JPH0418430U - - Google Patents

Info

Publication number
JPH0418430U
JPH0418430U JP5975690U JP5975690U JPH0418430U JP H0418430 U JPH0418430 U JP H0418430U JP 5975690 U JP5975690 U JP 5975690U JP 5975690 U JP5975690 U JP 5975690U JP H0418430 U JPH0418430 U JP H0418430U
Authority
JP
Japan
Prior art keywords
mfc
material gas
constant temperature
mixing
mocvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5975690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5975690U priority Critical patent/JPH0418430U/ja
Publication of JPH0418430U publication Critical patent/JPH0418430U/ja
Pending legal-status Critical Current

Links

JP5975690U 1990-06-06 1990-06-06 Pending JPH0418430U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5975690U JPH0418430U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-06-06 1990-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5975690U JPH0418430U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-06-06 1990-06-06

Publications (1)

Publication Number Publication Date
JPH0418430U true JPH0418430U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-17

Family

ID=31586536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5975690U Pending JPH0418430U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-06-06 1990-06-06

Country Status (1)

Country Link
JP (1) JPH0418430U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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