JPH04188479A - Magnetic head - Google Patents

Magnetic head

Info

Publication number
JPH04188479A
JPH04188479A JP31588490A JP31588490A JPH04188479A JP H04188479 A JPH04188479 A JP H04188479A JP 31588490 A JP31588490 A JP 31588490A JP 31588490 A JP31588490 A JP 31588490A JP H04188479 A JPH04188479 A JP H04188479A
Authority
JP
Japan
Prior art keywords
air
floating
slider
magnetic head
faces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31588490A
Other languages
Japanese (ja)
Inventor
Kotaro Yamamoto
耕太郎 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP31588490A priority Critical patent/JPH04188479A/en
Publication of JPH04188479A publication Critical patent/JPH04188479A/en
Pending legal-status Critical Current

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  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)

Abstract

PURPOSE:To restrain a change in the floating posture with reference to a recording medium by a method wherein a slope whose width increases gradually toward the outflow end from the inflow end of the air is formed at a corner part along an air current on the side of the floating face of a slider. CONSTITUTION:A groove 37 along the flow direction A of the air is formed in the center in a face which is faced with a magnetic disk at a slider 35. Thereby, floating faces 39 are formed on both sides of the groove 37. Taper parts 41 are formed on the side of air inflow ends at the floating faces 39. Slopes 43 whose width becomes gradually larger toward the outflow end from the inflow end of the air are formed at corner parts of the slider 35 on the side opposite to the groove 37 on the side of the floating faces 38. Since the width of the floating faces 39 is formed to be gradually smaller toward the outflow end from the inflow end of the air, the area on the side of air inflow ends at the floating faces 39 becomes large as compared with the area on the side of outflow ends, and the rigidity of air films at the floating faces 39 is increased. Thereby, it is possible to restrain a change in the floating posture of a magnetic head against an external force or dust particles and to substantially maintain the stability of the recording and replay operation of a data.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) この発明は、回転する記録媒体に対し空気流によりスラ
イダが所定の隙間をもって浮上した状態で記録再生を行
う、例えば磁気ディスク装置に用いられる磁気ヘッドに
関する。
Detailed Description of the Invention [Objective of the Invention] (Industrial Application Field) This invention relates to a magnetic disk, for example, in which recording and reproduction is performed with a slider floating with a predetermined gap between a rotating recording medium and a rotating recording medium. The present invention relates to a magnetic head used in a device.

(従来の技術) 一般に磁気ディスク装置は、その起動、停止の動作につ
いては、コンタクト・スタート・ストップ(C5S)方
式を採用しており、装置か停止しているときには、第2
図に示すように磁気ヘッド1はサスペンション3によっ
て磁気ディスク5に押し付けられて接触しており、装置
の起動時には磁気へラド1−は磁気ディスク5の回転に
より発生する空気流の動圧効果により徐々に浮上し、こ
の浮上状態で記録再生を行う。磁気ヘッド1が浮上して
いる状態から装置が停止する際には、磁気ディスク5の
回転速度の低下により空気の動圧効果が減少し、磁気ヘ
ッド1は磁気ディスク5に対し徐々に接触、摺動する。
(Prior Art) Magnetic disk drives generally use the contact start/stop (C5S) method for starting and stopping operations, and when the device is stopped, the second
As shown in the figure, the magnetic head 1 is pressed against and in contact with the magnetic disk 5 by the suspension 3, and when the device is started, the magnetic head 1- gradually moves due to the dynamic pressure effect of the air flow generated by the rotation of the magnetic disk 5. The device levitates to the top and performs recording and playback in this floating state. When the apparatus stops from a state where the magnetic head 1 is floating, the dynamic pressure effect of the air decreases due to the decrease in the rotational speed of the magnetic disk 5, and the magnetic head 1 gradually comes into contact with the magnetic disk 5 and slides. move.

