JPH0419818A - Grinding device for manufacture of magnetic recording medium - Google Patents

Abstract

PURPOSE:To evenly grind the surface of a substrate or a recording magnetic layer by providing the recessing and projecting parts to the surface of a pressing roll. CONSTITUTION:A grinding tape 2 touches the surface of a recording magnetic layer provided on a substrate 1, and a pressing roll 7 has the pressing and projecting parts on its surface and presses the tape 2 to the surface of the substrate 1 or the recording magnetic layer. Furthermore the V-shaped grooves are equidistantly provided on the surface of the roll 7 made of the hard rubber. Thus the tape 2 is evenly pressed onto the surface of the substrate 1 or the recording magnetic layer formed on the substrate 1. Then the tape 2 can evenly grind the surface of the substrate 1 or the recording magnetic layer.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a polishing apparatus used for manufacturing magnetic recording media.

[Conventional technology]

In recent years, in order to increase the storage capacity of fixed magnetic disk drives, more and more fixed magnetic disk drives are equipped with continuous thin-film magnetic recording media that have a magnetic recording layer formed using sputtering or plating methods instead of conventional so-called coated media. be.

Continuous thin film magnetic recording media are characterized by extremely excellent surface precision. Many of the current fixed magnetic disk drives either use the contact start/stop method (C5S method) in which the head and magnetic recording medium come into contact when starting or stopping, or they use continuous thin film magnetic recording media with excellent surface precision. If magnetic heads with surface precision come into contact, a problem arises in that they attract each other and do not separate.

In order to avoid this adsorption problem, for example,
After applying a tape polishing process called texturing process to the substrate as shown in Japanese Patent No. 197030,
A continuous thin-film magnetic recording medium is formed on top of this, and fine irregularities are provided on the surface to avoid the adsorption phenomenon. FIG. 13 is a schematic front view of a polishing apparatus for producing a magnetic recording medium used for texturing processing, and FIG. 14 is a perspective view of a tape pressing roll of the apparatus. In the figure, +11 is a disk-shaped substrate attached to a rotatable mounting base (8), (2) is a polishing tape, and (3) is a polishing tape (2).
A pressing roll that presses the substrate (1) against the substrate (1), and is made of an elastic material such as hard rubber or hard urethane. (4) is the arm that applies a load to the pressing roll (3), (5) is the rotation center axis of the pressing roll (3), and (6) is the polishing tape (2).
This is a take-up roll. Arrows a and b indicate the direction of rotation of the take-up roll (6) and the mounting base (8), respectively.

Next, the operation will be explained. After pressing the polishing tape (2) in the radial direction of the substrate (1) with the pressing roll (3), the take-up roll (6) is rotated in the direction of arrow a in the figure, and the polishing tape is While winding up the substrate (2), the substrate (1) is rotated in the direction of the arrow in the figure to roughen the surface of the substrate (1). At this time, the pressing pressure of the pressing roll (3) in the width direction of the pressing roll (3) is large at both ends and small at the center (as shown in FIG. 15).
1) Many abnormal protrusions are formed on the surface of the magnetic recording medium due to non-uniform surface processing.

This becomes a factor that inhibits the reduction of the flying height of the magnetic head, and imposes a major restriction on the design of current fixed magnetic disk drives aiming at high recording density. In addition, such non-uniformity in processing also deteriorates the sliding characteristics of the magnetic head and magnetic recording medium, making it difficult to ensure the reliability of fixed magnetic disk drives. For this purpose, after forming a magnetic film or a protective film on the substrate (1), in order to remove abnormal protrusions on the film, a burnishing process is performed using a polishing device similar to that shown in Fig. 13 and a finer polishing tape, or a texturing process is performed. As in the case of , non-uniformity of processing occurs.

[Invention or problem to be solved]

Since the conventional polishing apparatus for manufacturing magnetic recording media is constructed as described above, it is difficult to press the polishing tape with a uniform force onto the surface of the substrate or the recording magnetic layer provided thereon. However, there was a problem in that many abnormal protrusions were formed on the surface of the magnetic recording medium. This invention was made to solve the above-mentioned problems, and provides a polishing device for manufacturing magnetic recording media that can uniformly polish the surface of a substrate or a recording magnetic layer provided thereon. The purpose is to

[Means to solve the problem]

A polishing apparatus for manufacturing a magnetic recording medium according to the present invention has an uneven surface on the surface of a pressing roll.

[For production]

The pressing roll of the polishing apparatus for manufacturing magnetic recording media according to the present invention presses the polishing tape against the surface of the substrate or the recording magnetic layer provided thereon with a uniform force.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 to 3. FIG. 1 is a schematic front view of a polishing apparatus for manufacturing magnetic recording media according to the present invention, FIG. 2 is a perspective view of a pressing roll according to the present invention, and FIG. 3 is a partial cross-section of the section ■-■ in FIG. It is a diagram. In the figure, (1) is the substrate, with a diameter of 3
．． A 5-inch Ninkelurin substrate was used. (2) is the abrasive tape, alumina abrasive tape with a roughness of #3000 (
(manufactured by Nippon Micro Coating) was used. (7) is a pressing roll made of hard rubber. Pressing roll (7
) are provided with ■-shaped grooves at equal intervals as shown in Figure 3.

The other components are the same as the corresponding parts of conventional devices.

