JPH042018U - - Google Patents

Info

Publication number
JPH042018U
JPH042018U JP4246490U JP4246490U JPH042018U JP H042018 U JPH042018 U JP H042018U JP 4246490 U JP4246490 U JP 4246490U JP 4246490 U JP4246490 U JP 4246490U JP H042018 U JPH042018 U JP H042018U
Authority
JP
Japan
Prior art keywords
mounting table
wafer
fixing structure
resist
removably
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4246490U
Other languages
English (en)
Japanese (ja)
Other versions
JP2530716Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990042464U priority Critical patent/JP2530716Y2/ja
Publication of JPH042018U publication Critical patent/JPH042018U/ja
Application granted granted Critical
Publication of JP2530716Y2 publication Critical patent/JP2530716Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1990042464U 1990-04-23 1990-04-23 ウエハの固定構造 Expired - Lifetime JP2530716Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990042464U JP2530716Y2 (ja) 1990-04-23 1990-04-23 ウエハの固定構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990042464U JP2530716Y2 (ja) 1990-04-23 1990-04-23 ウエハの固定構造

Publications (2)

Publication Number Publication Date
JPH042018U true JPH042018U (US07922777-20110412-C00004.png) 1992-01-09
JP2530716Y2 JP2530716Y2 (ja) 1997-03-26

Family

ID=31554033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990042464U Expired - Lifetime JP2530716Y2 (ja) 1990-04-23 1990-04-23 ウエハの固定構造

Country Status (1)

Country Link
JP (1) JP2530716Y2 (US07922777-20110412-C00004.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59141406A (ja) * 1982-12-27 1984-08-14 ユナイテッド・テクノロジ−ズ・コ−ポレ−ション 急速始動形メタノ−ル反応装置
JPS61942U (ja) * 1984-06-08 1986-01-07 シチズン時計株式会社 ドツト印字ヘツドのワイヤガイド

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59141406A (ja) * 1982-12-27 1984-08-14 ユナイテッド・テクノロジ−ズ・コ−ポレ−ション 急速始動形メタノ−ル反応装置
JPS61942U (ja) * 1984-06-08 1986-01-07 シチズン時計株式会社 ドツト印字ヘツドのワイヤガイド

Also Published As

Publication number Publication date
JP2530716Y2 (ja) 1997-03-26

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