この種の浮上型磁気ヘッドの詳細を、磁気ディスク5に
対向する而から見た斜視図である第3図及び第4図に示
す。第3図に示す磁気ヘッドはモノリシックヘッドと呼
ばれるもので、磁気ディスク5に対して浮上するスライ
ダ7の左右両側部には、磁気ディスク5に対向する浮上
面9,9が形成され、浮上面9の矢印Aで示す空気の流
入側にはテーバ部1]が設けられている。スライダ7の
空気の流出端側には、磁気回路を形成しコイル13が巻
かれているコア]5が設けられ、浮上面9側におけるコ
ア]5とスライダ7との間には、磁気ディスク5に対し
記録再生を行う磁気ギャップ17が形成されている。
Details of this type of floating magnetic head are shown in FIGS. 3 and 4, which are perspective views as seen from the side facing the magnetic disk 5. The magnetic head shown in FIG. 3 is called a monolithic head, and air bearing surfaces 9, 9 facing the magnetic disk 5 are formed on both left and right sides of a slider 7 that flies with respect to the magnetic disk 5. A tapered portion 1] is provided on the air inflow side shown by arrow A in FIG. A core]5 forming a magnetic circuit and around which a coil 13 is wound is provided on the air outflow end side of the slider 7, and a magnetic disk 5 is provided between the core]5 on the air bearing surface 9 side and the slider 7. A magnetic gap 17 is formed for recording and reproducing.

一方、第4図に示す磁気ヘッドは、ホトリソグラフィや
薄膜形成技術によってコア19及びコア19に挟まれた
数〜数10ターンの平面状のコイル2]を、スライダ2
3の空気流出端側に形成した薄膜ヘッドである。この薄
膜ヘッドにおいても、前記モノリシックヘッド同様磁気
ディスク5に対する浮上面9及びテーバ部]1が設けら
れている。
On the other hand, in the magnetic head shown in FIG. 4, a core 19 and a planar coil 2 with several to several tens of turns sandwiched between the core 19 and a slider 2 are formed using photolithography or thin film forming technology.
This is a thin film head formed on the air outflow end side of No. 3. This thin film head is also provided with an air bearing surface 9 and a tapered portion 1 for the magnetic disk 5, as in the monolithic head.

上記各スライダ7.23は、サスペンション3により押
し付けられつつ磁気ディスク5に対し、空気の動圧効果
により0.3μm程度の微小隙間で浮上するように設計
されている。第5図は、磁気ヘッド浮上時でのスライダ
7.23の浮上面9における空気の圧力分布をA1算し
た一例を示しており、圧力は浮上面9における空気の流
入端及び流出端で高(なり、このような圧力分布をもつ
空気の動圧力とスライダ7.23を押さえるサスペンシ
ョン3のばね力とのバランスにより、磁気ヘッドは第6
図の模式図に示すような姿勢で磁気ディスク5上を浮上
する。
Each of the sliders 7 and 23 is designed to float with respect to the magnetic disk 5 with a minute gap of about 0.3 μm due to the dynamic pressure effect of air while being pressed by the suspension 3. FIG. 5 shows an example of the A1 calculation of the air pressure distribution on the air bearing surface 9 of the slider 7.23 when the magnetic head is flying, and the pressure is high ( Due to the balance between the dynamic pressure of the air with such a pressure distribution and the spring force of the suspension 3 that presses down the slider 7.23, the magnetic head
It floats above the magnetic disk 5 in the attitude shown in the schematic diagram in the figure.

ここで、浮上面9の空気の流入端における磁気ディスク
との距離aと、流出端における磁気ディスク5との距離
すとの差a−bを磁気ヘッドのピッチ量Δhと呼び、こ
のピッチ量Δhがある程度大きくなると、浮上面9と磁
気ディスク5との間の空気膜の剛性が高まり、磁気ヘッ
ドの浮上安定性が向上する。また、磁気ヘッドの浮上量
は、−般に流出端における隙間すをいう。
Here, the difference a-b between the distance a from the magnetic disk at the air inflow end of the air bearing surface 9 and the distance from the magnetic disk 5 at the air outflow end is called the pitch amount Δh of the magnetic head, and this pitch amount Δh When becomes large to a certain extent, the rigidity of the air film between the air bearing surface 9 and the magnetic disk 5 increases, and the flying stability of the magnetic head improves. Furthermore, the flying height of a magnetic head generally refers to the gap at the outflow end.

