JPH04188052A - Surface inspecting apparatus - Google Patents

Surface inspecting apparatus

Info

Publication number
JPH04188052A
JPH04188052A JP31588290A JP31588290A JPH04188052A JP H04188052 A JPH04188052 A JP H04188052A JP 31588290 A JP31588290 A JP 31588290A JP 31588290 A JP31588290 A JP 31588290A JP H04188052 A JPH04188052 A JP H04188052A
Authority
JP
Japan
Prior art keywords
roll
scanning
color
output
strip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31588290A
Other languages
Japanese (ja)
Other versions
JP2941411B2 (en
Inventor
Yoshihisa Morioka
森岡 義久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP31588290A priority Critical patent/JP2941411B2/en
Publication of JPH04188052A publication Critical patent/JPH04188052A/en
Application granted granted Critical
Publication of JP2941411B2 publication Critical patent/JP2941411B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To keep the level of reflected light from a roll surface at a sufficiently low state and to extract the effective component of the output of scanning accurately by selecting the color of the roll and the like in contact with a band-shaped material as a complementary color with respect to the color of an illuminating light source for scanning. CONSTITUTION:When a red light source such as He-Ne laser is used as an illuminating light source for scanning, the color of the surface of a roll is selected as a blue or green color. In an output (a) of a photodetector 4, the levels of scanning parts A and C of the roll 2 are sufficiently low in comparison with the level of a scanning part B of a band-shaped material 1. Then, an adequate threshold value (b) from a setting device 6 is compared with the output (a) of the received light in a comparator 7, and the level is discriminated. As a result, the accurate gate signal (c) is obtained. When a gate 8 is controlled with the signal (c), a signal (d) of the scanning part B of the band-shaped material 1 can be extracted. Thus, the effective part and the noneffective part of the output of the received light can be accurately divided.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) この発明は、ロール等に接した状態で走行する帯状物の
表面をそのロール等に接した位置にて幅方向に光電的に
走査して欠陥を検出する表面検査装置に関する。
[Detailed Description of the Invention] [Objective of the Invention] (Industrial Application Field) The present invention is directed to photoelectronizing the surface of a strip running in contact with a roll or the like in the width direction at a position in contact with the roll or the like. The present invention relates to a surface inspection device that detects defects by scanning the surface of the surface.

(従来の技術) この種の表面検査装置の従来の代表的な構成を第4図に
示している。被検査物である長尺の帯状物1がロール2
に接した状態で走行する。ロール2に接した位置では帯
状物1は振動したり撓んだりしないので、光電的走査は
この位置で行われる。つまり、ロール2に接した部分の
帯状物1の表面が光源3で照明され、その反射光を受光
器4で受光して帯状物1を幅方向に走査する。走査には
フライングスポット、フライングイメージ、−次元カメ
ラ等の各種の方式がある。
(Prior Art) A typical conventional configuration of this type of surface inspection device is shown in FIG. A long strip 1, which is an object to be inspected, is a roll 2.
Driving in contact with Since the strip 1 does not vibrate or bend at the position in contact with the roll 2, photoelectric scanning is performed at this position. That is, the surface of the strip 1 in contact with the roll 2 is illuminated by the light source 3, and the reflected light is received by the light receiver 4 to scan the strip 1 in the width direction. There are various scanning methods such as flying spot, flying image, and -dimensional camera.

光電的走査は帯状物1の幅より少し長い範囲にわたって
行われるので、ロール2の表面も走査される。ロール2
の表面から帯状物1からと同等の反射光があると、受光
信号の処理系でロール2の表面の検査信号なのか帯状物
1の表面の検査信号なのかを区別することができない。
Since the photoelectric scanning is performed over an area slightly longer than the width of the strip 1, the surface of the roll 2 is also scanned. roll 2
If there is reflected light from the surface of the strip 1 that is equivalent to that from the strip 1, the processing system for the received light signal cannot distinguish whether the inspection signal is from the surface of the roll 2 or the surface of the strip 1.