Next, the operation will be explained. The polishing tape (2) is pressed onto the substrate fl+ with a pressing roll (7), the roll pressing pressure is 4.0 kg, /country, and the rotation speed of the mounting base (8) is 2.
00 rpm, tape feed speed 10 mm/sec,
The surface of the substrate 1) is polished under the processing conditions of a processing time of 30 seconds and a speed of 55 rpm. Surface roughness Rz=10
The surface roughness distribution in the radial direction of the substrate (1) that has been finished to about 0 degrees is as shown in the actual situation in FIG. As a comparative example, the roughness distribution of the substrate surface when processed in the same manner as in this example using a conventional pressing roll is shown in FIG. 4 by dotted lines. As is clear from the figure, extremely uniform texturing is achieved using the pressing roll (7) according to this embodiment. In addition, Figures 5 and 6 are
20-A partially enlarged sectional view in the radial direction of the surface of the substrate (1) subjected to texturing by the pressing roll (7) of Example 20 and a conventional pressing roll, respectively. As is clear from the figure, there are many abnormal protrusions on the surface of the substrate processed by the conventional pressing roll, whereas the pressing roll according to this embodiment (7
) No abnormal protrusions were observed on the surface of the substrate (1). This is because when the pressing roll (7) of this embodiment is used, the presence of the grooves prevents the stress from propagating or breaking, thereby suppressing the deformation of the pressing roll (7) surface and pressing the surface of the substrate (1). Since the pressure can be made uniform as shown in FIG. 7, it is possible to realize a uniform contact state between the polishing tape (2) and the substrate (1). On the other hand, in a conventional pressing roll, since the contact surface is continuous in the width direction of the pressing roll, the stress generated at the end propagates to the center of the roll, deforming the shape of the pressing roll surface.

Next, an example in which a burnishing process is performed using a polishing apparatus equipped with a pressing roll (7) according to this embodiment will be explained. Baninyu processing is a process for removing abnormal protrusions on the surface of a magnetic recording medium that remain after texturing processing. The results of polishing the magnetic recording medium having abnormal protrusions shown in FIG. 8 with the pressing roll (7) according to this embodiment are shown in FIG.
FIG. 10 shows the results of polishing with a conventional pressing roll. As is clear from the figure, when the conventional pressing roll is used, abnormal protrusions are not sufficiently removed, and new abnormal protrusions are formed. On the other hand, when the pressing roll (7) according to Example 20 was used, the abnormal protrusions were completely removed. A glide test was conducted on each magnetic recording medium, and it was found that the magnetic recording medium using a conventional pressing roll had a flying hide of 0.
．． It was not possible to fly the head up to 20 .mu.m, or it was possible to fly the head up to 0.10 .mu.m in the magnetic recording medium using the pressing roll (7) of this example.

In addition, in the above-mentioned example, a groove having a V-shaped cross section is provided on the surface of the pressing roll, or a groove having a cross-sectional shape as shown in FIG. 11 and FIG. A certain groove may also be provided (the same effect as in the above embodiment can be achieved).

Furthermore, in the first to third embodiments described above, the case where the unevenness is continuous in the circumferential direction of the pressing roll is shown, but it is also possible to have a relationship between the unevenness and the seabird, similar to the above first to third embodiments. It has the effect of

〔Effect of the invention〕

As described above, according to the present invention, a polishing apparatus for manufacturing a magnetic recording medium is provided that includes a polishing tape that contacts the surface of a substrate or a recording magnetic layer provided thereon, and a polishing tape that has an uneven surface. manufacturing a magnetic recording medium capable of uniformly polishing the surface of the substrate or the recording magnetic layer provided thereon by comprising a pressing roll on the surface of the substrate or the recording magnetic layer; There are some effects that can be obtained with polishing equipment.

[Brief explanation of the drawing]

FIG. 1 is a schematic front view of a polishing apparatus for manufacturing magnetic recording media according to the present invention, FIG. 2 is a perspective view of a pressing roll according to the present invention, and FIG. 3 is a partial cross-sectional view of the part ■■ in FIG. ,
FIG. 4 is a diagram showing the radial surface roughness distribution of a substrate textured using the present invention and a conventional pressing roll, respectively, and FIGS. Partially enlarged cross-sectional view in the radial direction of the substrate surface subjected to texturing processing using a roll, and a partially enlarged cross-sectional view of the substrate surface subjected to texturing processing using a conventional pressing roll, No. 7
The figure shows the distribution of the pressing pressure in the width direction of the pressing roll when the polishing tape is pressed against the substrate using the pressing roll of this embodiment. 9 and 10 are partially enlarged sectional views of the surface of a magnetic recording medium having the surface roughness shown in FIG. 8 after burnishing using the pressing roll of the present invention and the conventional pressing roll, and FIGS. FIG. 12 is a partial sectional view of a pressing roll according to another embodiment of the present invention, FIG. 13 is a schematic front view of a polishing apparatus for manufacturing magnetic recording media used for conventional texturing processing, and FIG.
FIG. 4 is a perspective view of a pressing roll of the device, and FIG. 15 is a diagram showing the distribution of pressing pressure in the pressing roll radius direction when a polishing tape is pressed against a substrate with a conventional pressing roll. In the figure, (]) is the substrate, (2)
(7) is a polishing tape and a pressing roll. Fig. 1 a Fig. 3 Fig. 4 Fig. 5 Fig. 6 Fig. 7 Pressing 170-le l yang spring time f15 8th factor Fig. 9 Fig. 10 Fig. 11 Fig. 12 Fig. 13 Figure 15 Najishi i size j brawl'j4. 'I IF11 Procedural Amendment (Voluntary) Date, Month, 1990

Claims (1)

[Claims] A polishing apparatus for manufacturing a magnetic recording medium, comprising a polishing tape that contacts the surface of a substrate or a recording magnetic layer provided thereon, and a pressing roll that presses the polishing tape against the surface of the substrate or the recording magnetic layer. A polishing apparatus for manufacturing a magnetic recording medium, characterized in that the surface of the pressing roll is provided with irregularities so as to uniformly polish the surface of the substrate or the recording magnetic layer.