(発明が解決しようとする課題) ところで、上記のようにして浮上する磁気ヘッドは、磁
気ディスクに対するデータの記録再生時での浮上安定性
を保ち、また磁気ヘットと磁気ディスクとか衝突するこ
とにより、記録したデータが破壊されることかないよう
に、各種の外力を受けても磁気ディスクとの隙1’、i
?(浮上量)か大きく変動しないような構造とする必要
がある。
(Problems to be Solved by the Invention) By the way, the magnetic head that flies in the above manner maintains flying stability when recording and reproducing data on the magnetic disk, and also prevents collisions between the magnetic head and the magnetic disk. In order to prevent recorded data from being destroyed, the gap 1', i between the magnetic disk and the magnetic disk is maintained even when subjected to various external forces.
? It is necessary to have a structure in which the (flying height) does not fluctuate greatly.

ところが、前記従来の磁気ヘットのスライダ形状は、第
3図及び第4図に示すように浮上面9の幅が空気の流入
端から流出端まで一定であるため、流入端と流出端での
前記空気の圧力差が、特に浮上量すが0.2μm以下程
度になると、小さくなって前記ピッチ量Δhも小さくな
り、浮上面9上の空気膜の剛性が低下する。剛性か低下
すると、外力に対し、磁気ヘッドの浮上姿勢における変
動が大きくなり、データの記録再生の安定性か損なわれ
るとともに、磁気ヘッドと磁気ディスクとの衝突の危険
性が高くなる。
However, in the slider shape of the conventional magnetic head, as shown in FIGS. 3 and 4, the width of the air bearing surface 9 is constant from the air inflow end to the air outflow end. When the air pressure difference, especially the flying height, becomes about 0.2 μm or less, the pitch amount Δh also becomes small, and the rigidity of the air film on the flying surface 9 decreases. When the rigidity decreases, fluctuations in the flying posture of the magnetic head in response to external forces increase, which impairs the stability of data recording and reproduction, and increases the risk of collision between the magnetic head and the magnetic disk.

このため、従来では第7図に示す磁気ヘッドのスライダ
25のように、浮上面27におけるテーバ部29の近傍
を広くした磁気ヘッドが提唱されている。このスライダ
25は、前述したような0゜2μm以下程度の低い浮上
量においても、空気の流入端側である浮上面27におけ
るテーバ部29近傍での圧力が流出端側に比べて高くな
り、これによりピッチ量Δhを大きくすることがてき、
空気膜の剛性を高めることか可能となって磁気ヘッドの
浮上姿勢か安定化する。
For this reason, conventionally, a magnetic head has been proposed in which the vicinity of the tapered portion 29 on the air bearing surface 27 is widened, such as a magnetic head slider 25 shown in FIG. In this slider 25, even at a low flying height of about 0.2 μm or less as described above, the pressure near the tapered portion 29 of the air bearing surface 27 on the air inflow end side is higher than that on the outflow end side. The pitch amount Δh can be increased by
It becomes possible to increase the rigidity of the air film, thereby stabilizing the flying posture of the magnetic head.

ところが、このようなスライダの製造には、アルゴンガ
スなどの不活性ガスのイオンビームを照射してスパッタ
効果を利用する精密加工技術であるイオンビーム加工な
との特殊な加工が必要であることから、製造性が極めて
悪く、コスト高を招いている。
However, manufacturing such sliders requires special processing called ion beam processing, which is a precision processing technology that utilizes the sputtering effect by irradiating an ion beam of an inert gas such as argon gas. , which has extremely poor manufacturability and leads to high costs.

そこでこの発明は、記録媒体に対する浮上姿勢の変動を
抑制し、かつ製造性の優れた磁気ヘッドを提供すること
を目的とする。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a magnetic head that suppresses fluctuations in flying posture relative to a recording medium and has excellent manufacturability.