そこで受光器4に入るロール2からの反射光の強度を充
分に小さくするために、遮光装置5を設けて、帯状物1
で覆われていない部分のロール2に光源3からの照明光
が当らないようにしている。つまり、帯状物1の両側に
露出しているロール2の部分が影になるように遮光装置
5を設けている。こうするとロール2の部分の反射光レ
ベルは充分に小さくなり、帯状物1からの反射光レベル
と確実に区別することができる。
Therefore, in order to sufficiently reduce the intensity of the reflected light from the roll 2 that enters the light receiver 4, a light shielding device 5 is provided.
The illumination light from the light source 3 is prevented from hitting the part of the roll 2 that is not covered by the light source 3. That is, the light blocking device 5 is provided so that the exposed portions of the roll 2 on both sides of the strip 1 are shaded. In this way, the level of light reflected from the roll 2 becomes sufficiently low and can be reliably distinguished from the level of light reflected from the strip 1.

(発明が解決しようとする課題) 前述した従来の技術において、ロール2に接して走行す
る帯状物1が幅方向にまったく変動しないのであれば、
簡単な遮光装置5でもって目的を達成することができる
。しかし帯状物1は走行に伴って幅方向に変動する場合
が多く、露出したロール2の表面に照明光を当てず、か
つ帯状物1の表面は影にならない状態を保つのは現実的
に困難であった。
(Problems to be Solved by the Invention) In the conventional technology described above, if the strip 1 running in contact with the roll 2 does not change at all in the width direction,
The purpose can be achieved with a simple light shielding device 5. However, the strip 1 often fluctuates in the width direction as it travels, and it is practically difficult to keep the surface of the strip 1 free of shadows without exposing the exposed surface of the roll 2 to illumination light. Met.

この発明は前述した従来の問題点に鑑みなされたもので
、その目的は、ロール等に接した位置にて帯状物を幅方
向に走査する表面検査装置において、帯状物が幅方向に
変動しても、帯状物表面からの反射光レベルに対してロ
ール等の表面からの反射光レベルを充分に小さく保てる
ようにすることにある。
This invention was made in view of the above-mentioned conventional problems, and its purpose is to use a surface inspection device that scans a strip in the width direction at a position in contact with a roll, etc., in which the strip moves in the width direction. Another objective is to keep the level of light reflected from the surface of the roll etc. sufficiently small compared to the level of light reflected from the surface of the strip.

[発明の構成] (課題を解決するための手段) そこでこの発明では、ロール等の表面の色を走査のため
の照明光源の色に対して補色の関係になるように選定し
た。
[Structure of the Invention] (Means for Solving the Problems) Therefore, in the present invention, the color of the surface of the roll etc. is selected so as to be complementary to the color of the illumination light source for scanning.

(作用) 被検査物である帯状物の両側に前記ロール等が露出し、
そこにも走査のための照明光が当たり、そこからの反射
光も受光器に入って走査されることになるが、照明光の
色に対してロール等の表面の色が補色になっているので
、ロール等の表面からの反射光レベルは充分に小さくな
る。
(Function) The rolls, etc. are exposed on both sides of the strip-shaped object to be inspected,
Illumination light for scanning also hits there, and the reflected light from there also enters the receiver and is scanned, but the color of the surface of the roll etc. is complementary to the color of the illumination light. Therefore, the level of reflected light from the surface of the roll etc. becomes sufficiently small.

(実施例) 走査のだめの照明光源としてHe−Neレーザ等の赤色
光源を用いる場合、ロール等の表面の色を青ないし緑色
に選定する。
(Example) When a red light source such as a He-Ne laser is used as the illumination light source for scanning, the color of the surface of the roll etc. is selected to be blue or green.

また走査のための受光器に偏光フィルタを設け、ロール
等の表面からの反射光を減衰させるようにすればさらに
好ましい。
Furthermore, it is more preferable to provide a polarizing filter in the light receiver for scanning to attenuate reflected light from the surface of the roll or the like.

走査のための受光器の出力において、被検査物である帯
状物の表面からの反射光レベルに対し、ロール等の表面
からの反射光レベルが充分に小さく保たれていれば、受
光出力の有効部分(帯状物の検査信号)と無効部分(帯
状物からはみだした部分)とを簡単かつ正確に区別する
ことができる。
In the output of the light receiver for scanning, if the level of light reflected from the surface of the roll, etc. is kept sufficiently small compared to the level of light reflected from the surface of the strip-shaped object to be inspected, the received light output will be effective. It is possible to easily and accurately distinguish between a portion (inspection signal of the strip) and an invalid portion (portion protruding from the strip).

