・
・・・・・・・・・・・・・・・・・・・・・・圧電セ
ラミック、５．１５・軸・・・・・・・・・・・・・・
・ガイド、６．６．．５．・・・・・・・・・リード線
、７・・・・・・・・・・・・・・・・・・・・・・・
・・・・ハーメチックシール、８・・・・・・・・・・
・・・・・・・・・・・・・・・・・高圧ガス配管、８
１・・・・・・・・・・・・・・・・・・・・・・・・
分岐管、９・・・・・・・・・・・・・・・・・・・・
・・・・・・・取り付は孔、９、・・・・・・・・・・
・・・・・・・・・・・・・・ボルト、９２・・・・・
・・・・・・・・・・・・・・・・・・・ナツト、０・
・・・・・・・・・・・・・・・・・・・・・・・・・
・インピーダンス変換器、３・・・・・・・・・・・・
・・・・・・・・・・・・・・・ステンレス板、６・・
・・・・・・・・・・・・・川・・・・・・・・・エレ
クトレットフィルム７ 絶縁体、
７Ｉ・・・・・・・・・・・・・・・・・・・・・・・
・接着剤。FIG. 1 is a cross-sectional view showing a first embodiment of a pressure fluctuation detection sensor for high-pressure gas piping according to the present invention, and FIGS. 2 and 3 are cross-sectional views showing second and third embodiments of the present invention, respectively. It is. 1・・・・・・・・・・・・・・・・・・・・・・・・
...High pressure flange, 1,. 2. ．． 15. ...Through hole, 2... Old...
・Support part, 22・・・・・・・・・・・・・・・・・・・・・Screw, 3・・・・・・・・・・・・・・・
・・・・・・・・・Diaphragm, 4...
・・・・・・・・・・・・・・・・・・・・・Piezoelectric ceramic, 5.15・Axis・・・・・・・・・・・・・・・・
・Guide, 6.6. ．． 5.・・・・・・・・・Lead wire, 7・・・・・・・・・・・・・・・・・・・・・・・・
・・・Hermetic seal, 8・・・・・・・・・・・・
・・・・・・・・・・・・・・・・・・High pressure gas piping, 8
1・・・・・・・・・・・・・・・・・・・・・・・・
Branch pipe, 9・・・・・・・・・・・・・・・・・・
......Mounting is through hole 9,...
・・・・・・・・・・・・・・・Bolt, 92・・・・・・
・・・・・・・・・・・・・・・・・・Natsuto, 0・
・・・・・・・・・・・・・・・・・・・・・・・・
・Impedance converter, 3・・・・・・・・・・・・
・・・・・・・・・・・・・・・Stainless steel plate, 6...
・・・・・・・・・・・・・River・・・・・・・・・Electret film 7 Insulator, 7I・・・・・・・・・・・・・・・・・・...
·glue.
Claims (1)
基板と、 側壁に圧力バランス用の貫通孔が形成され、取り付けの
際、分岐管側となる該基板の一面に突設された筒状部材
と、 該筒状部材の開放端を覆うように該筒状部材に取り付け
られたダイアフラムと、 該ダイアフラムに配設した圧力センサで該ダイアフラム
の変形を検出し、検出結果を該基板に配設したシール部
を貫通して該基板の他面に導出する圧力変動導出手段と
を有する高圧ガス配管用の圧力変動検出センサ。[Claims] A substrate to be attached to a flange of a branch pipe from a high-pressure gas pipe, a through hole for pressure balance formed in the side wall, and a through hole for pressure balance formed protruding from one surface of the substrate on the branch pipe side during installation. a cylindrical member, a diaphragm attached to the cylindrical member so as to cover an open end of the cylindrical member, a pressure sensor disposed on the diaphragm to detect deformation of the diaphragm, and transmit the detection result to the substrate. A pressure fluctuation detection sensor for high pressure gas piping, comprising a pressure fluctuation deriving means that penetrates a seal portion disposed on the substrate and leads out to the other surface of the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32720889A JPH03188340A (en) | 1989-12-19 | 1989-12-19 | Pressure-fluctuation detection sensor for high-pressure piping |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32720889A JPH03188340A (en) | 1989-12-19 | 1989-12-19 | Pressure-fluctuation detection sensor for high-pressure piping |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03188340A true JPH03188340A (en) | 1991-08-16 |
Family
ID=18196523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32720889A Pending JPH03188340A (en) | 1989-12-19 | 1989-12-19 | Pressure-fluctuation detection sensor for high-pressure piping |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03188340A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003344363A (en) * | 2002-05-30 | 2003-12-03 | Ishikawajima Harima Heavy Ind Co Ltd | Method of judging flow pattern of vapor-liquid two-phase flow |
| US20100143816A1 (en) * | 2007-01-29 | 2010-06-10 | Eduard Saar | Fuel cell system with sensor for detecting pressure fluctuations in a fluid supply train |
| JP2013213535A (en) * | 2012-04-02 | 2013-10-17 | Sekisui Chem Co Ltd | Monitoring device for piping network |
| JP2021162093A (en) * | 2020-03-31 | 2021-10-11 | 株式会社フクハラ | Sensor pipe structure for temperature and humidity measurement in compression pneumatic circuit |
-
1989
- 1989-12-19 JP JP32720889A patent/JPH03188340A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003344363A (en) * | 2002-05-30 | 2003-12-03 | Ishikawajima Harima Heavy Ind Co Ltd | Method of judging flow pattern of vapor-liquid two-phase flow |
| US20100143816A1 (en) * | 2007-01-29 | 2010-06-10 | Eduard Saar | Fuel cell system with sensor for detecting pressure fluctuations in a fluid supply train |
| JP2013213535A (en) * | 2012-04-02 | 2013-10-17 | Sekisui Chem Co Ltd | Monitoring device for piping network |
| JP2021162093A (en) * | 2020-03-31 | 2021-10-11 | 株式会社フクハラ | Sensor pipe structure for temperature and humidity measurement in compression pneumatic circuit |
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