[発明の構成] (課題を解決するための手段) 前述した課題を解決するためにこの発明は、回転する記
録媒体との間に空気流が入り込むことで、スライダが記
録媒体に対し所定の隙間をもって浮上し記録再生を行う
磁気ヘッドにおいて、前記スライダの記録媒体に対向す
る浮上面の前記空気流とほぼ直交する方向の幅か、前記
空気の流入端から流出端に向かって徐々に狭くなるよう
、前記スライダの浮上面側の前記空気流に沿う角部に、
空気の流入端から流出端に向かって徐々に幅が広くなる
傾斜面を設ける構成としである。
[Structure of the Invention] (Means for Solving the Problems) In order to solve the above-mentioned problems, the present invention provides a method in which the slider can maintain a predetermined gap with respect to the recording medium by introducing an air flow between the slider and the rotating recording medium. In a magnetic head that performs recording and reproducing while floating, the width of the air bearing surface facing the recording medium of the slider in a direction substantially perpendicular to the air flow is such that the width gradually narrows from the air inflow end to the air outflow end. , at a corner along the air flow on the air bearing surface side of the slider,
The structure is such that an inclined surface is provided whose width gradually increases from the air inflow end to the air outflow end.

(作用) スライダの浮上面の空気流に沿う角部に、スライダに対
する空気の流入端から流出端に向かって徐々に幅が広く
なる傾斜面を設けたので、記録媒体に対するスライダの
浮上面の幅が、前記空気の流入端側か流出端側に比べて
大きくなる。これにより、浮上面での空気流による圧力
が空気の流入端側か流出端側に比べて高いものとなって
、磁気ヘッドの浮上姿勢か安定化する。
(Function) An inclined surface that gradually increases in width from the air inlet end to the outflow end of the slider is provided at the corner of the air bearing surface of the slider along the air flow, so the width of the slider air bearing surface relative to the recording medium is is larger on the air inlet end side than on the air outflow end side. As a result, the pressure caused by the air flow on the air bearing surface becomes higher than that at the air inflow end or air outflow end, thereby stabilizing the flying posture of the magnetic head.

(実施例) 以下、この発明の実施例を図面に基づき説明する。(Example) Embodiments of the present invention will be described below with reference to the drawings.

第1図はこの発明の一実施例を示す磁気ディスク装置に
使用される磁気ヘッドの、図示しない記録媒体である磁
気ディスクに対向する側から見た斜視図であり、この磁
気ヘッドは、磁気ディスクの回転によって発生する矢印
A方向の空気流により、磁気ディスクに対して微少量浮
上する。上記磁気ヘッドは、前記第4図及び第7図に示
した磁気ヘッドと同様、ホトリソグラフィや薄膜形成技
術によってコア31およびコイル33を、スライダ35
の空気流出端35a側に形成した薄膜ヘッドである。コ
イル33の両端部は、空気流出端35aの中央側に引き
出されている。
FIG. 1 is a perspective view of a magnetic head used in a magnetic disk device showing one embodiment of the present invention, viewed from the side facing a magnetic disk, which is a recording medium (not shown). Due to the air flow in the direction of arrow A generated by the rotation of the magnetic disk, the magnetic disk floats a small amount relative to the magnetic disk. Similar to the magnetic heads shown in FIGS. 4 and 7, the magnetic head described above has a core 31 and a coil 33 formed on a slider 35 using photolithography or thin film forming technology.
This is a thin film head formed on the air outlet end 35a side of the head. Both ends of the coil 33 are drawn out toward the center of the air outflow end 35a.

上記スライダ35の磁気ディスクに対向する面の中央に
は、空気の流れ方向Aに沿って溝37が形成され、これ
により溝37の両サイドに浮上面39が形成される。浮
上面39の空気流入端側にハ、テーパ部41か形成され
ている。浮上面3つ側における溝37と反対側のスライ
ダ35の角部に、空気の流入端から流出端に向かって徐
々に幅が広くなる傾斜面43が形成されている。このよ
うな傾斜面43を形成することで、磁気ディスクに対す
る浮上面39の空気流とほぼ直交する方向の幅が、空気
の流入端から流出端に向かって徐々に狭く形成されるこ
とになる。
A groove 37 is formed in the center of the surface of the slider 35 facing the magnetic disk along the air flow direction A, and thereby air bearing surfaces 39 are formed on both sides of the groove 37. A tapered portion 41 is formed on the air inflow end side of the air bearing surface 39. At the corner of the slider 35 on the side opposite to the groove 37 on the three air bearing surfaces, an inclined surface 43 is formed which gradually increases in width from the air inflow end to the air outflow end. By forming such an inclined surface 43, the width of the air bearing surface 39 relative to the magnetic disk in a direction substantially perpendicular to the air flow is gradually narrowed from the air inflow end to the air outflow end.