以下ではそのための信号処理について説明する。Below, signal processing for this purpose will be explained.

第1図において、1は帯状物、2はロール、3は照明光
源、4は受光器であり、前述のようにロール2の表面の
色は照明光源3の色に対して補色になっている。従って
受光器4の出力aにおいて、帯状物1の走査部分Bのレ
ベルに対し、ロール2の走査部分AおよびCのレベルは
充分に低くなる。
In FIG. 1, 1 is a strip, 2 is a roll, 3 is an illumination light source, and 4 is a light receiver. As mentioned above, the color of the surface of roll 2 is complementary to the color of illumination light source 3. . Therefore, at the output a of the light receiver 4, the level of the scanning portions A and C of the roll 2 is sufficiently lower than the level of the scanning portion B of the strip 1.

そこで設定器6からの適宜なしきい値すと受光出力aと
をコンパレータ7で比較してレベル弁別にすれば、同図
のように正確なゲート信号Cが得られ、この信号Cでゲ
ート8を制御すれば、帯状物1の走査部分Bの信号dを
抽出することができる。
Therefore, by comparing the appropriate threshold value from the setter 6 and the received light output a with the comparator 7 for level discrimination, an accurate gate signal C can be obtained as shown in the figure, and this signal C can be used to control the gate 8. If controlled, the signal d of the scanned portion B of the strip 1 can be extracted.

別の信号処理の例を第2図と第3図に示している。ここ
では受光器4の出力aを微分回路9で微分し、その微分
出力eをコンパレータ10a、10にて設定器11から
の正負のしきい値+Vs。
Another example of signal processing is shown in FIGS. 2 and 3. Here, the output a of the photodetector 4 is differentiated by a differentiating circuit 9, and the differential output e is sent to the comparators 10a and 10 to obtain the positive and negative threshold values +Vs from the setter 11.

−Vsと比較してレベル弁別する。-Discriminate the level by comparing with Vs.

コンパレータ10aから出力される正微分パルスfには
帯状物1の一方のエツジ信号E1が含まれ、コンパレー
タ10bから出力される負微分パルスgには帯状物1の
他方のエツジ信号E2が含まれる。
The positive differential pulse f output from the comparator 10a includes the edge signal E1 of one edge of the strip 1, and the negative differential pulse g output from the comparator 10b includes the edge signal E2 of the other edge of the strip 1.

一方、センサ12により走査開始信号りが得られ、また
帯状体1の走行に同期した信号がパルスジェネレータ1
3から得られる。パルスジェネレータ13の出力は分周
器14で分周され、微小な一定ピッチ1ごとの信号と、
ある程度大きな一定走行量りごとの信号が作られる。こ
の分周器14の出力と走査開始信号りとを受けてメモリ
コントローラ15が動作し、走査開始信号りでリセット
された後、一定ピツチlごとの信号でカウントアツプさ
れる。
On the other hand, a scanning start signal is obtained by the sensor 12, and a signal synchronized with the running of the strip 1 is sent to the pulse generator 1.
Obtained from 3. The output of the pulse generator 13 is frequency-divided by a frequency divider 14, and is divided into a signal at a minute constant pitch of 1,
A signal is generated every time the vehicle travels a certain amount of distance. The memory controller 15 operates in response to the output of the frequency divider 14 and the scan start signal, and after being reset by the scan start signal, is counted up with a signal every fixed pitch l.

メモリ16a (16b)は入力段に加算器をもち、コ
ンパレータ10a (10b)から正微分パルス(負微
分パルス)が出力されるごとにメモリコントローラ15
のアドレスをリードし、前回の値に対し正微分パルス(
負微分パルス)があった場合“1°を加算し記憶する。
The memory 16a (16b) has an adder at its input stage, and the memory controller 15
Read the address of and generate a positive differential pulse (
If there is a negative differential pulse, add 1° and store it.

つまりアドレス単位に加算していくマルチ加算型として
働く。
In other words, it works as a multi-addition type that adds address by address.

