JPH0420166B2 - - Google Patents
Info
- Publication number
- JPH0420166B2 JPH0420166B2 JP8041783A JP8041783A JPH0420166B2 JP H0420166 B2 JPH0420166 B2 JP H0420166B2 JP 8041783 A JP8041783 A JP 8041783A JP 8041783 A JP8041783 A JP 8041783A JP H0420166 B2 JPH0420166 B2 JP H0420166B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- light
- spatial filter
- fourier transform
- patterns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001228 spectrum Methods 0.000 claims description 24
- 230000003287 optical effect Effects 0.000 claims description 20
- 230000007547 defect Effects 0.000 claims description 19
- 238000007689 inspection Methods 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 8
- 230000002950 deficient Effects 0.000 claims description 7
- 239000011295 pitch Substances 0.000 description 27
- 238000000034 method Methods 0.000 description 8
- 238000002834 transmittance Methods 0.000 description 3
- 230000001427 coherent effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8041783A JPS59204820A (ja) | 1983-05-09 | 1983-05-09 | パタ−ン欠陥検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8041783A JPS59204820A (ja) | 1983-05-09 | 1983-05-09 | パタ−ン欠陥検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59204820A JPS59204820A (ja) | 1984-11-20 |
| JPH0420166B2 true JPH0420166B2 (enrdf_load_html_response) | 1992-03-31 |
Family
ID=13717713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8041783A Granted JPS59204820A (ja) | 1983-05-09 | 1983-05-09 | パタ−ン欠陥検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59204820A (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004177377A (ja) | 2002-11-29 | 2004-06-24 | Hitachi Ltd | 検査方法および検査装置 |
-
1983
- 1983-05-09 JP JP8041783A patent/JPS59204820A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59204820A (ja) | 1984-11-20 |
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