浮上面39の幅が空気の流入端から流出端に向かって徐
々に狭く形成されることで、浮上面39における空気流
入端側の面積が流出端側の面積に比べて大きくなり、磁
気ヘッドの磁気ディスクに対する浮上量が0.2μm以
下の場合でも、前記第6図におけるピッチ量Δhが大き
くなって浮上面39における空気膜の剛性が高まる。こ
れにより、磁気ヘッドの浮上姿勢における外力あるいは
塵埃などに対する変動が抑制され、データの記録再生の
安定性が良好に維持される。磁気ヘッドの浮上姿勢が安
定化することで、磁気ヘッドと磁気ディスクとの衝突が
回避される。
Since the width of the air bearing surface 39 is gradually narrowed from the air inflow end to the air outflow end, the area of the air bearing surface 39 on the air inflow end side becomes larger than the area on the outflow end side, and the magnetic head Even when the flying height relative to the magnetic disk is 0.2 μm or less, the pitch amount Δh in FIG. 6 becomes large, and the rigidity of the air film on the flying surface 39 increases. This suppresses fluctuations in the flying posture of the magnetic head due to external forces or dust, and maintains good stability in data recording and reproduction. By stabilizing the flying posture of the magnetic head, collision between the magnetic head and the magnetic disk is avoided.

また、傾斜面43を形成することで、スライダ35の両
サイドの角部が面取りされる形になって鋭角部位が排除
されるので、装置の起動・停止の際にスライダ35が磁
気ディスクを傷付ける不具合も防止される。
In addition, by forming the inclined surface 43, the corners on both sides of the slider 35 are chamfered to eliminate sharp angles, which may cause the slider 35 to damage the magnetic disk when starting or stopping the device. Malfunctions are also prevented.

傾斜面43は、イオンビーム加工などの特殊な加工を用
いる必要はなく、機械加工で容易に行え、製造性も優れ
ている。
The inclined surface 43 does not require special processing such as ion beam processing, and can be easily formed by machining, and has excellent manufacturability.

なお、傾斜面43のテーバ部41側端部位置、傾斜面4
3の幅及び傾斜角度などは、特に規定されるものではな
く、磁気ヘッドの浮上量などにより決定される。また、
上記実施例では薄膜磁気ヘッドについて説明したが、第
3図に示したようなモノリシックヘッドにこの発明を適
用してもよい。
Note that the position of the end of the inclined surface 43 on the tapered portion 41 side, the inclined surface 4
The width and inclination angle of the magnetic head 3 are not particularly defined, but are determined by the flying height of the magnetic head. Also,
Although a thin film magnetic head has been described in the above embodiment, the present invention may also be applied to a monolithic head as shown in FIG.