メモリ16a (16b)に加算記憶するタイミングは
、ライン進行する毎に進行量に同期してパルスを発生す
るパルスジェネレータ13からの信号を分周器14によ
り分周して得られる一定ピッチl毎にサンプリングして
記憶する形をとる。つまりメモリ16a (16b)内
に記憶された内容は走査開始点から帯状物幅方向をメモ
リアドレス単位Wで区分しかつ帯状物進行方向をピッチ
l毎に絵素化状態の流れ方向のコンパレータ10a(1
0b)の出力パルス数を抽出し流れ方向に斜影を求めた
ことになる。ここで流れ方向進行量L(1<L)経過す
ると、メモリ16a (16b)内にはコンパレータ1
0a (10b)のパルス出力を幅方向毎に細かく細分
化した幅位置毎のカウント値が記憶されていることにな
る。一定値し進むと、メモリ16a (16b)の内容
はアドレスバスのアドレスに従がい順次読出されて行き
、その内容を正、負独立のプロフィル比較器17a(1
7b)により設定器18a (18b)の設定値と比較
し設定値を越えたアドレスをラッチ回路19a (19
b)によりラッチする。この時、正極性のラッチ19a
は設定値を越える毎にラッチするが、負極性の設定値を
越えたアドレス以後はラッチを禁止するようにする。積
算されたプロフィールは帯状物エツジ部では連続して微
分パルスが発生するのに対しロール2の汚れ、疵は連続
的に微分パルスが出ずらくなるので(ロールの場合回転
するので間欠点発生となる)、積算値がエツジより低い
ので確実に分離可能となる。ラッチされた正極性アドレ
ス、負極性アドレスは次の走行量りの信号まで更進せず
、走査開始信号に同期したアドレスとラッチされたアド
レスを正/負独立に比較器10a (20b)により比
較し、それぞれ一致した点でゲート用フリップフロップ
21に対し正極性アドレス一致点をセット信号として負
極性アドレス一致点をリセット信号として与えることに
より、フリップフロップ21の出力は正しいゲート信号
Cとなる。
The timing of addition and storage in the memory 16a (16b) is at every constant pitch l obtained by dividing the signal from the pulse generator 13, which generates pulses in synchronization with the amount of progress each time the line advances, by the frequency divider 14. It takes the form of sampling and memorizing. In other words, the contents stored in the memory 16a (16b) are divided from the scanning start point in the width direction of the strip by memory address unit W, and in the direction of movement of the strip at every pitch l, the comparator 10a ( 1
This means that the number of output pulses of 0b) was extracted and the oblique shadow was obtained in the flow direction. Here, when the flow direction progress amount L (1<L) has elapsed, the comparator 1 is stored in the memory 16a (16b).
The pulse output of 0a (10b) is divided finely in each width direction, and the count value for each width position is stored. When the value reaches a certain value, the contents of the memory 16a (16b) are sequentially read out according to the addresses on the address bus, and the contents are passed to the positive and negative independent profile comparators 17a (16b).
7b) is compared with the set value of the setter 18a (18b), and the address exceeding the set value is sent to the latch circuit 19a (19
b) latches. At this time, the positive polarity latch 19a
is latched every time the set value is exceeded, but latching is prohibited after an address that exceeds the set value of negative polarity. The integrated profile shows that differential pulses are generated continuously at the edge of the strip, but if the roll 2 is dirty or has scratches, it becomes difficult to generate continuous differential pulses (in the case of a roll, it rotates, so intermittent defects occur). ), the integrated value is lower than the edge, so it can be reliably separated. The latched positive polarity address and negative polarity address are not advanced until the next travel distance signal, and the address synchronized with the scan start signal and the latched address are compared independently (positive/negative) by the comparator 10a (20b). By applying the positive address matching point as a set signal and the negative address matching point as a reset signal to the gate flip-flop 21 at the matching points, the output of the flip-flop 21 becomes the correct gate signal C.

なお帯状物エツジ部とロール2のプロフィール積算値が
近似し前述の条件が満足出来ないような場合、アドレス
バスを正極性用と負極性用の2系列に分離し、走行量り
ごとの信号による読出し時アドレスカウンタをバス切換
ゲートにより切り換え、正極性°データはメモリ書込み
範囲の1/2からダウンカウントして読出し、負極性デ
ータは1/2からアップカウントして読出し、各々最初
の比較設定値を越えたアドレスをラッチして求め、以後
前記と同様にフリップフロップ21のセット1リセツト
を行ないゲート信号Cを出力しても良い。
If the profile integrated values of the edge of the strip and roll 2 are similar and the above conditions cannot be satisfied, the address bus is divided into two lines, one for positive polarity and one for negative polarity, and the readout is performed using a signal for each traveling distance. When the address counter is switched by the bus switching gate, positive polarity data is read out by counting down from 1/2 of the memory write range, negative polarity data is read out by counting up from 1/2, and the initial comparison setting value is read out. The exceeded address may be latched and obtained, and then the flip-flop 21 may be reset to set 1 in the same manner as described above, and the gate signal C may be output.

〔発明の効果コ 以上詳細に説明したように、この発明では、走査のため
の照明光源の色に対し、帯状物(被検査物)の接するロ
ール等の色を補色の関係になるように選定したので、帯
状物が走行に伴ってロール等の上で幅方向に変動しても
、走査受光器の8力において、帯状物の表面からの反射
光レベルに対してロール等の表面からの反射光レベルは
充分低い状態に常に保たれ、簡単な回路処理で走査出力
の有効部分のみを正確に抽出することができる。
[Effects of the Invention] As explained in detail above, in this invention, the color of the roll, etc. that the strip-shaped object (object to be inspected) comes into contact with is selected in a complementary color relationship to the color of the illumination light source for scanning. Therefore, even if the strip moves in the width direction on the roll etc. as it travels, the level of light reflected from the surface of the strip will be lower than the level of reflected light from the surface of the strip, etc. The light level is always kept sufficiently low that only the useful portion of the scanning output can be accurately extracted with simple circuit processing.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明を採用した装置における信号処理系の一
例の構成と波形を示す図、第2図は同じく信号処理系の
他の例を示すブロック図、第3図は第2図の動作波形図
、第4図は従来装置の構成図である。
FIG. 1 is a diagram showing the configuration and waveforms of an example of a signal processing system in a device employing the present invention, FIG. 2 is a block diagram showing another example of the signal processing system, and FIG. 3 is the operation of FIG. 2. The waveform diagram and FIG. 4 are configuration diagrams of a conventional device.

Claims (1)

【特許請求の範囲】[Claims] (1)ロール等に接した状態で走行する帯状物の表面を
前記ロール等に接した位置にて幅方向に光電的に走査し
て欠陥を検査する装置において、走査のための照明光源
の色に対し前記ロール等の表面の色を補色にしたことを
特徴とする表面検査装置。
(1) In a device that inspects defects by photoelectrically scanning the surface of a strip running in contact with a roll, etc. in the width direction at a position in contact with the roll, etc., the color of the illumination light source for scanning. A surface inspection device characterized in that the color of the surface of the roll or the like is a complementary color.
JP31588290A 1990-11-22 1990-11-22 Surface inspection equipment Expired - Lifetime JP2941411B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31588290A JP2941411B2 (en) 1990-11-22 1990-11-22 Surface inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31588290A JP2941411B2 (en) 1990-11-22 1990-11-22 Surface inspection equipment

Publications (2)

Publication Number Publication Date
JPH04188052A true JPH04188052A (en) 1992-07-06
JP2941411B2 JP2941411B2 (en) 1999-08-25

Family

ID=18070738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31588290A Expired - Lifetime JP2941411B2 (en) 1990-11-22 1990-11-22 Surface inspection equipment

Country Status (1)

Country Link
JP (1) JP2941411B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001108630A (en) * 1999-10-12 2001-04-20 Sumitomo Chem Co Ltd Method for inspecting optical transparent film
CN111417525A (en) * 2017-12-01 2020-07-14 惠普发展公司,有限责任合伙企业 Adaptive sampling

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001108630A (en) * 1999-10-12 2001-04-20 Sumitomo Chem Co Ltd Method for inspecting optical transparent film
CN111417525A (en) * 2017-12-01 2020-07-14 惠普发展公司,有限责任合伙企业 Adaptive sampling

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Publication number Publication date
JP2941411B2 (en) 1999-08-25

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