[発明の効果] 以上説明してきたようにこの発明によれば、スライダの
浮上面側角部に、スライダに対する空気の流入端から流
出端に向かって徐々に幅が広くなる傾斜面を設けること
て、スライダの記録媒体に対する浮上面の幅を、前記空
気の流入端側が流出端側に比べて大きくなるようにした
ので、この流入端側の浮上面における面積が流出端側の
同面積、−に比べて大きくなり、これにより浮上面での
空気の圧力が流入端側か流出端側に比べて高いものとな
って、磁気ヘッドの浮上姿勢を安定化させることができ
る。また、傾斜面はスライダの角部に形成するので、特
殊な加工を用いる必要はなく、機械加工で容易に行える
ので、製造性も優れている。
[Effects of the Invention] As described above, according to the present invention, an inclined surface whose width gradually increases from the air inlet end to the outflow end of the slider is provided at the corner of the air bearing surface of the slider. , the width of the air bearing surface of the slider relative to the recording medium is set so that the air inflow end side is larger than the air outflow end side, so that the area on the air bearing surface on the air inflow end side is equal to the same area on the outflow end side, -. As a result, the air pressure at the air bearing surface becomes higher than that at either the inflow end or the outflow end, and the flying posture of the magnetic head can be stabilized. Further, since the inclined surface is formed at the corner of the slider, there is no need for special processing, and it can be easily performed by machining, resulting in excellent manufacturability.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例を示す磁気ヘッドの斜視図
、第2図は磁気ディスク装置内の要部の斜視図、第3図
、第4図はそれぞれ従来の磁気ヘッドの斜視図、第5図
は従来の磁気ヘッドにおける浮上面の圧力分布図、第6
図は磁気ヘッドの浮上姿勢を示す模式図、第7図は他の
従来例を示す磁気ヘッドの斜視図である。 35・・・スライダ 39・・・浮上面 43・・・傾斜面
FIG. 1 is a perspective view of a magnetic head showing an embodiment of the present invention, FIG. 2 is a perspective view of main parts inside a magnetic disk device, FIGS. 3 and 4 are perspective views of a conventional magnetic head, respectively. Figure 5 is a pressure distribution diagram on the air bearing surface of a conventional magnetic head;
The figure is a schematic diagram showing the flying posture of the magnetic head, and FIG. 7 is a perspective view of another conventional magnetic head. 35... Slider 39... Air bearing surface 43... Inclined surface

Claims (1)

【特許請求の範囲】[Claims] 回転する記録媒体との間に空気流が入り込むことで、ス
ライダが記録媒体に対し所定の隙間をもって浮上し記録
再生を行う磁気ヘッドにおいて、前記スライダの記録媒
体に対向する浮上面の前記空気流とほぼ直交する方向の
幅が、前記空気の流入端から流出端に向かって徐々に狭
くなるよう、前記スライダの浮上面側の前記空気流に沿
う角部に、空気の流入端から流出端に向かって徐々に幅
が広くなる傾斜面を設けたことを特徴とする磁気ヘッド
In a magnetic head that performs recording and reproduction in which the slider floats with a predetermined gap relative to the recording medium due to the air flow entering between the rotating recording medium, the air flow on the air bearing surface of the slider facing the recording medium and At the corner of the slider along the air flow on the air bearing surface side, the width in the almost orthogonal direction gradually narrows from the air inflow end to the air outflow end. A magnetic head characterized by having an inclined surface whose width gradually increases.
JP31588490A 1990-11-22 1990-11-22 Magnetic head Pending JPH04188479A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31588490A JPH04188479A (en) 1990-11-22 1990-11-22 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31588490A JPH04188479A (en) 1990-11-22 1990-11-22 Magnetic head

Publications (1)

Publication Number Publication Date
JPH04188479A true JPH04188479A (en) 1992-07-07

Family

ID=18070763

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31588490A Pending JPH04188479A (en) 1990-11-22 1990-11-22 Magnetic head

Country Status (1)

Country Link
JP (1) JPH04188479A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6278582B1 (en) 1995-05-17 2001-08-21 Hiatchi, Ltd Magnetic head and magnetic head manufacturing method
KR100370756B1 (en) * 1995-08-19 2003-03-26 삼성전자 주식회사 Head slider device for pseudo-contact recording of hard disk drive

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6278582B1 (en) 1995-05-17 2001-08-21 Hiatchi, Ltd Magnetic head and magnetic head manufacturing method
US6504680B2 (en) 1995-05-17 2003-01-07 Hitachi, Ltd. Magnetic head and magnetic head manufacturing method
US6690544B2 (en) 1995-05-17 2004-02-10 Hitachi, Ltd. Magnetic head and magnetic head manufacturing method
KR100370756B1 (en) * 1995-08-19 2003-03-26 삼성전자 주식회사 Head slider device for pseudo-contact recording of hard disk drive

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